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    • 21. 发明申请
    • PATTERN INSPECTION EQUIPMENT, PATTERN INSPECTION METHOD, AND STORAGE MEDIUM STORING PATTERN INSPECTION PROGRAM
    • 模式检验设备,图案检查方法和存储介质存储模式检查程序
    • US20010012390A1
    • 2001-08-09
    • US09122779
    • 1998-07-27
    • KABUSHIKI KAISHI TOSHIBA
    • TOSHIYUKI WATANABE
    • G06K009/00
    • G06T7/0006G06T2207/30121G06T2207/30148
    • Pattern inspection equipment has at least a measured data generation unit for generating measured data from patterns that have been delineated on a sample according to design data, a reference data generation unit for generating reference data used to inspect the patterns from gradational data expressed in multiple gradation levels, and a fault decision circuit for comparing the measured data with the reference data. The reference data generation unit has a multi-valued pattern development circuit for developing the design data into the gradational data and a fine adjustment circuit for finely shifting the positions or adjusting the curvatures of pattern edges in the pattern constructed with the gradational data. The fine adjustment of the pattern edges is necessary to cope with slightly displaced edges and rounded corners of the actual patterns on the sample. These slightly displaced edges and rounded corners are caused through mask manufacturing processes and are frequently smaller than the size of a sensor pixel. To adjust the reference data to the displaced edges, a size modification circuit detects a maximum value in a specified area in the gradational data and modifies the size of the pattern constructed with the gradational data. To adjust the reference data to match with the actual rounded corners, a corner rounding circuit rounds corners in the pattern constructed with the gradational data. Also provided is a pattern inspection method for developing the design data into the gradational data, adjusting the gradational data to displaced edges and rounded corners of the actual patterns and preparing the reference data, and testing the patterns for faults. Further provided is a storage medium for storing a pattern inspection program for realizing the pattern inspection method.
    • 模式检查设备至少具有测量数据生成单元,用于根据设计数据从已经在样本上划定的模式生成测量数据;参考数据生成单元,用于生成用于根据以多个等级表示的分级数据检查模式的参考数据 电平,以及用于将测量数据与参考数据进行比较的故障判定电路。 参考数据生成单元具有用于将设计数据发展成渐变数据的多值图案开发电路和用于精细移位位置或调整由渐变数据构成的图案中的图案边缘的曲率的微调电路。 图案边缘的精细调整是必要的,以应对样品上实际图案的稍微偏移的边缘和圆角。 这些略微偏移的边缘和圆角是通过掩模制造工艺引起的,并且通常小于传感器像素的尺寸。 为了将参考数据调整到移位边缘,尺寸修改电路检测渐变数据中指定区域中的最大值,并修改由渐变数据构成的图案的大小。 为了调整参考数据以与实际的圆角匹配,一个圆角圆形回转线使用渐变数据构造的图案中的角落圆。 还提供了一种用于将设计数据开发到等级数据的模式检查方法,将等级数据调整到实际模式的偏移边缘和圆角,并准备参考数据,并测试故障模式。 还提供了一种用于存储用于实现图案检查方法的图案检查程序的存储介质。
    • 28. 发明授权
    • Memory card
    • 存储卡
    • US5905253A
    • 1999-05-18
    • US531391
    • 1995-09-21
    • Toshiyasu ItoHiroshi IwasakiMinoru Ohara
    • Toshiyasu ItoHiroshi IwasakiMinoru Ohara
    • B42D15/10G06K19/077G11C5/00G06K7/00G06K19/06
    • G06K19/077G06K19/07741
    • A memory card is to be inserted into an electronic device so as to add a memory function. The memory card comprises a parent card and a child card, the child card including a semiconductor memory element and a lead as an external terminal of the memory element. The parent card includes a child card receiving portion and a child card insert port for inserting the child card into the child card receiving portion through the child card insert port, and a contact to be contacted with the lead of the child card within the child card receiving portion. A contact opening/closing slide plate is provided for causing a contacting portion of the contact to be shifted to a position in which it can contact with the lead while moving in the child card insert direction pushed by the child card. The parent card also includes a connector element for contacting with the electronic device.
    • 将存储卡插入到电子设备中以增加记忆功能。 存储卡包括母卡和子卡,子卡包括半导体存储元件和作为存储元件的外部端子的引线。 母卡包括儿童卡接收部分和儿童卡插入口,用于通过儿童卡插入口将子卡插入儿童卡接收部分,以及与儿童卡内的儿童卡片的导线接触的联系人 接收部分。 提供接触开/闭滑板,用于使触点的接触部分移动到与儿童卡片推动的儿童卡片插入方向移动时能够与引线接触的位置。 母卡还包括用于与电子设备接触的连接器元件。