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1. 发明授权

US07433756B2 Calibration of high speed loader to substrate transport system 失效
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US07433756B2
公开(公告)日：2008-10-07
申请号：US10987956
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

2. 发明申请

US20090030547A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 有权
标题翻译：高速装载机校准运输系统
公开(公告)号：US20090030547A1
公开(公告)日：2009-01-29
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

3. 发明授权

US07912576B2 Calibration of high speed loader to substrate transport system 有权
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US07912576B2
公开(公告)日：2011-03-22
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

4. 发明申请

US20080187419A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 审中-公开
标题翻译：高速装载机校准运输系统
公开(公告)号：US20080187419A1
公开(公告)日：2008-08-07
申请号：US12099780
申请日：2008-04-08
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： H01L21/67
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

5. 发明授权

US07230702B2 Monitoring of smart pin transition timing 有权
标题翻译：监控智能针脚转换时序
公开(公告)号：US07230702B2
公开(公告)日：2007-06-12
申请号：US10987950
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
IPC分类号： G01B11/00 , H01L21/677 , B65B21/02
CPC分类号： H01L21/67775 , H01L21/67769
摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.
摘要翻译：衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件，基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。

6. 发明授权

US07930061B2 Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback 有权
标题翻译：使用反馈装载和卸载移动输送机上的基板载体的方法和装置
公开(公告)号：US07930061B2
公开(公告)日：2011-04-19
申请号：US11867584
申请日：2007-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Jeffrey C. Hudgens , Kirk Van Katwyk
发明人： Michael R. Rice , Eric A. Englhardt , Jeffrey C. Hudgens , Kirk Van Katwyk
IPC分类号： G06F7/00 , G06F19/00 , G05B19/00 , H01L21/677 , B65G53/46 , B65G1/00 , E04H6/00
CPC分类号： H01L21/67775 , H01L21/67724 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要： The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate carrier between a docking station and a transport system, the substrate carrier handler including an end effector adapted to support the substrate carrier; a controller coupled to the substrate carrier handler and operative to control the substrate carrier handler such that the end effector of the substrate carrier handler is operative to selectively engage and disengage the substrate carrier to and from the transport system while the substrate carrier is in motion; and a sensor coupled to the controller and operative to provide a signal to the controller indicative of information about the substrate carrier. The controller is operative to adjust operation of the substrate carrier handler based on the signal from the sensor if the adjustment may be performed within a load or unload stroke of the substrate carrier handler. Numerous other aspects are provided.
摘要翻译：本发明提供了用于将基板载体装载和卸载到运输系统上的系统和方法。本发明包括适于在对接站和传输系统之间传送衬底载体的衬底载体处理器，衬底载体处理器包括适于支撑衬底载体的端部执行器; 控制器，其耦合到所述衬底载体处理器并且可操作以控制所述衬底载体处理器，使得所述衬底载体处理器的末端执行器可操作以在所述衬底载体运动时选择性地将所述衬底载体接合和脱离所述传输系统; 以及耦合到所述控制器并且可操作地向控制器提供指示关于衬底载体的信息的信号的传感器。如果可以在衬底载体处理器的负载或卸载冲程中执行调整，则控制器可操作以基于来自传感器的信号来调整衬底载体处理器的操作。提供了许多其他方面。

7. 发明申请

US20100280654A1 SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL 有权
标题翻译：卡特彼勒机器人工具中的基板处理序列
公开(公告)号：US20100280654A1
公开(公告)日：2010-11-04
申请号：US12840143
申请日：2010-07-20
申请人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Dave Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
发明人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Dave Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
IPC分类号： H01L21/677 , H01L21/68
CPC分类号： B25J11/008 , B25J18/00 , G03F7/70991 , H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67742 , H01L21/67745 , Y10S414/135
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, an actuator within the enclosure, and a fan assembly disposed in the enclosure that is adapted to generate a pressure within the enclosure that is less than a pressure outside of the enclosure.
摘要翻译：提供了一种使用多室处理系统或集群工具处理衬底的方法和装置。在本发明的一个实施例中，提供了机器人组件。所述机器人组件包括可在第一方向上移动的第一运动组件和第二运动组件，所述第二运动组件联接到所述第一运动组件，并且可相对于所述第一运动组件在大致正交于所述第一运动组件的第二方向上移动第一个方向机器人组件还包括设置在第一运动组件或第二运动组件中的一个中的壳体，壳体内的致动器，以及设置在外壳中的风扇组件，其适于产生外壳内的压力小于外壳外部压力。

8. 发明申请

US20070147976A1 SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL 有权
标题翻译：卡特彼勒机器人工具中的基板处理序列
公开(公告)号：US20070147976A1
公开(公告)日：2007-06-28
申请号：US11553820
申请日：2006-10-27
申请人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Dave Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
发明人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Dave Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
IPC分类号： H01L21/677
CPC分类号： B25J11/008 , B25J18/00 , G03F7/70991 , H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67742 , H01L21/67745 , Y10S414/135
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

9. 发明授权

US07374391B2 Substrate gripper for a substrate handling robot 有权
标题翻译：用于基板处理机器人的基板夹具
公开(公告)号：US07374391B2
公开(公告)日：2008-05-20
申请号：US11315873
申请日：2005-12-22
申请人： Michael Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Mario David Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
发明人： Michael Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Mario David Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
IPC分类号： B25J15/00
CPC分类号： H01L21/67178 , H01L21/67173 , H01L21/67276 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68707
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和装置，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

10. 发明申请

US20070147982A1 Method of retaining a substrate during a substrate transferring process 有权
标题翻译：在衬底转移过程中保持衬底的方法
公开(公告)号：US20070147982A1
公开(公告)日：2007-06-28
申请号：US11398218
申请日：2006-04-05
申请人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
发明人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
IPC分类号： H01L21/677
CPC分类号： H01L21/67178 , H01L21/67173 , H01L21/67276 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68707
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

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