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11. 发明授权

US06596993B1 Method of automatically correcting magnification and non-linearity of scanning electron microscope 失效
标题翻译：自动校正扫描电子显微镜放大倍数和非线性的方法
公开(公告)号：US06596993B1
公开(公告)日：2003-07-22
申请号：US09696252
申请日：2000-10-26
申请人： Albert Sicignano , Tim Goldburt , Dmitriy Yeremin
发明人： Albert Sicignano , Tim Goldburt , Dmitriy Yeremin
IPC分类号： G21K700
CPC分类号： H01J37/28 , H01J2237/2826
摘要： A method of automatically correcting magnification and/or non linearity of scanning electron microscope has the steps of loading a reference material in the microscope, inputting a pitch of the reference material and a nominal magnification of the microscope, obtaining an image of the reference material, determining a pitch and/or a linearity of the image of the reference material, comparing the pitch of the image with the inputted pitch of the reference material to obtain a ratio indicative of the magnification and/or comparing the magnification in different locations across an image field indicative of the linearity, comparing the thusly determined magnification with the nominal magnification, and if an error of magnification exceeds a predetermined value, adjusting the scanning electron microscope.
摘要翻译：自动校正扫描电子显微镜的放大倍数和/或非线性的方法具有以下步骤：在显微镜中加载参考物质，输入参考物质的间距和显微镜的标称倍率，获得参考物质的图像，确定参考材料的图像的间距和/或线性，将图像的间距与参考材料的输入间距进行比较，以获得指示放大率的比率和/或比较跨越图像的不同位置的倍率指示线性的场，将如此确定的倍率与标称倍率进行比较，并且如果放大误差超过预定值，则调整扫描电子显微镜。

12. 发明授权

US06423967B1 Detection apparatus and detection method to be used for scanning probe and observation apparatus and observation method 失效
标题翻译：用于扫描探头和观察装置的检测装置和检测方法及观察方法
公开(公告)号：US06423967B1
公开(公告)日：2002-07-23
申请号：US09570406
申请日：2000-05-12
申请人： Shunichi Shido , Takeaki Itsuji
发明人： Shunichi Shido , Takeaki Itsuji
IPC分类号： G21K700
CPC分类号： G01Q20/04 , Y10S977/837 , Y10S977/849 , Y10S977/873 , Y10S977/88 , Y10S977/901
摘要： A detection apparatus for detecting the surface of a specimen by means of a cantilever having a probe and a piezo resistance element, which comprises a first circuit for detecting an electric current flowing through the piezo resistance element and a second circuit for detecting an electric current flowing through the probe. The electric current flowing through the piezo resistance element and the electric current flowing through the probe are detected by way of a common current path.
摘要翻译：一种用于通过具有探针和压电电阻元件的悬臂检测样本表面的检测装置，其包括用于检测流过压电电阻元件的电流的第一电路和用于检测电流流动的第二电路通过探头。通过公共电流路径检测流过压电电阻元件的电流和流过探头的电流。

13. 发明授权

US06717143B2 Beam alignment in a lower column of a scanning electron microscope or the like 有权
标题翻译：在扫描电子显微镜等的下列中的束对准
公开(公告)号：US06717143B2
公开(公告)日：2004-04-06
申请号：US10136692
申请日：2002-04-30
申请人： Paul J. Duval , Anastasia Y. Tyurina , Neal T. Sullivan
发明人： Paul J. Duval , Anastasia Y. Tyurina , Neal T. Sullivan
IPC分类号： G21K700
CPC分类号： H01J37/28 , H01J37/145 , H01J37/1472
摘要： An apparatus for imaging the surface of a sample, such as a scanning electron microscope. The apparatus generates a beam of charged particles directed at the surface, and includes an objective lens and an electrostatic lens for controlling the particle beam. The objective lens and the electrostatic lens constitute a compound lens that has an axis. The beam is controlled so that it travels along the axis of the compound lens in order to avoid adverse consequences induced by, for example, mechanical misalignments and as manifested when the focus of one of the objective and electrostatic lenses is changed during operation of the apparatus.
摘要翻译：用于对样品表面进行成像的装置，例如扫描电子显微镜。该装置产生指向表面的带电粒子束，并且包括用于控制粒子束的物镜和静电透镜。物镜和静电透镜构成具有轴的复合透镜。控制光束使其沿着复合透镜的轴线行进，以避免由例如机械不对准引起的不良后果，并且当在设备的操作期间改变物镜和静电透镜中的一个的焦点被改变时表现出来。

14. 发明授权

US06710337B2 Laser scanning microscope and shutter for an optical system 有权
标题翻译：激光扫描显微镜和光学系统快门
公开(公告)号：US06710337B2
公开(公告)日：2004-03-23
申请号：US09884625
申请日：2001-06-19
申请人： Johann Engelhardt , William C. Hay , Juergen Hoffmann
发明人： Johann Engelhardt , William C. Hay , Juergen Hoffmann
IPC分类号： G21K700
CPC分类号： G02B21/002
摘要： An optical arrangement, in particular a laser scanning microscope, having a light source, in particular a laser light source, and an interruption device (1) for a light beam (2) of the light source, is configured, in the interest of reliable operation, in such a way that means (3) for monitoring the functioning of the interruption device (1) are associated with the interruption device (1). The invention additionally concerns a shutter (5) for a light beam (2) of a light source, in particular a laser light source, which, again in the interest of reliable operation of an optical arrangement, is characterized by at least two movable components (6, 7) which are configured and arranged such that the mechanical momentum generated by a moving component (6) or by several moving components is compensated for by the motion of the other component (7) or components.
摘要翻译：具有光源，特别是激光光源的光学装置，特别是激光扫描显微镜，以及用于光源的光束（2）的中断装置（1）被配置为有可能以这种方式，用于监视中断装置（1）的功能的装置（3）与中断装置（1）相关联。本发明还涉及用于光源的光束（2）的快门（5），特别是激光光源，其再次为了光学装置的可靠操作而特征在于至少两个可移动部件（6,7），其被构造和布置成使得由运动部件（6）产生的机械动量或由多个运动部件产生的机械动量通过另一部件（7）或部件的运动来补偿。

15. 发明授权

US06635874B1 Self-cleaning technique for contamination on calibration sample in SEM 失效
标题翻译：扫描电镜校准样品污染自清洁技术
公开(公告)号：US06635874B1
公开(公告)日：2003-10-21
申请号：US09729290
申请日：2000-12-04
申请人： Bhanwar Singh , Michael K. Templeton , Sanjay K. Yedur , Bryan K. Choo
发明人： Bhanwar Singh , Michael K. Templeton , Sanjay K. Yedur , Bryan K. Choo
IPC分类号： G21K700
CPC分类号： G01N23/22 , G01N2001/2893
摘要： The present invention provides SEM calibration standards, and associated SEM systems and SEM calibration methods, that are self-cleaning with respect to electron beam deposited carbon. The calibration standards have coatings containing a transition metal oxide. The coatings facilitate oxidation of deposited carbon, whereby carbon buildup can be stopped or reversed. By providing a mechanism to mitigate carbon buildup, calibration standards provided by the present invention achieve high accuracy, high durability, and low cost.
摘要翻译：本发明提供了SEM校准标准，以及相关的SEM系统和SEM校准方法，它们是相对于电子束沉积碳进行自清洁的。校准标准品含有过渡金属氧化物的涂层。涂层促进沉积碳的氧化，从而可以停止或反转碳积累。通过提供减轻碳积累的机制，本发明提供的校准标准实现高精度，高耐久性和低成本。

16. 发明授权

US06522717B1 Reflective-type soft x-ray microscope 失效
标题翻译：反光型软X射线显微镜
公开(公告)号：US06522717B1
公开(公告)日：2003-02-18
申请号：US09635466
申请日：2000-08-11
申请人： Katsuhiko Murakami , Hiroyuki Kondo
发明人： Katsuhiko Murakami , Hiroyuki Kondo
IPC分类号： G21K700
CPC分类号： G21K7/00
摘要： A reflective-type soft X-ray microscope includes an image-focusing optical system including a concave mirror and a convex mirror, an illumination optical system that has a light source, a filter, and a focusing optical element for transmitting an illumination light beam, and a stage mechanism that carries and moves a sample under observation. In the reflective-type soft X-ray microscope, the concave mirror has at least one opening part for transmitting the illuminating light beam that illuminates the sample, and a reflected image of the sample is focused on a soft X-ray image detector by the image-focusing optical system.
摘要翻译：反射型软X射线显微镜包括具有凹面镜和凸面镜的图像聚焦光学系统，具有用于透射照明光束的光源，滤光器和聚焦光学元件的照明光学系统，以及在观察下携带和移动样品的阶段机构。在反射型软X射线显微镜中，凹面镜具有至少一个开口部，用于透射照射样品的照明光束，并且样品的反射图像被聚焦在软X射线图像检测器上图像聚焦光学系统。

17. 发明授权

US06479816B1 Near-field optical probe 有权
标题翻译：近场光学探头
公开(公告)号：US06479816B1
公开(公告)日：2002-11-12
申请号：US09426532
申请日：1999-10-26
申请人： Mamabu Oumi , Yasuyuki Mitsuoka , Norio Chiba , Nobuyuki Kasama , Kenji Kato , Takashi Niwa
发明人： Mamabu Oumi , Yasuyuki Mitsuoka , Norio Chiba , Nobuyuki Kasama , Kenji Kato , Takashi Niwa
IPC分类号： G21K700
CPC分类号： G21K1/06 , G01Q60/22 , Y10S977/862
摘要： A near-field optical probe with a resolving power exceeding a diffraction limit of light is provided utilizing near-near-field light. A near-field optical probe is formed by a core and a shading film. The core has a tip surface spotted with inwardly depressed points with respect to the surface. This provides within the tip surface a light intensity distribution in a distributed form instead of a conventional rectangle function. Its Fourier expansion is increased in short-wavelength lattice constant component. Utilizing this component, a near-field optical probe is realized having a resolving power exceeding a diffraction limit of light.
摘要翻译：利用近场光提供具有超过光的衍射极限的分辨能力的近场光学探针。近场光学探针由芯和遮光膜形成。芯部具有相对于表面具有向内凹陷点的尖端表面。这在尖端表面内提供分布形式的光强分布，而不是传统的矩形函数。其傅立叶扩展在短波长晶格常数分量中增加。利用该部件，实现了具有超过光的衍射极限的分辨能力的近场光学探针。

18. 发明授权

US06437329B1 Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube 失效
标题翻译：通过在管内掺入荧光分子，使用碳纳米管作为化学传感器
公开(公告)号：US06437329B1
公开(公告)日：2002-08-20
申请号：US09428098
申请日：1999-10-27
申请人： Sanjay K. Yedur , Bhanwar Singh , Bryan K. Choo
发明人： Sanjay K. Yedur , Bhanwar Singh , Bryan K. Choo
IPC分类号： G21K700
CPC分类号： G01Q70/12 , G01N21/6458 , G01N21/9501 , G01N2021/7786 , Y10S977/843 , Y10S977/844 , Y10S977/852 , Y10S977/876 , Y10S977/877
摘要： A system for analyzing a film and detecting a defect associated therewith includes a scanning probe microscope having a nanotube tip with a material associated therewith which exhibits a characteristic that varies with respect to a film composition at a location corresponding to the nanotube tip. The system also includes a detection system for detecting the material characteristic and a controller operatively coupled to the detection system and the scanning probe microscope. The controller configured to receive information associated with the detected characteristic and use the information to determine whether the film contains a defect at the location corresponding to the nanotube tip. The invention also includes a method of detecting a film composition at a particular location of a film or substrate. The method includes associating a material exhibiting a characteristic which varies with respect to a film composition with a nanotube tip of a scanning probe microscope and detecting the characteristic. The method then includes the step of determining a composition of a portion of the film using the detected characteristic.
摘要翻译：用于分析胶片并检测与之相关的缺陷的系统包括扫描探针显微镜，其具有与其相关联的材料的纳米管末端，其具有相对于与纳米管尖端相对应的位置处的膜组成变化的特性。该系统还包括用于检测材料特性的检测系统和可操作地耦合到检测系统和扫描探针显微镜的控制器。所述控制器被配置为接收与检测到的特性相关联的信息并使用所述信息来确定所述胶片是否包含在与所述纳米管尖端相对应的位置处的缺陷。本发明还包括在膜或基底的特定位置检测膜组成的方法。该方法包括将表现出相对于膜组成变化的特性的材料与扫描探针显微镜的纳米管尖端相关联并检测特性。该方法然后包括使用检测到的特性来确定膜的一部分的组成的步骤。

19. 发明授权

US06430254B2 High resolution x-ray imaging of very small objects 失效
标题翻译：非常小的物体的高分辨率x射线成像
公开(公告)号：US06430254B2
公开(公告)日：2002-08-06
申请号：US09730960
申请日：2000-12-05
申请人： Stephen William Wilkins
发明人： Stephen William Wilkins
IPC分类号： G21K700
CPC分类号： G21K7/00 , G21K2207/005
摘要： A sample cell for use in x-ray imaging, including structure defining a chamber for a sample and, mounted to said structure, a body of a substance excitable by an appropriate incident beam to generate x-ray radiation, the cell being arranged so that, in use, at least a portion of the x-ray radiation traverses said chamber to irradiate the sample therein and thereafter exits the structure for detection.
摘要翻译：一种用于x射线成像的样品池，包括限定样品室的结构，并且安装在所述结构上，由适当入射光束激发的物质的主体以产生x射线辐射，所述细胞被布置成使得在使用中，x射线辐射的至少一部分穿过所述腔室以将样品照射在其中，然后离开该结构以进行检测。

20. 发明授权

US06765201B2 Ultraviolet laser-generating device and defect inspection apparatus and method therefor 有权
标题翻译：紫外线激光发生装置及缺陷检查装置及其方法
公开(公告)号：US06765201B2
公开(公告)日：2004-07-20
申请号：US09764457
申请日：2001-01-19
申请人： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunji Maeda
发明人： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunji Maeda
IPC分类号： G21K700
CPC分类号： G01N21/956 , G01N21/33 , G02F2001/3505 , G02F2001/3542 , H01S3/0092
摘要： An ultraviolet laser-generating device, for use in a defect inspection apparatus and a method thereof, etc., comprising: a laser ray source for irradiating and emitting a basic wave of laser ray therefrom; a wavelength converter device for receiving the basic wave of laser ray emitted from the laser ray source and for converting it into an ultraviolet laser ray composed of a multiplied high harmonic light of the basic wave of laser ray; and a container having an inlet window, upon which the basic wave of laser ray emitted from the laser ray source is incident upon, and an outlet window for emitting the ultraviolet laser ray composed of the multiplied high harmonic light of the basic wave of laser ray, and installing the wavelength converter device therein, wherein the container is hermetically sealed and is filled up with an inert gas, such as nitrogen or argon gas, therein.
摘要翻译：一种用于缺陷检查装置及其方法的紫外线激光发生装置，包括：用于从其照射和发射激光光线的基本波的激光束源; 波长转换器装置，用于接收从激光射线源发射的激光的基波，并将其转换为由激光的基波的相乘的高次谐波构成的紫外激光; 以及具有入射窗的容器，从激光射线源发射的激光的基波入射到该入口窗口，以及用于发射由激光的基波的倍增的高次谐波构成的紫外线激光的出射窗并且在其中安装波长转换器装置，其中容器被气密密封，并在其中填充有惰性气体，例如氮气或氩气。

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