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21. 发明专利

JPS625547A APPARATUS FOR CHECKING FOREIGN MATTER ON SUBSTRATE SURFACE 失效
公开(公告)号：JPS625547A
公开(公告)日：1987-01-12
申请号：JP14262885
申请日：1985-07-01
申请人： ULVAC CORP
发明人： MAEHANE YOSHIYASU , YAMAKAWA HIROYUKI , YOSHIKAWA HIDEJI , YANAGIDA HIROSHI , MATSUMI YUTAKA , KATAGAWA TAKESHI , KOMIYA MUNEHARU
IPC分类号： G01B15/00 , G01N21/88 , G01N21/94 , G01N21/956 , H01J37/22 , H01J37/28 , H01L21/28 , H01L21/285 , H01L21/66
摘要： PURPOSE:To quickly check foreign matters by scanning the surface of substrate placed within a vacuum reservior with laser beam, detecting the light beam reflected in scatter by foreign matter with a detector and then shifting a substrate to the check position by electronic microscope in accordance with such detected signal. CONSTITUTION:The surface of substrate 4 of semiconductor, etc. placed on a movable table 2 in a varrum reservior 1 is scanned in the X, Y directions by the laser beam through a laser beam source 6 and a scanner 7. If there are foreign matters on the substrate 4, scattering of the laser beam is detected by the detector 8 and location of such foreign matters is stored in a computer 11 in accordance with such detected signal. Next, the movable table 2 is driven, after the scanning, in accordance with such stored data until the foreign matters on the substrate are set within the sight of the scanning type electronic microscope 5 in order to check shape and size of foreign matters. Accordingly, foreign matters can be easily and quickly checked within the vacuum process line, improving the manufacturing yield of semiconductors.

22. 发明专利

JPS60186246A METHOD OF PRESERVATION OF PERISHABLE FARM PRODUCT 失效
公开(公告)号：JPS60186246A
公开(公告)日：1985-09-21
申请号：JP4134884
申请日：1984-03-06
申请人： ULVAC CORP
发明人： MAEHANE YOSHIYASU
IPC分类号： A23B7/00 , A23B7/04 , A23B7/12 , A23B7/152
摘要： PURPOSE:To preserve perishable farm products for a long period stably, by sterilizing the perishable farm products, cooling them in vacuum, putting them into cold storage in a packed state. CONSTITUTION:For example, perishable farm products placed in a container are put in bags of polethylene, etc. the packed bags 1 are sterilized by the sterilizing device 4 in the air cooling chamber 2, cooled in vacuum, the mouths of the packed bags 1 are hermetically sealed successively, and they are put into cold storage. When the packed bags consist of a film with selective gas permeability, and an ethylene gas evolved from vegetables is preferably discarged to the outside, preservation period is further prolonged.

23. 发明专利

JPH0326944A APPARATUS FOR INSPECTING FOREIGN MATTER ON SUBSTRATE 失效
公开(公告)号：JPH0326944A
公开(公告)日：1991-02-05
申请号：JP16063689
申请日：1989-06-26
申请人： ULVAC CORP
发明人： MAEHANE YOSHIYASU , NAMIKAWA YASUO , YAMAKAWA HIROYUKI
IPC分类号： G01N21/88 , G01N21/94 , G01N21/956
摘要： PURPOSE:To observe the surface of a substrate in real time by providing a laser beam limiting means for limiting laser beam so as to irradiate only the surface of the substrate, a camera receiving the scattering beam from the foreign matter on the substrate and an operational processing apparatus processing the signal from the camera to detect the size, number and position of the foreign matter on the substrate. CONSTITUTION:A scanner 3 scans only the surface of a water 5 at the scanning speed controlled by a computer 8 by the laser beam from a laser beam source 1. When dust is present on the surface of the wafer 5, the scattering beam due to the dust is caught by a high sensitivity video camera 6. The video signal thus imaged by the high sensitivity video camera 6 is subjected to operational processing under the control of the computer 8 by a data processor 7 and the position, size and number of the dust on the surface of the wafer can be identified by this operational processing and, at the same time, thereby are displayed on a monitor display apparatus 9. By this method, the surface state of the wafer 5 can be observed in real time.

24. 发明专利

JPH01268861A METHOD FOR INTRODUCING GAS INTO VACUUM VESSEL AND VACUUM DEVICE THEREFOR 失效
公开(公告)号：JPH01268861A
公开(公告)日：1989-10-26
申请号：JP9690788
申请日：1988-04-21
申请人： ULVAC CORP
发明人： NAMIKAWA YASUO , MAEHANE YOSHIYASU , NARUSE FUMIO
IPC分类号： C23C14/22 , C23C14/24
摘要： PURPOSE:To prevent the contamination of a treated article due to the whirling up of the fine particles deposited on the inner wall surface of a vacuum vessel by specifying the mass flow rate of an introduced gas in the gas introducing stage at the time of increasing the pressure of the atmospheric gas from its reduced pressure. CONSTITUTION:The atmosphere 11 in the vacuum vessel 10 is evacuated by an evacuating means 16 connected to the exhaust ports 15a and 15b of the vessel 10, and depressurized. When the pressure of the atmosphere 11 is sufficiently reduced, a gas is introduced into the vessel 10 from a gas source 26 connected to a gas inlet 31 through a gas passage to increase the pressure of the atmosphere 11 from its reduced pressure. In this case, the mass flow rate expressed by the product of the volume of the introduced gas passing through the gas passage per unit time and its pressure is adjusted by a variable- opening adjusting mechanism 32, and the force exerted on the fine particles deposited on the inner wall surface of the vessel 10 by the introduced gas is kept practically constant.

25. 发明专利

JPS63287524A FINE PARTICLE COLLECTOR FOR EVACUATING SYSTEM 失效
公开(公告)号：JPS63287524A
公开(公告)日：1988-11-24
申请号：JP12032087
申请日：1987-05-19
申请人： ULVAC CORP
发明人： MAEHANE YOSHIYASU
IPC分类号： F04B37/16 , B01D49/02 , B01D50/00 , B01D51/00 , B01D51/02
摘要： PURPOSE:To efficiently collect fine particles by connecting >=2 traps for fine particles in series with a piping between each traps by using the space between a high temp. wall and a law temp. wall as a gas passage. CONSTITUTION:By the action of a vacuum pump 2, a gas enters a vessel 1A from a vacuum chamber 11 through an inlet pipe A, and the fine particles are stuck to the wall surface of an inner cylinder 7 while flowed through a passage 5A by the phenomenon of thermophoresis generated by an outer cylinder of high temp. and the inner cylinder of low temp. Then, the gas enters a vessel 1B through an outlet pipe 4A, and the fine particles are caught as in the vessel 1A, and the gas is discharged from an outlet pipe 4B. In this case, unreacted gas may be reacted to be made into particles by an electric discharge mechanism 20. Thus, the fine particles are efficiently collected, and the clogging of the vacuum pump 2 is eliminated.

26. 发明专利

JPS63223481A DRIER FOR CEREALS 失效
公开(公告)号：JPS63223481A
公开(公告)日：1988-09-16
申请号：JP5685887
申请日：1987-03-13
申请人： ULVAC CORP
发明人： NAGASHIMA NAOKI , MAEHANE YOSHIYASU
IPC分类号： F26B7/00

27. 发明专利

JPS62258701A CENTRIFUGAL EVAPORATOR 失效
公开(公告)号：JPS62258701A
公开(公告)日：1987-11-11
申请号：JP10108886
申请日：1986-05-02
申请人： ULVAC CORP
发明人： FUTAMURA KAORU , TACHIKAWA KAZUO , TAKEDA HIROSHI , MAEHANE YOSHIYASU , KOMIYA MUNEHARU
IPC分类号： B01D1/00 , B01D1/22 , B01D3/10
摘要： PURPOSE:To reduce the consumption of electric power and to simplify the constitution of a rotary shaft by constituting a rotor provided with an evaporation face of a material made of metal and arranging an electrically-conductive coil for induction heating to the opposite side of the evaporation face of this rotor. CONSTITUTION:A rotor 2 made of metal is provided to the tip of a rotary shaft 3 introduced into a vacuum vessel 1 and a funnelform evaporation face 4 is formed in the front face of this rotor 2 and an electrically-conductive coil 5 supported in the vessel is arranged in the opposite side of this face. A high-frequency electric power source 6 feeding high-frequency electric power to the coil 5 from the outside is arranged to the outside of this vessel 1. In this apparatus, raw liquid is fed through a feed pipe 7 and evaporated components are taken out through a takeout pipe 8 and the residue is taken out through a takeout pipe 9. Therefore the consumption of electric power is reduced in comparison with such a case that the rotor 2 is subjected to radiation heating by means of a heating resistor and the structure of the rotary shaft 3 is simplified in comparison with the case heating the rotor 2 by a heating element.

28. 发明专利

JPS62225203A DEVICE FOR CIRCULATING HEATING MEDIUM 失效
公开(公告)号：JPS62225203A
公开(公告)日：1987-10-03
申请号：JP6847486
申请日：1986-03-28
申请人： ULVAC CORP
发明人： KOMIYA MUNEHARU , MAEHANE YOSHIYASU , NAGASHIMA NAOKI
IPC分类号： B01D1/30 , B01D1/22
摘要： PURPOSE:To use the titled device for a along period by keeping the whole circulating passage at reduce pressure at the time of heating a heating medium, and preventing the oxidation of the heating medium in the device having the heating medium circulating passage such as a centrifugal evaporator. CONSTITUTION:A rotor 3 having a funneled evaporation surface 3a is provided in a centrifugal evaporation vessel 1, a heat-transfer part 11 through which a heating medium is circulated is formed integrally with the rotor 3, and a passage 15 for circulating the heating medium furnished with a heater 12, a pump 13, and a reservoir 14 is connected to the rotor. The heating medium circulating through the passage is stored in the reservoir to form a space 26, an oil-sealed rotary vacuum pump 27 is connected to the space 26 through a pipeline 28, and hence the whole circulating passage 15 can be kept at reduced pressure at the time of heating and circulating the heating medium. As a result, the oxidation of the heating medium is prevented, and frying oil. etc., can also be used.

29. 发明专利

JPS6111049A Microwave discharge plasma sterilization apparatus 失效
标题翻译：微波放电等离子体杀菌装置
公开(公告)号：JPS6111049A
公开(公告)日：1986-01-18
申请号：JP13090084
申请日：1984-06-27
申请人： Ulvac Corp
发明人： MAEHANE YOSHIYASU
IPC分类号： A61L2/14

30. 发明专利

JPS614501A MICROWAVE-HEATING CENTRIFUGAL EVAPORATOR 失效
公开(公告)号：JPS614501A
公开(公告)日：1986-01-10
申请号：JP12186984
申请日：1984-06-15
申请人： ULVAC CORP
发明人： MAEHANE YOSHIYASU
IPC分类号： B01D1/00 , B01D1/22 , B01D3/30
摘要： PURPOSE:To heat efficiently and to prevent overheating by heating directly an evaporation surface constituted of dielectrics with microwaves. CONSTITUTION:A liquid to be treated is introduced from an inlet 11, and supplied onto an evaporation surface 6 through a supply tube 12. The evaporation surface is rotated by a driving shaft 15, and microwaves are irradiated from a microwave guide 10 to heat the surface. Vapor is taken out from a fraction outlet 13, and the remaining liquid is discharged from an outlet 14.

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