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    • 11. 发明授权
    • Two-dimensional tunable filter array for a matrix of integrated fiber optic input-output light channels
    • 用于集成光纤输入输出光通道矩阵的二维可调滤波器阵列
    • US06449410B1
    • 2002-09-10
    • US09811142
    • 2001-03-16
    • Long Que
    • Long Que
    • G02B626
    • G02B6/12007G02B6/29361G02B6/29395G02B6/4214
    • An integrated two-dimensional tunable filter array for a matrix of fiber-optic input-output light channels includes a tunable filter chip array sandwiched between a first semiconductive wafer in which the guiding grooves for the input light channels terminate in a 45° reflecting surface causing a 90° turn of the light beams into each tunable filter of the array. Then a third semiconductive substrate is bonded to the other side of the tunable filter array to receive the reflected light beams. A 45° mirror on a {111} plane may be formed by slow etching of a {100} type wafer or the use of a {100} type wafer with a 9.7° off axis cut.
    • 用于光纤输入 - 输出光通道矩阵的集成的二维可调滤波器阵列包括夹在第一半导体晶片之间的可调滤波器芯片阵列,其中用于输入光通道的引导槽终止于45°反射表面,导致 将光束的90°转换成阵列的每个可调滤波器。 然后,第三半导体衬底被结合到可调滤波器阵列的另一侧以接收反射光束。 {111}平面上的45°反射镜可以通过缓慢蚀刻{100}型晶片或使用具有9.7°偏轴切割的{100}型晶片来形成。
    • 12. 发明授权
    • Micromechanical phase-shifting gate optical modulator
    • 微机械相移门光调制器
    • US06377718B1
    • 2002-04-23
    • US09535312
    • 2000-03-24
    • Long QueGunawan WitjaksonoYogesh B. Gianchandani
    • Long QueGunawan WitjaksonoYogesh B. Gianchandani
    • G02F1035
    • G02B6/3524G02B6/3532G02B6/3546G02B6/357G02B6/358G02B6/3584G02B6/3594
    • A micromechanical optical modulator includes an input optical waveguide that projects a beam across a gap to an output optical waveguide. A phase shifting gate is mounted between the input and output optical waveguides and has a light transmissive panel which may have at least two sections of different thicknesses. The phase shifting gate is translatable between a position in which the beam of light is transmitted and a second position in which a section of the gate panel is interposed in the beam path and the beam of light is reflected by interference effects. A micromechanical actuator may be connected to the phase shifting gate to switch it between its positions. The optical waveguides may be mounted at an angle to the surfaces of the sections of the gate such that when the beam is reflected from the gate it is directed to a second output optical waveguide, which receives the beam and directs it on a new path, thereby allowing switching of optical beam paths in an optical communication system. The optical modulator may also be used as a sensor to detect effects which displace the phase shifting gate, such as in an accelerometer in which a mass is connected to the gate to move the gate when the mass is subjected to accelerations.
    • 微机械光学调制器包括将光束跨越间隙投射到输出光波导的输入光波导。 相移门安装在输入和输出光波导之间,并具有透光面板,其可具有不同厚度的至少两个部分。 相移门可以在其中透射光束的位置和其中栅极面板的一部分插入在光束路径中并且光束被干涉效应反射的第二位置之间平移。 微机械致动器可以连接到相移门以在其位置之间切换。 光波导可以与栅极的部分的表面成角度地安装,使得当光束从栅极反射时,其被引导到第二输出光波导,其接收光束并将其引导到新的路径上, 从而允许光通信系统中的光束路径的切换。 光调制器也可以用作传感器,以检测移位相移门的效应,例如在质量连接到门的加速度计中,当质量受到加速时移动门。
    • 16. 发明授权
    • Piezoelectric photovoltaic micropower generator and method
    • 压电光伏微功率发电机及方法
    • US08901802B1
    • 2014-12-02
    • US13085561
    • 2011-04-13
    • Long Que
    • Long Que
    • H01L41/39
    • H02N2/186H01L41/1136H01L41/1876
    • An energy harvesting device capable of harvesting multiple forms of energy. The device includes a base, a piezoelectric cantilever, and a carbon nanotube film. The piezoelectric cantilever includes a piezoelectric layer disposed between a top electrode and a bottom electrode. A proximate end of the piezoelectric cantilever is supported by the base. The base does not support a distal end of the piezoelectric cantilever. The piezoelectric cantilever is capable of converting vibration energy into electrical power. The carbon nanotube film is capable of absorbing electromagnetic radiation and thermal radiation, and thereafter transmitting heat to the piezoelectric layer. The piezoelectric layer is mechanically deformed in response to said heating, thereby generating electrical power.
    • 能够收获多种能量的能量收集装置。 该装置包括基底,压电悬臂和碳纳米管膜。 压电悬臂包括设置在顶电极和底电极之间的压电层。 压电悬臂的近端由基座支撑。 底座不支撑压电悬臂的远端。 压电悬臂能够将振动能量转化为电力。 碳纳米管膜能够吸收电磁辐射和热辐射,然后将热量传递到压电层。 压电层响应于所述加热而机械变形,从而产生电力。
    • 20. 发明授权
    • Gating voltage control system and method for electrostatically actuating a micro-electromechanical device
    • 门电压控制系统和静电驱动微机电装置的方法
    • US07473859B2
    • 2009-01-06
    • US11622483
    • 2007-01-12
    • Joshua Isaac WrightKanakasabapathi SubramanianWilliam James PremerlaniJohn Norton ParkChristopher KeimelLong QueKuna Venkat Satya Rama KishoreAbhijeet Dinkar SatheXuefeng WangEdward Keith Howell
    • Joshua Isaac WrightKanakasabapathi SubramanianWilliam James PremerlaniJohn Norton ParkChristopher KeimelLong QueKuna Venkat Satya Rama KishoreAbhijeet Dinkar SatheXuefeng WangEdward Keith Howell
    • H01H51/22
    • H01H59/0009H01H47/22Y10T307/937
    • A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit electrically coupled to a gate terminal of the device to apply a gating voltage. The gating voltage control system may further comprise a controller electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.
    • 提供了门控电压控制系统和方法,用于静电致动微机电系统(MEMS)装置,例如MEMS开关。 该装置可以包括静电响应致动器,其可通过间隙移动,以将装置致动到对应于第一致动状态(例如,闭合开关状态)和第二致动状态(例如,开启状态)之一的相应致动状态, 。 门控电压控制系统可以包括电耦合到该器件的栅极端子以施加选通电压的驱动电路。 门控电压控制系统还可以包括电耦合到驱动电路的控制器,以根据门控电压控制顺序控制施加到门控端子的门控电压。 门控电压控制序列可以包括用于将门控电压升高到电压电平的第一间隔,用于产生足以通过由致动器穿过的间隙的一部分来加速致动器以达到相应的致动状态的静电力。 门控电压控制序列还可以包括用于将门控电压降低到足以减小作用在可移动致动器上的静电力的水平的第二间隔。 这允许减小致动器接合接触件以建立第一致动条件的力的量,或者避免致动器在达到第二致动状态时的过冲位置。