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21. 发明授权

US4692815A Photographing and recording method and apparatus for electronic still picture cameras 失效
标题翻译：电子静态照相机的拍摄和记录方法和装置
公开(公告)号：US4692815A
公开(公告)日：1987-09-08
申请号：US921844
申请日：1986-10-23
申请人： Atsushi Kawahara , Masaya Okita
发明人： Atsushi Kawahara , Masaya Okita
IPC分类号： G11B19/20 , G11B31/00 , H04N1/21 , H04N5/232 , H04N5/335 , H04N5/369 , H04N5/77 , H04N5/781
CPC分类号： G11B19/20 , G11B31/006 , H04N1/2112 , H04N5/335 , H04N5/772 , H04N2101/00 , Y10S358/906
摘要： A photographing and recording method and apparatus for an electronic still picture camera of the type in which an image is picked up by a combination of a mechanical or electrooptical shutter and an image pickup device and the resulting picture signal is recorded on a magnetic disk, eliminate any undesired power consumption due to the preliminary revolution of the magnetic disk. The revolution of the magnetic disk is started upon the depression of the shutter button and the revolution is controlled at a constant speed by a velocity servosystem. The phase of the vertical synchronizing signals for reading the signal charges from the image pickup device and recording the signal on the disk after the exposure is shifted with respect to the vertical synchronizing signals for the extraneous charge draining operation of the image pickup device before the exposure and the phase-shifted vertical signals are reset in response to the beginning of the next exposure thereby controlling the phase difference between the vertical synchronizing signals and the rotational period of the disk at a desired value.
摘要翻译：一种用于电子静态照相机的拍摄和记录方法和装置，其中通过机械或电光门和图像拾取装置的组合拾取图像并将所得到的图像信号记录在磁盘上，消除由于磁盘的初步旋转而导致的任何不期望的功率消耗。在按下快门按钮时开始磁盘的旋转，并且通过速度伺服系统以恒定的速度控制旋转。用于读取来自图像拾取装置的信号电荷并且在曝光之后将信号记录在盘上的垂直同步信号的相位相对于在曝光之前的图像拾取装置的无关电荷排放操作的垂直同步信号移位并且相移的垂直信号响应于下一次曝光的开始被复位，从而将垂直同步信号和盘的旋转周期之间的相位差控制在期望的值。

22. 发明授权

US4342905A Automatic focusing device of a microscope 失效
标题翻译：自动对焦装置的显微镜
公开(公告)号：US4342905A
公开(公告)日：1982-08-03
申请号：US180150
申请日：1980-08-21
申请人： Norio Fujii , Atsushi Kawahara , Masahiro Sawada
发明人： Norio Fujii , Atsushi Kawahara , Masahiro Sawada
IPC分类号： G02B21/24 , G01J1/20
CPC分类号： G02B21/244
摘要： An automatic focusing device of a microscope having an objective lens and a stage on which a specimen is placed comprises distance varying means for varying the relative distance between the objective lens and the stage, distance detecting means for producing a distance output corresponding to said distance, photoelectric detector means for photoelectrically detecting a high frequency component of the space frequency component of the image of the specimen on the stage by the objective lens, judging means for judging whether or not a predetermined peak smaller than a maximum peak exists in the output of the photoelectric detector means within a predetermined distance range from a first distance output of the distance detecting means when the output of the photoelectric detector means assumes said maximum peak and for producing an in-focus output when said predetermined peak exists, and means for determining said relative distance on the basis of said in-focus output.
摘要翻译：具有物镜的显微镜的自动聚焦装置和放置有试样的台架包括用于改变物镜与台架之间的相对距离的距离变化装置，用于产生对应于所述距离的距离输出的距离检测装置，光电检测装置，用于通过物镜光电检测载物台上的样本的空间频率分量的高频分量;判断装置，用于判断小于最大峰值的预定峰值是否存在于光电检测装置，当光电检测装置的输出呈现所述最大峰值时，距距离检测装置的第一距离输出预定距离范围内，并且当存在所述预定峰值时产生对焦输出，以及用于确定所述相对基于所述对焦输出的距离。

23. 发明授权

US07760348B2 Particle inspection apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：粒子检查装置，曝光装置及装置的制造方法
公开(公告)号：US07760348B2
公开(公告)日：2010-07-20
申请号：US12389323
申请日：2009-02-19
申请人： Atsushi Kawahara
发明人： Atsushi Kawahara
IPC分类号： G01N21/88
CPC分类号： G03F1/84
摘要： A particle inspection apparatus includes an irradiation unit configured to apply a light beam onto front and back surfaces of an object to be inspected, first and second detection units configured to detect scattering light from the surfaces, a calculation unit configured to conduct a particle inspection on the surfaces on the basis of outputs from the detection units, and a control unit configured to control the irradiation unit, the detection units, and the calculation unit. The irradiation unit can selectively apply the beam onto the front or back surface. The control unit causes the calculation unit to conduct the particle inspection on the inspection surface on which the light beam is selectively applied, on the basis of outputs made by the detection unit corresponding to simultaneous application and selective application of the light beam.
摘要翻译：一种粒子检查装置，包括：被配置为将被检测体的前后表面施加光束的照射部，配置为检测来自所述表面的散射光的第一检测部和第二检测部，基于来自检测单元的输出的表面，以及被配置为控制照射单元，检测单元和计算单元的控制单元。照射单元可以选择性地将光束施加到前表面或后表面上。控制单元使得计算单元基于对应于同时施加和选择性地施加光束的由检测单元产生的输出，在选择了光束的检查表面上进行粒子检查。

24. 发明申请

US20090207406A1 PARTICLE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：颗粒检查装置，曝光装置和装置制造方法
公开(公告)号：US20090207406A1
公开(公告)日：2009-08-20
申请号：US12389323
申请日：2009-02-19
申请人： Atsushi Kawahara
发明人： Atsushi Kawahara
IPC分类号： G01N21/88
CPC分类号： G03F1/84
摘要： A particle inspection apparatus includes an irradiation unit configured to apply a light beam onto front and back surfaces of an object to be inspected, first and second detection units configured to detect scattering light from the surfaces, a calculation unit configured to conduct a particle inspection on the surfaces on the basis of outputs from the detection units, and a control unit configured to control the irradiation unit, the detection units, and the calculation unit. The irradiation unit can selectively apply the beam onto the front or back surface. The control unit causes the calculation unit to conduct the particle inspection on the inspection surface on which the light beam is selectively applied, on the basis of outputs made by the detection unit corresponding to simultaneous application and selective application of the light beam.
摘要翻译：一种粒子检查装置，包括：被配置为将被检测体的前后表面施加光束的照射部，配置为检测来自所述表面的散射光的第一检测部和第二检测部，基于来自检测单元的输出的表面，以及被配置为控制照射单元，检测单元和计算单元的控制单元。照射单元可以选择性地将光束施加到前表面或后表面上。控制单元使得计算单元基于对应于同时施加和选择性地施加光束的由检测单元产生的输出，在选择了光束的检查表面上进行粒子检查。

25. 发明申请

US20090133482A1 Ignition Timing Measuring and Display Device of Internal Combustion Engine 失效
标题翻译：内燃机点火时间测量与显示装置
公开(公告)号：US20090133482A1
公开(公告)日：2009-05-28
申请号：US11887430
申请日：2006-04-06
申请人： Masao Iwata , Fumitake Matsuda , Toshiyuki Takano , Atsushi Kawahara
发明人： Masao Iwata , Fumitake Matsuda , Toshiyuki Takano , Atsushi Kawahara
IPC分类号： G01M15/04
CPC分类号： F02P17/12 , F02D41/009 , F02P17/02 , F02P2017/003
摘要： An ignition timing measuring and display device of an internal combustion engine (1) having a magneto (A) includes a reference RPM signal pulse detector (2) for detecting a reference RPM signal pulse of the internal combustion engine (1) and an ignition noise pulse detector (4) for detecting ignition noise of an electromagnetic wave generated in the vicinity of an ignition plug (3) when ignition is carried out in the internal combustion engine (1) and calculates ignition timing generated by the magneto (A) based on the signal pulse and the ignition noise pulse and displays it. Since the ignition timing of the internal combustion engine can be easily monitored, maintenance can be carried out to the internal combustion engine and an ignition device to realize a necessary operating performance of the internal combustion engine.
摘要翻译：具有磁（A）的内燃机（1）的点火正时测量和显示装置包括用于检测内燃机（1）的基准RPM信号脉冲的基准RPM信号脉冲检测器（2）和点火噪声脉冲检测器（4），用于在内燃机（1）中进行点火时，检测在火花塞（3）附近产生的电磁波的点火噪声，并计算由磁电机（A）产生的点火正时基于信号脉冲和点火噪声脉冲并显示。由于可以容易地监视内燃机的点火正时，因此可以对内燃机和点火装置进行维护，以实现内燃机的必要的运行性能。

26. 发明授权

US6163369A Plane position detecting method and exposing method and exposure apparatus using same 有权
标题翻译：平面位置检测方法和曝光方法以及使用其的曝光装置
公开(公告)号：US6163369A
公开(公告)日：2000-12-19
申请号：US205173
申请日：1998-12-04
申请人： Yuichi Yamada , Atsushi Kawahara
发明人： Yuichi Yamada , Atsushi Kawahara
IPC分类号： G01B11/00 , G01B11/26 , G03F9/00 , G03F9/02 , H01L21/027 , G03B27/52
CPC分类号： G03F9/7026 , G03F9/7046
摘要： The position or the inclination of a substrate surface is detected at a high accuracy and a high speed, and corrected. When moving the substrate in a direction substantially at right angles to an optical axis of a projection optical system and feeding an area on the substrate into an image space of the projection optical system, at least one of the position and inclination in the optical axis direction of the substrate is detected, to bring that area into focus with the focal plane of the projection optical system. One of a first mode of conducting the measurement during travel of the substrate and a second mode of performing the measurement in a state in which that area has substantially been positioned in the image space is selected.
摘要翻译：以高精度和高速检测基板表面的位置或倾斜度并进行校正。当基板垂直于投影光学系统的光轴移动基板并将基板上的区域馈送到投影光学系统的图像空间中时，光轴方向上的位置和倾斜中的至少一个检测基板，使该区域与投影光学系统的焦平面对准。选择在基板行进期间进行测量的第一模式和在该区域基本上位于图像空间中的状态下执行测量的第二模式之一。

27. 发明授权

US5851060A Projective display device 失效
标题翻译：投影显示设备
公开(公告)号：US5851060A
公开(公告)日：1998-12-22
申请号：US713966
申请日：1996-09-12
申请人： Takayuki Uchiyama , Atsushi Kawahara
发明人： Takayuki Uchiyama , Atsushi Kawahara
IPC分类号： G03B21/12 , G03B21/28 , H04N9/31 , G03B21/14
CPC分类号： H04N9/3105 , G03B21/12 , G03B21/28
摘要： A projective display device can function as a video projector and a slide projector. The device is compact, easy to use and simple in operation. A video projector that projects video information can be used as a slide projector by utilizing a reflection type spatial light modulator in a reflected state when a photographic film is held in the optical system of the projector. Alternatively, a moveable mirror can be used to switch from a video projector to a slide projector.
摘要翻译：投影显示设备可以用作视频投影仪和幻灯机。该设备结构紧凑，使用方便，操作简单。当照相胶片保持在投影仪的光学系统中时，通过利用反射状态的反射型空间光调制器，投影视频信息的视频投影仪可以用作幻灯机。或者，可以使用可移动镜从视频投影仪切换到幻灯机。

28. 发明授权

US5810463A Illumination device 失效
标题翻译：照明装置
公开(公告)号：US5810463A
公开(公告)日：1998-09-22
申请号：US563232
申请日：1995-11-28
申请人： Atsushi Kawahara , Osamu Inoue
发明人： Atsushi Kawahara , Osamu Inoue
IPC分类号： F21K99/00 , F21V8/00
CPC分类号： G02B6/0006 , F21K9/61 , F21Y2101/00
摘要： An illumination device for an image input device includes a cylindrical light guiding unit, a board having a plurality of light emitting diode elements, a connection member connecting the light guiding unit with the board and a terminal reflection member formed at one end of the light guiding unit. A surface of the light guiding unit has a scattering reflection member extending linearly along the axial direction of the light guiding unit. A cylindrical reflection member is spaced around the light guiding unit and a linear space is provided in the reflection member along the axial direction of the guiding unit.
摘要翻译：一种用于图像输入装置的照明装置包括圆柱形导光单元，具有多个发光二极管元件的板，连接导光单元与板的连接构件和形成在导光体的一端的端子反射构件单元。导光单元的表面具有沿着导光单元的轴向线性延伸的散射反射构件。圆柱形反射构件围绕导光单元间隔开，并且沿着引导单元的轴向方向在反射构件中设置线性空间。

29. 发明授权

US4479145A Apparatus for detecting the defect of pattern 失效
标题翻译：用于检测图案缺陷的装置
公开(公告)号：US4479145A
公开(公告)日：1984-10-23
申请号：US400681
申请日：1982-07-22
申请人： Toru Azuma , Junji Hazama , Atsushi Kawahara , Kazunari Hada , Norio Fujii
发明人： Toru Azuma , Junji Hazama , Atsushi Kawahara , Kazunari Hada , Norio Fujii
IPC分类号： G01N21/88 , G06T7/00 , H04N7/18
CPC分类号： G01N21/88 , G06T7/001 , G06T2207/30148
摘要： A pattern examining in which a pattern on an examined object such as reticle or mask is scanned to produce image binary signals of picture elements; binary information corresponding to a local area on the examined object is serially extracted from the image binary signals; and shape detection is effected for detecting by means of the binary information whether or not the pattern in the local area possesses a determined geometric shape or characteristics. The result of the shape detection is compared with the information on design relating to the geometric shape or characteristics which the pattern on the examined object should possess.
摘要翻译：模式检查，其中扫描诸如掩模版或掩模的被检查物体上的图案以产生图像元素的图像二进制信号; 对应于所检查对象上的局部区域的二进制信息从图像二进制信号中被串行提取; 并且通过二进制信息进行形状检测来检测局部区域中的图案是否具有确定的几何形状或特征。将形状检测的结果与关于检查对象的图案所具有的几何形状或特征的设计信息进行比较。

30. 发明授权

US4472738A Pattern testing apparatus 失效
标题翻译：图案检测仪
公开(公告)号：US4472738A
公开(公告)日：1984-09-18
申请号：US381469
申请日：1982-05-24
申请人： Kazunari Hada , Norio Fujii , Atsushi Kawahara , Toru Azuma , Junji Hazama
发明人： Kazunari Hada , Norio Fujii , Atsushi Kawahara , Toru Azuma , Junji Hazama
IPC分类号： G01N21/88 , G01N21/956 , G06T1/00 , G06T7/00 , H04N7/18
CPC分类号： G01N21/956 , G06T7/001 , G06T2207/10016 , G06T2207/30148
摘要： A pattern defect testing apparatus comprises a first detection circuit which defines a first detection area on a two-dimensional pattern and produces a first detection signal when all digital signals representative of densities of picture cells in the first detection area have the same logical value, a second detection circuit which defines a second detection area on the two-dimensional pattern and produces a second detection signal when at least one of digital signals representative of densities of picture cells in the second detection area has a logical value different from that of the digital signals to the first detection circuit, and a discriminating circuit for discriminating the presence of a defect in the second detection area when the first and second detection signals are produced.
摘要翻译：图案缺陷检测装置包括第一检测电路，其定义二维图案上的第一检测区域，并且当表示第一检测区域中的图像单元的密度的所有数字信号具有相同的逻辑值时，产生第一检测信号，第二检测电路，其限定二维图案上的第二检测区域，并且当表示第二检测区域中的图像单元的密度的数字信号中的至少一个具有与数字信号的逻辑值不同的逻辑值时，产生第二检测信号以及鉴别电路，用于在产生第一和第二检测信号时鉴别第二检测区域中的缺陷的存在。

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