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    • 21. 发明专利
    • MANUFACTURE OF FLEXIBLE PRINTED CIRCUIT BOARD
    • JPH01214096A
    • 1989-08-28
    • JP3904688
    • 1988-02-22
    • FURUKAWA ELECTRIC CO LTD
    • KUMAZAWA KINYASEKI OSAMUYAMANAKA NOBUMITSUKOMATSU MASAYA
    • H05K3/38
    • PURPOSE:To obtain a board with excellent contact and having excellent dimensional stability by processing the surface of a film made of liquid crystal polymer or a sheet board using low temperature plasma of oxidizing gas under a specific pressure, and then by forming a conductive layer on the surface thereof by physical deposition. CONSTITUTION:One or both surfaces of a film made of liquid crystal polymer or a sheet board 1 is processed by low temperature plasma of oxidizing gas in pressures of 10 Torr-10Torr. Then, a conductive layer 2 is formed on the processed surface by physical deposition. For example, liquid crystal polymer film 1 (polyester copolymer containing parahydroxy benzoic acid) of 50mum thick is set in a sputtering device having a plasma processing mechanism. After the device is discharged fully, oxygen gas is introduced to process by plasma for ten seconds at a gas pressure of 3X10 Torr and at a high-frequency power of 100W. After this, argon gas is introduced inside the device. Copper is sputtered for 120sec. at a gas pressure of 3X10 Torr and a high-frequency power of 100W, forming the conductive layer 2 of 1mum on the film 1.
    • 24. 发明专利
    • METHOD FOR ALLOWING THIN METALLIC FILM TO ADHERE TO PLASTIC FILM
    • JPS6431958A
    • 1989-02-02
    • JP18670087
    • 1987-07-28
    • FURUKAWA ELECTRIC CO LTD
    • KOMATSU MASAYAKUMAZAWA KINYAYAMANAKA NOBUMITSU
    • C23C14/02C23C14/20
    • PURPOSE:To allow a thin metallic film excellent in adhesive strength to adhere to a plastic film, by subjecting a plastic film to low-temp. plasma treatment of inert gas, forming a thin metallic film on the above by a physical vapor deposition method, and successively exposing the above film to a gaseous atmosphere having limited oxygen content. CONSTITUTION:A plastic film 11 is set in a vacuum tank 1 and the inside of the tank is evacuated. Ar is introduced from an exhaust nozzle 13 to regulate gas pressure to about 3.0X10 Torr and an A.C. voltage of about 1000V is applied to an electrode 12 to produce plasma, and then, plasma treatment is carried out while controlling the winding speed of the film 11. Subsequently, the inside of the tank 1 is evacuated and O2 gas is introduced until a pressure of about 1.0Torr is reached, and then, while being rewound, the film 11 is brought into contact with the atmosphere containing >=1% O2. The inside of the vacuum tank 1 is evacuated again and Ar is introduced, and, in a sputter chamber 2 equipped with a cathode to which a Cu target 8 is attached and an anode 10, a thin Cu film is formed on the film 11 by sputtering. By this method, the thin metallic film excellent in adhesive strength can be allowed to adhere to the plastic film 11.
    • 30. 发明专利
    • HIGH-DENSITY FLEXIBLE PRINTED CIRCUIT BOARD
    • JPH02109390A
    • 1990-04-23
    • JP26058788
    • 1988-10-18
    • FURUKAWA ELECTRIC CO LTD
    • KUMAZAWA KINYASEKI OSAMU
    • H05K1/02H05K3/24
    • PURPOSE:To obtain high density of circuits, freedom in design and shortening of time without deterioration in heat resistance and stability in sizes by forming a circuit pattern on a board so that a microcircuit part is very thin in comparison with a part for a large current without providing a bonding agent. CONSTITUTION:A conductor layer 2 comprising copper and the like having a thickness of 5mum or less is formed on one surface or on both surfaces of a film board 1 comprising polyimide, polyester and the like without providing a bonding agent and the like by a sputtering method and the like. Then the surface other than a large-current circuit pattern is covered with plating resist. A conductor layer 3 having a thickness of 18mum or more is formed by a electrolytic copper plating method and the like. Since the bonding agent is not used, causes for deteriorating heat resistance and stability in sizes can be decreased. Since the conductor layer of a microcircuit is very thin, the pitch of the circuit patterns can be made 200mum or less, and high density can be provided. Therefore, freedom in design for wiring of circuit at mounting positions and the like can be increased, and the design time can be shortened.