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    • 24. 发明授权
    • Method for producing trichlorosilane
    • 制备三氯硅烷的方法
    • US09266742B2
    • 2016-02-23
    • US13583794
    • 2011-03-01
    • Shuji TanakaMasaki Tabata
    • Shuji TanakaMasaki Tabata
    • B01D3/14C01B33/107B01D3/00
    • C01B33/1071B01D3/009B01D3/143C01B33/10757C01B33/10763C01B33/10778
    • A mixture containing methyldichlorosilane, tetrachlorosilane, and trichlorosilane is distilled to fractionate a fraction with a higher content of methyldichlorosilane than the mixture before distillation. Subsequently, the fraction thus fractionated is heated to disproportionate chlorine between methyldichlorosilane and tetrachlorosilane to disproportionate methyldichlorosilane into methyltrichlorosilane. Subsequently, the fraction after disproportionation containing methyltrichlorosilane is purified by distillation to separate high-purity trichlorosilane. Having a close boiling point to that of trichlorosilane (32° C.), which is a target product to be purified by distillation, removal of methyldichlorosilane (boiling point of 41° C.) has been difficult. The present invention removes methyldichlorosilane more easily by converting it into methyltrichlorosilane (boiling point of 66° C.) through disproportionation of chlorine between methyldichlorosilane and tetrachlorosilane.
    • 将含有甲基二氯硅烷,四氯硅烷和三氯硅烷的混合物蒸馏以分馏具有比蒸馏之前的混合物高的甲基二氯硅烷含量的级分。 随后,将如此分馏的馏分加热到甲基二氯硅烷和四氯硅烷之间的不成比例的氯,使不对称甲基二氯硅烷转化为甲基三氯硅烷。 随后,通过蒸馏纯化含有甲基三氯硅烷歧化后的级分,分离高纯度三氯硅烷。 与通过蒸馏纯化的目标产物三氯硅烷(32℃)的沸点接近,难以除去甲基二氯硅烷(沸点41℃)。 本发明通过甲基二氯硅烷和四氯硅烷之间的氯的歧化将其转化为甲基三氯硅烷(沸点66℃)更容易地除去甲基二氯硅烷。
    • 28. 发明申请
    • METHOD FOR PRODUCING TRICHLOROSILANE
    • 生产三氯硅烷的方法
    • US20130001063A1
    • 2013-01-03
    • US13583794
    • 2011-03-01
    • Shuji TanakaMasaki Tabata
    • Shuji TanakaMasaki Tabata
    • B01D3/14
    • C01B33/1071B01D3/009B01D3/143C01B33/10757C01B33/10763C01B33/10778
    • A mixture containing methyldichlorosilane, tetrachlorosilane, and trichlorosilane is distilled to fractionate a fraction with a higher content of methyldichlorosilane than the mixture before distillation. Subsequently, the fraction thus fractionated is heated to disproportionate chlorine between methyldichlorosilane and tetrachlorosilane to disproportionate methyldichlorosilane into methyltrichlorosilane. Subsequently, the fraction after disproportionation containing methyltrichlorosilane is purified by distillation to separate high-purity trichlorosilane. Having a close boiling point to that of trichlorosilane (32° C.), which is a target product to be purified by distillation, removal of methyldichlorosilane (boiling point of 41° C.) has been difficult. The present invention removes methyldichlorosilane more easily by converting it into methyltrichlorosilane (boiling point of 66° C.) through disproportionation of chlorine between methyldichlorosilane and tetrachlorosilane.
    • 将含有甲基二氯硅烷,四氯硅烷和三氯硅烷的混合物蒸馏以分馏具有比蒸馏之前的混合物高的甲基二氯硅烷含量的级分。 随后,将如此分馏的馏分加热到甲基二氯硅烷和四氯硅烷之间的不成比例的氯,使不对称甲基二氯硅烷转化为甲基三氯硅烷。 随后,通过蒸馏纯化含有甲基三氯硅烷歧化后的级分,分离高纯度三氯硅烷。 与通过蒸馏纯化的目标产物三氯硅烷(32℃)的沸点接近,难以除去甲基二氯硅烷(沸点41℃)。 本发明通过甲基二氯硅烷和四氯硅烷之间的氯的歧化将其转化为甲基三氯硅烷(沸点66℃)更容易地除去甲基二氯硅烷。