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    • 18. 发明申请
    • EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    • 极致超紫外光发生系统
    • US20110226745A1
    • 2011-09-22
    • US13048454
    • 2011-03-15
    • Shinji NagaiTamotsu AbeHitoshi NaganoOsamu Wakabayashi
    • Shinji NagaiTamotsu AbeHitoshi NaganoOsamu Wakabayashi
    • B23K26/04
    • G03F7/70033G03F7/70891G03F7/70916G03F7/70925G21K1/06G21K2201/064G21K2201/067H05G2/005H05G2/008
    • An extreme ultraviolet light generation system is an extreme ultraviolet light generation system which is used with a laser apparatus and is connected to an external device so as to supply extreme ultraviolet light thereto, and the extreme ultraviolet light generation system may include: a chamber provided with at least one inlet through which a laser beam is introduced thereinto; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a discharge pump connected to the chamber; at least one optical element disposed inside the chamber; an etching gas introduction unit provided to the chamber through which etching gas passes, the etching gas being introduced to etch debris of the target material which is emitted when the target material is irradiated with the laser beam inside the chamber and adheres to the at least one optical element; and at least one temperature control mechanism for controlling a temperature of the at least one optical element.
    • 极紫外光发生系统是与激光装置一起使用并与外部装置连接以向其提供极紫外光的极紫外光发生系统,并且极紫外线发生系统可以包括:室 入射至少一个激光束的入口; 目标供给单元,其设置在所述室中,用于将目标材料供应到所述室内的预定区域; 连接到所述室的排出泵; 设置在所述室内的至少一个光学元件; 蚀刻气体导入单元,其被设置到蚀刻气体通过的室,所述蚀刻气体被引入以蚀刻所述目标材料的碎屑,所述目标材料在所述靶材料被所述室内的所述激光束照射时发射,并且粘附至所述至少一个 光学元件 以及用于控制所述至少一个光学元件的温度的至少一个温度控制机构。
    • 19. 发明授权
    • Extreme ultraviolet light source apparatus
    • 极紫外光源设备
    • US07999241B2
    • 2011-08-16
    • US12605113
    • 2009-10-23
    • Shinji NagaiTakanobu IshiharaKouji KakizakiTamotsu Abe
    • Shinji NagaiTakanobu IshiharaKouji KakizakiTamotsu Abe
    • G21K5/02H01J17/26
    • H05G2/003G03F7/70033G03F7/70175G03F7/70916H05G2/006H05G2/008
    • An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles including ion emitted from the plasma region toward the direction of the magnetic field, a first charged particle collector (receiver) mounted at both sides of an axis of the magnetic field in the magnetic field region in order to collect (receive) the charged particles converged by the magnetic field, a target supply unit supplying a target from a nozzle located outside a converging region in which the charged particles are to be converged inside the magnetic field region in an extreme ultraviolet light generating chamber, and a target collector located at a position opposite to the nozzle, the target retrieval portion retrieving a residual target which does not contribute to generation of the plasma.
    • 极紫外光源装置具有磁场发生器,该磁场发生器在通过等离子体产生等离子体区域的磁场方向周围产生磁场区域,并将包含从等离子体区域射出的离子的带电粒子向着 磁场方向,安装在磁场区域的磁场轴的两侧的第一带电粒子收集器(接收器),以收集(接收)由磁场收敛的带电粒子;目标供给单元 从位于极紫外光发生室内的磁场区域内的会聚区域的会聚区域的喷嘴和位于与喷嘴相对的位置的目标集合体供给目标,目标取出部 检索对等离子体的产生无贡献的残留目标。