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1. 发明授权

US08203102B2 Thermal type flow sensor 有权
标题翻译：热式流量传感器
公开(公告)号：US08203102B2
公开(公告)日：2012-06-19
申请号：US12724399
申请日：2010-03-15
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
IPC分类号： H05B1/01
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译：热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流变异。

2. 发明授权

US07631555B2 Thermal flowmeter for measuring a flow rate of fluid 有权
标题翻译：用于测量流体流量的热流量计
公开(公告)号：US07631555B2
公开(公告)日：2009-12-15
申请号：US10580112
申请日：2003-11-20
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6845
摘要： A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter includes a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and a heating temperature control disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.
摘要翻译：具有优异的温度特性和改进的测量精度的热空气流量计。热空气流量计包括设置在空气流量计的壳体中的温度传感器，用于使用温度传感器校正来自测量元件的流量检测电压的计算单元，以及设置在温度控制电路中的加热温度控制，用于执行加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差，并且可以实现具有优异的测量精度的热空气流量计。

3. 发明申请

US20060037390A1 Thermal type air flow meter 失效
标题翻译：热式空气流量计
公开(公告)号：US20060037390A1
公开(公告)日：2006-02-23
申请号：US11202017
申请日：2005-08-12
申请人： Hiroshi Nakano , Izumi Watanabe , Masamichi Yamada , Masahiro Matsumoto
发明人： Hiroshi Nakano , Izumi Watanabe , Masamichi Yamada , Masahiro Matsumoto
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F25/0007
摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
摘要翻译：提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。

4. 发明授权

US08779337B2 Thermal type flow sensor having bridge circuit and adjustment circuit 有权
标题翻译：具有桥式电路和调节电路的热式流量传感器
公开(公告)号：US08779337B2
公开(公告)日：2014-07-15
申请号：US13542426
申请日：2012-07-05
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
IPC分类号： B23K10/00
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译：热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流变异。

5. 发明授权

US08217320B2 Thermal type flow sensor 有权
公开(公告)号：US08217320B2
公开(公告)日：2012-07-10
申请号：US11627111
申请日：2007-01-25
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
IPC分类号： H05B1/02
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.

6. 发明申请

US20100170335A1 THERMAL TYPE FLOW SENSOR 有权
标题翻译：热流型传感器
公开(公告)号：US20100170335A1
公开(公告)日：2010-07-08
申请号：US12724399
申请日：2010-03-15
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译：热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流变异。

7. 发明授权

US07555944B2 Physical quantity sensor 有权
标题翻译：物理量传感器
公开(公告)号：US07555944B2
公开(公告)日：2009-07-07
申请号：US11353937
申请日：2006-02-15
申请人： Hiroshi Nakano , Masahiro Matsumoto , Masamichi Yamada , Keiichi Nakada , Izumi Watanabe
发明人： Hiroshi Nakano , Masahiro Matsumoto , Masamichi Yamada , Keiichi Nakada , Izumi Watanabe
IPC分类号： G01F1/68
CPC分类号： G01C9/00 , G01F1/6845 , G01F1/69 , G01P15/008
摘要： A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors of the sensor has a horizontal resistance component Rl and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient πl of the horizontal resistance component Rl, which is provided when the stress imposed on the substrate is applied to the horizontal resistance component Rl, to a piezoresistance coefficient πt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is πl:πt=−n:1 (n:integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component Rl is set substantially equal to the ratio of the piezoresistance coefficient πl to πt.
摘要翻译：一种高精度的物理量传感器，可以确保强度的可靠性，并减少由应力引起的阻力变化。假设相对于在预定方向（例如，施加最大应力的方向）施加在基板上的应力σ，作为水平方向的平行方向和垂直方向的垂直方向，每个电阻器传感器具有水平电阻分量R1和垂直电阻分量Rt。当将施加在基板上的应力所提供的水平电阻分量R1的压阻系数pil与施加到水平电阻分量R1的比率相加到垂直电阻分量Rt的压阻系数凹坑时，应力被施加到垂直电阻分量Rt，即pil：pit = -n：1（n：整数），垂直电阻分量Rt与水平电阻分量R1的电阻值比基本上等于压阻系数pil到坑。

8. 发明申请

US20060070436A1 Heating resistance flow rate measuring apparatus 失效
标题翻译：耐热流量测量装置
公开(公告)号：US20060070436A1
公开(公告)日：2006-04-06
申请号：US11283778
申请日：2005-11-22
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , F02D41/187 , G01F1/692 , G01F1/696 , G01F1/699
摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
摘要翻译：一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置设置检测电阻器。

9. 发明授权

US07010971B2 Heating resistor type flow-measuring device having a heating resistor and a thermoresistance, whose resistance value varies in response to the ambient temperature 有权
标题翻译：具有加热电阻器和耐热电阻的加热电阻器型流量测量装置，其电阻值响应于环境温度而变化
公开(公告)号：US07010971B2
公开(公告)日：2006-03-14
申请号：US10921206
申请日：2004-08-19
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
IPC分类号： G01F1/68
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/699 , G01K7/20
摘要： A heating resistor type flow-measuring device is capable of adjusting heating temperature of a heating resistor according to the ambient temperature as well as making the initial adjustment. A heating resistor, a thermoresistance, a group of the resistors, and an amplifier constitute a bridge circuit, and leading terminals of the group of resistors are connected to one of input terminals of an amplifier for amplifying an error voltage through MOS transistors. The heating temperature of the heating resistor can be changed by selecting one of the MOS transistors and turning it on.
摘要翻译：加热电阻式流量测量装置能够根据环境温度调节加热电阻器的加热温度，并进行初始调整。加热电阻器，热电阻器，一组电阻器和放大器构成桥式电路，并且该组电阻器的引线端子连接到放大器的一个输入端子，用于通过MOS晶体管放大误差电压。可以通过选择一个MOS晶体管并将其加热来改变加热电阻器的加热温度。

10. 发明授权

US07721599B2 Reduced resistance thermal flow measurement device 失效
标题翻译：降低电阻热流量测量装置
公开(公告)号：US07721599B2
公开(公告)日：2010-05-25
申请号：US11814308
申请日：2006-02-20
申请人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
发明人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
IPC分类号： G01F1/68
CPC分类号： G01F15/006 , G01F1/6845 , G01F1/692
摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.
摘要翻译：传统的热流测量装置在恶劣环境中缺乏汽车的考虑。根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。

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