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    • 21. 发明申请
    • Gas detection system
    • 气体检测系统
    • US20060114113A1
    • 2006-06-01
    • US11070460
    • 2005-03-03
    • Koichi YokosawaSadaki NakanoYasushi Goto
    • Koichi YokosawaSadaki NakanoYasushi Goto
    • G01N7/00
    • G01N33/0063G01N27/123
    • A gas detection system capable of suppressing the power consumption of the system using gas sensors required for heating for measurement at high accuracy, comprising a server and a plurality of gas sensors connected by way of wireless communication with the server, in which each of the gas sensors is provided with a heater, a controller for controlling the ON-OFF for the power supply to the heater and a comparator for comparing the detected gas concentration with a predetermined threshold value. In the gas detection system, electric power is not usually supplied to the heater in each of the gas sensors and the gas sensor measures the gas concentration at a low accuracy and always compares it with the threshold value. In a case where the gas concentration exceeds the threshold value in one of the gas sensors, it turns the heater of its own to ON thereby switching the measurement to that at high accuracy and turns the heater to OFF upon completing the measurement. At the same time, it informs the detection for the excess of threshold value to the server and the server lowers the threshold value of the gas sensors in the vicinity of the gas sensor that has informed the detection for the excess of threshold value to make the monitoring level severer.
    • 一种气体检测系统,其能够以高精度抑制用于加热测量所需的气体传感器的系统的功率消耗,包括通过与服务器的无线通信连接的服务器和多个气体传感器,其中每个气体 传感器设置有加热器,用于控制对加热器的电源的ON-OFF的控制器和用于将检测到的气体浓度与预定阈值进行比较的比较器。 在气体检测系统中,通常不向每个气体传感器中的加热器供电,并且气体传感器以低精度测量气体浓度,并且始终将其与阈值进行比较。 在其中一个气体传感器中气体浓度超过阈值的情况下,它将其自身的加热器变为ON,从而将测量值以高精度切换,并在完成测量时将加热器转为OFF。 同时,它通知检测到服务器的阈值过大,服务器和服务器降低气体传感器附近的气体传感器的阈值,该气体传感器通知检测阈值超过阈值, 监控级别更严重。
    • 25. 发明授权
    • Switch, semiconductor device, and manufacturing method thereof
    • 开关,半导体器件及其制造方法
    • US07667559B2
    • 2010-02-23
    • US11472355
    • 2006-06-22
    • Kiyoko YamanakaYasushi Goto
    • Kiyoko YamanakaYasushi Goto
    • H01H51/22
    • H01H1/0036B81B2207/07B81C1/00246B81C2203/0136B81C2203/0735H01H59/0009
    • It is an objective to achieve a MEMS switch which can be mounted with a CMOS circuit and has a contact point with high reliability, both mechanically and electrically. An insulator having a compatibility with a CMOS process is formed at the contact surface of a cantilever beam constituting a MEMS switch and a fixed contact 2 opposite thereto. When the switch is used the cantilever beam is moved by applying a voltage to the pull-in electrode and the cantilever beam. After the cantilever beam makes contact with the fixed contact, a voltage exceeding the breakdown field strength of the insulator is applied to the insulator, resulting in dielectric breakdown occurring. By modifying the insulator once, the mechanical fatigue concentration point of the switch contact point is protected, and a contact point is achieved as well in which electrical signals are transmitted through the current path formed by the dielectric breakdown.
    • 实现可以安装有CMOS电路并具有机械和电气的高可靠性的接触点的MEMS开关的目的。 在构成MEMS开关的悬臂梁和与其相对的固定触头2的接触表面处形成具有与CMOS工艺兼容的绝缘体。 当使用开关时,通过向拉入电极和悬臂梁施加电压来移动悬臂梁。 在悬臂梁与固定触点接触之后,超过绝缘体的击穿场强的电压被施加到绝缘体上,导致电介质击穿。 通过改变绝缘体一次,保护开关接触点的机械疲劳浓度点,并且实现接触点,其中电信号通过由电介质击穿形成的电流路径传输。
    • 27. 发明授权
    • Biochemical measuring chip and measuring apparatus
    • 生化测量芯片和测量仪器
    • US07306941B2
    • 2007-12-11
    • US11007366
    • 2004-12-09
    • Toru FujimuraYasushi Goto
    • Toru FujimuraYasushi Goto
    • C12M1/34C12M3/00
    • G01N33/54373G01N21/55
    • A simple and convenient sensor and measuring apparatus utilizing the optical interference effect of an optical thin film capable of measuring the binding between biochemical substances at a high throughput and having alkali resistance. An optical thin film of silicon nitride is disposed on the first surface and the rear surface of a silicon substrate, and the thickness of the silicon nitride film is modified in a direction parallel to the film. A portion of the thin film with increased thickness is used as a sensor upon which a probe is disposed, and over which a sample-containing solution is caused to flow. The binding between the probe and biochemical sample is detected based upon the change of the intensity of reflected light.
    • 一种简单方便的传感器和测量装置,利用光学薄膜的光学干涉效应,能够以高通量测量生化物质之间的结合并具有耐碱性。 氮化硅的光学薄膜设置在硅衬底的第一表面和后表面上,并且氮化硅膜的厚度在与膜平行的方向上被改变。 使用具有增加厚度的薄膜的一部分用作传感器,在其上设置探针,并使含有样品的溶液流过。 基于反射光强度的变化来检测探针和生化样品之间的结合。
    • 29. 发明申请
    • Semiconductor gas sensor and method for manufacturing the same
    • 半导体气体传感器及其制造方法
    • US20070007546A1
    • 2007-01-11
    • US11476682
    • 2006-06-29
    • Yasushi GotoToshiyuki MineKoichi Yokosawa
    • Yasushi GotoToshiyuki MineKoichi Yokosawa
    • H01L29/74
    • G01N27/4141G01N33/0047G01N33/005
    • The present invention provides a manufacturing method enabling suppression of threshold voltage fluctuation without giving any damage to a gate insulating film when a transistor structure is formed at first in a field effect transistor type of gas sensor and then an electrode with a material responsive to a gas to be detected is formed. The gate insulating film is a film stack including at least an SiO2 film and an SRN (Si-rich nitride) film. The SRN film functions as a etching stopper film when the gate insulating film is exposed by etching of an inter-layer insulating film. Pressure resistance of the gate insulating film is preserved with SiO2. An electric charge in the SRN film can be removed with a lower voltage as compare to that required for removing an electric charge in the Si3N4 film, which enables suppression of threshold voltage fluctuation in gas sensor transistors.
    • 本发明提供一种制造方法,能够在场效应晶体管型气体传感器中首先形成晶体管结构之后抑制阈值电压波动,而不会对栅极绝缘膜造成任何损害,然后是具有响应于气体的材料的电极 被形成。 栅绝缘膜是至少包括SiO 2膜和SRN(富Si的氮化物)膜的膜堆叠。 当栅极绝缘膜通过蚀刻层间绝缘膜而暴露时,SRN膜用作蚀刻停止膜。 栅极绝缘膜的耐压性由SiO 2保持。 与去除Si 3 N 4 N 3膜中的电荷相比,SRN膜中的电荷可以以较低的电压去除,这使得能够抑制 气体传感器晶体管的阈值电压波动。