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11. 发明申请

WO2012112616A2 COMPOSITE POLARIZER WITH ADJUSTABLE POLARIZATION ANGLES 审中-公开
标题翻译：具有可调偏振角的复合偏振器
公开(公告)号：WO2012112616A2
公开(公告)日：2012-08-23
申请号：PCT/US2012/025130
申请日：2012-02-14
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng
发明人： ZHAO, Guoheng
IPC分类号： G02B5/30 , G01N21/88
CPC分类号： G02B27/286 , G01N21/21 , G01N21/8806 , G01N21/9501 , G01N2021/8848 , G02B5/3066 , G02B27/283
摘要： An adjustable, composite polarizer can include first and second plate polarizers and an adjusting apparatus. The adjusting apparatus can adjust a pitch angle and a roll angle for the first and second plate polarizers while maintaining a predetermined, minimal distance between those plates. In this configuration, the adjustable, composite polarizer can provide mirror symmetric polarization with respect to an incident plane while providing the flexibility of any polarization.
摘要翻译：可调整的复合偏振器可以包括第一和第二板偏振器以及调整装置。调整设备可以调整第一和第二板偏振器的俯仰角和侧倾角，同时保持这些板之间的预定的最小距离。在这种配置中，可调整的复合偏振器可以提供相对于入射平面的镜像对称偏振，同时提供任何偏振的灵活性。

12. 发明申请

WO2011011291A1 DARK FIELD INSPECTION SYSTEM WITH RING ILLUMINATION 审中-公开
标题翻译：具有环形照明的暗场检测系统
公开(公告)号：WO2011011291A1
公开(公告)日：2011-01-27
申请号：PCT/US2010/042354
申请日：2010-07-16
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , VAEZ-IRAVANI, Mehdi , YOUNG, Scott , BHASKAR, Kris
发明人： ZHAO, Guoheng , VAEZ-IRAVANI, Mehdi , YOUNG, Scott , BHASKAR, Kris
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8822
摘要： A dark field inspection system that minimizes the speckle noise due to sample surface roughness can include a plurality of beam shaping paths for generating a composite, focused illumination line on a wafer. Each beam shaping path can illuminate the wafer at an oblique angle. The plurality of beam shaping paths can form a ring illumination. This ring illumination can reduce the speckle effect, thereby improving SNR. An objective lens can capture scattered light from the wafer and an imaging sensor can receive an output of the objective lens. Because the wafer illumination occurs at oblique angles, the objective lens can have a high NA, thereby improving optical resolution of the imaging sensor, and the resulting signal level.
摘要翻译：使样品表面粗糙度引起的斑点噪声最小化的暗场检查系统可以包括用于在晶片上产生复合聚焦照明线的多个光束整形路径。每个光束成形路径可以倾斜角度照射晶片。多个光束成形路径可以形成环形照明。这种环形照明可以减少斑点效应，从而提高SNR。物镜可以捕获来自晶片的散射光，成像传感器可以接收物镜的输出。由于晶片照明以倾斜角度发生，所以物镜可以具有高NA，从而提高成像传感器的光学分辨率和所得到的信号电平。

13. 发明申请

WO2017031013A1 DARK-FIELD INSPECTION USING A LOW-NOISE SENSOR 审中-公开
标题翻译：使用低噪声传感器的暗场检测
公开(公告)号：WO2017031013A1
公开(公告)日：2017-02-23
申请号：PCT/US2016/046938
申请日：2016-08-13
申请人： KLA-TENCOR CORPORATION
发明人： CHUANG, Yung-Ho Alex , BROWN, David L. , CONTARATO, Devis , FIELDEN, John , KAVALDJIEV, Daniel Ivanov , ZHAO, Guoheng , CHERN, Jehn-Huar Howard , ZHENG, Guowu , PETTIBONE, Donald , BIELLAK, Stephen
IPC分类号： G01N21/17 , G01J1/02 , H04N5/367 , G01N21/88
CPC分类号： H04N5/335 , G01N21/9501 , G01N2021/95676 , H04N5/2256 , H04N5/347
摘要： An inspection system and methods in which analog image data values (charges) captured by an image sensor are binned (combined) before or while being transmitted as output signals on the image sensor' s output sensing nodes (floating diffusions), and in which an ADC is controlled to sequentially generate multiple corresponding digital image data values between each reset of the output sensing nodes. According to an output binning method, the image sensor is driven to sequentially transfer multiple charges onto the output sensing nodes between each reset, and the ADC is controlled to convert the incrementally increasing output signal after each charge is transferred onto the output sensing node. According to a multi-sampling method, multiple charges are vertically or horizontally binned (summed/combined) before being transferred onto the output sensing node, and the ADC samples each corresponding output signal multiple times. The output binning and multi- sampling methods may be combined.
摘要翻译：在图像传感器的输出感测节点（浮动扩散）之前作为输出信号发送之前或同时将由图像传感器捕获的模拟图像数据值（电荷）分组（组合）的检查系统和方法，其中控制ADC以在输出感测节点的每个复位之间顺序地生成多个对应的数字图像数据值。根据输出合并方法，驱动图像传感器以在每个复位之间顺序地将多个电荷传送到输出感测节点上，并且在每个电荷被传送到输出感测节点之后，控制ADC转换递增增加的输出信号。根据多采样方法，在转移到输出感测节点之前，将多个电荷垂直或水平分类（相加/组合），并且ADC对每个对应的输出信号进行多次采样。可以组合输出合并和多采样方法。

14. 发明申请

WO2016054570A1 TDI SENSOR IN A DARKFIELD SYSTEM 审中-公开
标题翻译： TDI传感器在一个DARKFIELD系统
公开(公告)号：WO2016054570A1
公开(公告)日：2016-04-07
申请号：PCT/US2015/053824
申请日：2015-10-02
申请人： KLA-TENCOR CORPORATION
发明人： VAZHAEPARAMBIL, Jijen , ZHAO, Guoheng , KAVALDJIEV, Daniel Ivanov , ROMANOVSKY, Anatoly , MALEEV, Ivan , WOLTERS, Christian , KREN, George , BIELLAK, Stephen , WHITESIDE, Bret , PETTIBONE, Donald
IPC分类号： H01L21/66
CPC分类号： G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8887 , G01N2021/8896 , G01N2201/06113 , G01N2201/103 , G01N2201/12 , G06T7/0004 , G06T2207/10004 , G06T2207/30148
摘要： A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.
摘要翻译：晶片扫描系统包括成像采集光学器件以减少有效光斑尺寸。较小的斑点尺寸使得表面散射的光子数量与斑点的面积成比例地减小。空气散射也减少。 TDI用于基于在晶片的线性运动方向上积分的多个图像信号产生晶片图像。照明系统用光淹没晶片，创建光斑的任务被分配给成像采集光学元件。

15. 发明申请

WO2014151802A1 MULTI-SPOT DEFECT INSPECTION SYSTEM 审中-公开
标题翻译：多点缺陷检查系统
公开(公告)号：WO2014151802A1
公开(公告)日：2014-09-25
申请号：PCT/US2014/026473
申请日：2014-03-13
申请人： KLA-TENCOR CORPORATION
发明人： XU, Zhiwei , WOLTERS, Christian , REICH, Juergen , WHITESIDE, Bret , ZHAO, Guoheng , VAZHAEPARAMBIL, Jijen , BIELLAK, Stephen , SHAMOUILIAN, Sam , VAEZ-IRAVANI, Mehdi
IPC分类号： G01N21/01 , G01N21/17 , G01N21/47 , G01N21/63 , G01N1/00
CPC分类号： G01N21/9501 , G01N21/956
摘要： The disclosure is directed to a system and method for inspecting a spinning sample by substantially simultaneously scanning multiple spots on a surface of the sample utilizing a plurality of illumination beams. Portions of illumination reflected, scattered, or radiated from respective spots on the surface of the sample are collected by at least one detector array. Information associated with at least one defect of the sample is determined by at least one computing system in communication with the detector array. According to various embodiments, at least one of scan pitch, spot size, spot separation, and spin rate is controlled to compensate pitch error due to tangential spot separation.
摘要翻译：本发明涉及一种用于通过基本上同时利用多个照明光束扫描样品表面上的多个点来检查纺丝样品的系统和方法。通过至少一个检测器阵列收集从样品表面上的各个点反射，散射或辐射的照射部分。与样品的至少一个缺陷相关联的信息由与检测器阵列通信的至少一个计算系统确定。根据各种实施例，控制扫描间距，光斑尺寸，光点分离和旋转速率中的至少一个以补偿由于切点分离引起的俯仰误差。

16. 发明申请

WO2014066813A1 SAMPLE INSPECTION SYSTEM DETECTOR 审中-公开
标题翻译：样品检测系统检测器
公开(公告)号：WO2014066813A1
公开(公告)日：2014-05-01
申请号：PCT/US2013/066904
申请日：2013-10-25
申请人： KLA-TENCOR CORPORATION
发明人： KAVALDJIEV, Daniel Ivanov , BIELLAK, Stephen , ZHAO, Guoheng , VAEZ-IRAVANI, Mehdi
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , H01L27/1446
摘要： Methods and systems for enhancing the dynamic range of a high sensitivity inspection system are presented. The dynamic range of a high sensitivity inspection system is increased by directing a portion of the light collected from each pixel of the wafer inspection area toward an array of avalanche photodiodes (APDs) operating in Geiger mode and directing another portion of the light collected from each pixel of the wafer inspection area toward another array of photodetectors having a larger range. The array of APDs operating in Geiger mode is useful for inspection of surfaces that generate extremely low photon counts, while other photodetectors are useful for inspection of larger defects that generate larger numbers of scattered photons. In some embodiments, the detected optical field is split between two different detectors. In some other embodiments, a single detector includes both APDs operating in Geiger mode and other photodetectors having a larger range.
摘要翻译：介绍了提高高灵敏度检测系统动态范围的方法和系统。高灵敏度检测系统的动态范围通过将从晶片检查区域的每个像素收集的光的一部分引导到以盖革模式操作的雪崩光电二极管（APD）阵列并且引导从每个晶片检查区域的像素朝向具有较大范围的另一个光电检测器阵列。以Geiger模式操作的APD阵列对于检查产生极低光子数的表面是有用的，而其他光电探测器可用于检查产生更大数量的散射光子的较大缺陷。在一些实施例中，检测到的光场在两个不同的检测器之间被分开。在一些其他实施例中，单个检测器包括以盖革模式操作的APD和具有较大范围的其它光电探测器。

17. 发明申请

WO2010077865A3 DEFECT DETECTION AND RESPONSE 审中-公开
公开(公告)号：WO2010077865A3
公开(公告)日：2010-07-08
申请号：PCT/US2009/068060
申请日：2009-12-15
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , ZAPALAC, George H. , NGAI, Samuel S. H. , VAEZ-IRAVANI, Mehdi , LEVY, Ady , DHARMADHIKARI, Vineet
发明人： ZHAO, Guoheng , ZAPALAC, George H. , NGAI, Samuel S. H. , VAEZ-IRAVANI, Mehdi , LEVY, Ady , DHARMADHIKARI, Vineet
IPC分类号： H01L21/66 , H01L31/042
摘要： To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.

18. 发明申请

WO2004049016A2 OPTICAL SYSTEM FOR MEASURING SAMPLES USING SHORT WAVELENGTH RADIATION 审中-公开
标题翻译：用短波长辐射测量样品的光学系统
公开(公告)号：WO2004049016A2
公开(公告)日：2004-06-10
申请号：PCT/US2003/037939
申请日：2003-11-25
申请人： KLA-TENCOR CORPORATION
发明人： NIKOONAHAD, Mehrdad , LEE, Shing , KWAK, Hidong , EDELSTEIN, Sergio , ZHAO, Guoheng , JANIK, Gary
IPC分类号： G02B
CPC分类号： G01N21/9501 , G01N21/8806
摘要： In an optical system measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system. In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample does not need to be placed in a vacuum, thereby enhancing system throughput.
摘要翻译：在用于测量样品特性的光学系统中，通过减少在至少一部分照明和检测路径中存在的环境吸收气体或气体和水分的量，所述环境吸收气体或气体和水分存在于用于测量过程中，可以减少这种波长分量的衰减。这种减少可以通过一个过程来完成，而不需要从测量系统中排出所有的气体和湿气。在一个实施例中，可通过置换至少一部分测量路径中存在的吸收气体和湿气中的至少一些来减少VUV辐射的衰减来实现该降低。以这种方式，样品不需要放在真空中，从而提高了系统的产量。

19. 发明申请

WO2003069263A2 SYSTEM FOR DETECTING ANOMALIES AND/OR FEATURES OF A SURFACE 审中-公开
标题翻译：用于检测表面异常和/或特征的系统
公开(公告)号：WO2003069263A2
公开(公告)日：2003-08-21
申请号：PCT/US2003/004043
申请日：2003-02-11
申请人： KLA-TENCOR CORPORATION
发明人： VAEZ-IRAVANI, Mehdi , ZHAO, Guoheng , STOKOWSKI, Stanley, E.
IPC分类号： G01B
CPC分类号： G01N21/95623 , G01N21/47 , G01N21/94 , G01N2201/1045
摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.
摘要翻译：使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦光束的入射平面中。光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。

20. 发明申请

WO2018053199A1 SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION 审中-公开
标题翻译：同时进行多方向激光晶圆检查
公开(公告)号：WO2018053199A1
公开(公告)日：2018-03-22
申请号：PCT/US2017/051659
申请日：2017-09-14
申请人： KLA-TENCOR CORPORATION
发明人： LIU, Sheng , TSAI, Bin-Ming, Benjamin , ZHAO, Guoheng
IPC分类号： G01N21/95 , G01N21/88
CPC分类号： G01N21/9501 , G01N21/8806 , G01N21/956 , G01N2021/8825 , G01N2021/8848 , G01N2201/0683 , G06T7/0004 , G06T7/001 , G06T2207/10152 , G06T2207/20212 , G06T2207/30148 , H04N5/2256 , H04N5/23229 , H04N5/2354
摘要： Disclosed is apparatus for inspecting a sample. The apparatus includes illumination optics for simultaneously directing a plurality of incident beams at a plurality of azimuth angles towards a sample and collection optics for directing a plurality of field portions of output light from two or more of the plurality of angles towards two or more corresponding sensors. The two or more sensors are arranged for receiving the field portions corresponding to two or more angles and generating two or more corresponding images. The apparatus further comprises a processor for analyzing the two or more images to detect defects on the sample.
摘要翻译：公开了用于检查样品的设备。该设备包括照明光学器件，用于同时将多个入射光束以多个方位角引向样品，并且收集光学器件用于将来自多个角度中的两个或更多个的输出光的多个场部分朝向两个或更多个对应的传感器。两个或更多个传感器被布置用于接收对应于两个或更多个角度的场部分并且生成两个或更多个对应的图像。该设备还包括处理器，用于分析两个或更多图像以检测样品上的缺陷。

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