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    • 27. 发明授权
    • Method and its apparatus for detecting defects
    • 检测缺陷的方法及其装置
    • US07834992B2
    • 2010-11-16
    • US11695743
    • 2007-04-03
    • Minoru YoshidaShunji Maeda
    • Minoru YoshidaShunji Maeda
    • G01N21/00
    • G01N21/9501G01N21/4738
    • In the present invention, to make corrective matching thereof, it is designed as follows; position effect of defects coordinates, which are output from an inspection apparatus, is allowed, coordinates of inspected data are mutually corrected, and a state of coincidence or non-coincidence among a plurality sets of inspected data is output or displayed. Inspection data is designed to include kinds, kinds difference and dimension of defects. A state of coincidence or non-coincidence between inspected data is designed to be output or displayed appropriately, by kinds or dimensions, or by a grouping thereof, of a defects object. The same sample is inspected by every time of passing a production step, and a state of data increase or decrease, or coincidence or non-coincidence between the inspected data is designed to be output or displayed.
    • 在本发明中,为了进行校正匹配,设计如下: 允许从检查装置输出的缺陷坐标的位置效果,相互校正被检查数据的坐标,并且输出或显示多组检查数据之间的一致或不一致的状态。 检验数据旨在包括缺陷的种类,种类差异和尺寸。 被检查数据之间的重合或不一致的状态被设计为通过种类或尺寸或其分组来输出或显示缺陷对象。 通过每次通过生产步骤检查相同的样品,并且被设计为输出或显示检查数据之间的数据增加或减少或一致或不一致的状态。