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    • 24. 发明授权
    • Sensor
    • 传感器
    • US4928513A
    • 1990-05-29
    • US78741
    • 1987-07-28
    • Takashi SugiharaKazutaka UdaHiroki TabuchiYasuhiko InamiMasaya HijikigawaShoei Kataoka
    • Takashi SugiharaKazutaka UdaHiroki TabuchiYasuhiko InamiMasaya HijikigawaShoei Kataoka
    • G01N27/12G01N33/00
    • G01N27/12G01N33/0031H01L2924/0002
    • A sensor having a pair of sensor units, one of which is a detecting sensor unit and the other of which is a reference sensor unit, wherein each of the units comprises a substrate with a hollow portion, a thin insulating layer with a bridge, cantilever or diaphragm shape disposed on the substrate, a sensitive film disposed on the bridge, cantilever or diaphragm portion of the thin insulating layer, and a pair of electrodes being in contact with the sensitive film, the sensitive film section of the detecting sensor unit being exposed to an atmosphere to be measured so that the electrical resistance of the sensitive film changes with a variation in the physical quantity of the atmosphere to be detected, and the sensitive film section of the reference sensor unit being sealed within a shielding container so that the electrical resistance of the sensitive film is not influenced by a variation in the physical quantity of the atmosphere outside of the container, whereby the absolute physical quantity of the atmosphere to be detected is determined by the output power of the sensor based on a difference between the electrical resistance of the detecting sensor unit and the electrical resistance of the reference sensor unit.
    • 一种传感器,具有一对传感器单元,其中一个是检测传感器单元,另一个是参考传感器单元,其中每个单元包括具有中空部分的基板,具有桥的薄绝缘层,悬臂 或隔膜形状,设置在薄壁绝缘层的桥,悬臂或隔膜部分上的敏感膜和与敏感膜接触的一对电极,检测传感器单元的敏感膜部分露出 使得测量的气氛使得敏感膜的电阻随着要检测的气氛的物理量的变化而变化,并且参考传感器单元的敏感膜部分被密封在屏蔽容器内,使得电气 敏感膜的电阻不受容器外部大气物理量的变化的影响,由此绝对物理 基于检测传感器单元的电阻与基准传感器单元的电阻之差,由传感器的输出功率确定要检测的气氛量。