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    • 1. 发明申请
    • Plasma processing apparatus
    • 等离子体处理装置
    • US20080017107A1
    • 2008-01-24
    • US11798646
    • 2007-05-15
    • Masatsugu AraiRyujiro UdoSeiichiro KannoTsuyoshi Yoshida
    • Masatsugu AraiRyujiro UdoSeiichiro KannoTsuyoshi Yoshida
    • C23C16/00
    • H01L21/67248H01J37/32082H01J2237/2001H01L21/67109
    • A plasma processing apparatus having an electrostatic chucking electrode that allows temperature control of a semiconductor wafer during etching process with high efficiency comprises: a holder stage comprising an electrode block S having a dielectric film 4 on the surface thereof and a coolant flow passage 6 therein, in which temperature control is performed while holding a semiconductor wafer W on the dielectric film on the surface of the electrode block; and a cooling cycle 50 including a compressor 52, a condenser 55, an expansion valve 53, a heat exchanger 54 having a heater built therein, and an evaporator, wherein the temperature control of the electrode block S is performed by using a direct-expansion-type temperature controller in which the electrode block S is used as the evaporator of the cooling cycle, and the coolant is directly circulated and expanded inside the electrode block.
    • 一种具有静电夹持电极的等离子体处理装置,其能够高效率地进行蚀刻处理时的半导体晶片的温度控制,包括:保持台,其具有在其表面具有电介质膜4的电极块S和冷却剂流路6, 在将半导体晶片W保持在电极块的表面上的电介质膜上的同时进行温度控制; 以及包括压缩机52,冷凝器55,膨胀阀53,内置加热器的热交换器54和蒸发器的冷却循环50,其中,电极块S的温度控制通过使用直接膨胀 型温度控制器,其中电极块S用作冷却循环的蒸发器,并且冷却剂在电极块内直接循环和膨胀。
    • 2. 发明申请
    • Plasma processing apparatus
    • 等离子体处理装置
    • US20050045104A1
    • 2005-03-03
    • US10795350
    • 2004-03-09
    • Masatsugu AraiRyujiro UdoSeiichiro KannoTsuyoshi Yoshida
    • Masatsugu AraiRyujiro UdoSeiichiro KannoTsuyoshi Yoshida
    • F25B1/00H01L21/00H01L21/3065C23C16/00
    • H01L21/67248H01J37/32082H01J2237/2001H01L21/67109
    • A plasma processing apparatus having an electrostatic chucking electrode that allows temperature control of a semiconductor wafer during etching process with high efficiency comprises: a holder stage comprising an electrode block S having a dielectric film 4 on the surface thereof and a coolant flow passage 6 therein, in which temperature control is performed while holding a semiconductor wafer W on the dielectric film on the surface of the electrode block; and a cooling cycle 50 including a compressor 52, a condenser 55, an expansion valve 53, a heat exchanger 54 having a heater built therein, and an evaporator, wherein the temperature control of the electrode block S is performed by using a direct-expansion-type temperature controller in which the electrode block S is used as the evaporator of the cooling cycle, and the coolant is directly circulated and expanded inside the electrode block.
    • 一种具有静电夹持电极的等离子体处理装置,其能够高效率地进行蚀刻处理时的半导体晶片的温度控制,包括:保持台,其具有在其表面具有电介质膜4的电极块S和冷却剂流路6, 在将半导体晶片W保持在电极块的表面上的电介质膜上的同时进行温度控制; 以及包括压缩机52,冷凝器55,膨胀阀53,内置加热器的热交换器54和蒸发器的冷却循环50,其中,电极块S的温度控制通过使用直接膨胀 型温度控制器,其中电极块S用作冷却循环的蒸发器,并且冷却剂在电极块内直接循环和膨胀。
    • 3. 发明授权
    • Construction-equipment bucket-tooth assembly and bucket provided to same
    • 施工设备铲斗组合和铲斗提供相同
    • US08997383B2
    • 2015-04-07
    • US13818770
    • 2012-04-26
    • Daijirou ItouTakanori NagataEiji AmadaTsuyoshi Yoshida
    • Daijirou ItouTakanori NagataEiji AmadaTsuyoshi Yoshida
    • E02F9/28
    • E02F9/2833E02F9/2841E02F9/2891
    • A bucket tooth assembly is mounted to an adapter provided to a distal end part of a bucket of construction equipment. The bucket assembly includes a bucket tooth and a latching member. The bucket tooth has a cavity for inserting the adapter and a through-hole that is provided to the side face and communicates through to the adapter when the bucket tooth has been mounted to the adapter. The through-hole has a center axis. The latching member is fitted inside the through-hole and having a rotational axis disposed along a direction of the center axis and a bottom part provided to an end on an adapter side in an axial direction. The latching member is rotated to switch between a first state in which the bottom part is held inside the through-hole and a second state in which the bottom part protrudes toward a concave portion on the adapter side.
    • 铲斗齿组件安装到设置在一桶施工设备的远端部分的适配器上。 铲斗组件包括铲斗齿和闩锁构件。 铲斗齿具有用于插入适配器的空腔和设置到侧面的通孔,并且当铲斗齿已经安装到适配器上时,该通孔连接到适配器。 通孔具有中心轴。 锁定构件配合在通孔的内部,具有沿着中心轴线的方向设置的旋转轴线和设置在轴向方向上的适配器侧的端部的底部。 锁定构件被旋转以在其中底部保持在通孔内的第一状态和底部朝接合器侧的凹部突出的第二状态之间切换。
    • 6. 发明授权
    • Image reading apparatus
    • 图像读取装置
    • US07202983B2
    • 2007-04-10
    • US10222823
    • 2002-08-19
    • Masahiko YokotaHaruo IshizukaTsuyoshi Yoshida
    • Masahiko YokotaHaruo IshizukaTsuyoshi Yoshida
    • H04N1/04H04N1/00
    • H04N1/2032H04N1/203H04N1/2034
    • In an image reading apparatus having a first original reading device for reading one side of an original guided and fed by a guide, and a second original reading device disposed downstream of the first original reading device for reading the other side of the original, the guide is bent between the first original reading device and the second original reading device so as to shield the respective reading devices. The bending of the guide is done by bending an original feeding path so that direct rays and diffraction rays from each of two light sources may not enter respective photoelectric transfer elements associated with other light source, to thereby shield the photoelectric transfer elements from light of a light source not associated therewith.
    • 在具有用于读取由引导件引导和馈送的原稿的一侧的第一原稿读取装置的图像读取装置中,以及设置在第一原稿读取装置的下游,用于读取原稿的另一侧的第二原稿读取装置, 在第一原稿读取装置和第二原稿读取装置之间弯曲,以屏蔽各个读取装置。 引导件的弯曲通过弯曲原始馈送路径来实现,使得来自两个光源中的每一个的直射线和衍射光线可能不会进入与其他光源相关联的相应的光电转移元件,从而将光电转移元件从光 光源不相关。
    • 8. 发明授权
    • Drive assembly for a track-type vehicle
    • 轨道式车辆的驱动组件
    • US07014278B2
    • 2006-03-21
    • US11052096
    • 2005-02-08
    • Tsuyoshi YoshidaKazushi NakataShouta Murakami
    • Tsuyoshi YoshidaKazushi NakataShouta Murakami
    • B62D55/108
    • B62D55/14B62D55/1086B62D55/15
    • A drive assembly has a track frame, an idler, and a sprocket arranged substantially on a straight line that includes single track roller units disposed respectively closest to the idler and closest to the sprocket. The single track roller units each rotatably support a track roller at an end of an arm that is rockably attached at another end to the track frame. The single track roller units bear the vehicle body load at the distal end of the arm through elastic members. A double track roller unit is interposed between the single track roller units, and includes a first arm rockably attached at its end to the track frame and a second arm rockably attached at its central portion to another end of the first arm. The second arm rotatably supports paired front and rear track rollers at two ends thereof.
    • 驱动组件具有履带架,惰轮和基本上布置在直线上的链轮,该链条包括分别最靠近惰轮设置并且最靠近链轮设置的单个履带辊单元。 单个履带辊单元各自可旋转地支撑在臂的端部处的轨道辊,该另一端可摇动地附接到轨道框架。 单轨道滚子单元通过弹性构件承载在臂的远端处的车身载荷。 双轨道滚轮单元被插入在单个滚轮单元之间,并且包括在其端部可摇动地附接到轨道框架的第一臂和在其中心部分可摇动地附接到第一臂的另一端的第二臂。 第二臂可旋转地支撑成对的前后滚轮在其两端。