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11. 发明申请

US20090296308A1 MEMS VARIABLE CAPACITOR 失效
标题翻译： MEMS可变电容器
公开(公告)号：US20090296308A1
公开(公告)日：2009-12-03
申请号：US12400815
申请日：2009-03-10
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Kazuhiko Itaya
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Kazuhiko Itaya
IPC分类号： H01G5/16
CPC分类号： H01G5/16 , H01G5/18 , H01H2057/006
摘要： A MEMS variable capacitor includes: a first connection beam having one end fixed to a substrate; a first actuation beam connected to the first connection beam; a second actuation beam connected to the first actuation beam and extending in a reverse direction; a second connection beam having one end fixed to the substrate; a third actuation beam connected to the second connection beam; a fourth actuation beam connected to the third actuation beam and extending in a reverse direction; a movable electrode provided between the second and fourth actuation beams; and a fixed electrode provided on the substrate opposed to the movable electrode. The first to fourth actuation beams have a piezoelectric film sandwiched between a lower electrode and an upper electrode, the first and third actuation beams are placed on a line, the second and fourth actuation beams are placed on a line, and the first and second actuation beams and the third and fourth actuation beams are placed symmetrically about a line.
摘要翻译： MEMS可变电容器包括：第一连接梁，其一端固定到基板; 连接到第一连接梁的第一致动梁; 连接到第一致动光束并沿相反方向延伸的第二致动光束; 第二连接梁，其一端固定到所述基板; 连接到第二连接梁的第三致动梁; 连接到第三致动光束并沿相反方向延伸的第四致动光束; 设置在所述第二和第四致动光束之间的可动电极; 以及设置在与可动电极相对的基板上的固定电极。第一至第四致动光束具有夹在下电极和上电极之间的压电膜，第一和第三致动光束被放置在一条线上，第二和第四致动光束被放置在一条线上，并且第一和第二致动梁和第三和第四致动梁围绕线对称放置。

12. 发明申请

US20080074005A1 PIEZOELECTRIC THIN FILM DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
公开(公告)号：US20080074005A1
公开(公告)日：2008-03-27
申请号：US11946913
申请日：2007-11-29
申请人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01L41/047
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

13. 发明申请

US20060001508A1 Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR 失效
标题翻译：薄膜体声波谐振器（FBAR），FBAR实现的滤波器和FBAR制造方法
公开(公告)号：US20060001508A1
公开(公告)日：2006-01-05
申请号：US11169645
申请日：2005-06-30
申请人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
发明人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
IPC分类号： H03H9/56
CPC分类号： H03H9/02094 , H03H3/04 , H03H9/02133 , H03H9/173 , H03H9/174 , H03H9/703 , H03H2003/021 , H03H2003/023
摘要： A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.
摘要翻译：薄膜体声波谐振器包括具有空腔的基板; 部分地固定在基板上的底部电极，底部电极的一部分机械地悬挂在空腔上方; 设置在底部电极上的压电层; 以及设置在压电体层上的顶电极，其具有沿着压电体层的厚度方向取向的晶轴，所述晶轴的取向分布的半峰全宽小于或等于约6度。

14. 发明申请

US20050184627A1 Piezoelectric thin film device and method for manufacturing the same 失效
标题翻译：压电薄膜器件及其制造方法
公开(公告)号：US20050184627A1
公开(公告)日：2005-08-25
申请号：US11043257
申请日：2005-01-27
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01L41/047 , H01L41/22 , H03H3/02 , H03H9/02 , H03H9/15 , H03H9/17
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译：压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。

15. 发明授权

US08395462B2 Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body 失效
标题翻译：谐振器和振荡器，其具有在分层体的切口部分中的音叉振子
公开(公告)号：US08395462B2
公开(公告)日：2013-03-12
申请号：US13422023
申请日：2012-03-16
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： H03H9/21 , H03H9/10 , H03B5/32 , H03L1/02
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译：根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。

16. 发明授权

US08038890B2 Piezoelectric-driven MEMS device and method for manufacturing the same 失效
标题翻译：压电驱动MEMS器件及其制造方法
公开(公告)号：US08038890B2
公开(公告)日：2011-10-18
申请号：US12038568
申请日：2008-02-27
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： G01D15/00 , G11B5/127 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译：可以可靠且一致地制造压电驱动的MEMS器件。压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。

17. 发明授权

US07719169B2 Micro-electromechanical device 失效
标题翻译：微机电装置
公开(公告)号：US07719169B2
公开(公告)日：2010-05-18
申请号：US11686731
申请日：2007-03-15
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/16 , H01G5/18 , H01L41/0946 , H01L41/0953
摘要： A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.
摘要翻译：微机电装置包括第一压电致动器和第二压电致动器。第一压电致动器包括固定在基板上的第一光束和从第一连接端到第一工作端平行于第一光束延伸的第二光束。第二压电致动器包括固定在基板上的与第一光束间隔开的第三光束和从第二连接端到第二工作端平行于第三光束延伸的第四光束。第二工作端在与基板的表面垂直的方向上面向第一工作端。

18. 发明申请

US20090322183A1 INERTIAL SENSOR AND INERTIAL DETECTING DEVICE 审中-公开
标题翻译：惯性传感器和惯性检测装置
公开(公告)号：US20090322183A1
公开(公告)日：2009-12-31
申请号：US12488691
申请日：2009-06-22
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/0922 , G01P15/18 , G01P2015/0817 , G01P2015/0828
摘要： An inertial sensor includes a first beam, a first proof mass section and a first upper surface stopper section. The first beam extends in a first direction in a plane parallel to a major surface of a substrate and is held with a spacing from the major surface of the substrate. The first beam has a first detecting section including a first upper side electrode, a first lower side electrode, and a first upper side piezoelectric film provided between the first upper side electrode and the first lower side electrode. The first beam has one end connected to the major surface of the substrate. The first proof mass section is connected to the other end of the first beam and held with a spacing from the major surface of the substrate. The first upper surface stopper section is provided on the opposite side of the first proof mass section from the substrate with a spacing from the first proof mass section.
摘要翻译：惯性传感器包括第一光束，第一检测质量部分和第一上表面阻挡部分。第一光束在与基板的主表面平行的平面中沿第一方向延伸，并且与基板的主表面保持间隔。第一光束具有包括设置在第一上侧电极和第一下侧电极之间的第一上侧电极，第一下侧电极和第一上侧压电膜的第一检测部。第一光束的一端连接到基板的主表面。第一检测质量部分连接到第一光束的另一端并且与衬底的主表面间隔保持。第一上表面止动部分设置在第一检验质量部分的与第一检验质量部分间隔开的基板的相对侧上。

19. 发明授权

US07567018B2 Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch 失效
标题翻译：微机械装置，微动开关，可变电容高频电路和光开关
公开(公告)号：US07567018B2
公开(公告)日：2009-07-28
申请号：US11400407
申请日：2006-04-10
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： H01L41/08
CPC分类号： B81B3/0021 , B81B2201/014 , B81B2201/045 , G02B26/0858 , H01G5/18 , H01G5/40 , H01H2057/006
摘要： A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.
摘要翻译：微机械装置包括：第一压电致动器，其包括压电膜，下电极和上电极交错压电膜，并从衬底上的第一固定部分延伸到第一操作端;以及第二压电致动器，压电致动器经由第一压电致动器的第一操作端处的连接部分并且从连接部分延伸到第二操作端，第二压电致动器比第一压电致动器短。

20. 发明申请

US20090135541A1 ACTUATOR AND ELECTRONIC CIRCUIT BASED THEREON 审中-公开
标题翻译：基于执行器和电子电路
公开(公告)号：US20090135541A1
公开(公告)日：2009-05-28
申请号：US12266245
申请日：2008-11-06
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01G5/16 , H01L41/04
CPC分类号： H01G5/0136 , B81B3/0021 , H01G5/16 , H01L41/094 , H02N1/006
摘要： An actuator includes a substrate, a fixed electrode provided on a major surface of the substrate, a movable beam opposed to the major surface and held above the substrate with a gap thereto, and a dielectric film provided between the fixed electrode and the movable beam. The dielectric film is made of aluminum nitride oriented along c-axis with an orientation full width at half maximum of 4.6 degrees or less.
摘要翻译：致动器包括基板，设置在基板的主表面上的固定电极，与主表面相对并且与基板间隔开并保持在其上的可移动光束，以及设置在固定电极和可移动光束之间的电介质膜。电介质膜由沿着c轴取向的氮化铝制成，取向全宽度为半径为4.6度以下。

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