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    • 21. 发明授权
    • Method of positioning catalyst nanoparticle and nanowire-based device employing same
    • 使用其的催化剂纳米颗粒和基于纳米线的装置的定位方法
    • US08268720B2
    • 2012-09-18
    • US11742310
    • 2007-04-30
    • Theodore I. KaminsZhiyong LiDuncan R. Stewart
    • Theodore I. KaminsZhiyong LiDuncan R. Stewart
    • H01L21/4763
    • H01L29/0665B81B2201/0271B81C1/00142B82Y10/00B82Y30/00H01L23/53276H01L29/0673H01L29/0676H01L2221/1094H01L2924/0002H01L2924/00
    • A method of positioning a catalyst nanoparticle that facilitates nanowire growth for nanowire-based device fabrication employs a structure having a vertical sidewall formed on a substrate. The methods include forming the structure, forming a targeted region in a surface of either the structure or the substrate, and forming a catalyst nanoparticle in the targeted region using one of a variety of techniques. The techniques control the position of the catalyst nanoparticle for subsequent nanowire growth. A resonant sensor system includes a nanowire-based resonant sensor and means for accessing the nanowire. The sensor includes an electrode and a nanowire resonator. The electrode is electrically isolated from the substrate. One or more of the substrate is electrically conductive, the nanowire resonator is electrically conductive, and the sensor further comprises another electrode. The nanowire resonator responds to an environmental change by displaying a change in oscillatory behavior.
    • 定位促进用于纳米线的器件制造的纳米线生长的催化剂纳米颗粒的方法采用具有形成在衬底上的垂直侧壁的结构。 所述方法包括形成结构,在结构或基底的表面中形成目标区域,并使用各种技术之一在目标区域中形成催化剂纳米颗粒。 该技术控制催化剂纳米颗粒在随后的纳米线生长中的位置。 谐振传感器系统包括基于纳米线的谐振传感器和用于访问纳米线的装置。 传感器包括电极和纳米线谐振器。 电极与衬底电隔离。 衬底中的一个或多个是导电的,纳米线谐振器是导电的,并且传感器还包括另一个电极。 纳米线谐振器通过显示振荡行为的变化来响应环境变化。