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    • 2. 发明授权
    • Inertial sensor with off-axis spring system
    • 惯性传感器带离轴弹簧系统
    • US08739627B2
    • 2014-06-03
    • US13282192
    • 2011-10-26
    • Gary G. LiYizhen LinAndrew C. McNeilLisa Z. Zhang
    • Gary G. LiYizhen LinAndrew C. McNeilLisa Z. Zhang
    • G01C19/56
    • G01C19/5747G01C19/5762
    • An inertial sensor (20) includes a drive mass (30) configured to undergo oscillatory motion and a sense mass (32) linked to the drive mass (30). On-axis torsion springs (58) are coupled to the sense mass (32), the on-axis torsion springs (58) being co-located with an axis of rotation (22). The inertial sensor (20) further includes an off-axis spring system (60). The off-axis spring system (60) includes off-axis springs (68, 70, 72, 74), each having a connection interface (76) coupled to the sense mass (32) at a location on the sense mass (32) that is displaced away from the axis of rotation (22). Together, the on-axis torsion springs (58) and the off-axis spring system (60) enable the sense mass (32) to oscillate out of plane about the axis of rotation (22) at a sense frequency that substantially matches a drive frequency of the drive mass (30).
    • 惯性传感器(20)包括构造成经历振荡运动的驱动质量块(30)和与驱动质量块(30)连接的感测质量块(32)。 轴上扭转弹簧(58)联接到感测质量块(32),所述轴上扭转弹簧(58)与旋转轴线(22)共同定位。 惯性传感器(20)还包括离轴弹簧系统(60)。 离轴弹簧系统(60)包括离轴弹簧(68,70,72,74),每个离轴弹簧具有在感测质量块(32)上的位置处耦合到感测质量块(32)的连接界面(76) 其远离旋转轴线(22)移位。 一起,轴上扭转弹簧(58)和离轴弹簧系统(60)使得感测质量(32)能够以基本匹配驱动器的感测频率围绕旋转轴线(22)摆动离开平面 驱动质量(30)的频率。
    • 3. 发明申请
    • MEMS SENSOR WITH STRESS ISOLATION AND METHOD OF FABRICATION
    • 具有应力隔离的MEMS传感器和制造方法
    • US20130319117A1
    • 2013-12-05
    • US13482332
    • 2012-05-29
    • Andrew C. McNeilGary G. LiLisa Z. ZhangYizhen Lin
    • Andrew C. McNeilGary G. LiLisa Z. ZhangYizhen Lin
    • G01P15/125H01R43/00
    • G01P15/125G01P15/0802G01P15/18G01P2015/0831
    • A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36) is suspended above the substrate (24) and is connected to the support structure (26) via torsional elements (38). Electrodes (42, 44), spaced apart from the proof mass (36), are connected to the support structure (26) and are suspended above the substrate (24). Suspension of the electrodes (42, 44) and proof mass (36) above the surface (28) of the substrate (24) via the support structure (26) substantially physically isolates the elements from deformation of the underlying substrate (24). Additionally, connection via the spring elements (30, 32, 34) result in the MEMS sensor (22, 86) being less susceptible to movement of the support structure (26) due to this deformation.
    • MEMS传感器(20,86)包括悬挂在基板(24)的表面(28)上方并通过弹簧元件(30,32,34)连接到基板(24)的支撑结构(26)。 证明物质(36)悬挂在基底(24)上方,并通过扭转元件(38)连接到支撑结构(26)。 与证明物质(36)间隔开的电极(42,44)连接到支撑结构(26)并悬挂在基底(24)上方。 通过支撑结构(26)将基片(24)的表面(28)上方的电极(42,44)和检验质量块(36)悬挂在基本上物理上隔离下面的基底(24)的变形。 此外,通过弹簧元件(30,32,34)的连接导致MEMS传感器(22,86)由于这种变形而不易受支撑结构(26)的移动的影响。
    • 4. 发明申请
    • MEMS SENSOR WITH DUAL PROOF MASSES
    • 具有双重防伪质量的MEMS传感器
    • US20120186347A1
    • 2012-07-26
    • US13012671
    • 2011-01-24
    • Andrew C. McNeil
    • Andrew C. McNeil
    • G01P15/125
    • G01P15/125G01P2015/0831G01P2015/0837
    • A microelectromechanical systems (MEMS) sensor (20) includes a substrate (26) and suspension anchors (34, 36) formed on a planar surface (28) of the substrate (26). The MEMS sensor (20) further includes a first movable element (38) and a second movable element (40) suspended above the substrate (26). Compliant members (42, 44) interconnect the first movable element (38) with the suspension anchor 34 and compliant members (46, 48) interconnect the second movable element (40) with the suspension anchor (36). The movable elements (38, 40) have an equivalent shape. The movable elements may be generally rectangular movable elements (38, 40) or L-shaped movable elements (108, 110) in a nested configuration. The movable elements (38, 40) are oriented relative to one another in rotational symmetry about a point location (94) on the substrate (26).
    • 微机电系统(MEMS)传感器(20)包括衬底(26)和形成在衬底(26)的平坦表面(28)上的悬挂锚固件(34,36)。 MEMS传感器(20)还包括悬挂在衬底(26)上方的第一可移动元件(38)和第二可移动元件(40)。 第一可移动元件(38)与悬挂锚固件34相互连接的合规构件(42,44)以及将第二可移动元件(40)与悬挂锚固件(36)相互连接的顺应构件(46,48)。 可移动元件(38,40)具有等效的形状。 可移动元件可以是嵌套构造的大致为矩形的可移动元件(38,40)或L形可移动元件(108,110)。 可移动元件(38,40)相对于彼此以关于基底(26)上的点位置(94)的旋转对称的方式定向。
    • 7. 发明授权
    • Differential capacitive sensor and method of making same
    • 差分电容式传感器及其制作方法
    • US07610809B2
    • 2009-11-03
    • US11655557
    • 2007-01-18
    • Andrew C. McNeilYizhen LinTodd F. Miller
    • Andrew C. McNeilYizhen LinTodd F. Miller
    • G01P15/125
    • G01P15/125G01P2015/0831
    • A differential capacitive sensor (50) includes a movable element (56) pivotable about a rotational axis (60). The movable element (56) includes first and second sections (94, 96). The first section (94) has an extended portion (98) distal from the rotational axis (60). A static layer (52) is spaced away from a first surface (104) of the moveable element (56), and includes a first actuation electrode (74), a first sensing electrode (64), and a third sensing electrode (66). A static layer (62) is spaced away from a second surface (106) of the moveable element (56) and includes a second actuation electrode (74), a second sensing electrode (70), and a fourth sensing electrode (72). The first and second electrodes (64, 70) oppose the first section (94), the third and fourth electrodes (66, 72) oppose the second section (96), and the first and second electrodes (68, 74) oppose the extended portion (98).
    • 差分电容传感器(50)包括可围绕旋转轴线(60)枢转的可移动元件(56)。 可移动元件(56)包括第一和第二部分(94,96)。 第一部分(94)具有远离旋转轴线(60)的延伸部分(98)。 静电层(52)与可移动元件(56)的第一表面(104)间隔开,并且包括第一致动电极(74),第一感测电极(64)和第三感测电极(66) 。 静电层(62)与可移动元件(56)的第二表面(106)间隔开并且包括第二致动电极(74),第二感测电极(70)和第四感测电极(72)。 第一和第二电极(64,70)与第一部分(94)相对,第三和第四电极(66,72)与第二部分(96)相对,并且第一和第二电极(68,74)与延伸的 部分(98)。