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    • 22. 发明申请
    • COMPUTER MOTHERBOARD WITH AUTOMATICALLY ADJUSTED HARDWARE PARAMETER VALUE
    • 具有自动调整硬件参数值的计算机主板
    • US20100146252A1
    • 2010-06-10
    • US12397950
    • 2009-03-04
    • Chung-Hsing ChangTung-Jung TsaiTu-Tsung Kao
    • Chung-Hsing ChangTung-Jung TsaiTu-Tsung Kao
    • G06F9/00
    • G06F11/3031G06F1/04G06F1/24G06F9/4403G06F11/3051
    • A computer motherboard with automatically adjusted hardware parameter values restarts automatically and proceeds with overclocking or power-saving operation in case the computer motherboard hangs due to preceding overclocking or power-saving operation. The computer motherboard includes: a watchdog unit connected to a frequency generator and adapted to notify the frequency generator and generate a restart signal after predetermined duration; the frequency generator for generating and outputting a frequency, and automatically decreasing or increasing, according to notice from the watchdog unit, a current frequency generated by the frequency generator so as to generate and output a new frequency to substitute for the current frequency; and a hardware parameter value setting unit for setting the frequency generator for a start frequency and an operation mode and starting the watchdog unit; wherein the computer motherboard receives the restart signal and automatically restarts at the new frequency when unbooted after predetermined duration.
    • 具有自动调整的硬件参数值的计算机主板将自动重新启动,并进行超频或省电操作,以防计算机主板由于超频或省电操作而挂起。 计算机主板包括:看门狗单元,连接到频率发生器,并适于通知频率发生器并在预定的持续时间之后产生重启信号; 频率发生器,用于产生和输出频率,并且根据来自看门狗单元的通知自动地减小或增加由频率发生器产生的当前频率,以产生并输出新频率来代替当前频率; 以及硬件参数值设定单元,用于设定频率发生器的起始频率和运行模式,并启动看门狗单元; 其中所述计算机主板在预定的持续时间之后未被引导时接收到所述重启信号并且以新频率自动重启。
    • 24. 发明授权
    • Dual trench alternating phase shift mask fabrication
    • 双沟槽交变相移掩模制造
    • US07033947B2
    • 2006-04-25
    • US10385764
    • 2003-03-11
    • San-De TzuMing-Shuo YenChung-Hsing Chang
    • San-De TzuMing-Shuo YenChung-Hsing Chang
    • H01L21/302
    • G03F1/30
    • Fabricating a dual-trench alternating phase shift mask (PSM) is disclosed. A chromium layer over a mask layer, which is over a quartz layer, of the PSM is patterned according to a semiconductor design. The mask layer is dry etched according to deep trenches of a PSM design. The quartz layer is dry etched a first number of times through a first photoresist layer applied over the chromium layer and patterned according to the deep trenches of the PSM design by using backside ultraviolet exposure. The mask layer is dry etched again, according to shallow trenches of the PSM design. The quartz layer is dry etched a second number of times through a second photoresist layer applied over the chromium layer and patterned according to the shallow trenches of the PSM design by using backside ultraviolet exposure.
    • 公开了制造双沟道交替相移掩模(PSM)。 根据半导体设计对PSM之上的掩模层上的铬层在石英层上进行图案化。 根据PSM设计的深沟槽对掩模层进行干蚀刻。 通过施加在铬层上的第一光致抗蚀剂层将石英层干蚀刻第一次,并通过使用背面紫外线曝光根据PSM设计的深沟槽进行图案化。 根据PSM设计的浅沟槽,再次对掩模层进行干蚀刻。 通过施加在铬层上的第二光致抗蚀剂层将石英层干蚀刻第二次,并通过使用背面紫外线曝光根据PSM设计的浅沟槽进行图案化。
    • 26. 发明授权
    • Tri-tone attenuated phase shift trim mask for double exposure alternating phase shift mask process
    • 用于双重曝光交替相移掩模工艺的三色衰减相移修整蒙版
    • US06861182B2
    • 2005-03-01
    • US10272627
    • 2002-10-17
    • Chung-Hsing Chang
    • Chung-Hsing Chang
    • G03F1/00G03F1/30G03F1/32G03F7/20G03F9/00G03C5/00H01L29/40
    • G03F1/32G03F1/30G03F1/70G03F7/70283G03F7/70466Y10T428/24802
    • Employing a tri-tone attenuated phase shift trim mask in the second exposure of a double exposure alternating phase shift mask (alt-PSM) process is disclosed. A semiconductor wafer is first exposed utilizing a dark field alt-PSM, and then secondly is exposed utilizing a tri-tone attenuated PSM. The tri-tone attenuated PSM may include a transparent substrate, such as quartz, an opaque layer, such as chrome, and an attenuated layer, such as 6% transparency molybdenum silicide (MoSi). The opaque layer has a pattern corresponding to polysilicon gates to be imprinted on the semiconductor wafer, to protect the polysilicon photoresist patterns. The attenuated layer includes assist features to protect forbidden pitch semi-isolated field polysilicon patterns and isolated field polysilicon patterns to be imprinted on the semiconductor wafer.
    • 公开了在双曝光交替相移掩模(alt-PSM)工艺的第二曝光中采用三色衰减相移修整掩模。 首先使用暗场alt-PSM曝光半导体晶片,然后利用三音衰减PSM曝光半导体晶片。 三色衰减PSM可以包括透明衬底,例如石英,不透明层,例如铬,以及衰减层,例如6%透明硅化钼(MoSi)。 不透明层具有对应于要印刷在半导体晶片上的多晶硅栅极的图案,以保护多晶硅光致抗蚀剂图案。 衰减层包括辅助特征,以保护要被印制在半导体晶片上的禁止间距半隔离场多晶硅图案和隔离场多晶硅图案。
    • 27. 发明授权
    • Single trench alternating phase shift mask fabrication
    • 单沟槽交变相移掩模制造
    • US06830702B2
    • 2004-12-14
    • US10165028
    • 2002-06-07
    • San-De TzuChang-Ming DaiChung-Hsing ChangChen-Hao Hsieh
    • San-De TzuChang-Ming DaiChung-Hsing ChangChen-Hao Hsieh
    • B44C122
    • C03C17/3605C03C17/36C03C2218/33C23F4/00G03F1/30
    • The invention relates to fabricating a single-trench alternating phase shift mask (PSM). A chromium layer over a mask layer, which is itself over a quartz layer, of the PSM is patterned according to a semiconductor design. The mask layer and the quartz layer are dry etched through a photoresist layer that has been applied over the chromium layer and patterned according to an alternating PSM design. The dry etching initially forms single trenches of the PSM. The quartz layer is next wet etched through the mask layer to completely form the single trenches of the PSM, where the photoresist layer has first been removed. The mask layer is dry etched again, where the single trenches of the PSM are initially filled with filler material to protect the single trenches from the dry etching.
    • 本发明涉及制造单沟槽交替相移掩模(PSM)。 根据半导体设计对PSM上的掩模层上的铬层本身在石英层上进行图案化。 掩模层和石英层通过已经施加在铬层上并且根据交替的PSM设计被图案化的光致抗蚀剂层被干蚀刻。 干蚀刻最初形成PSM的单个沟槽。 接着通过掩模层湿法蚀刻石英层,以完全形成PSM的单个沟槽,其中光致抗蚀剂层首先被去除。 再次对掩模层进行干蚀刻,其中PSM的单个沟槽最初用填充材料填充,以保护单个沟槽免受干蚀刻。
    • 28. 发明授权
    • Method in the design for a power supply for suppressing noise and signal interference in equipment
    • 设计用于抑制设备中的噪声和信号干扰的电源的方法
    • US06765811B1
    • 2004-07-20
    • US10463089
    • 2003-06-17
    • Chung-Hsing Chang
    • Chung-Hsing Chang
    • H02M112
    • H02M1/126H02M1/44
    • A new method in the design for an electronic power supply for suppressing signal interference in equipment of an electronic system due to ground current in a ground loop is provided. In a power supply comprising a transformer, a primary circuit, a secondary circuit, and ground conductors, the method is done by connecting the common signal references of secondary side to the ground conductors through a capacitor and an inductor connected in series. The added capacitor is to reject DC and low frequency noise and interference, and the added inductor is to reject high frequency noise and interference. Most noise and interference signals therefore cannot pass through the formed paths. As a result, the degree of signal interference problem is greatly reduced.
    • 提供了一种用于抑制由于接地回路中的接地电流引起的电子系统设备中信号干扰的电子电源设计的新方法。 在包括变压器,初级电路,次级电路和接地导体的电源中,通过将电容器和串联的电感器连接到次级侧的公共信号基准到接地导体来实现。 增加的电容器是抑制直流和低频噪声和干扰,增加的电感是抑制高频噪声和干扰。 因此,大多数噪声和干扰信号不能通过形成的路径。 结果,信号干扰问题的程度大大降低。