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21. 发明授权

US5725914A Process and apparatus for producing a functional structure of a semiconductor component 失效
标题翻译：用于制造半导体部件的功能结构的方法和装置
公开(公告)号：US5725914A
公开(公告)日：1998-03-10
申请号：US534071
申请日：1995-09-26
申请人： Hans Opower
发明人： Hans Opower
IPC分类号： C23C14/00 , B23K26/00 , B23K26/06 , B23K26/064 , B23K26/12 , B23K26/18 , C23C14/02 , C23C14/04 , C23C14/22 , C23C14/28 , C23C14/58 , G03F7/20 , H01L21/203 , H01L21/268 , H01L21/285 , B05D5/12
CPC分类号： B23K26/009 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/123 , B23K26/18 , C23C14/022 , C23C14/048 , C23C14/28 , C23C14/5813 , C23C14/5873 , G03F7/704 , H01L21/268 , Y10S148/093
摘要： In order to improve a process and an apparatus for producing a functional structure of a semiconductor component, which comprises layers arranged on a base substrate and defining the entire functions of the semiconductor component, such that the functional structure of the semiconductor components can be produced as simply as possible and with as little susceptibility as possible with respect to the quality of the semiconductor components it is suggested that all the layers be produced without lithography and applied to the base substrate one after the other exclusively with physical layer application processes.
摘要翻译：为了改进用于制造半导体部件的功能结构的工艺和装置，其包括布置在基底基板上并限定半导体部件的整体功能的层，使得半导体部件的功能结构可以如尽可能简单地并且对于半导体组件的质量尽可能少的敏感性，建议所有的层都不经光刻制造，并且一个接一个地将其应用于物理层应用过程。

22. 发明授权

US5513195A Phase-controlled, fractal laser system 失效
$Phase-controlled, fractal laser system$
标题翻译：相控分形激光系统
公开(公告)号：US5513195A
公开(公告)日：1996-04-30
申请号：US307712
申请日：1994-09-21
申请人： Hans Opower , Helmut Huegel , Adolf Giesen
发明人： Hans Opower , Helmut Huegel , Adolf Giesen
IPC分类号： H01S3/10 , B23K26/06 , B23K26/064 , G02B6/04 , G02B6/34 , G02B6/42 , G02F1/01 , H01S3/094 , H01S3/23 , H01S5/00 , H01S5/068 , H01S5/40 , H01S5/42 , H01S3/098
CPC分类号： H01S5/4025 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , G02B6/4204 , G02B6/4249 , H01S5/4012 , H01S5/42 , H01S5/423
摘要： In order to improve a semiconductor laser system with a plurality of semiconductor laser units, from which laser radiation exits, a light-conducting fiber associated with each semiconductor laser unit, a coupling element for coupling the laser radiation exiting from the respective semiconductor laser unit into the respective light-conducting fiber, and a fiber bundle comprising the fibers as light conductor system, a total laser radiation formed by the sum of the laser radiations generated by the respective semiconductor laser units exiting from one end of this fiber bundle, the total laser radiation illuminating a target surface on an object to be irradiated during laser activity of all the semiconductor laser units, such that complex irradiation tasks can be performed it is suggested that the semiconductor laser units be designed such that they operate relative to one another in a phase-defined and frequency-defined mode operation, that the laser radiation of each semiconductor laser unit be coupled into the respective laser light-conducting fiber with low loss, that each fiber be a single-mode fiber and that in the total laser radiation the laser radiations of several, preferably all of the semiconductor laser units be controllable in their phase independently of one another.
摘要翻译： PCT No.PCT / DE94 / 00036 Sec。 371日期1994年9月21日 102（e）1994年9月21日PCT PCT 1994年1月14日PCT公布。出版物WO94 / 17575 日期为1994年8月4日。为了改善具有激光辐射出射的多个半导体激光器单元的半导体激光系统，与每个半导体激光器单元相关联的导光纤维，用于耦合离开的激光辐射的耦合元件从相应的半导体激光器单元到相应的导光纤维，以及包括作为光导体系统的光纤的光纤束，由从各个半导体激光器单元的一端离开的各个半导体激光器单元产生的激光辐射之和形成的总激光辐射该光纤束，在所有半导体激光器单元的激光活动期间，总的激光辐射照射被照射物体上的目标表面，使得可以执行复杂的照射任务，建议将半导体激光器单元设计成使得其操作在相位定义和频率定义的模式操作中相对于彼此，每个s的激光辐射半导体激光器单元以低损耗耦合到相应的激光导光纤维中，每个光纤是单模光纤，而在总的激光辐射中，几个，优选所有的半导体激光器单元的激光辐射可以在它们的相位彼此独立。

23. 发明授权

US5220577A Waveguide laser with variable waveguide thickness 失效
标题翻译：波形激光器具有可变波导厚度
公开(公告)号：US5220577A
公开(公告)日：1993-06-15
申请号：US745593
申请日：1991-08-15
申请人： Hans Opower
发明人： Hans Opower
IPC分类号： H01S3/034 , H01S3/03 , H01S3/0973
CPC分类号： H01S3/0315
摘要： In order to improve a high-frequency excited high-power laser comprising two resonator mirrors arranged opposite one another, a gas discharge chamber, a waveguide having two reflecting waveguide surfaces located opposite one another and facing the gas discharge chamber and a beam path having an initial wave bundle, which expands with spatial coherence as a wave bundle system due to multiple back and forth reflection in a transverse direction between the waveguide surfaces, such that the expansion of the wave bundle system with spatial coherence in the transverse direction at right angles to the initial direction can be achieved by other means, it is suggested that the tangents at two first waveguide surface regions reflecting the initial wave bundle, these tangents extending at right angles to the initial direction, extend parallel to one another and that a distance between second waveguide surface regions following the first waveguide surface regions which reflect the initial wave bundle become steadily larger, proceeding from the distance between the first waveguide surface regions, over an expansion path in the direction of the transverse direction with increasing expansion of the wave bundle system.
摘要翻译：为了改进包括相互相对布置的两个谐振器反射镜的高频激发大功率激光器，气体放电室，具有彼此相对定位并且面对气体放电室的两个反射波导表面的波导和具有初始波束由于在波导表面之间的横向上的多个前后反射而随空间相干性而扩展为波束系统，使得波束系统在横向方向上的空间相干性的扩展与可以通过其他方式实现初始方向，因此建议在反射初始波束的两个第一波导表面区域处的切线，这些切线与初始方向成直角延伸，彼此平行延伸，并且第二波导区域之间的距离跟随反射初始波束的第一波导表面区域的波导表面区域从第一波导表面区域之间的距离开始，沿着横向方向的膨胀路径上的波束稳定地变大，随着波束束系统的扩大。

24. 发明授权

US5204931A Flexible waveguide 失效
标题翻译：柔性波导
公开(公告)号：US5204931A
公开(公告)日：1993-04-20
申请号：US856246
申请日：1992-03-25
申请人： Erwin Gehringer , Hans Opower
发明人： Erwin Gehringer , Hans Opower
IPC分类号： G02B6/00 , B23K26/06 , G02B6/02 , G02B6/032
CPC分类号： G02B6/032 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648
摘要： In order to further develop an optical waveguide comprising first and second optically reflecting wall surfaces extending in a longitudinal direction and having a constant width transversely to the longitudinal direction, both wall surfaces facing one another and extending at a constant spacing from one another and enclosing a space in which radiation is guided by reflection in the longitudinal direction, such that it is flexible and hence permits guidance of the radiation in different directions, it is proposed that a first region of the waveguide be movable in a flexible manner relative to a second region thereof, and that each wall surface be carried for this purpose by a strip which on account of its inherent rigidity is bendable in a non-buckling manner perpendicular to the longitudinal direction and the wall surfaces of the strips be held at a constant spacing from one another by a supporting structure comprising supporting surfaces which are arranged one after the other in the longitudinal direction and against which the strips rest by the application of force for sliding displacement in the longitudinal direction.
摘要翻译：为了进一步开发包括在纵向方向上延伸并且具有横向于纵向方向的恒定宽度的第一和第二光学反射壁表面的光波导，两个壁表面彼此面对并且以彼此间隔一定的间隔延伸并且包围辐射通过纵向反射引导的空间，使得其是柔性的并且因此允许沿不同方向引导辐射，所以提出波导的第一区域相对于第二区域可以灵活地移动并且每个壁表面通过条带承载，由于其固有的刚度可以以垂直于纵向方向的非弯曲方式弯曲，并且条带的壁表面保持与一个恒定的间隔另一个由支撑结构构成，其包括在l中一个接一个布置的支撑表面通过施加力沿长度方向滑动位移而使条带靠在其上。

25. 发明授权

US5097479A Folded waveguide laser 失效
标题翻译：折叠波导激光
公开(公告)号：US5097479A
公开(公告)日：1992-03-17
申请号：US635758
申请日：1990-12-28
申请人： Hans Opower
发明人： Hans Opower
IPC分类号： H01S3/03 , H01S3/07 , H01S3/081 , H01S3/083
CPC分类号： H01S3/0315 , H01S3/073 , H01S3/081 , H01S3/083 , H01S3/0835
摘要： In order to so improve a high-frequency-excited, diffusion-cooled waveguide laser comprising a folded, unstable laser resonator with a first resonator axis branch and a second resonator axis branch, a folded, optical waveguide with a first waveguide branch and a second waveguide branch penetrated by the first and the second resonator axis branch, respectively, in their longitudinal direction, and each having two spaced, optical waveguide surfaces, and at least one reflection element with a reflection surface coupling the waveguide branches with one another, that as low reflection losses as possible occur with the folding and that the laser is as compact as possible, it is proposed that the two waveguide branches be coupled with one another at a first end by a single, first reflection surface, each with single beam reflection thereat, in that the two resonator axis branches intersect at their point of impact on the first reflection surface and that the two waveguide branches be curved in the direction towards one another.
摘要翻译：为了改进包括具有第一谐振器轴分支和第二共振器轴分支的折叠不稳定的激光谐振器的高频激励扩散冷却波导激光器，具有第一波导分支和第二波导分支的折叠光波导波导支路分别由第一和第二谐振轴分支在其纵向方向上穿过，并且每个具有两个间隔开的光波导表面，以及至少一个反射元件，其具有将波导分支彼此耦合的反射表面，即：尽可能地发生低反射损失，并且激光器尽可能紧凑，但是提出两个波导分支在第一端通过单个第一反射表面彼此耦合，每个反射表面具有单个波束反射因为两个谐振器轴分支在它们的冲击点处相交在第一反射表面上，并且两个波导支路弯曲朝向彼此的方向。

26. 发明授权

US4688229A Gas laser structure, particularly CO.sub.2 laser 失效
标题翻译：气体激光结构，特别是二氧化碳激光
公开(公告)号：US4688229A
公开(公告)日：1987-08-18
申请号：US760166
申请日：1985-07-29
申请人： Hans Opower
发明人： Hans Opower
IPC分类号： H01S3/038 , H01S3/04 , H01S3/097
CPC分类号： H01S3/038 , H01S3/04
摘要： To improve the power transfer of a glow discharge between a cathode (3) and an anode (4) in a glow discharge space (2), through which a laser-active is being passed (5) at high speed, the cathode is constructed to have a rotating surface, projecting through slits (8) of the walls (1) defining the discharge space into the discharge space, the tangential or surface speed of the cathode (3) being at least approximately equal to the flow speed of the gas, so that the gas will flow along the cathode in essentially laminar, linear flow, thereby avoiding turbulence at the surface and instabilities in the glow discharge.
摘要翻译：为了提高在辉光放电空间（2）中的阴极（3）和阳极（4）之间的辉光放电的功率传递，通过该放电空间（5）高激光激发（5），阴极被构造具有旋转表面，突出通过将限定放电空间的壁（1）的狭缝（8）突出到放电空间中，阴极（3）的切向或表面速度至少近似等于气体的流速，使得气体将以基本层流的线性流动沿着阴极流动，从而避免了表面的湍流和辉光放电的不稳定性。

27. 发明授权

US08314921B2 Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US08314921B2
公开(公告)日：2012-11-20
申请号：US12456137
申请日：2009-06-10
申请人： Hans Opower
发明人： Hans Opower
IPC分类号： G03F7/22
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/704
摘要： An exposure apparatus for producing exposed structures in a photosensitive layer arranged on an object is provided. An object carrier and an exposure device, which can be moved relative to one another in an advance direction, enable exposure spots to be produced on the photosensitive layer in a position-controlled manner. The exposure device has at least one exposure unit with a series of radiation exit regions which are arranged successively in a series direction and from which exposure beams emerge, by means of each of which, passed through an imaging optical system, an exposure spot can be produced on the photosensitive layer and each of which can be deflected by a deflection unit in a deflection direction running transversely to the series direction, such that each exposure beam can produce exposure spots that at least partly overlap one another in a multiplicity of successive positions in the deflection direction.
摘要翻译：提供了一种用于在布置在物体上的感光层中产生曝光结构的曝光装置。可以在前进方向上相对于彼此移动的物体载体和曝光装置能够以位置控制的方式在感光层上产生曝光点。曝光装置具有至少一个具有一系列辐射出射区域的曝光单元，这些曝光单元按照串联方向依次布置，曝光光束通过成像光学系统通过成像光学系统，曝光点可以在感光层上产生，并且其中的每一个可以通过横向于串联方向的偏转方向被偏转单元偏转，使得每个曝光光束可以产生在多个连续位置中至少部分彼此重叠的曝光点偏转方向。

28. 发明授权

US08248581B2 Exposure system 失效
标题翻译：曝光系统
公开(公告)号：US08248581B2
公开(公告)日：2012-08-21
申请号：US12229501
申请日：2008-08-21
申请人： Hans Opower , Stefan Scharl
发明人： Hans Opower , Stefan Scharl
IPC分类号： G03B27/54
CPC分类号： G03F7/70791 , G03F7/70383 , G03F7/704
摘要： In the case of an exposure system for substrate bodies which carry a photosensitive coating on a substrate surface, comprising a machine frame, a substrate carrier which carries the substrate body and has a substrate carrier surface, and an exposure device with an optics unit, the optics unit and the machine frame being movable relative to one another in a first direction and in a second direction, so that the photosensitive coating can be exposed by this relative movement in the first direction and in the second direction, in order to improve said system in such a way that a compact configuration is possible, despite in this case a substrate body with a very large extent in the first and the second direction, it is proposed that the exposure device has a guide cross-member for at least one guide carriage of the exposure device, the guide carriage carrying the optics unit, in that the guide carriage is guided on the guide cross-member to be movable in the first direction, and in that the guide cross-member is arranged on the machine frame to be movable in the second direction.
摘要翻译：在用于在基板表面上承载感光涂层的基板体的曝光系统的情况下，包括机架，承载基板主体并具有基板载体表面的基板载体以及具有光学单元的曝光装置，光学单元和机架可以在第一方向和第二方向上相对于彼此移动，使得感光涂层可以通过在第一方向和第二方向上的这种相对运动而暴露，以便改进所述系统尽管在这种情况下，尽管在第一和第二方向上具有很大程度的衬底主体，但是提出了紧凑的构造，即，曝光装置具有用于至少一个导向架的导向横向构件承载光学单元的导向架，其特征在于，导向架在引导横向构件上被引导以在第一方向上可移动，并且在该t 他的引导横向构件布置在机架上可沿第二方向移动。

29. 发明申请

US20120163660A1 PROCESSING SYSTEM 有权
标题翻译：加工系统
公开(公告)号：US20120163660A1
公开(公告)日：2012-06-28
申请号：US13332467
申请日：2011-12-21
申请人： Hans Opower , Klaus Juenger
发明人： Hans Opower , Klaus Juenger
IPC分类号： G06K9/46
CPC分类号： G03F7/70791 , G03F9/00
摘要： A processing system for plate-like objects is provided, with an exposure device and an object carrier with an object carrier surface for receiving the object. The exposure device and the carrier are movable relative to one another, such that the exact position of the object relative to the carrier is determinable. An edge detection device is provided which comprises at least one edge illumination unit having an illumination area, within which an object edge located in the respective object edge area has light directed onto it from the side of the carrier. At least one edge image detection unit is provided on a side of the object located opposite the carrier, the edge image detection unit imaging an edge section of the object edges located in the illumination area as an edge image, such that the respective edge image is detectable in its exact position relative to the carrier.
摘要翻译：提供了一种用于板状物体的处理系统，其具有曝光装置和具有用于接收物体的物体载体表面的物体载体。曝光装置和载体可相对于彼此移动，使得物体相对于载体的精确位置是可确定的。提供一种边缘检测装置，其包括具有照明区域的至少一个边缘照明单元，在该边缘照明单元中位于相应物体边缘区域中的物体边缘具有从载体的侧面引导到其上的光。至少一个边缘图像检测单元设置在与载体相对的一侧的物体侧，边缘图像检测单元将位于照明区域中的物体边缘的边缘部分成像为边缘图像，使得各个边缘图像是在其相对于载体的确切位置可检测。

30. 发明授权

US08027018B2 Method and device for producing exposed structures 失效
标题翻译：用于生产暴露结构的方法和装置
公开(公告)号：US08027018B2
公开(公告)日：2011-09-27
申请号：US11071074
申请日：2005-03-02
申请人： Hans Opower , Stefan Scharl , Dirk Leinenbach
发明人： Hans Opower , Stefan Scharl , Dirk Leinenbach
IPC分类号： G03B27/42 , G03B27/32
CPC分类号： G03F7/70525 , G03F7/704 , G03F7/70425
摘要： In order to improve a method for producing exposed structures on a plurality of components by means of an exposure unit, with which substrate member and the exposure unit are moved relative to one another, wherein identical structures are produced on at least some of the components, in such a manner that this operates as efficiently as possible it is suggested that each of the identical structures be produced by way of exposure of the substrate member in the area of the component respectively provided within a plurality of macrolines, that each of the macrolines comprise a plurality of lines lying next to one another, that during a single pass along a path of exposure all the components covered by this path of exposure be exposed with the exposure unit in the area of the same macroline of the plurality of macrolines, that the exposure unit have a plurality of light sources and a control with a control memory, with which sets of data already stored for the macroline, in the area of which exposure is being carried out, can be read out while sets of data of an additional macroline are being stored.
摘要翻译：为了改进通过曝光单元在多个部件上产生暴露结构的方法，使基板部件和曝光单元相对于彼此移动，其中在至少一些部件上产生相同的结构，以这样的方式，其尽可能有效地进行操作，建议通过在分别设置在多个大环内酯内的组分的区域中暴露基质成分来产生每个相同的结构，每一个大环内酯包含在彼此相邻的多个线中，在沿着曝光路径的单次通过期间，由该曝光路径覆盖的所有部件将曝光单元暴露在多个麦克风的同一宏线的区域中，曝光单元具有多个光源和具有控制存储器的控制，其中已经存储有用于宏线的数据组在whic的区域中 h曝光正在执行，可以在存储附加宏线的数据集的同时读出。

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