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21. 发明申请

US20090294912A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20090294912A1
公开(公告)日：2009-12-03
申请号：US12426588
申请日：2009-04-20
申请人： Hiroyuki Chibahara , Atsushi Ishii , Naoki Izumi , Masahiro Matsumoto
发明人： Hiroyuki Chibahara , Atsushi Ishii , Naoki Izumi , Masahiro Matsumoto
IPC分类号： H01L23/02 , H01L21/304
CPC分类号： H01L23/02 , H01L23/522 , H01L23/585 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.
摘要翻译：提供了难以发生由层间电介质膜的破裂引起的密封环破坏的半导体装置，以及半导体装置的制造方法。第一层压板包括具有第一机械强度的第一层间绝缘膜。第二层压体包括具有高于第一机械强度的机械强度的第二层间介电膜。第一区域包括设置在第一层压体内的第一金属层和通孔。第二区域包括设置在第二层压体内的第二金属层和通孔。当在平面图中看到时，第二区域与第一区域的至少一部分重叠，不通过通孔与第一区域耦合，并且在其与第一区域之间夹住第二层间电介质膜。

22. 发明授权

US07617723B2 Thermal type flow rate measuring apparatus having decrease in coupling capacitance between wiring portions of detection element 有权
标题翻译：热式流量测量装置，其检测元件的布线部分之间的耦合电容降低
公开(公告)号：US07617723B2
公开(公告)日：2009-11-17
申请号：US11765736
申请日：2007-06-20
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Yasuhiro Kanamaru
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Yasuhiro Kanamaru
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/6986
摘要： The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.
摘要翻译：热式流量测量装置的布线部分的耦合电容减小，以防止响应特性的下降。热式流量测量装置的检测元件包括其中形成有隔膜的由硅，陶瓷等制成的平面基板。在隔膜的表面上设置有发热电阻器作为发热元件，其被加热到与要测量的空气流的温度的预定温度差，用于检测的发热元件温度检测电阻器发热电阻器的温度和设置在发热电阻器两侧的温度检测电阻器。检测元件还包括具有与发热电阻器电连接的连接端子的布线部分和与平面基板的表面电连接的布线图案。

23. 发明申请

US20090049909A1 Hydraulic Controller 审中-公开
标题翻译：液压控制器
公开(公告)号：US20090049909A1
公开(公告)日：2009-02-26
申请号：US12191600
申请日：2008-08-14
申请人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
发明人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
IPC分类号： G01C19/00
CPC分类号： B60T8/3675 , G01C19/5719
摘要： A hydraulic controller including a cabinet, a hydraulic pipe block having a passage, a linearly driving actuator having a piston to open and close the passage in the hydraulic pipe block, a printed wiring board having a circuit for driving the linearly driving actuator, and a vibrating angular velocity sensor having two vibrators which can move in a Coriolis force detection direction orthogonal to vibration directions, wherein the vibrating angular velocity sensor is disposed on the printed wiring board in order that the vibration directions of the vibrators may be substantially parallel to a driving direction of the piston, and that the Coriolis force detection direction may be substantially orthogonal to the driving direction of the piston.
摘要翻译：一种液压控制器，包括机壳，具有通道的液压管块，具有用于打开和关闭液压管块中的通道的活塞的线性驱动致动器，具有用于驱动线性驱动致动器的电路的印刷线路板，以及具有两个振动器的振动角速度传感器，所述两个振动器能够以与振动方向正交的科里奥利力检测方向移动，其中振动角速度传感器设置在印刷线路板上，以使得振动器的振动方向可基本上平行于驱动活塞的方向，科里奥利力检测方向可以与活塞的驱动方向基本正交。

24. 发明申请

US20080113201A1 BLACK PASTE AND PLASMA DISPLAY PANEL AND METHOD FOR PREPARATION THEREOF 有权
标题翻译：黑色浆料和等离子体显示面板及其制备方法
公开(公告)号：US20080113201A1
公开(公告)日：2008-05-15
申请号：US11932208
申请日：2007-10-31
申请人： Masahiro Matsumoto , Nobuo Matsumura , Junji Mata , Yuichiro Iguchi
发明人： Masahiro Matsumoto , Nobuo Matsumura , Junji Mata , Yuichiro Iguchi
IPC分类号： B32B17/00 , B32B15/00
CPC分类号： H01J11/12 , B32B15/00 , C03C8/14 , H01J9/02 , H01J11/44 , H01J2211/444
摘要： A black paste contains an organic component and an inorganic powder containing a glass powder and a cobalt oxide. A plasma display panel having a black layer made from the black paste, and methods for fabricating the black paste, the plasma display are also provided.
摘要翻译：黑色糊状物含有有机成分和含有玻璃粉末和氧化钴的无机粉末。还提供了具有由黑色浆料制成的黑色层的等离子体显示面板和用于制造黑色浆料的方法，等离子体显示器。

25. 发明申请

US20060037390A1 Thermal type air flow meter 失效
标题翻译：热式空气流量计
公开(公告)号：US20060037390A1
公开(公告)日：2006-02-23
申请号：US11202017
申请日：2005-08-12
申请人： Hiroshi Nakano , Izumi Watanabe , Masamichi Yamada , Masahiro Matsumoto
发明人： Hiroshi Nakano , Izumi Watanabe , Masamichi Yamada , Masahiro Matsumoto
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F25/0007
摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
摘要翻译：提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。

26. 发明申请

US20050091428A1 Serial data transferring apparatus 有权
标题翻译：串行数据传输设备
公开(公告)号：US20050091428A1
公开(公告)日：2005-04-28
申请号：US10491285
申请日：2001-10-02
申请人： Masahiro Matsumoto , Fumio Murabayashi , Hiromichi Yamada , Keiji Hanzawa , Hiroyasu Sukesako
发明人： Masahiro Matsumoto , Fumio Murabayashi , Hiromichi Yamada , Keiji Hanzawa , Hiroyasu Sukesako
IPC分类号： H04L7/02 , H04L7/04 , H04L7/06 , H04L7/10 , G06F3/00
CPC分类号： H04L7/10 , H04J3/24 , H04J7/00 , H04L7/046 , H04L7/06
摘要： A master unit sends a start signal to a slave unit. When receiving the start signal from the master unit, the slave unit sends, to the master unit, a synchronization field that is a data train (pulse signal) indicative of a transfer clock with which the slave unit is able to perform transferring and receiving operations. The master unit sends, to the slave unit, command data in accordance with the transfer clock indicated by the synchronization field sent from the slave unit. In response to the command data sent from the master unit, the slave unit sends, to the master unit, response data in accordance with the transfer clock indicated by the synchronization field. Thus, in a communication system employing a serial data transferring apparatus of the present invention, the master unit establishes the synchronization for the data transfer, while the slave unit is free from a burden of establishing the synchronization for the data transfer. A serial data transferring apparatus is realized which can simplify the structure of the slave unit, cut the total cost, and reduce noise.
摘要翻译：主单元向从单元发送启动信号。当从主单元接收到起始信号时，从单元向主单元发送同步字段，该同步字段是指示从单元能够执行传送和接收操作的传送时钟的数据串（脉冲信号）。主单元根据从从单元发送的同步字段指示的传送时钟向从属单元发送命令数据。响应于从主单元发送的命令数据，从单元根据由同步字段指示的传送时钟向主单元发送响应数据。因此，在采用本发明的串行数据传送装置的通信系统中，主单元建立用于数据传送的同步，而从单元没有建立用于数据传送的同步的负担。实现了串行数据传送装置，其可以简化从单元的结构，降低总成本并降低噪声。

27. 发明授权

US06734489B2 Semiconductor element and MIM-type capacitor formed in different layers of a semiconductor device 失效
标题翻译：形成在半导体器件的不同层中的半导体元件和MIM型电容器
公开(公告)号：US06734489B2
公开(公告)日：2004-05-11
申请号：US10122387
申请日：2002-04-16
申请人： Noboru Morimoto , Kinya Goto , Masahiro Matsumoto
发明人： Noboru Morimoto , Kinya Goto , Masahiro Matsumoto
IPC分类号： H01L2708
CPC分类号： H01L23/5223 , H01L21/76807 , H01L21/76831 , H01L21/76838 , H01L28/55 , H01L2924/0002 , H01L2924/00
摘要： A second-level wire is formed by a dual damascene process in a insulating film. In an upper surface of the first insulating film a metal film is formed and serves as a first electrode of an MIM-type capacitor. A second insulating films has a structure in which a plurality of insulating films are layered on a second interconnection layer, in this order. In a first insulating film of the plurality of insulating films, a second electrode of the MIM-type capacitor is formed. The second electrode has a first metal film formed on a second insulating film of the plurality of the insulating films and a second metal film is formed on the first metal film. A portion of the second insulating film which is sandwiched between the first electrode and the second electrode of the MIM-type capacitor serves as a capacitor dielectric film of the MIM-type capacitor. In the second insulating film, a third-level wire is formed Thus, a semiconductor device and a method of manufacturing the same are provided such that the MIM-type capacitor is formed together with metal wires with no additional complicated step.
摘要翻译：二级线由绝缘膜中的双镶嵌工艺形成。在第一绝缘膜的上表面形成有金属膜，作为MIM型电容器的第一电极。第二绝缘膜具有这样的结构，其中多个绝缘膜依次层叠在第二互连层上。在多个绝缘膜的第一绝缘膜中形成MIM型电容器的第二电极。第二电极具有形成在多个绝缘膜的第二绝缘膜上的第一金属膜，并且在第一金属膜上形成第二金属膜。夹在MIM型电容器的第一电极和第二电极之间的第二绝缘膜的一部分用作MIM型电容器的电容器电介质膜。在第二绝缘膜中，形成第三级线。因此，提供半导体器件及其制造方法，使得MIM型电容器与金属线一起形成，而不需要额外的复杂步骤。

28. 发明授权

US06188340B1 Sensor adjusting circuit 有权
标题翻译：传感器调节电路
公开(公告)号：US06188340B1
公开(公告)日：2001-02-13
申请号：US09167984
申请日：1998-10-08
申请人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
发明人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
IPC分类号： H03M100
CPC分类号： G01D3/022 , G01D3/02
摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.
摘要翻译：提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

29. 发明授权

US06167761A Capacitance type pressure sensor with capacitive elements actuated by a diaphragm 失效
标题翻译：电容型压力传感器，其电容元件由隔膜驱动
公开(公告)号：US06167761A
公开(公告)日：2001-01-02
申请号：US09103612
申请日：1998-06-24
申请人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
发明人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
IPC分类号： G01L912
CPC分类号： G01L9/0073
摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.
摘要翻译：在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变薄膜和可动电极。固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

30. 发明授权

US5506454A System and method for diagnosing characteristics of acceleration sensor 失效
标题翻译：用于诊断加速度传感器特性的系统和方法
公开(公告)号：US5506454A
公开(公告)日：1996-04-09
申请号：US059069
申请日：1993-05-10
申请人： Keiji Hanzawa , Tetsuo Matsukura , Hirokazu Fujita , Masayoshi Suzuki , Masahiro Matsumoto
发明人： Keiji Hanzawa , Tetsuo Matsukura , Hirokazu Fujita , Masayoshi Suzuki , Masahiro Matsumoto
IPC分类号： B60R21/01 , G01P15/04 , G01P15/125 , G01P21/00 , G01R31/00 , B60R21/08
CPC分类号： B60R21/0173 , B60R21/01 , G01P15/04 , G01P15/125 , G01P21/00 , G01R31/007 , G01P2015/0828
摘要： An apparatus for diagnosing the characteristic of an acceleration sensor and a method for diagnosis thereof are disclosed. The acceleration sensor includes a movable electrode (or mass part) displaced in accordance with an acceleration and a fixed electrode disposed opposite to the movable electrode. In a diagnosis mode, a signal for diagnosis is applied to the fixed electrode so that an electrostatic force as a force corresponding to a predetermined acceleration is generated between the fixed electrode and the movable electrode. In the case where the acceleration sensor is sound, the movable electrode or mass part is normally displaced. A failure of the acceleration sensor, the deterioration thereof in performance, a change in characteristic thereof caused from the lapse of time, or the like is self-diagnosed by detecting a change in capacitance between the movable electrode and the fixed electrode upon generation of the diagnosis signal. The force corresponding to the predetermined acceleration may be an electromagnetic force or a mechanical oscillation based on a piezoelectric element.
摘要翻译：公开了一种用于诊断加速度传感器的特性的装置及其诊断方法。加速度传感器包括根据加速度移位的可移动电极（或质量部分）和与可动电极相对设置的固定电极。在诊断模式中，用于诊断的信号被施加到固定电极，使得在固定电极和可动电极之间产生作为与预定加速度相对应的力的静电力。在加速度传感器是声音的情况下，可移动电极或质量部分通常位移。通过检测可动电极和固定电极之间的电容变化，可以自诊断加速度传感器的故障，其性能的劣化，由于时间的流失引起的特性变化等诊断信号。对应于预定加速度的力可以是基于压电元件的电磁力或机械振荡。

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