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11. 发明申请

US20070147583A1 X-Ray Micro-Tomography System Optimized for High Resolution, Throughput, Image Quality 有权
标题翻译： X射线微层析成像系统针对高分辨率，吞吐量，图像质量进行了优化
公开(公告)号：US20070147583A1
公开(公告)日：2007-06-28
申请号：US11682503
申请日：2007-03-06
申请人： Yuxin Wang , Wenbing Yun , David Scott
发明人： Yuxin Wang , Wenbing Yun , David Scott
IPC分类号： A61B6/00 , G01N23/00 , G21K1/12 , H05G1/60
CPC分类号： G01N23/046 , A61B6/508 , G01N2223/419
摘要： A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolution and high throughput are described. It also concerns ways to optimize the system design to obtain improved image quality.
摘要翻译：公开了可能利用基于实验室的微焦点x射线源的投影X射线成像系统。描述了用于利用具有高分辨率和高吞吐量的潜力的断层成像优化用于高质量三维图像形成的系统的技术。它还涉及到优化系统设计以获得改进的图像质量的方法。

12. 发明授权

US07130375B1 High resolution direct-projection type x-ray microtomography system using synchrotron or laboratory-based x-ray source 有权
标题翻译：使用同步加速器或基于实验室的X射线源的高分辨率直投式X射线显微镜系统
公开(公告)号：US07130375B1
公开(公告)日：2006-10-31
申请号：US11035749
申请日：2005-01-14
申请人： Wenbing Yun , David Dean Scott , David R. Trapp , Frederick William Duewer , Yuxin Wang
发明人： Wenbing Yun , David Dean Scott , David R. Trapp , Frederick William Duewer , Yuxin Wang
IPC分类号： G01N23/20
CPC分类号： G01N23/04 , A61B6/508 , G01N2223/505 , G01N2223/6113
摘要： A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especially in a proximity mode where the same is held in close proximity to the scintillator. In this case, a sample holder is provided that can rotate the sample. Further, a z-axis motion stage is also provided that is used to control distance between the sample and the scintillator.
摘要翻译：基于投影的X射线成像系统结合了投影放大倍数和光学放大倍率，以便减轻源光斑尺寸的限制，同时提高成像系统的覆盖面和效率。该系统使得样品的层析成像特别是在接近模式下，其中相邻的模式保持在闪烁体附近。在这种情况下，提供可以旋转样品的样品架。此外，还提供了用于控制样品和闪烁体之间的距离的z轴运动级。

13. 发明授权

US06917472B1 Achromatic fresnel optics for ultraviolet and x-ray radiation 有权
标题翻译：用于紫外线和X射线辐射的消色差菲涅耳光学
公开(公告)号：US06917472B1
公开(公告)日：2005-07-12
申请号：US10134026
申请日：2002-04-25
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02B3/08 , G02B27/44 , G03F7/20
CPC分类号： G03F7/70308 , G02B3/08 , G02B27/4211 , G02B27/4216 , G02B27/4222 , G03F7/70316
摘要： An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The AFO has a wide range of potential applications in lithography, microimaging with various contrast mechanisms and measurement techniques.
摘要翻译：一种消色差菲涅耳光学器件，其结合了菲涅尔波带板和折射菲涅尔透镜。区域板提供用于成像和聚焦的高分辨率，而折射透镜利用靠近吸收边缘的适当元件的折射率变化特性来重新组合由区域板分散的不同能量的电磁辐射。该复合透镜有效地解决了区域板的高色差问题。 AFO在光刻，各种对比度机制和测量技术的微成像中具有广泛的潜在应用。

14. 发明授权

US07920676B2 CD-GISAXS system and method 有权
标题翻译： CD-GISAXS系统和方法
公开(公告)号：US07920676B2
公开(公告)日：2011-04-05
申请号：US11774183
申请日：2007-07-06
申请人： Wenbing Yun , Yuxin Wang , Srivatsan Seshadri , Kenneth W. Nill
发明人： Wenbing Yun , Yuxin Wang , Srivatsan Seshadri , Kenneth W. Nill
IPC分类号： G01N23/20
CPC分类号： G01N23/201 , G03F7/70625
摘要： CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (˜12×, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.
摘要翻译： CD-GISAXS通过使用较长波长辐射（例如约12×）（例如反射几何形状的x射线）提高吞吐量来实现缩短的测量时间，以增加入射光束的准直接收角和散射信号强度，从而导致实质的组合吞吐量增益。这种波长选择和几何结构可以大大减少测量时间。此外，CD-GISAXS的功能可以扩展，以满足未来几代半导体制造和纳米结构表征的许多计量需求。

15. 发明授权

US07796725B1 Mechanism for switching sources in x-ray microscope 有权
标题翻译： x射线显微镜切换源的机制
公开(公告)号：US07796725B1
公开(公告)日：2010-09-14
申请号：US12401750
申请日：2009-03-11
申请人： Ziyu Wu , Wenbing Yun , Peiping Zhu , Yuxin Wang , Qingxi Yuan , Andrei Tkachuk , Wanxia Huang , Michael Feser
发明人： Ziyu Wu , Wenbing Yun , Peiping Zhu , Yuxin Wang , Qingxi Yuan , Andrei Tkachuk , Wanxia Huang , Michael Feser
IPC分类号： G21K7/00
CPC分类号： G21K7/00 , H01J2235/00
摘要： An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.
摘要翻译： X射线成像系统使用同步加速器辐射束来获取x射线图像和至少一个集成的x射线源。该系统具有成像系统，包括由线性平移台控制的样本台，物镜X射线透镜和x射线敏感探测器系统，放置在固定的光学平台和机械平移台系统上以在同步加速器辐射时切换x射线源光束不可用。

16. 发明授权

US07400704B1 High resolution direct-projection type x-ray microtomography system using synchrotron or laboratory-based x-ray source 有权
标题翻译：使用同步加速器或基于实验室的X射线源的高分辨率直投式X射线显微镜系统
公开(公告)号：US07400704B1
公开(公告)日：2008-07-15
申请号：US11537806
申请日：2006-10-02
申请人： Wenbing Yun , David Dean Scott , David R. Trapp , Frederick William Duewer , Yuxin Wang
发明人： Wenbing Yun , David Dean Scott , David R. Trapp , Frederick William Duewer , Yuxin Wang
IPC分类号： G01N23/20 , A61B6/08 , H05G1/00
CPC分类号： G01N23/04 , A61B6/508 , G01N2223/505 , G01N2223/6113
摘要： A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especially in a proximity mode where the same is held in close proximity to the scintillator. In this case, a sample holder is provided that can rotate the sample. Further, a z-axis motion stage is also provided that is used to control distance between the sample and the scintillator.
摘要翻译：基于投影的X射线成像系统结合了投影放大倍数和光学放大倍率，以便减轻源光斑尺寸的限制，同时提高成像系统的覆盖面和效率。该系统使得样品的层析成像特别是在接近模式下，其中相邻的模式保持在闪烁体附近。在这种情况下，提供可以旋转样品的样品架。此外，还提供了用于控制样品和闪烁体之间的距离的z轴运动级。

17. 发明授权

US07388942B2 X-ray micro-tomography system optimized for high resolution, throughput, image quality 有权
标题翻译：针对高分辨率，吞吐量，图像质量优化的X射线微层析成像系统
公开(公告)号：US07388942B2
公开(公告)日：2008-06-17
申请号：US11682503
申请日：2007-03-06
申请人： Yuxin Wang , Wenbing Yun , David Dean Scott
发明人： Yuxin Wang , Wenbing Yun , David Dean Scott
IPC分类号： A61B6/03
CPC分类号： G01N23/046 , A61B6/508 , G01N2223/419
摘要： A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolution and high throughput are described. It also concerns ways to optimize the system design to obtain improved image quality.
摘要翻译：公开了可能利用基于实验室的微焦点x射线源的投影X射线成像系统。描述了用于利用具有高分辨率和高吞吐量的潜力的断层成像优化用于高质量三维图像形成的系统的技术。它还涉及到优化系统设计以获得改进的图像质量的方法。

18. 发明授权

US07268945B2 Short wavelength metrology imaging system 有权
标题翻译：短波长测量成像系统
公开(公告)号：US07268945B2
公开(公告)日：2007-09-11
申请号：US10683872
申请日：2003-10-10
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02B27/44
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/84 , G21K1/06 , G21K2207/005
摘要： An extreme ultraviolet (EUV) AIM tool for both the EUV actinic lithography and high-resolution imaging or inspection is described. This tool can be extended to lithography nodes beyond the 32 nanometer (nm) node covering other short wavelength radiation such as soft X-rays. The metrology tool is preferably based on an imaging optic referred to as an Achromatic Fresnel Optic (AFO). The AFO is a transmissive optic that includes a diffractive Fresnel zone plate lens component and a dispersion-correcting refractive lens component. It retains all of the imaging properties of a Fresnel zone plate lens, including a demonstrated resolution capability of better than 25 nanometers and freedom from image distortion. It overcomes the chromatic aberration of the Fresnel zone plate lens and has a larger usable spectral bandwidth. These optical properties and optical system designs enable the development of the AFO-based AIM tool with improved performance that has advantages compared with an AIM tool based on multilayer reflective mirror optics in both performance and cost.
摘要翻译：描述了用于EUV光化光刻和高分辨率成像或检查的极紫外（EUV）AIM工具。该工具可以扩展到覆盖其他短波长辐射（如软X射线）的32纳米（nm）节点之外的光刻节点。测量工具优选地基于被称为消色差菲涅尔光学（AFO）的成像光学器件。 AFO是包括衍射菲涅耳带平板透镜部件和色散校正折射透镜部件的透射光学器件。它保留了菲涅耳带状透镜的所有成像特性，包括显示的分辨率优于25纳米，并且不受图像失真的影响。它克服了菲涅耳带状透镜的色差，并具有较大的可用光谱带宽。这些光学性质和光学系统设计使得能够开发基于AFO的AIM工具，其性能与性能和成本基于多层反射镜光学的AIM工具相比具有优势。

19. 发明申请

US20050226376A1 Dual-band detector system for x-ray imaging of biological samples 有权
标题翻译：用于生物样品X射线成像的双波段检测器系统
公开(公告)号：US20050226376A1
公开(公告)日：2005-10-13
申请号：US10990198
申请日：2004-11-16
申请人： Wenbing Yun , Yuxin Wang , David Scott
发明人： Wenbing Yun , Yuxin Wang , David Scott
IPC分类号： G01J1/42 , G01N23/04 , G01T1/00 , G01T1/20 , G01T1/202
CPC分类号： G01T1/202 , G01T1/2018 , G21K2207/005
摘要： A digital dual-band detector functions as an imaging platform capable of extracting hard and soft tissue images, for example. The detector has a first detector system comprising a first scintillator for converting x-rays from a sample to an first optical signal, and a first detector for detecting the first optical signal in combination with a second detector system comprising a second scintillator for converting x-rays from the sample and passing through the first scintillator to a second optical signal, and a second detector for detecting the second optical signal. The detector can facilitate the implementation and deployment of recent developments and can permit low cost practical deployment in clinical applications as well as biomedical research applications where significant improvement in spatial resolution and image contrast is required. These improvements include an increase of feature detection sensitivity by more than an order of magnitude, simultaneous imaging of soft and hard (or mineralized) tissue at extremely high time resolution that is not limited by detector readout speed, and an increase in the signal to noise ratio of images by reducing the substantial background resulting from Compton scattering.
摘要翻译：例如，数字双频带检测器用作能够提取硬和软组织图像的成像平台。检测器具有第一检测器系统，该第一检测器系统包括用于将来自样品的x射线转换成第一光信号的第一闪烁器，以及用于与第二检测器系统一起检测第一光信号的第一检测器，该第二检测器系统包括第二闪烁器，来自样品的光并通过第一闪烁体到第二光信号;以及第二检测器，用于检测第二光信号。检测器可以促进近期发展的实施和部署，并且可以允许临床应用中的低成本实际部署以及需要显着改善空间分辨率和图像对比度的生物医学研究应用。这些改进包括将特征检测灵敏度提高超过一个数量级，以非常高的时间分辨率同时成像软和硬（或矿化的）组织，其不受检测器读出速度的限制，并且信号与噪声的增加通过减少由康普顿散射产生的实质背景，图像的比例。

20. 发明授权

US07561662B2 X-ray micro-tomography system optimized for high resolution, throughput, image quality 有权
标题翻译：针对高分辨率，吞吐量，图像质量优化的X射线微层析成像系统
公开(公告)号：US07561662B2
公开(公告)日：2009-07-14
申请号：US12029790
申请日：2008-02-12
申请人： Yuxin Wang , Wenbing Yun , David Dean Scott
发明人： Yuxin Wang , Wenbing Yun , David Dean Scott
IPC分类号： G01N23/00
CPC分类号： G01N23/046 , A61B6/508 , G01N2223/419
摘要： A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolution and high throughput are described. It also concerns ways to optimize the system design to obtain improved image quality.
摘要翻译：公开了可能利用基于实验室的微焦点x射线源的投影X射线成像系统。描述了用于利用具有高分辨率和高吞吐量的潜力的断层成像优化用于高质量三维图像形成的系统的技术。它还涉及到优化系统设计以获得改进的图像质量的方法。

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