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    • 21. 发明授权
    • High speed test probe positioning system
    • 高速测试探头定位系统
    • US5550483A
    • 1996-08-27
    • US342433
    • 1994-11-18
    • James E. Boyette, Jr.James M. HammondJiann-Chang LoJames C. MahlbacherMichael ServedioAli R. Taheri
    • James E. Boyette, Jr.James M. HammondJiann-Chang LoJames C. MahlbacherMichael ServedioAli R. Taheri
    • G01R1/067G01R31/02
    • G01R1/06705
    • Probing system performance is improved by dynamically positioning a test probe at a test site during the gantry settling interval using a high performance secondary positioner to compensate for the inherent moving mass oscillational displacements. A primary positioner positions the gantry and its associated test probe to within a predetermined axis distance of the test site and a secondary positioner dynamically maintains the test probe at a target position corresponding to the test site during the settling interval by imparting compensating displacements to the test probe to counteract the displacement errors incurred as the primary positioner attempts to settle the gantry at the test site. Similarly, automatic machine tool performance is improved by dynamically positioning a work tool at a work site during the gantry settling interval using a high performance secondary positioner to compensate for the inherent moving mass oscillational displacements. A primary positioner positions the gantry and its associated work tool to within a predetermined axis distance of the work site and a secondary positioner dynamically maintains the work tool at a target position corresponding to the work site during the settling interval by imparting compensating displacements to the work tool to counteract the displacement errors incurred as the primary positioner attempts to settle the gantry at the work site.
    • 通过使用高性能辅助定位器在机架沉降间隔期间在测试位置处动态定位测试探头来补偿固有的移动质量振荡位移,来提高系统性能。 主要定位器将机架及其相关联的测试探针定位在测试位置的预定轴距离内,并且辅助定位器通过赋予测试的补偿位移在静止间隔期间将测试探针动态地维持在对应于测试位置的目标位置 探测器可以抵消由于主要定位器试图在测试现场安装龙门架时发生的位移误差。 类似地,通过使用高性能二次定位器在机架沉降间隔期间通过在工作现场的动态定位工作工具来补偿固有的移动质量振荡位移,从而提高了自动机床性能。 主要定位器将机架及其相关联的工作工具定位在工作现场的预定轴距离内,并且辅助定位器通过向工件施加补偿位移来将工作工具在对应于工作现场的目标位置处动态地维持在工作位置 作为主要定位者试图在工地上定位龙门架时发生的位移错误的工具。
    • 22. 发明授权
    • Miniature probe positioning actuator
    • 微型探头定位执行器
    • US5532611A
    • 1996-07-02
    • US451635
    • 1995-05-26
    • Jiann-Chang LoMichael ServedioJames M. HammondJames E. Boyette, Jr.Hans-George H. Kolan
    • Jiann-Chang LoMichael ServedioJames M. HammondJames E. Boyette, Jr.Hans-George H. Kolan
    • G01R31/26G01R1/067G01R1/073G01R31/28H01L21/66H02K41/03G01R31/22
    • G01R1/06705
    • Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the prob into contact with selected portions of the device being tested.
    • 公开了一种探头定位致动器,其成本和质量低,能够具有高加速度,相对长的行程和紧凑的包装以及高的效率。 致动器组件包括框架,以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。 基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置,并且探头附接到电枢的“U”的底部,用于接触电气中的选定点 与被测设备相关的电路。 致动器的心脏包括安装在U形衔铁的直立腿上的线圈,并被布置成使得线圈的轴线垂直于电枢的基部,但基本上平行于探针尖端。 这种布置使致动器的“电动机”部分邻近探头,并且允许精确和可重复地,快速地控制探针尖端位置,但是探针尖端运动。 为了完成致动器的电动机部分,由框架承载的装置在线圈上产生磁场,由此在线圈通电时,发生电枢(以及因此的梁)的偏转,从而实现与该 正在测试的设备的所选部分。