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11. 发明申请

US20050045104A1 Plasma processing apparatus 审中-公开
标题翻译：等离子体处理装置
公开(公告)号：US20050045104A1
公开(公告)日：2005-03-03
申请号：US10795350
申请日：2004-03-09
申请人： Masatsugu Arai , Ryujiro Udo , Seiichiro Kanno , Tsuyoshi Yoshida
发明人： Masatsugu Arai , Ryujiro Udo , Seiichiro Kanno , Tsuyoshi Yoshida
IPC分类号： F25B1/00 , H01L21/00 , H01L21/3065 , C23C16/00
CPC分类号： H01L21/67248 , H01J37/32082 , H01J2237/2001 , H01L21/67109
摘要： A plasma processing apparatus having an electrostatic chucking electrode that allows temperature control of a semiconductor wafer during etching process with high efficiency comprises: a holder stage comprising an electrode block S having a dielectric film 4 on the surface thereof and a coolant flow passage 6 therein, in which temperature control is performed while holding a semiconductor wafer W on the dielectric film on the surface of the electrode block; and a cooling cycle 50 including a compressor 52, a condenser 55, an expansion valve 53, a heat exchanger 54 having a heater built therein, and an evaporator, wherein the temperature control of the electrode block S is performed by using a direct-expansion-type temperature controller in which the electrode block S is used as the evaporator of the cooling cycle, and the coolant is directly circulated and expanded inside the electrode block.
摘要翻译：一种具有静电夹持电极的等离子体处理装置，其能够高效率地进行蚀刻处理时的半导体晶片的温度控制，包括：保持台，其具有在其表面具有电介质膜4的电极块S和冷却剂流路6，在将半导体晶片W保持在电极块的表面上的电介质膜上的同时进行温度控制; 以及包括压缩机52，冷凝器55，膨胀阀53，内置加热器的热交换器54和蒸发器的冷却循环50，其中，电极块S的温度控制通过使用直接膨胀型温度控制器，其中电极块S用作冷却循环的蒸发器，并且冷却剂在电极块内直接循环和膨胀。

12. 发明申请

US20080017107A1 Plasma processing apparatus 审中-公开
标题翻译：等离子体处理装置
公开(公告)号：US20080017107A1
公开(公告)日：2008-01-24
申请号：US11798646
申请日：2007-05-15
申请人： Masatsugu Arai , Ryujiro Udo , Seiichiro Kanno , Tsuyoshi Yoshida
发明人： Masatsugu Arai , Ryujiro Udo , Seiichiro Kanno , Tsuyoshi Yoshida
IPC分类号： C23C16/00
CPC分类号： H01L21/67248 , H01J37/32082 , H01J2237/2001 , H01L21/67109
摘要： A plasma processing apparatus having an electrostatic chucking electrode that allows temperature control of a semiconductor wafer during etching process with high efficiency comprises: a holder stage comprising an electrode block S having a dielectric film 4 on the surface thereof and a coolant flow passage 6 therein, in which temperature control is performed while holding a semiconductor wafer W on the dielectric film on the surface of the electrode block; and a cooling cycle 50 including a compressor 52, a condenser 55, an expansion valve 53, a heat exchanger 54 having a heater built therein, and an evaporator, wherein the temperature control of the electrode block S is performed by using a direct-expansion-type temperature controller in which the electrode block S is used as the evaporator of the cooling cycle, and the coolant is directly circulated and expanded inside the electrode block.
摘要翻译：一种具有静电夹持电极的等离子体处理装置，其能够高效率地进行蚀刻处理时的半导体晶片的温度控制，包括：保持台，其具有在其表面具有电介质膜4的电极块S和冷却剂流路6，在将半导体晶片W保持在电极块的表面上的电介质膜上的同时进行温度控制; 以及包括压缩机52，冷凝器55，膨胀阀53，内置加热器的热交换器54和蒸发器的冷却循环50，其中，电极块S的温度控制通过使用直接膨胀型温度控制器，其中电极块S用作冷却循环的蒸发器，并且冷却剂在电极块内直接循环和膨胀。

13. 发明申请

US20060121195A1 Plasma processing apparatus and method for manufacturing electrostatic chuck 审中-公开
标题翻译：等离子体处理装置及其制造方法
公开(公告)号：US20060121195A1
公开(公告)日：2006-06-08
申请号：US11327447
申请日：2006-01-09
申请人： Ryujiro Udo , Masatsugu Arai , Masanori Kadotani
发明人： Ryujiro Udo , Masatsugu Arai , Masanori Kadotani
IPC分类号： C23C14/32 , C23C16/00 , C23C14/00
CPC分类号： H01L21/67069 , C25D11/005 , C25D11/026 , C25D11/04 , H01J37/32082 , H01L21/6831 , H01L21/6833
摘要： An electrostatic chuck comprising an insulating base 6, a plurality of conductive aluminum thin films 4a, 4b deposited on the surface of the base, and alumite films 2a, 2b formed by anodizing the surfaces of the conductive thin films 4a, 4b, wherein the conductive thin films 4a, 4b are each provided with a DC voltage of a different polarity so that a surface chucking a wafer 7 is electrostatically bipolar.
摘要翻译：一种静电卡盘，其包括绝缘基体6，沉积在基底表面上的多个导电铝薄膜4a，4b和通过阳极氧化导电薄膜4a的表面形成的耐酸铝膜2a，如图4b所示，其中导电薄膜4a，4b分别具有不同极性的DC电压，使得夹持晶片7的表面是静电双极的。

14. 发明授权

US06838833B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US06838833B2
公开(公告)日：2005-01-04
申请号：US10670288
申请日：2003-09-26
申请人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
发明人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
IPC分类号： H01J37/32 , H01L21/00 , H01L21/683 , H01J7/24
CPC分类号： H01L21/67109 , H01J37/32724 , H01J2237/2001 , H01L21/6833
摘要： A plasma processing apparatus provided with a holding stage of a system in which a temperature of an electrode block is controlled so as to control the temperature of a semiconductor wafer. The electrode block is provided with at least first and second independent temperature controllers on inner and outer sides thereof, and a slit for suppressing heat transfer is provided in the electrode block between the first and second temperature controllers.
摘要翻译：一种等离子体处理装置，其具有控制电极块的温度以控制半导体晶片的温度的系统的保持台。电极块在其内侧和外侧设置有至少第一和第二独立温度控制器，并且在第一和第二温度控制器之间的电极块中设置用于抑制热传递的狭缝。

15. 发明授权

US06897403B2 Plasma processing method and plasma processing apparatus 失效
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US06897403B2
公开(公告)日：2005-05-24
申请号：US10378601
申请日：2003-03-05
申请人： Ryujiro Udo , Masatsugu Arai , Motohiko Yoshigai , Masanori Kadotani
发明人： Ryujiro Udo , Masatsugu Arai , Motohiko Yoshigai , Masanori Kadotani
IPC分类号： H01J37/32 , H01L21/00 , H01L21/683 , H01L21/687 , B23K9/00
CPC分类号： H01L21/6875 , H01J37/32431 , H01J2237/2001 , H01L21/67109 , H01L21/6831
摘要： A plasma processing apparatus capable of processing the surface of a workpiece more precisely is provided. The plasma processing apparatus for supplying a gas between a sample and a sample table to generate plasma for processing the sample, comprises an adjusting device for changing a pressure supplied to a central side of the sample and a pressure of the gas supplied to an outer peripheral side as processing of the sample progresses.
摘要翻译：提供了能够更精确地处理工件的表面的等离子体处理装置。用于在样品和样品台之间提供气体以产生用于处理样品的等离子体的等离子体处理装置包括调节装置，用于改变供给到样品的中心侧的压力和供给到外周的气体的压力作为样品进行的处理。

16. 发明授权

US06664738B2 Plasma processing apparatus 有权
公开(公告)号：US06664738B2
公开(公告)日：2003-12-16
申请号：US10083381
申请日：2002-02-27
申请人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
发明人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
IPC分类号： H01J724
CPC分类号： H01L21/67109 , H01J37/32724 , H01J2237/2001 , H01L21/6833
摘要： There is provided a plasmar processing apparatus capable of positively controlling the temperature distribution of a semiconductor wafer during etching processing in a clear state, wherein an electrode block is provided with independent slits as coolant flow paths on the inner and outer peripheries and, at the same time, between these slits is formed a slit for suppressing heat transfer between the inner and outer peripheries, and owing to this slit for suppressing heat transfer, a uniform temperature in the electrode block is suppressed and thus it is possible to obtain an arbitrary independent temperature in the plane of the electrode block and positive and clear control of temperature distribution patterns can be performed.

17. 发明申请

US20140174708A1 Vehicle Device Temperature Adjustment System 有权
标题翻译：车载温度调节系统
公开(公告)号：US20140174708A1
公开(公告)日：2014-06-26
申请号：US14236095
申请日：2011-08-17
申请人： Yuki Akiyama , Tadashi Osaka , Masatsugu Arai
发明人： Yuki Akiyama , Tadashi Osaka , Masatsugu Arai
IPC分类号： B60K11/06 , B60H1/00
CPC分类号： F16K17/36 , B60H1/00271 , B60H1/00278 , B60H1/00978 , B60K11/02 , B60K11/04 , B60K11/06 , B60K2001/003 , B60K2001/005 , B60K2001/006 , B60L1/003 , B60L3/0046 , B60L3/0069 , B60L11/1874 , B60L2240/36 , B60L2240/545 , B60R16/00 , B60Y2306/01 , B60Y2306/05 , H01M10/625 , H01M10/6567 , H01M10/6568 , Y02T10/7005 , Y02T10/705
摘要： A temperature-adjustment system for a vehicle includes temperature-adjustment passages and obtained by circularly connecting a battery, an inverter, a DC/DC converter, a traveling motor, and a pump that circulates the heat medium that adjusts temperatures by cooling/heating the heat generation elements, are provided. The temperature-adjustment passages and are provided with proportional valves that interrupt the flow of the heat medium and adjust the flow volume of the heat medium, an air flow-in part that introduces air into the battery temperature-adjustment passage, and a heat medium discharge part that discharges the heat medium from the temperature-adjustment passage to outside of the vehicle. The proportional valve, air flow-in part, battery, pump, and heat medium discharge part are preferably arranged in that order, and the proportional valve is closed and an air take-in valve and a heat medium discharge valve are opened.
摘要翻译：车辆温度调节系统包括温度调节通道，其通过循环连接电池，逆变器，DC / DC转换器，行进电动机和使通过冷却/加热调节温度的热介质循环的泵而获得提供发热元件。温度调节通道设置有比例阀，其阻断热介质的流动并调节热介质的流量，将空气引入部分，将空气引入电池温度调节通道;以及热介质将热介质从温度调节通道排出到车辆外部的排出部。比例阀，空气流入部分，电池，泵和热介质排出部优选按顺序布置，并且比例阀关闭，并且打开空气吸入阀和热介质排出阀。

18. 发明申请

US20130118820A1 ELECTRIC DRIVE SYSTEM FOR VEHICLE 有权
标题翻译：车用电驱动系统
公开(公告)号：US20130118820A1
公开(公告)日：2013-05-16
申请号：US13577196
申请日：2010-08-25
申请人： Atsushi Yokoyama , Masatsugu Arai , Tadashi Osaka , Itsuro Sawada
发明人： Atsushi Yokoyama , Masatsugu Arai , Tadashi Osaka , Itsuro Sawada
IPC分类号： B60K11/02 , B60K1/00
CPC分类号： B60K11/02 , B60H1/00385 , B60H1/08 , B60K1/00 , B60K11/04 , B60K2001/003 , B60K2001/005 , B60K2001/006 , B60L11/1874 , B60L11/1892 , B60L2200/26 , Y02T10/705 , Y02T90/34
摘要： An electric drive system for a vehicle includes: an electric drive unit that electrically drives the vehicle; and a cooling unit that cools the electric drive unit, wherein: the electric drive unit and the cooling unit are mounted at a body frame of the vehicle via an elastic support member, the electric drive unit and the cooling unit being configured as an integrated unit.
摘要翻译：一种用于车辆的电驱动系统包括：电驱动车辆的电驱动单元; 以及冷却单元，其冷却所述电驱动单元，其中：所述电驱动单元和所述冷却单元经由弹性支撑构件安装在所述车辆的车身框架处，所述电驱动单元和所述冷却单元被配置为集成单元。

19. 发明申请

US20090136835A1 LITHIUM ION SECONDARY BATTERY 失效
标题翻译：锂离子二次电池
公开(公告)号：US20090136835A1
公开(公告)日：2009-05-28
申请号：US12269081
申请日：2008-11-12
申请人： Kenji Nakai , Akinori Tada , Masatsugu Arai , Kinya Aota
发明人： Kenji Nakai , Akinori Tada , Masatsugu Arai , Kinya Aota
IPC分类号： H01M2/18 , B23K26/20
CPC分类号： H01M10/0525 , H01M2/263 , H01M10/0431 , H01M10/0587 , Y02T10/7011 , Y10T29/49108
摘要： A lithium ion secondary battery comprises a case; a positive electrode foil having a current collector foil on which a positive electrode material is coated; an negative electrode film having a current collector film on which an negative electrode material is coated; a separator sandwiched between the positive electrode film and the negative electrode film, the films and the separator being arranged in multiple layers to form a group of electrodes enclosed in the case, a positive collector disc plate connected to the positive electrode side of the group of the electrodes, and an negative collector disc plate connected to the negative electrode side of the group of the electrodes. Each of the current collector foils has a non-coated portion extended along one side of the foils, a part or the entire of the non-coated portion being exposed from a side of the separator. At least one of the collector disc plate is welded to the side of the exposed non-coated portion of the group of the electrodes. The periphery of the collector disc plate has an annular portion, which is bent towards the group of electrodes.
摘要翻译：锂离子二次电池包括壳体; 具有集电箔的正极箔，其上涂覆有正极材料; 具有集电体膜的负极膜，其上涂覆有负极材料; 夹在正极膜和负极膜之间的隔膜，膜和隔膜被布置成多层以形成封闭在壳体中的一组电极，正极集电板盘连接到正极集电体的正极侧所述电极和与所述电极组的负极侧连接的负极集电板。每个集电箔具有沿箔的一侧延伸的未涂覆部分，未涂覆部分的一部分或全部从分离器的侧面露出。集电盘片中的至少一个焊接到该组电极的暴露未涂覆部分的一侧。集电盘片的周边具有朝向该组电极弯曲的环形部分。

20. 发明授权

US08839894B2 Electric drive system for vehicle 有权
标题翻译：车用电驱动系统
公开(公告)号：US08839894B2
公开(公告)日：2014-09-23
申请号：US13577196
申请日：2010-08-25
申请人： Atsushi Yokoyama , Masatsugu Arai , Tadashi Osaka , Itsuro Sawada
发明人： Atsushi Yokoyama , Masatsugu Arai , Tadashi Osaka , Itsuro Sawada
IPC分类号： B60K11/02 , B60H1/00 , B60L11/18 , B60H1/08 , B60K1/00
CPC分类号： B60K11/02 , B60H1/00385 , B60H1/08 , B60K1/00 , B60K11/04 , B60K2001/003 , B60K2001/005 , B60K2001/006 , B60L11/1874 , B60L11/1892 , B60L2200/26 , Y02T10/705 , Y02T90/34
摘要： An electric drive system for a vehicle includes: an electric drive unit that electrically drives the vehicle; and a cooling unit that cools the electric drive unit, wherein: the electric drive unit and the cooling unit are mounted at a body frame of the vehicle via an elastic support member, the electric drive unit and the cooling unit being configured as an integrated unit.
摘要翻译：一种用于车辆的电驱动系统包括：电驱动车辆的电驱动单元; 以及冷却单元，其冷却所述电驱动单元，其中：所述电驱动单元和所述冷却单元经由弹性支撑构件安装在所述车辆的车身框架处，所述电驱动单元和所述冷却单元被配置为集成单元。

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