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21. 发明授权

US06936492B2 Single proof mass, 3 axis MEMS transducer 失效
标题翻译：单轴质量，3轴MEMS换能器
公开(公告)号：US06936492B2
公开(公告)日：2005-08-30
申请号：US11009109
申请日：2004-12-10
申请人： Andrew C. McNeil , Gary Li , Daniel N. Koury, Jr.
发明人： Andrew C. McNeil , Gary Li , Daniel N. Koury, Jr.
IPC分类号： G01P15/125 , G01P15/18 , H01G5/18
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/082 , G01P2015/0831
摘要： A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
摘要翻译：本文提供了一种传感器，其包括不平衡证明块（51），并且适于在至少两个相互正交的方向上感测加速度。证明物质（51）具有不等质量的第一（65）和第二（67）相对的侧面。

22. 发明授权

US06845670B1 Single proof mass, 3 axis MEMS transducer 有权
标题翻译：单轴质量，3轴MEMS换能器
公开(公告)号：US06845670B1
公开(公告)日：2005-01-25
申请号：US10615328
申请日：2003-07-08
申请人： Andrew C. McNeil , Gary Li , Daniel N. Koury, Jr.
发明人： Andrew C. McNeil , Gary Li , Daniel N. Koury, Jr.
IPC分类号： G01P15/125 , G01P15/18
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/082 , G01P2015/0831
摘要： A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
摘要翻译：本文提供了一种传感器，其包括不平衡证明质量块（51），并且适于在至少两个相互正交的方向上感测加速度。证明物质（51）具有不等质量的第一（65）和第二（67）相对的侧面。

23. 发明授权

US06840106B1 Sensor using an actuator for self-test and method therefor 有权
标题翻译：传感器使用执行器进行自检和其方法
公开(公告)号：US06840106B1
公开(公告)日：2005-01-11
申请号：US10640724
申请日：2003-08-14
申请人： Andrew C. McNeil
发明人： Andrew C. McNeil
IPC分类号： G01P15/00 , G01P15/125 , G01P15/18
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/082
摘要： A self-test structure is placed in the middle of a sensing structure that utilizes a movable mass. The sensing structure has portions aligned in two directions that are orthogonal to each other. The self-test structure is an actuator made up of individual sensing patterns. The individual sensing patterns are aligned along a line that is diagonal to the two directions, thereby reducing the number of individual sensing patterns required for the actuator that is used for self-test. The reduced number of sensing patterns results in more mass for the movable mass, thereby improving sensitivity of the sensing structure.
摘要翻译：自检结构放置在利用可移动质量块的感测结构的中间。感测结构具有在彼此正交的两个方向上排列的部分。自检结构是由单独的感测图案构成的致动器。各个感测图案沿着与两个方向对角的线对准，从而减少用于自检的致动器所需的各个感测图案的数量。感测图案的数量减少导致可移动质量更多的质量，从而提高感测结构的灵敏度。

24. 发明授权

US06472243B2 Method of forming an integrated CMOS capacitive pressure sensor 有权
标题翻译：形成集成CMOS电容式压力传感器的方法
公开(公告)号：US06472243B2
公开(公告)日：2002-10-29
申请号：US09734473
申请日：2000-12-11
申请人： Bishnu P. Gogoi , David J. Monk , David W. Odle , Kevin D. Neumann , Donald L. Hughes, Jr. , John E. Schmiesing , Andrew C. McNeil , Richard J. August
发明人： Bishnu P. Gogoi , David J. Monk , David W. Odle , Kevin D. Neumann , Donald L. Hughes, Jr. , John E. Schmiesing , Andrew C. McNeil , Richard J. August
IPC分类号： H01L2100
CPC分类号： G01L9/0073 , H01L27/0617
摘要： A capacitive pressure sensor (10) utilizes a diaphragm (38) that is formed along with forming gates (56,57) of active devices on the same semiconductor substrate (11).
摘要翻译：电容式压力传感器（10）利用与同一半导体衬底（11）上的有源器件的形成门（56,57）一起形成的隔膜（38）。

25. 发明授权

US6122963A Electronic component for measuring acceleration 有权
标题翻译：用于测量加速度的电子元件
公开(公告)号：US6122963A
公开(公告)日：2000-09-26
申请号：US235731
申请日：1999-01-22
申请人： Jonathan H. Hammond , Daniel N. Koury, Jr. , Richard J. August , Andrew C. McNeil
发明人： Jonathan H. Hammond , Daniel N. Koury, Jr. , Richard J. August , Andrew C. McNeil
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An electronic component includes a support substrate (101), a fixed electrode (113) overlying the support substrate (101), a movable electrode (123, 423) overlying the support substrate and the first electrode (113) wherein the first and second electrodes (113, 123, and 423) form a capacitor with a sensing area, an anchor (122, 422) coupled to the support substrate (101), and beams (125, 425) coupling different attachment points (129) of the second electrode (123, 423) to the anchor (122, 422) wherein the different attachment points (129) form a simply connected polygon and wherein a portion of the sensing area is located within the simply connected polygon.
摘要翻译：电子部件包括支撑基板（101），覆盖支撑基板（101）的固定电极（113），覆盖支撑基板的可动电极（123,423）和第一电极（113），其中第一和第二电极（113,123和423）形成具有感测区域的电容器，耦合到支撑衬底（101）的锚固件（122,422）和耦合第二电极的不同连接点（129）的梁（125,425）（123,423）到锚定器（122,422），其中不同的附接点（129）形成简单连接的多边形，并且其中感测区域的一部分位于简单连接的多边形内。

26. 发明授权

US5888412A Method for making a sculptured diaphragm 失效
标题翻译：制作雕刻膜片的方法
公开(公告)号：US5888412A
公开(公告)日：1999-03-30
申请号：US610033
申请日：1996-03-04
申请人： Kathirgamasundaram Sooriakumar , Andrew C. McNeil , Kenneth G. Goldman , Mahesh K. Shah
发明人： Kathirgamasundaram Sooriakumar , Andrew C. McNeil , Kenneth G. Goldman , Mahesh K. Shah
IPC分类号： G01L9/00 , B44C1/22
CPC分类号： G01L9/0042
摘要： A sculptured diaphragm of a sensor is fabricated by providing a semiconductor material, forming at least one cavity on the front side of the semiconductor material, forming a diaphragm layer over the semiconductor material, and the etching a cavity on the back side of the semiconductor material. If a sensor having a diaphragm with a central boss is desired, then the diaphragm layer is planarized to form a thick and a thin portion in the diaphragm layer.
摘要翻译：通过提供半导体材料制造传感器的雕刻隔膜，在半导体材料的正面上形成至少一个空腔，在半导体材料上形成隔膜层，并且蚀刻半导体材料背面的空腔。如果需要具有带有中心凸台的隔膜的传感器，则隔膜层被平坦化以在隔膜层中形成厚而薄的部分。

27. 发明申请

US20170341926A9 MICROELECTROMECHANICAL SYSTEM DEVICES HAVING CRACK RESISTANT MEMBRANE STRUCTURES AND METHODS FOR THE FABRICATION THEREOF 有权
公开(公告)号：US20170341926A9
公开(公告)日：2017-11-30
申请号：US14537498
申请日：2014-11-10
申请人： Chad S Dawson , Dubravka Bilic , Lianjun Liu , Andrew C McNeil
发明人： Chad S Dawson , Dubravka Bilic , Lianjun Liu , Andrew C McNeil
IPC分类号： B81B3/00 , G01L9/00
CPC分类号： B81B3/007 , B81B2201/0264 , B81B2203/0127 , G01L9/0072
摘要： Methods for fabricating crack resistant Microelectromechanical (MEMS) devices are provided, as are MEMS devices produced pursuant to such methods. In one embodiment, the method includes forming a sacrificial body over a substrate, producing a multi-layer membrane structure on the substrate, and removing at least a portion of the sacrificial body to form an inner cavity within the multi-layer membrane structure. The multi-layer membrane structure is produced by first forming a base membrane layer over and around the sacrificial body such that the base membrane layer has a non-planar upper surface. A predetermined thickness of the base membrane layer is then removed to impart the base membrane layer with a planar upper surface. A cap membrane layer is formed over the planar upper surface of the base membrane layer. The cap membrane layer is composed of a material having a substantially parallel grain orientation.

28. 发明申请

US20150059484A1 MICROELECTROMECHANICAL SYSTEM DEVICES HAVING CRACK RESISTANT MEMBRANE STRUCTURES AND METHODS FOR THE FABRICATION THEREOF 有权
标题翻译：具有抗裂膜结构的微电子系统装置及其制造方法
公开(公告)号：US20150059484A1
公开(公告)日：2015-03-05
申请号：US14537498
申请日：2014-11-10
申请人： Chad S Dawson , Dubravka Bilic , Lianjun Liu , Andrew C McNeil
发明人： Chad S Dawson , Dubravka Bilic , Lianjun Liu , Andrew C McNeil
IPC分类号： G01L9/12
CPC分类号： B81B3/007 , B81B2201/0264 , B81B2203/0127 , G01L9/0072
摘要： Methods for fabricating crack resistant Microelectromechanical (MEMS) devices are provided, as are MEMS devices produced pursuant to such methods. In one embodiment, the method includes forming a sacrificial body over a substrate, producing a multi-layer membrane structure on the substrate, and removing at least a portion of the sacrificial body to form an inner cavity within the multi-layer membrane structure. The multi-layer membrane structure is produced by first forming a base membrane layer over and around the sacrificial body such that the base membrane layer has a non-planar upper surface. A predetermined thickness of the base membrane layer is then removed to impart the base membrane layer with a planar upper surface. A cap membrane layer is formed over the planar upper surface of the base membrane layer. The cap membrane layer is composed of a material having a substantially parallel grain orientation.
摘要翻译：提供了制造抗电微机电（MEMS）器件的方法，以及根据这些方法制造的MEMS器件。在一个实施例中，该方法包括在衬底上形成牺牲体，在衬底上产生多层膜结构，以及去除牺牲体的至少一部分以在多层膜结构内形成内腔。多层膜结构通过首先在牺牲体上方和周围形成基膜层使得基膜层具有非平面的上表面来制造。然后去除预定厚度的基膜层，以使基膜层具有平坦的上表面。在基膜层的平面上表面上形成盖膜层。盖膜层由具有基本上平行的晶粒取向的材料构成。

29. 发明授权

US08925384B2 MEMS sensor with stress isolation and method of fabrication 有权
标题翻译：具有应力隔离的MEMS传感器和制造方法
公开(公告)号：US08925384B2
公开(公告)日：2015-01-06
申请号：US13482332
申请日：2012-05-29
申请人： Andrew C. McNeil , Gary G. Li , Lisa Z. Zhang , Yizhen Lin
发明人： Andrew C. McNeil , Gary G. Li , Lisa Z. Zhang , Yizhen Lin
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
摘要： A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36) is suspended above the substrate (24) and is connected to the support structure (26) via torsional elements (38). Electrodes (42, 44), spaced apart from the proof mass (36), are connected to the support structure (26) and are suspended above the substrate (24). Suspension of the electrodes (42, 44) and proof mass (36) above the surface (28) of the substrate (24) via the support structure (26) substantially physically isolates the elements from deformation of the underlying substrate (24). Additionally, connection via the spring elements (30, 32, 34) result in the MEMS sensor (22, 86) being less susceptible to movement of the support structure (26) due to this deformation.
摘要翻译： MEMS传感器（20,86）包括悬挂在基板（24）的表面（28）上方并通过弹簧元件（30,32,34）连接到基板（24）的支撑结构（26）。证明物质（36）悬挂在基底（24）上方，并通过扭转元件（38）连接到支撑结构（26）。与证明物质（36）间隔开的电极（42,44）连接到支撑结构（26）并悬挂在基底（24）上方。通过支撑结构（26）将基片（24）的表面（28）上方的电极（42,44）和检验质量块（36）悬挂在基本上物理上隔离下面的基底（24）的变形。此外，通过弹簧元件（30,32,34）的连接导致MEMS传感器（22,86）由于这种变形而不易受支撑结构（26）的移动的影响。

30. 发明授权

US08610222B2 MEMS device with central anchor for stress isolation 有权
标题翻译：具有中心锚杆的MEMS器件用于应力隔离
公开(公告)号：US08610222B2
公开(公告)日：2013-12-17
申请号：US13088579
申请日：2011-04-18
申请人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Todd F. Miller , Lisa Z. Zhang
发明人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Todd F. Miller , Lisa Z. Zhang
IPC分类号： H01L27/14
CPC分类号： B81B3/0072 , B81B2203/0136 , B81B2203/0307
摘要： A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body (34) of the structure (30). The proof mass (32) includes movable fingers (60), each of which is disposed between a pair (62) of the fixed fingers (36, 38). A central area (42) of the body (34) is coupled to an underlying substrate (24), with the remainder of the immovable structure (30) and the proof mass (32) being suspended above the substrate (24) to largely isolate the MEMS device (20) from package stress, Additionally, the MEMS device (20) includes isolation trenches (80) and interconnects (46, 50, 64) so that the fixed fingers (36), the fixed fingers (38), and the movable fingers (60) are electrically isolated from one another to yield a differential device configuration.
摘要翻译： MEMS装置（20）包括联接到并围绕不可移动结构（30）的检验质量块（32）。不动结构（30）包括从结构（30）的主体（34）向外延伸的固定指状物（36,38）。检测质量块（32）包括可动指状物（60），每个指状物设置在固定指状物（36,38）的一对（62）之间。主体（34）的中心区域（42）联接到下面的基板（24），其中不可移动的结构（30）的其余部分和证明质量块（32）悬挂在基板（24）上方以大大隔离另外，MEMS器件（20）包括隔离沟槽（80）和互连（46,50,64），使得固定指状物（36），固定指状物（38）和可动指状物（60）彼此电隔离以产生差分装置构型。

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