专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

21. 发明授权

US4785545A Means for simultaneously connecting a plurality of switch-type probe heads to the measurement arm of a coordinate-measuring machine 失效
标题翻译：用于将多个开关型探头同时连接到坐标测量机的测量臂的装置
公开(公告)号：US4785545A
公开(公告)日：1988-11-22
申请号：US105825
申请日：1987-10-08
申请人： Karl-Eugen Aubele
发明人： Karl-Eugen Aubele
IPC分类号： G01B21/00 , G01B7/008 , G01B7/012 , G01B7/00
CPC分类号： G01B7/008 , G01B7/012
摘要： Plural switch-type probe heads used in a coordinate-measuring machine are electrically connected in parallel, and each probe head contains a resistor (106) which is series-connected to its switch contact (103/110). In addition, each probe head has a measurement resistor (108) which is independent of switch contacts, and the measurement resistors of all probe heads are also connected in parallel. The operative work-contacting switch signal is produced from a comparison of the currents flowing through the measurement resistors (108) and the series resistors (106).
摘要翻译：在坐标测量机中使用的多个开关型探头并联电连接，并且每个探针头包含串联连接到其开关触点（103/110）的电阻（106）。此外，每个探头具有独立于开关触点的测量电阻器（108），并且所有探针头的测量电阻器也并联连接。通过比较流过测量电阻（108）和串联电阻（106）的电流产生工作接触开关信号。

22. 发明授权

US4758720A Method and means for measuring guidance errors at one or more points along the length of a displacement-measuring system 失效
标题翻译：用于在位移测量系统的长度的一个或多个点处测量引导误差的方法和装置
公开(公告)号：US4758720A
公开(公告)日：1988-07-19
申请号：US932283
申请日：1986-11-19
申请人： Karl-Eugen Aubele , Helmut Lenhof , Peter Vogt
发明人： Karl-Eugen Aubele , Helmut Lenhof , Peter Vogt
IPC分类号： G01B21/02 , G01B5/00 , G01D5/36 , H01J40/14
CPC分类号： G01D5/36 , G01B5/0009
摘要： In order to initiate the operation of an incremental-correction measurement system, which measures such guidance errors as instantaneous lateral offset of a movable machine part with respect to its guidance direction (Y), a reference mark is provided by two cylindrical lenses (4, 5) which are arranged at an angle to each other and to the guidance direction. Since the distance intercepts for Y-direction scanning of and between the two cylindrical lenses is dependent on the instantaneous lateral offset (.DELTA.X) of the guided part, it is possible to determine the absolute offset values (.DELTA.X.sub.1, .DELTA.X.sub.2) of two spaced incremental-correction measurement systems (K1, K2), using pairs of pulses (A.sub.1/2, B.sub.1/2) generated by two signal transmitters (KNIP1, KNIP2) upon their scanning traverse of the respective cylindrical lenses in the course of a single calibration run.
摘要翻译：为了启动增量校正测量系统的操作，该增量校正测量系统测量相对于其引导方向（Y）的可移动机器部件的瞬时横向偏移的引导误差，参考标记由两个柱面透镜（4， 5），它们彼此成角度并且与引导方向相对。由于两个柱面透镜之间的Y方向扫描的距离截距取决于被引导部分的瞬时横向偏移（DELTA X），因此可以确定两个柱面透镜的绝对偏移值（DELTA X1，DELTA X2）使用由两个信号发射器（KNIP1，KNIP2）产生的脉冲对（A1 / 2，B1 / 2）在一个单独的过程中扫描相应的柱面透镜时进行扫描的间隔增量校正测量系统（K1，K2）校准运行。

23. 发明申请

US20110235005A1 POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUMINATION SYSTEM 有权
标题翻译：投影照明系统的光学布置定位方法
公开(公告)号：US20110235005A1
公开(公告)日：2011-09-29
申请号：US13050155
申请日：2011-03-17
申请人： Karl-Eugen Aubele , Erich Merz , Thorsten Rassel
发明人： Karl-Eugen Aubele , Erich Merz , Thorsten Rassel
IPC分类号： G03B21/14
CPC分类号： G02B27/62 , G03F7/70258 , G03F7/70525
摘要： The present disclosure relates to a method for the production and/or adjustment of an optical arrangement of a projection illumination system, in which at least one actuator is used to set the position of at least one optical element to be manipulated by moving the optical element incrementally with a specific increment size. The increment size of the movement increments is set as a function of the distance of the optical element from the desired position, with the distance being represented by a distance value. If the distance value is above a first threshold value, a substantially constant increment size is set, while the specific increment size decreases as the distance from the desired position decreases if the distance value is below the first threshold value. Alternatively or additionally, a pre-specified deviation from the specific increment size and/or from a pre-specified increment size change rate results in a warning signal and/or ceasing of the movement.
摘要翻译：本公开涉及一种用于生产和/或调整投影照明系统的光学装置的方法，其中至少一个致动器用于通过移动光学元件来设置要操纵的至少一个光学元件的位置递增地以特定的增量大小。移动增量的增量大小被设置为光学元件距离期望位置的距离的函数，距离由距离值表示。如果距离值高于第一阈值，则设定基本上恒定的增量大小，而如果距离值低于第一阈值，则特定增量大小随着与期望位置的距离而减小。或者或另外，与特定增量尺寸和/或预先规定的增量尺寸变化率的预定偏差导致警告信号和/或停止运动。

24. 发明授权

US07710542B2 Imaging device in a projection exposure machine 失效
标题翻译：投影曝光设备中的成像装置
公开(公告)号：US07710542B2
公开(公告)日：2010-05-04
申请号：US11936768
申请日：2007-11-07
申请人： Wolfgang Hummel , Jürgen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schöngart , Markus Neumaier , Bärbel Trossbach , Ulrich Weber , Michael Mühlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Wolfgang Hummel , Jürgen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schöngart , Markus Neumaier , Bärbel Trossbach , Ulrich Weber , Michael Mühlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
IPC分类号： G03B27/42 , G03B27/52
CPC分类号： G03F7/70258 , G03F7/70825
摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.
摘要翻译：用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

25. 发明申请

US20090271997A1 METHOD AND APPARATUS FOR DETERMINING SPATIAL COORDINATES AT A MULTIPLICITY OF MEASUREMENT POINTS 有权
标题翻译：用于确定测量点多项式空间坐标的方法和装置
公开(公告)号：US20090271997A1
公开(公告)日：2009-11-05
申请号：US12465705
申请日：2009-05-14
申请人： Otto RUCK , Eugen AUBELE , Guenter GRUPP
发明人： Otto RUCK , Eugen AUBELE , Guenter GRUPP
IPC分类号： G01B5/012
CPC分类号： G01B21/045 , G01B5/008
摘要： In order to determine spatial coordinates of a multiplicity of measurement points along a contour of a measurement object, a probe head is provided with a probe element that is movably supported on the probe head. During movement of the probe head along the contour, position measuring values of the probe head and deflections of the probe element relative to the probe head are determined. Spatial coordinates for the measurement points along the contour are determined from the position measuring values and deflections. The probe element is kept in contact with the contour during movement of the probe head by using an actuator to produce a defined contact force. The contact force is set as a function of a differential acceleration of the probe element relative to the probe head.
摘要翻译：为了确定沿着测量对象的轮廓的多个测量点的空间坐标，探针头设置有可移动地支撑在探头上的探针元件。在探针沿着轮廓移动期间，确定探针头的位置测量值和探针元件相对于探针头的偏转。沿着轮廓的测量点的空间坐标由位置测量值和偏转确定。探针元件通过使用致动器在探针头移动期间保持与轮廓接触以产生限定的接触力。接触力被设定为探头元件相对于探头的差速加速度的函数。

26. 发明申请

US20090141258A1 Imaging Device in a Projection Exposure Machine 审中-公开
标题翻译：投影曝光机中的成像装置
公开(公告)号：US20090141258A1
公开(公告)日：2009-06-04
申请号：US12363065
申请日：2009-01-30
申请人： Stephan Back , Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Schwaer , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Stephan Back , Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Schwaer , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
IPC分类号： G03B27/54 , G02B15/14
CPC分类号： G03F7/70258 , G03F7/70825
摘要： An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.
摘要翻译：用于微光刻的投影曝光机中的成像装置包括至少一个光学元件和至少一个操纵器，用于操纵光学元件的位置的线性驱动器。线性驱动器具有至少一个移动元件，移动元件具有剪切部分和提升部分。剪切部分被布置成移动光学元件，并且提升部分被布置成移动剪切部分。线性驱动器具有支撑元件，该支撑元件在通过提升部分移动剪切部分的同时与光学元件接触并防止其移动。

27. 发明申请

US20080080070A1 METHOD AND A DEVICE FOR POSITIONING AN ELEMENT IN AN OPTICAL SYSTEM 有权
标题翻译：用于在光学系统中定位元件的方法和装置
公开(公告)号：US20080080070A1
公开(公告)日：2008-04-03
申请号：US11861851
申请日：2007-09-26
申请人： Karl-Eugen Aubele
发明人： Karl-Eugen Aubele
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G03F7/70258
摘要： The disclosure generally relates to methods, devices, systems and components configured to position an element in a lens assembly, such as a lens assembly for microlithography, in which the element to be positioned is moved from an actual position to a target position via at least one actuator, and in which at least the positioning movement of the actuator is superimposed with an oscillating movement.
摘要翻译：本公开总体上涉及被配置为将元件定位在透镜组件中的方法，装置，系统和部件，例如用于微光刻的透镜组件，其中要定位的元件至少经由至少一个实际位置移动到目标位置一个致动器，并且其中致动器的至少定位运动以振荡运动叠加。

28. 发明授权

US06272760B1 Damping device for a coordinate measuring equipment 失效
标题翻译：用于坐标测量设备的阻尼装置
公开(公告)号：US06272760B1
公开(公告)日：2001-08-14
申请号：US09120258
申请日：1998-07-21
申请人： Wolfgang Wiedmann , Carsten Würfel , Eugen Aubele
发明人： Wolfgang Wiedmann , Carsten Würfel , Eugen Aubele
IPC分类号： G01B5004
CPC分类号： G01B21/04 , G01B5/008 , G01D11/10
摘要： A damping device for vibration damping of components of a coordinate measuring equipment has a damping component which is frictionally connected to the component to be damped. The characteristic frequency of the damping component deviates from the characteristic frequency of the component to be damped.
摘要翻译：用于坐标测量设备的部件的减振的阻尼装置具有与要被阻尼的部件摩擦连接的阻尼部件。阻尼部件的特征频率偏离要被阻尼的部件的特征频率。

29. 发明授权

US09207059B2 Operation of a coordinate measuring machine 有权
标题翻译：坐标测量机的操作
公开(公告)号：US09207059B2
公开(公告)日：2015-12-08
申请号：US13642597
申请日：2011-04-18
申请人： Henning Schon , Jochen Burger , Guenter Grupp , Otto Ruck , Eugen Aubele , Ralf Bernhardt
发明人： Henning Schon , Jochen Burger , Guenter Grupp , Otto Ruck , Eugen Aubele , Ralf Bernhardt
IPC分类号： G06F19/00 , G01B5/008 , G01B21/04
CPC分类号： G01B5/008 , G01B21/047
摘要： A method for operating a coordinate measuring machine or a machine tool. A movement of a machining part is controlled in such a way that, during the movement of the machine part, a predetermined maximum acceleration and/or a predetermined maximum jerk is not exceeded. The maximum acceleration and/or the maximum jerk is varied depending on the position of the machine part and/or depending on the alignment of the machine part.
摘要翻译：一种用于操作坐标测量机或机床的方法。控制加工部件的移动，使得在机器部件的运动期间，不超过预定的最大加速度和/或预定的最大加加速度。最大加速度和/或最大加加速度根据机器部件的位置和/或根据机器部件的对准而变化。

30. 发明授权

US08810934B2 Positioning method for an optical arrangement of a projection illumination system 有权
标题翻译：投影照明系统的光学布置的定位方法
公开(公告)号：US08810934B2
公开(公告)日：2014-08-19
申请号：US13050155
申请日：2011-03-17
申请人： Karl-Eugen Aubele , Erich Merz , Thorsten Rassel
发明人： Karl-Eugen Aubele , Erich Merz , Thorsten Rassel
IPC分类号： G02B7/02 , G03B27/54 , G03B27/32
CPC分类号： G02B27/62 , G03F7/70258 , G03F7/70525
摘要： The present disclosure relates to a method for the production and/or adjustment of an optical arrangement of a projection illumination system, in which at least one actuator is used to set the position of at least one optical element to be manipulated by moving the optical element incrementally with a specific increment size. The increment size of the movement increments is set as a function of the distance of the optical element from the desired position, with the distance being represented by a distance value. If the distance value is above a first threshold value, a substantially constant increment size is set, while the specific increment size decreases as the distance from the desired position decreases if the distance value is below the first threshold value. Alternatively or additionally, a pre-specified deviation from the specific increment size and/or from a pre-specified increment size change rate results in a warning signal and/or ceasing of the movement.
摘要翻译：本公开涉及一种用于生产和/或调整投影照明系统的光学装置的方法，其中至少一个致动器用于通过移动光学元件来设置要操纵的至少一个光学元件的位置递增地以特定的增量大小。移动增量的增量大小被设置为光学元件距离期望位置的距离的函数，距离由距离值表示。如果距离值高于第一阈值，则设定基本上恒定的增量大小，而如果距离值低于第一阈值，则特定增量大小随着与期望位置的距离而减小。或者或另外，与特定增量尺寸和/或预先规定的增量尺寸变化率的预定偏差导致警告信号和/或停止运动。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式