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    • 1. 发明授权
    • Method and means for measuring guidance errors at one or more points
along the length of a displacement-measuring system
    • 用于在位移测量系统的长度的一个或多个点处测量引导误差的方法和装置
    • US4758720A
    • 1988-07-19
    • US932283
    • 1986-11-19
    • Karl-Eugen AubeleHelmut LenhofPeter Vogt
    • Karl-Eugen AubeleHelmut LenhofPeter Vogt
    • G01B21/02G01B5/00G01D5/36H01J40/14
    • G01D5/36G01B5/0009
    • In order to initiate the operation of an incremental-correction measurement system, which measures such guidance errors as instantaneous lateral offset of a movable machine part with respect to its guidance direction (Y), a reference mark is provided by two cylindrical lenses (4, 5) which are arranged at an angle to each other and to the guidance direction. Since the distance intercepts for Y-direction scanning of and between the two cylindrical lenses is dependent on the instantaneous lateral offset (.DELTA.X) of the guided part, it is possible to determine the absolute offset values (.DELTA.X.sub.1, .DELTA.X.sub.2) of two spaced incremental-correction measurement systems (K1, K2), using pairs of pulses (A.sub.1/2, B.sub.1/2) generated by two signal transmitters (KNIP1, KNIP2) upon their scanning traverse of the respective cylindrical lenses in the course of a single calibration run.
    • 为了启动增量校正测量系统的操作,该增量校正测量系统测量相对于其引导方向(Y)的可移动机器部件的瞬时横向偏移的引导误差,参考标记由两个柱面透镜(4, 5),它们彼此成角度并且与引导方向相对。 由于两个柱面透镜之间的Y方向扫描的距离截距取决于被引导部分的瞬时横向偏移(DELTA X),因此可以确定两个柱面透镜的绝对偏移值(DELTA X1,DELTA X2) 使用由两个信号发射器(KNIP1,KNIP2)产生的脉冲对(A1 / 2,B1 / 2)在一个单独的过程中扫描相应的柱面透镜时进行扫描的间隔增量校正测量系统(K1,K2) 校准运行。