专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

21. 发明申请

US20100233876A1 FILM FORMING APPARATUS, FILM FORMING METHOD, COMPUTER PROGRAM AND STORAGE MEDIUM 审中-公开
标题翻译：电影制作装置，电影制作方法，计算机程序和存储介质
公开(公告)号：US20100233876A1
公开(公告)日：2010-09-16
申请号：US12303831
申请日：2007-06-08
申请人： Kenji Matsumoto , Junichi Koike , Koji Neishi
发明人： Kenji Matsumoto , Junichi Koike , Koji Neishi
IPC分类号： H01L21/768 , C23C16/458
CPC分类号： H01L23/53238 , C23C16/18 , C23C16/45529 , C23C16/45565 , C23C16/45574 , H01L21/28556 , H01L21/28562 , H01L21/76831 , H01L21/76844 , H01L21/76864 , H01L21/76871 , H01L21/76877 , H01L2221/1089 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要： In a film forming method, a substrate is first loaded into a vacuum-evacuable processing chamber. At least a transition metal-containing source gas and a reduction gas are supplied into the processing chamber, and the substrate is heated. Then, a thin film is formed in a recess in the surface of the substrate by heat treatment. Accordingly, the surface recess of the substrate can be filled with a copper film.
摘要翻译：在成膜方法中，首先将基板装载到真空排气处理室中。至少含有过渡金属的源气体和还原气体被供给到处理室中，并且加热基板。然后，通过热处理在基板的表面的凹部中形成薄膜。因此，可以用铜膜填充基板的表面凹部。

22. 发明申请

US20100219157A1 FILM FORMING APPARATUS AND FILM FORMING METHOD 审中-公开
标题翻译：薄膜成型装置和薄膜成型方法
公开(公告)号：US20100219157A1
公开(公告)日：2010-09-02
申请号：US12727992
申请日：2010-03-19
申请人： Kenji Matsumoto
发明人： Kenji Matsumoto
IPC分类号： B44C1/22 , C23F1/08 , C23C16/06
CPC分类号： C23C16/18 , C23C16/4486 , H01L21/28556 , H01L21/76864 , H01L21/76867 , H01L21/76873 , H01L2221/1089
摘要： A film forming apparatus 100 is provided with a processing chamber 2 for accommodating a wafer W; a gas supply section 10 for supplying inside the processing chamber 2 with a gas containing a Cu material gas and an Mn material gas; a shower head 4 for introducing the gas fed from the gas supply section 10 into the processing chamber 2; and a vacuum pump 8 for exhausting inside the processing chamber 2. The gas supply section 10 is provided with a Cu material storing section 21; an Mn material storing section 22; a manifold 40 to which the Cu material and the Mn material are introduced to be mixed; one vaporizer 42 for vaporizing the mixture formed at the manifold 40; and material gas supply piping 54 for introducing into the shower head 4 the material gas formed by vaporization.
摘要翻译：成膜装置100设置有用于容纳晶片W的处理室2; 用于在处理室2内部供给含有Cu材料气体和Mn材料气体的气体的气体供给部分10; 用于将从气体供给部10供给的气体导入处理室2的喷淋头4; 以及用于在处理室2内排出的真空泵8.气体供给部10设置有Cu材料收纳部21; Mn材料储存部22; 引入Cu材料和Mn材料以混合的歧管40; 一个蒸发器42用于蒸发形成在歧管40处的混合物; 以及用于将通过蒸发形成的原料气体引入喷淋头4的原料气体供给管路54。

23. 发明授权

US07583382B2 Optical measurement apparatus 失效
标题翻译：光学测量装置
公开(公告)号：US07583382B2
公开(公告)日：2009-09-01
申请号：US10594528
申请日：2005-03-29
申请人： Takakazu Yano , Kenji Matsumoto , Tadahiro Fukuda , Miharu Sugiura
发明人： Takakazu Yano , Kenji Matsumoto , Tadahiro Fukuda , Miharu Sugiura
IPC分类号： G01N21/00 , G01N3/00 , C02F1/461
CPC分类号： G01N30/96 , B01J39/07 , B01J41/07 , B01J47/04 , B01J49/08 , B01J49/30 , B01J49/53 , B01J49/57 , G01N21/21 , G01N30/74 , G01N2030/746 , G01N2030/0035
摘要： An object of the present invention is to provide an optical measurement apparatus equipped with an ion-exchange resin for pretreating a sample, thereby enabling the concentration of component in the sample to be measured with higher accuracy. The optical measurement apparatus of the present invention includes, in addition to the ion-exchange resin, an optical measurement section for measuring, based on the optical characteristics of the component, the concentration of the component in the sample after the sample is passed through the ion-exchange resin.
摘要翻译：本发明的目的是提供一种配备有用于对样品进行预处理的离子交换树脂的光学测量装置，从而能够以更高的精度测量样品中的组分的浓度。本发明的光学测量装置除了离子交换树脂之外还包括光学测量部分，用于基于部件的光学特性，测量样品在样品通过之后的浓度离子交换树脂。

24. 发明授权

US07540923B2 Shower head structure for processing semiconductor 失效
标题翻译：用于加工半导体的淋浴头结构
公开(公告)号：US07540923B2
公开(公告)日：2009-06-02
申请号：US10505169
申请日：2003-02-28
申请人： Toshio Takagi , Takeshi Sakuma , Yuji Kato , Kenji Matsumoto
发明人： Toshio Takagi , Takeshi Sakuma , Yuji Kato , Kenji Matsumoto
IPC分类号： C23C16/52 , C23F1/00 , H01L21/306 , C23C16/18
CPC分类号： H01J37/32935 , H01J37/3244 , H01L21/67115
摘要： A shower head structure disposed in a device 2 for processing a semiconductor while supplying processing gas to a processing space S for storing a heated processed substrate W, comprising a shower head 12 having a plurality of gas injection holes 20B for supplying the processing gas and a light introducing rod 68 of a radiation thermometer 66 inserted into at least one of the gas injection holes 20B.
摘要翻译：一种淋浴喷头结构，其设置在用于处理半导体的装置2中，同时向处理空间S供应处理气体，所述处理空间S用于存储加热的处理基板W，包括具有多个用于供应处理气体的气体注入孔20B的喷头12，插入至少一个气体注入孔20B的辐射温度计66的光导入杆68。

25. 发明申请

US20080248595A1 Method for Manufacturing Semiconductor Device and Computer Storage Medium 失效
标题翻译：半导体器件和计算机存储介质的制造方法
公开(公告)号：US20080248595A1
公开(公告)日：2008-10-09
申请号：US11815868
申请日：2006-06-12
申请人： Kenji Matsumoto , Masayuki Nasu , Tomoyuki Sakoda
发明人： Kenji Matsumoto , Masayuki Nasu , Tomoyuki Sakoda
IPC分类号： G06F19/00 , H01L21/285
CPC分类号： H01L21/31691 , C23C16/0272 , C23C16/40 , C23C16/409 , C30B25/02 , C30B29/32 , H01L21/02197 , H01L21/02271 , H01L27/11507 , H01L28/55
摘要： A method for fabricating a semiconductor device includes the steps of forming a PbTiOx film having a predominantly (111) orientation on a lower electrode as a nucleation layer by an MOCVD process with a film thickness exceeding 2 nm, and forming a PZT film having a predominantly (111) orientation on the nucleation layer, wherein the step of forming the PbTiOx film is conducted under an oxygen partial pressure of less than 340 Pa.
摘要翻译：一种制造半导体器件的方法包括以下步骤：通过膜厚超过2nm的MOCVD法在下电极上形成主要为（111）取向的PbTiOx膜作为成核层，并形成主要为（111）取向，其中形成PbTiOx膜的步骤在小于340Pa的氧分压下进行。

26. 发明授权

US07429138B2 Optical connection method and optical transmission apparatus 失效
标题翻译：光连接方法和光传输装置
公开(公告)号：US07429138B2
公开(公告)日：2008-09-30
申请号：US11660648
申请日：2005-08-19
申请人： Yoshisada Nakamura , Hiroki Takahashi , Takanori Sato , Kenji Matsumoto , Hiroyuki Hiiro
发明人： Yoshisada Nakamura , Hiroki Takahashi , Takanori Sato , Kenji Matsumoto , Hiroyuki Hiiro
IPC分类号： G02B6/36
CPC分类号： G02B6/02038 , G02B6/03633 , G02B6/3878
摘要： A plastic optical fiber (11) has a core (12) and a clad (13). The clad (13) is composed of an outer clad (14) and an inner clad (15). The refractive index in the core (12) gradually increases as the distance from the center thereof decreases. The refractive index in the inner clad (15) is equal to the minimum value of the refractive index in the core (12), and the refractive index in the outer clad (14) is smaller than that in the inner clad (15). For the purpose of decreasing the transmission loss between the plastic optical fiber (11) and a light emission device or the light receiving device, the diameter d1 of the core (12) and the outer diameter d2 of the inner clad (15) satisfy the following conditions; 100(μm)≦d1≦700(μm) 200(μm)≦d1≦1000(μm) d1
摘要翻译：塑料光纤（11）具有芯（12）和包层（13）。包层（13）由外包层（14）和内包层（15）组成。芯部（12）的折射率随着距离其中心的距离减小而逐渐增加。内包层（15）中的折射率等于芯（12）中的折射率的最小值，并且外包层（14）中的折射率小于内包层（15）中的折射率。为了降低塑料光纤（11）与发光装置或光接收装置之间的传输损耗，芯（12）的直径d 1和内包层（15）的外径d 2，满足以下条件; <？in-line-formula description =“In-line formula”end =“lead”？> 100（mum）<= d 1 <= 700（mum）<？in-line-formula description = “end =”tail“？> <？in-line-formula description =”In-line formula“end =”lead“？> 200（mum）<= d 1 <= 1000（mum）<？in-line- 公式描述=“内联公式”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> d 1

27. 发明授权

US07411675B2 Optical rotation angle measuring apparatus 失效
标题翻译：光学旋转角度测量装置
公开(公告)号：US07411675B2
公开(公告)日：2008-08-12
申请号：US10551796
申请日：2004-03-26
申请人： Kenji Matsumoto , Takakazu Yano , Tadahiro Fukuda , Shigeru Futakami
发明人： Kenji Matsumoto , Takakazu Yano , Tadahiro Fukuda , Shigeru Futakami
IPC分类号： G01J4/00 , G02F1/01
CPC分类号： G01N21/21
摘要： A linearly polarized light output unit (701) outputs a linearly polarized light. A first phase modulation unit (703) includes a first polarization axis and modulates a phase of the linearly polarized light. A second phase modulation unit (704) includes a second polarization axis orthogonal to the first polarization axis and modulates the phase of the linearly polarized light. A signal supply unit (705) supplies a modulation signal (vb) for modulating the phase of the linearly polarized light to one of the phase modulation units. A light intensity detection unit (707) detects an intensity of a light emitted from a phase modulation unit (702), to which the signal is supplied, to a sample (106) that contains an optically active material by causing a polarization plane of the light to be rotated and the light to be transmitted by the sample (106). An optical rotation angle calculation unit (708) calculates an optical rotation angle based on the modulation signal (Vb) and the detected light intensity.
摘要翻译：直线偏振光输出单元（701）输出线偏振光。第一相位调制单元（703）包括第一偏振轴并且调制线偏振光的相位。第二相位调制单元（704）包括与第一偏振轴正交的第二偏振轴并且调制线偏振光的相位。信号供给单元（705）将用于将线偏振光的相位调制的调制信号（vb）提供给相位调制单元之一。光强度检测单元（707）通过使包含光学活性材料的偏振面从包含光学活性材料的样品（106）检测从被提供信号的相位调制单元（702）发射的光的强度，要旋转的光和由样品（106）传播的光。光旋转角度计算单元（708）基于调制信号（Vb）和检测到的光强度来计算旋光角度。

28. 发明授权

US07396591B2 Wiring substrate 失效
标题翻译：接线基板
公开(公告)号：US07396591B2
公开(公告)日：2008-07-08
申请号：US11454412
申请日：2006-06-16
申请人： Takuya Miyashita , Masafumi Okada , Kenji Matsumoto
发明人： Takuya Miyashita , Masafumi Okada , Kenji Matsumoto
IPC分类号： B32B3/00
CPC分类号： H05K3/282 , H05K3/325 , H05K2201/0162 , H05K2201/0179 , Y10T428/24917 , Y10T428/31681
摘要： In a wiring substrate having a metal wiring pattern that is formed on a substrate and includes a contact portion for providing connection to an external element, an organic thin film containing silane is formed to cover the metal wiring pattern and the contact portion is electrically connected to the external element through the organic thing film. Unlike conventional wiring substrates in which a contact portion is uncovered by ripping open or cutting away a protective resin film formed on the contact portion, the wiring substrate can be electrically connected with an external element having a low contact pressure, for example.
摘要翻译：在具有形成在基板上并且包括用于提供与外部元件的连接的接触部分的金属布线图案的布线基板中，形成含有硅烷的有机薄膜以覆盖金属布线图案，并且该接触部分电连接到外部元素通过有机物膜。与通过撕开或切除形成在接触部分上的保护树脂膜不接触接触部分的传统布线基板不同，布线基板可以例如与具有低接触压力的外部元件电连接。

29. 发明申请

US20080134976A1 Apparatus for Forming Thin Film 审中-公开
标题翻译：薄膜成型装置
公开(公告)号：US20080134976A1
公开(公告)日：2008-06-12
申请号：US12030054
申请日：2008-02-12
申请人： Hiroshi Shinriki , Kenji Matsumoto , Toru Tatsumi
发明人： Hiroshi Shinriki , Kenji Matsumoto , Toru Tatsumi
IPC分类号： C23C16/54
CPC分类号： H01L21/02271 , C23C16/452 , C23C16/45565 , C23C16/4557 , C23C16/45574 , C30B25/14 , H01L21/02197 , H01L21/31691
摘要： A shower head having a plurality of ejection holes for supplying an organic metal gas at uniform density to the surface of a substrate and a plurality of ejection holes for supplying an oxidizing gas at uniform density to the same is provided in a reaction furnace of an MOCVD system. A heater for heating the inside to a temperature higher than the thermal decomposition point of the organic metal gas but lower than the film forming temperature is provided in the vicinity of the substrate-side surface of the shower head.
摘要翻译：具有多个用于将均匀密度的有机金属气体供给到基板表面的喷头，并且在MOCVD的反应炉中设置多个用于以均匀密度供给氧化气体的喷射孔系统。在淋浴头的基板侧表面附近设置有用于将内部加热到高于有机金属气体的热分解点但低于成膜温度的温度的加热器。

30. 发明授权

US07062311B1 Fluorescence observing apparatus 失效
标题翻译：荧光观察装置
公开(公告)号：US07062311B1
公开(公告)日：2006-06-13
申请号：US09611229
申请日：2000-07-06
申请人： Tomonari Sendai , Katsumi Hayashi , Kazuo Hakamata , Toshiro Hayakawa , Yoji Okazaki , Kenji Matsumoto
发明人： Tomonari Sendai , Katsumi Hayashi , Kazuo Hakamata , Toshiro Hayakawa , Yoji Okazaki , Kenji Matsumoto
IPC分类号： A61B6/00
CPC分类号： G01N21/6456 , A61B5/0071 , A61B5/0084 , G01N21/645 , G01N2021/6421 , G01N2201/0612
摘要： A fluorescence observing apparatus including a light source for emitting excitation light, an excitation light irradiation section for irradiating the excitation light to a sample, and a fluorescence measurement section for measuring fluorescence emitted from the sample by the irradiation of the excitation light. In the fluorescence observing apparatus, a GaN semiconductor laser is employed as the light source.
摘要翻译：包括用于发射激发光的光源的荧光观察装置，用于将激发光照射到样品的激发光照射部分和用于通过照射激发光来测量从样品发射的荧光的荧光测量部分。在荧光观察装置中，使用GaN半导体激光器作为光源。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式