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    • 11. 发明授权
    • Method for manufacturing bonded wafer and outer-peripheral grinding machine of bonded wafer
    • 接合晶片的制造方法以及接合晶片的外周磨削机的制造方法
    • US07727860B2
    • 2010-06-01
    • US11920761
    • 2006-05-18
    • Susumu MiyazakiTokio TakeiKeiichi Okabe
    • Susumu MiyazakiTokio TakeiKeiichi Okabe
    • H01L21/00
    • H01L21/304H01L21/2007H01L21/76256
    • The present invention provides a method for manufacturing a bonded wafer, which includes at least the steps of bonding a bond wafer and a base wafer, grinding an outer peripheral portion of the bonded bond wafer, etching off an unbonded portion of the ground bond wafer, and then reducing a thickness of the bond wafer, wherein, in the step of grinding the outer peripheral portion, the bonded bond wafer is ground so as to form a groove along the outer peripheral portion of the bond wafer to form an outer edge portion outside the groove; and in the subsequent step of etching, the outer edge portion is removed together with the groove portion of the bond wafer to form a terrace portion where the base wafer is exposed at the outer peripheral portion of the bonded wafer. Thus, it is possible to provide a method for manufacturing a bonded wafer, which can reduce the number of dimples formed in a terrace portion of a base wafer upon removing an outer peripheral portion of a bonded bond wafer.
    • 本发明提供一种接合晶片的制造方法,其至少包括接合晶片和基底晶片的接合步骤,研磨接合接合晶片的外周部分,蚀刻接地晶片的未结合部分, 然后减小接合晶片的厚度,其中,在研磨外周部分的步骤中,接合的接合晶片被研磨以沿着接合晶片的外周部分形成凹槽以形成外部边缘部分 凹槽 并且在随后的蚀刻步骤中,外边缘部分与接合晶片的沟槽部分一起被去除,以形成露台部分,其中基底晶片在接合晶片的外周部分露出。 因此,可以提供一种用于制造接合晶片的方法,其可以在去除接合的接合晶片的外周部分时减少形成在基底晶片的台阶部分中的凹坑的数量。
    • 12. 发明授权
    • Legged mobile robot leg structure
    • 有腿的移动机器人腿结构
    • US07240747B2
    • 2007-07-10
    • US10416900
    • 2001-11-16
    • Susumu MiyazakiHideaki Takahashi
    • Susumu MiyazakiHideaki Takahashi
    • B62D51/06
    • B25J13/085B25J17/0275
    • A legged mobile robot leg structure is provided in which a lower leg part (24) is connected to the lower end of an upper leg part (23) through a knee joint (27), a foot part (25) having a six-axis force sensor (60) is connected to the lower end of the lower leg part (24) through an ankle joint (28), and the ankle joint (28) supports the foot part (25) so that the foot part (25) can pitch around a lateral axis (Ly) and roll around a fore-and-aft axis (Lx) relative to the lower leg part (24). A pitch motor (34) for making the foot part (25) pitch around the lateral axis (Ly) is supported on the lower leg part (24) at a position above the ankle joint (28), and a roll motor (35) for making the foot part (25) roll around the fore-and-aft axis (Lx) is supported on the lower leg part (24) at a position above the ankle joint (28). The driving force for driving the lower leg part (24) can thereby be reduced by decreasing the moment of inertia around the knee joint (27), and the influence of noise of the motors (34, 35) on the six-axis force sensor (60) provided on the foot part (25) can be minimized.
    • 提供了一种腿式移动式机器人脚结构,其中小腿部分(24)通过膝关节(27)连接到大腿部分(23)的下端,具有六轴的脚部(25) 力传感器(60)通过踝关节(28)连接到小腿部(24)的下端,踝关节(28)支撑脚部(25),使得脚部(25)能够 围绕横向轴线(Ly)倾斜并相对于小腿部部分(24)围绕前后轴线(Lx)卷绕。 用于使脚部(25)围绕横轴(Ly)的间距的俯仰马达(34)在踝关节(28)上方的位置处支撑在小腿部(24)上,并且辊马达(35) 用于使所述脚部(25)围绕所述前后轴线(Lx)卷绕在所述踝关节(28)上方的位置处支撑在所述小腿部(24)上。 因此,可以通过减小膝关节(27)周围的惯性矩来减小用于驱动小腿部(24)的驱动力,并且可以减小电动机(34,35)的噪声对六轴力传感器 设置在脚部(25)上的(60)可以最小化。
    • 15. 发明授权
    • Legged mobile robot
    • 有腿的移动机器人
    • US07111696B2
    • 2006-09-26
    • US10515928
    • 2004-02-27
    • Susumu MiyazakiTomoko Otani
    • Susumu MiyazakiTomoko Otani
    • B62D51/06
    • B62D57/032B25J9/102Y10T74/20299
    • In a legged mobile robot (10) having a motor (42) that rotates the ankle joint (26R (26L)) about a right-and-left axis of the robot (26RY (26LY)) and a speed reducer (58) that reduces speed of an output of the motor, wherein the motor is disposed at a same position as the knee joint (22R (22L)) or at the thigh link (16R (16L)) such that the speed reducer is disposed at the shank link. With this, it becomes possible to reduce the weight of the distal end of the leg (12R (12L)) can be reduced, whereby enabling to reduce the inertial force generated in the leg during movement or locomotion of the robot.
    • 在具有使所述踝关节(26R(26L))围绕所述机器人(26RY(26LY))的左右轴线旋转的马达(42)的有腿移动机器人(10)和减速器 (58),其降低所述电动机的输出的速度,其中所述电动机设置在与所述膝关节(22R(22L))相同的位置处,或者位于所述大腿连杆(16 R(16L))处, 减速器设置在柄连杆上。 由此,可以减小脚部(12R(12L))的远端的重量,从而能够降低机器人的移动或移动期间腿部产生的惯性力。
    • 16. 发明授权
    • Phosphor for vacuum ultraviolet ray-excited light-emitting element
    • 真空紫外线激发发光元件用荧光粉
    • US06960310B2
    • 2005-11-01
    • US10695981
    • 2003-10-30
    • Yuichiro ImanariTakayoshi EzuharaSusumu Miyazaki
    • Yuichiro ImanariTakayoshi EzuharaSusumu Miyazaki
    • C09K11/78C09K11/77C09K11/80H01J11/22H01J11/34H01J11/42H01J61/44H01J11/00C09K11/55C09K11/64
    • C09K11/7774C09K11/7706H01J61/44
    • A phosphor for vacuum ultraviolet ray-excited light-emitting elements which comprises a compound represented by the following formula (I): M11−a−b−c−dM2aM3bM41−eM511−fM6c−d+e+fO19−(b+c+f)/2  (I) (wherein M1 is at least one element selected from the group consisting of La, Y and Gd, M2 is at least one element selected from the group consisting of Ce and Tb, M3 is at least one element selected from the group consisting of Ca, Sr and Ba, M4 is at least one element selected from the group consisting of Mg and Zn, M5 is at least one element selected from the group consisting of Al and Ga, and M6 is at least one element selected from the group consisting of Mn and Eu, and a, b, c, d, e and f are numbers satisfying the conditions of 0≦a
    • 一种真空紫外线激发发光元件用荧光体,其含有下述式(I)表示的化合物:&lt;&lt;线内式记载=“在线式”末端=“铅”→M > 1 1-abcd 2 M 4 - 1-e M 5 - - - - - - - - - - c-d + e + f O 19-(b + c + f)/ 2(I)<?in-line-formula description =“In-line Formulas”end = “尾”→(其中M 1至少1个选自La,Y和Gd的元素,M 2 O 2是选自以下的至少一种元素: 由Ce和Tb组成的组,M 3+是从Ca,Sr和Ba组成的组中选择的至少一种元素,M 4是选自以下的至少一种元素: 由Mg和Zn组成的组,M 5+是选自Al和Ga中的至少一种元素,M 6是选自以下的至少一种元素: 由Mn和E组成 u和a,b,c,d,e和f是满足条件0 <= a <1,0 <= b <= 0.6,0 <= c <= 0.5,0 <= d <= 0.5 ,0 <= e <1,0,0≤f<1,a + b + c + d <1和0