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1. 发明申请

US20120163660A1 PROCESSING SYSTEM 有权
标题翻译：加工系统
公开(公告)号：US20120163660A1
公开(公告)日：2012-06-28
申请号：US13332467
申请日：2011-12-21
申请人： Hans Opower , Klaus Juenger
发明人： Hans Opower , Klaus Juenger
IPC分类号： G06K9/46
CPC分类号： G03F7/70791 , G03F9/00
摘要： A processing system for plate-like objects is provided, with an exposure device and an object carrier with an object carrier surface for receiving the object. The exposure device and the carrier are movable relative to one another, such that the exact position of the object relative to the carrier is determinable. An edge detection device is provided which comprises at least one edge illumination unit having an illumination area, within which an object edge located in the respective object edge area has light directed onto it from the side of the carrier. At least one edge image detection unit is provided on a side of the object located opposite the carrier, the edge image detection unit imaging an edge section of the object edges located in the illumination area as an edge image, such that the respective edge image is detectable in its exact position relative to the carrier.
摘要翻译：提供了一种用于板状物体的处理系统，其具有曝光装置和具有用于接收物体的物体载体表面的物体载体。曝光装置和载体可相对于彼此移动，使得物体相对于载体的精确位置是可确定的。提供一种边缘检测装置，其包括具有照明区域的至少一个边缘照明单元，在该边缘照明单元中位于相应物体边缘区域中的物体边缘具有从载体的侧面引导到其上的光。至少一个边缘图像检测单元设置在与载体相对的一侧的物体侧，边缘图像检测单元将位于照明区域中的物体边缘的边缘部分成像为边缘图像，使得各个边缘图像是在其相对于载体的确切位置可检测。

2. 发明授权

US08811665B2 Processing system 有权
标题翻译：处理系统
公开(公告)号：US08811665B2
公开(公告)日：2014-08-19
申请号：US13332467
申请日：2011-12-21
申请人： Hans Opower , Klaus Juenger
发明人： Hans Opower , Klaus Juenger
IPC分类号： G06K9/00 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70791 , G03F9/00
摘要： A processing system for plate-like objects is provided, with an exposure device and an object carrier with an object carrier surface for receiving the object. The exposure device and the carrier are movable relative to one another, such that the exact position of the object relative to the carrier is determinable. An edge detection device is provided which comprises at least one edge illumination unit having an illumination area, within which an object edge located in the respective object edge area has light directed onto it from the side of the carrier. At least one edge image detection unit is provided on a side of the object located opposite the carrier, the edge image detection unit imaging an edge section of the object edges located in the illumination area as an edge image, such that the respective edge image is detectable in its exact position relative to the carrier.
摘要翻译：提供了一种用于板状物体的处理系统，其具有曝光装置和具有用于接收物体的物体载体表面的物体载体。曝光装置和载体可相对于彼此移动，使得物体相对于载体的精确位置是可确定的。提供一种边缘检测装置，其包括具有照明区域的至少一个边缘照明单元，在该边缘照明单元中位于相应物体边缘区域中的物体边缘具有从载体的侧面引导到其上的光。至少一个边缘图像检测单元设置在与载体相对的一侧的物体侧，边缘图像检测单元将位于照明区域中的物体边缘的边缘部分成像为边缘图像，使得各个边缘图像是在其相对于载体的确切位置可检测。

3. 发明申请

US20130120727A1 EXPOSURE SYSTEM 审中-公开
标题翻译：曝光系统
公开(公告)号：US20130120727A1
公开(公告)日：2013-05-16
申请号：US13470580
申请日：2012-05-14
申请人： Hans Opower , Klaus Juenger
发明人： Hans Opower , Klaus Juenger
IPC分类号： G03F7/20
CPC分类号： G03F7/20 , B23K26/0608 , B23K26/0821 , B23K26/083 , G02B26/123 , G03F7/70383 , G03F7/704 , G03F7/70791
摘要： An exposure system for generating exposed structures in a photosensitive layer arranged on an object is provided. The exposure system has an object carrier accommodating the object and an exposure device, which are movable relative to one another. Exposure beams exit from the exposure device, with each of which an exposure spot can be generated on the photosensitive layer by means of an imaging unit in a position controlled manner. At least one first exposure unit generating a set of first exposure beams and at least one second exposure unit generating a set of second exposure beams is associated with at least one deflecting element, first and second exposure beams of these exposure units being deflectable by the same deflecting element. Mirror surface areas for the first exposure beams and for the second exposure beams are arranged on the deflecting element offset relative to one another in a row direction.
摘要翻译：提供了一种用于在布置在物体上的感光层中产生曝光结构的曝光系统。曝光系统具有容纳物体的物体载体和可相对于彼此移动的曝光装置。曝光光束从曝光装置出射，其中每一个都可以通过位置控制方式的成像单元在感光层上产生曝光点。产生一组第一曝光光束的至少一个第一曝光单元和产生一组第二曝光光束的至少一个第二曝光单元与至少一个偏转元件相关联，这些曝光单元的第一和第二曝光光束可被偏转偏转元件用于第一曝光光束和第二曝光光束的镜面区域布置在偏转元件上相对于彼此在行方向上偏移。

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