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    • 30. 发明申请
    • Laser-scanning examination apparatus
    • 激光扫描检查仪
    • US20050187441A1
    • 2005-08-25
    • US11035075
    • 2005-01-14
    • Kenji KawasakiHiroshi SasakiKenichi KoyamaAtsuhiro TsuchiyaYoshihiro Kawano
    • Kenji KawasakiHiroshi SasakiKenichi KoyamaAtsuhiro TsuchiyaYoshihiro Kawano
    • A61B5/00G01N21/64G03C5/16
    • G01N21/6458
    • A laser-scanning examination apparatus includes a laser light source; an optical fiber through which laser light generated in the laser light source is transmitted; a scan head including a casing for housing a laser scanning unit that scans the laser light transmitted by the optical fiber on a specimen, an objective unit for imaging the laser light scanned by the laser scanning unit onto the specimen; an optical detector for detecting returning light that returns from the specimen to the interior of the casing via the objective unit; a stage for mounting the specimen; and an arm that supports the scan head so that the position and orientation of the objective unit with respect to the stage can be adjusted. The optical detector is provided on an outer surface of the casing except for the surface located in the opposite direction from the direction in which the arm extends from the casing. The laser-scanning examination apparatus has a compact head unit and allows improved ease-of-use by securing a large space around the head unit.
    • 激光扫描检查装置包括激光光源; 在激光光源中产生的激光透过的光纤; 扫描头,包括用于容纳将由所述光纤透射的激光扫描在检体上的激光扫描单元的外壳,用于将由所述激光扫描单元扫描的激光成像到所述样本上的目标单元; 光检测器,用于检测经由所述物镜单元从所述样本返回到所述壳体内部的返回光; 安装样品的阶段; 以及支撑扫描头的臂,使得可以调节物镜单元相对于平台的位置和取向。 光检测器设置在壳体的外表面上,除了位于与臂从壳体延伸的方向相反的方向上的表面之外。 激光扫描检查装置具有紧凑的头部单元,并且通过确保头部单元周围的大空间来允许改进的易于使用。