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    • 2. 发明授权
    • Piezoelectric actuator and micro-electromechanical device
    • 压电致动器和微机电装置
    • US07215066B2
    • 2007-05-08
    • US11196596
    • 2005-08-04
    • Takashi KawakuboToshihiko NaganoKazuhide AbeMichihiko Nishigaki
    • Takashi KawakuboToshihiko NaganoKazuhide AbeMichihiko Nishigaki
    • H01L41/053
    • H01H57/00H01G5/18H01G5/38H01H2057/006H01L41/094H01L41/0946H01L41/0953Y10S977/837
    • A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
    • 压电致动器包括第一梁,该第一梁包括第一底电极,第一底电极上的第一压电膜和第一压电膜上的第一顶电极,分配在第一梁的端部并固定在基板上的固定端 ,分配在第一梁的另一端并悬挂在自由空间上的连接端; 以及第二光束,包括在连接端连接到第一压电膜的第二压电膜,第二压电膜下的第二底电极和第二压电膜上的第二顶电极,分配在第二压电膜的端部的工作端 第二梁相对于连接端被分配并悬挂在自由空间上的另一端; 其中固定端和工作端的中心之间的距离短于从工作端到连接端的距离。