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    • 13. 发明授权
    • Semiconductor testing using electrically conductive adhesives
    • 使用导电胶的半导体测试
    • US06288559B1
    • 2001-09-11
    • US09050820
    • 1998-03-30
    • William E. BernierMichael A. GaynesWayne J. HowellMark V. PiersonAjit K. TrivediCharles G. Woychik
    • William E. BernierMichael A. GaynesWayne J. HowellMark V. PiersonAjit K. TrivediCharles G. Woychik
    • G01R3102
    • G01R31/2886H01L2224/45144H01L2224/81385H01L2224/83101H05K3/321H01L2924/00
    • A method and device for testing and burning-in semiconductor circuits. The method and device permit the entire wafer to be tested by temporarily attaching the wafer to a test substrate using electrically conductive adhesive (ECA). The ECA conforms to deviations from co-planarity of the contact points of both the wafer and test substrate while providing a quality electrical connection at each point. ECA material can be deposited on either the wafer contacts or the substrate pads. In addition, the ECA may be deposited on C4 bumps or tin-capped lead bases. Variations in the method and device include filling vias of a non-conductive interposer with ECA. The electrical connection may be enhanced by forming conductive dendrites on test pads while the ECA is deposited on the wafer contacts. To further enhance the electrical connection, the ECA material can be plasma etched to remove some of its polymer matrix and to expose the electrically conductive particles on one side and then plating with palladium. After the palladium-plated ECA is brought into contact with aluminum pads, palladium-coated aluminum pads, or even C4 solder bumps, conductive dendrites are formed on the palladium-treated ECA bumps.
    • 一种用于测试和燃烧半导体电路的方法和装置。 该方法和装置允许通过使用导电粘合剂(ECA)将晶片临时附接到测试基板来测试整个晶片。 ECA符合晶片和测试基板的接触点的共平面偏差,同时在每个点提供质量电连接。 ECA材料可以沉积在晶片触点或衬底焊盘上。 此外,ECA可以沉积在C4凸点或锡盖铅基上。 该方法和装置的变化包括用ECA填充非导电插入件的通孔。 可以通过在测试焊盘上形成导电枝晶而增加电连接,同时将ECA沉积在晶片触点上。 为了进一步增强电连接,可以对ECA材料进行等离子体蚀刻以除去其一些聚合物基质并使一面上的导电颗粒暴露,然后用钯镀覆。 在镀钯的ECA与铝焊盘,钯涂覆的铝焊盘或甚至C4焊料凸块接触之后,在钯处理的ECA凸块上形成导电枝晶。
    • 15. 发明授权
    • TFT panel alignment and attachment method and apparatus
    • TFT面板对准和附接方法和装置
    • US6129804A
    • 2000-10-10
    • US71675
    • 1998-05-01
    • Michael A. GaynesAllan O. JohnsonRamesh R. KodnaniMark V. PiersonEdward J. Tasillo
    • Michael A. GaynesAllan O. JohnsonRamesh R. KodnaniMark V. PiersonEdward J. Tasillo
    • B32B37/12G02F1/1333B32B31/00
    • B32B38/18G02F1/13336B32B37/12Y10S345/903Y10T156/1089Y10T156/109Y10T156/1092Y10T156/1093Y10T156/1754Y10T156/1756Y10T156/1759
    • A system for aligning and attaching together a plurality of thin film transistor tiles for constructing a flat panel display. A coverplate loading station where a coverplate that the tiles are to be attached to is arranged on a coverplate support. A coverplate bonding material dispensing station where a bonding material for bonding the tiles to the coverplate is applied to a surface of the coverplate. A tile placement station where the tiles are arranged on the coverplate. A tile aligning and securing station where the tiles are aligned relative to each other and the coverplate by the tile aligner and where the tiles are at least partially bonded to the coverplate. A tile assembly bonding material dispensing station where a bonding material is applied to a surface of the tiles opposite the side that the coverplate is bonded to. A backplate placement station where a backplate is arranged on the tiles. A backplate aligning and securing station where the backplate is aligned with the tiles and the coverplate and at least partially secured to the tiles A full bonding station where the tiles are fully bonded to the coverplate and the backplate.
    • 一种用于对准和连接在一起的多个薄膜晶体管瓦片用于构建平板显示器的系统。 一个盖板加载站,其中瓦片要附着的盖板布置在盖板支架上。 一种覆盖板接合材料分配站,其中用于将瓦片粘合到盖板上的粘合材料施加到盖板的表面。 瓦片布置台,其中瓦片布置在盖板上。 瓦片对准和固定台,其中瓦片通过瓦片对准器相对于彼此并且盖板对准,并且瓦片至少部分地结合到盖板。 一种瓦片组合接合材料分配站,其中粘合材料施加到瓦片与盖板粘合的一侧相反的表面。 背板放置台,其中背板设置在瓦片上。 背板对准和固定台,其中背板与瓦片和盖板对准并且至少部分地固定到瓦片完全粘合台,其中瓦片完全结合到盖板和背板。