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    • 20. 发明授权
    • DRAM (Dynamic Random Access Memory) cells
    • DRAM(动态随机存取存储器)单元
    • US07294543B2
    • 2007-11-13
    • US11308404
    • 2006-03-22
    • Kangguo ChengBabar Ali Khan
    • Kangguo ChengBabar Ali Khan
    • H01L21/8242
    • H01L27/1087
    • A DRAM cell with a self-aligned gradient P-well and a method for forming the same. The DRAM cell includes (a) a semiconductor substrate; (b) an electrically conducting region including a first portion, a second portion, and a third portion; (c) a first doped semiconductor region wrapping around the first portion, but electrically insulated from the first portion by a capacitor dielectric layer; (d) a second doped semiconductor region wrapping around the second portion, but electrically insulated from the second portion by a collar dielectric layer. The second portion is on top of and electrically coupled to the first portion, and the third portion is on top of and electrically coupled to the second portion. The collar dielectric layer is in direct physical contact with the capacitor dielectric layer. When going away from the collar dielectric layer, a doping concentration of the second doped semiconductor region decreases.
    • 具有自对准梯度P阱的DRAM单元及其形成方法。 DRAM单元包括(a)半导体衬底; (b)包括第一部分,第二部分和第三部分的导电区域; (c)围绕所述第一部分包围但与所述第一部分由电容器介电层电绝缘的第一掺杂半导体区域; (d)围绕第二部分缠绕的第二掺杂半导体区域,但是通过套环电介质层与第二部分电绝缘。 第二部分在第一部分的顶部并且电耦合到第一部分,并且第三部分在第二部分的顶部并且电耦合到第二部分。 套环电介质层与电容器电介质层直接物理接触。 当离开套环电介质层时,第二掺杂半导体区域的掺杂浓度降低。