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1. 发明申请

WO2011011291A1 DARK FIELD INSPECTION SYSTEM WITH RING ILLUMINATION 审中-公开
标题翻译：具有环形照明的暗场检测系统
公开(公告)号：WO2011011291A1
公开(公告)日：2011-01-27
申请号：PCT/US2010/042354
申请日：2010-07-16
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , VAEZ-IRAVANI, Mehdi , YOUNG, Scott , BHASKAR, Kris
发明人： ZHAO, Guoheng , VAEZ-IRAVANI, Mehdi , YOUNG, Scott , BHASKAR, Kris
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8822
摘要： A dark field inspection system that minimizes the speckle noise due to sample surface roughness can include a plurality of beam shaping paths for generating a composite, focused illumination line on a wafer. Each beam shaping path can illuminate the wafer at an oblique angle. The plurality of beam shaping paths can form a ring illumination. This ring illumination can reduce the speckle effect, thereby improving SNR. An objective lens can capture scattered light from the wafer and an imaging sensor can receive an output of the objective lens. Because the wafer illumination occurs at oblique angles, the objective lens can have a high NA, thereby improving optical resolution of the imaging sensor, and the resulting signal level.
摘要翻译：使样品表面粗糙度引起的斑点噪声最小化的暗场检查系统可以包括用于在晶片上产生复合聚焦照明线的多个光束整形路径。每个光束成形路径可以倾斜角度照射晶片。多个光束成形路径可以形成环形照明。这种环形照明可以减少斑点效应，从而提高SNR。物镜可以捕获来自晶片的散射光，成像传感器可以接收物镜的输出。由于晶片照明以倾斜角度发生，所以物镜可以具有高NA，从而提高成像传感器的光学分辨率和所得到的信号电平。

2. 发明申请

WO2008121561A1 STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK 审中-公开
标题翻译：使用真空预紧空气轴承座稳定基板
公开(公告)号：WO2008121561A1
公开(公告)日：2008-10-09
申请号：PCT/US2008/057539
申请日：2008-03-19
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , BELYAEV, Alexander , WOLTERS, Christian H. , DOYLE, Paul Andrew , DANDO, Howard W. , VAEZ-IRAVANI, Mehdi
发明人： ZHAO, Guoheng , BELYAEV, Alexander , WOLTERS, Christian H. , DOYLE, Paul Andrew , DANDO, Howard W. , VAEZ-IRAVANI, Mehdi
IPC分类号： F16C32/06 , B21D53/10
CPC分类号： B25B11/005 , F16C29/025 , F16C32/0603 , H01L21/67784 , H01L21/6838
摘要： Substrate processing method and apparatus are disclosed. The apparatus includes a chuck having a surface with one or more gas flow openings configured to provide a flow of gas to the surface. The surface includes one or more vacuum channels distributed across the surface. The vacuum channels permit vacuum to be drawn therethrough. In the method a substrate may be supported proximate the chuck surface with a back surface of the substrate sufficiently close to the chuck surface that a flow of gas and vacuum can maintain the substrate back surface and the chuck surface in a spaced-apart relationship. Gas flow is provided to the chuck surface through the gas flow openings and vacuum is drawn through one or more vacuum channels. The substrate is moved along a direction substantially perpendicular to the surface of the substrate.
摘要翻译：公开了基板处理方法和装置。该装置包括具有一个表面的卡盘，该表面具有一个或多个气体流动开口，该气体流动开口被配置为向表面提供气体流。表面包括分布在表面上的一个或多个真空通道。真空通道允许真空从中抽出。在该方法中，衬底可以靠近卡盘表面支撑，衬底的后表面足够靠近卡盘表面，气体和真空流可以以间隔的关系保持衬底背面和卡盘表面。通过气体流动开口将气流提供给卡盘表面，并通过一个或多个真空通道抽真空。衬底沿着基本上垂直于衬底表面的方向移动。

3. 发明申请

WO2010077865A3 DEFECT DETECTION AND RESPONSE 审中-公开
公开(公告)号：WO2010077865A3
公开(公告)日：2010-07-08
申请号：PCT/US2009/068060
申请日：2009-12-15
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , ZAPALAC, George H. , NGAI, Samuel S. H. , VAEZ-IRAVANI, Mehdi , LEVY, Ady , DHARMADHIKARI, Vineet
发明人： ZHAO, Guoheng , ZAPALAC, George H. , NGAI, Samuel S. H. , VAEZ-IRAVANI, Mehdi , LEVY, Ady , DHARMADHIKARI, Vineet
IPC分类号： H01L21/66 , H01L31/042
摘要： To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.

4. 发明申请

WO2009137706A2 IN-SITU DIFFERENTIAL SPECTROSCOPY 审中-公开
标题翻译：现场差异光谱
公开(公告)号：WO2009137706A2
公开(公告)日：2009-11-12
申请号：PCT/US2009/043185
申请日：2009-05-07
申请人： KLA-TENCOR CORPORATION , VAEZ-IRAVANI, Mehdi , NASSER GHODSI, Mehran , ZHAO, Guoheng
发明人： VAEZ-IRAVANI, Mehdi , NASSER GHODSI, Mehran , ZHAO, Guoheng
IPC分类号： G01J3/00 , G01J3/42
CPC分类号： H01J37/244 , G01N2223/079 , G01N2223/086 , G01N2223/33 , H01J37/256 , H01J2237/24495 , H01J2237/2511 , H01J2237/2807
摘要： A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array.
摘要翻译：具有用于产生针对样品的电子束的电子束发生器的光谱仪。电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。提取器与调制器和检测器阵列进行信号通信。

5. 发明申请

WO2012138460A3 LED SOLAR ILLUMINATOR 审中-公开
公开(公告)号：WO2012138460A3
公开(公告)日：2012-10-11
申请号：PCT/US2012/028910
申请日：2012-03-13
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , LEVY, Ady , SALNIK, Alex , VAEZ-IRAVANI, Mehdi , NICOLAIDES, Lena , NGAI, Samuel S.H.
发明人： ZHAO, Guoheng , LEVY, Ady , SALNIK, Alex , VAEZ-IRAVANI, Mehdi , NICOLAIDES, Lena , NGAI, Samuel S.H.
IPC分类号： G01N21/01 , F21V8/00 , F21S2/00 , G01R31/26
摘要： An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

6. 发明申请

WO2012082501A3 WAFER INSPECTION 审中-公开
公开(公告)号：WO2012082501A3
公开(公告)日：2012-06-21
申请号：PCT/US2011/063849
申请日：2011-12-07
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , LEONG, Jenn-Kuen , VAEZ-IRAVANI, Mehdi
发明人： ZHAO, Guoheng , LEONG, Jenn-Kuen , VAEZ-IRAVANI, Mehdi
IPC分类号： H01L21/66
摘要： A system configured to inspect a wafer and its operating method, the system comprising: an illumination subsystem configured to illuminate the wafer; a collection subsystem configured to collect light scattered from the wafer and to preserve the polarization of the scattered light; an optical element configured to separate the scattered light collected in different segments of the collection numerical aperture of the collection subsystem, wherein the optical element is positioned at a Fourier plane or a conjugate of the Fourier plane of the collection subsystem; a polarizing element configured to separate the scattered light in one of the different segments into different portions of the scattered light based on polarization; and a detector configured to detect one of the different portions of the scattered light and to generate output responsive to the detected light, wherein the output is used to detect defects on the wafer.

7. 发明申请

WO2009111407A2 MULTI-SPOT SCANNING SYSTEM AND METHOD 审中-公开
标题翻译：多点扫描系统和方法
公开(公告)号：WO2009111407A2
公开(公告)日：2009-09-11
申请号：PCT/US2009/035749
申请日：2009-03-02
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng , RUNYON, Rex , VAEZ-IRAVANI, Mehdi
发明人： ZHAO, Guoheng , RUNYON, Rex , VAEZ-IRAVANI, Mehdi
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2201/10 , G01N2201/104 , G02B26/123 , Y10S359/90
摘要： A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This 'delay and fill' scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.
摘要翻译：使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供对大量斑点的可扩展性以及消除通道之间的串扰。多点扫描技术可以选择点阵列（1D或2D）的多个斑点，确定斑点之间的间隔以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。在一个实施例中，扫描开始并结束在晶片上期望的扫描区域的外部，以确保全扫描覆盖。

8. 发明申请

WO2005065246A2 ILLUMINATION APPARATUS AND METHODS 审中-公开
标题翻译：照明装置和方法
公开(公告)号：WO2005065246A2
公开(公告)日：2005-07-21
申请号：PCT/US2004/043129
申请日：2004-12-17
申请人： KLA- TENCOR TECHNOLOGIES CORPORATION , VAEZ-IRAVANI, Mehdi , ZHAO, Guoheng , STOWKOWSKI, Stanley E.
发明人： VAEZ-IRAVANI, Mehdi , ZHAO, Guoheng , STOWKOWSKI, Stanley E.
IPC分类号： G02B6/00 , G02B6/04 , G02B6/32 , G02B27/48
CPC分类号： G02B27/48 , G02B6/0001 , G02B6/04
摘要： Disclosed are apparatus and methods for illuminating a sample, e.g. , during an inspection of such sample for defects. In one aspect, the illumination apparatus includes a bundle of fibers that each have a first end and a second end. The illumination apparatus further includes an illumination selector for selectively transmitting one or more incident beams into one or more corresponding first ends of the optical fibers so that the selected one or more incident beams are output from one or more corresponding second ends of the fibers. The illumination apparatus also includes a lens arrangement for receiving the selected one or more incidents beams output from the corresponding one or more second ends of the fibers and directing the selected one or more incident beams towards the sample. The lens arrangement and the fibers are arranged with respect to each other so as to image an imaging plane of the sample at the second ends of the fibers. In one aspect, the incident beams are laser beams. In a specific application of the invention, the sample is selected from a group consisting of a semiconductor device, a semiconductor wafer, and a semiconductor reticle.
摘要翻译：公开了用于照亮样品的装置和方法，例如在检查这种样品的缺陷时。一方面，照明装置包括一束纤维，每束纤维具有第一端和第二端。照明装置还包括照明选择器，用于选择性地将一个或多个入射光束传输到光纤的一个或多个对应的第一端中，使得所选择的一个或多个入射光束从光纤的一个或多个对应的第二端输出。照明设备还包括透镜装置，用于接收从光纤的对应的一个或多个第二端输出的所选择的一个或多个事件光束，并将所选择的一个或多个入射光束引向样品。透镜布置和光纤相对于彼此布置，以便在纤维的第二端成像样品的成像平面。一方面，入射光束是激光束。在本发明的具体应用中，样品选自半导体器件，半导体晶片和半导体掩模版。

9. 发明申请

WO2013016469A1 SOLAR METROLOGY METHODS AND APPARATUS 审中-公开
标题翻译：太阳计量方法和装置
公开(公告)号：WO2013016469A1
公开(公告)日：2013-01-31
申请号：PCT/US2012/048210
申请日：2012-07-26
申请人： KLA-TENCOR CORPORATION , YOUNG, Scott , ZHAO, Guoheng , LEVY, Ady , GUEVREMONT, Marco , KHANNA, Neeraj
发明人： YOUNG, Scott , ZHAO, Guoheng , LEVY, Ady , GUEVREMONT, Marco , KHANNA, Neeraj
IPC分类号： G01N21/62 , H01L31/042 , H01L31/18
CPC分类号： G01N21/6489 , G01N21/9501 , H02S50/10
摘要： Methods and apparatus are presented to measure the photoluminescence of incoming wafers and extract parameters such as minority carrier life time, diffusion length, and defect density that may be used to predict final solar cell efficiency. In some examples, illumination light is supplied to a side of an as-cut silicon wafer and the induced luminescence measured from the same side and the opposite side of the wafer is used to determine an indication of the minority carrier lifetime. In another example, the luminescence induced by two instances of illumination light of different wavelength is used to determine an indication of the minority carrier lifetime. In another example, the spatial distribution of luminescence intensity over an area surrounding a focused illumination spot is used to determine an indication of the minority carrier lifetime. Other apparatus useful to passivate the surface of a wafer for inspection are also presented.
摘要翻译：提出了测量进入晶片的光致发光的方法和装置，并提取可用于预测最终太阳能电池效率的参数，例如少数载流子寿命，扩散长度和缺陷密度。在一些示例中，将照明光提供给切割硅晶片的一侧，并且使用从晶片的相同侧和相对侧测量的感应发光来确定少数载流子寿命的指示。在另一示例中，由两个不同波长的照明光实例引起的发光用于确定少数载流子寿命的指示。在另一示例中，使用聚焦照明点周围的区域上的发光强度的空间分布来确定少数载流子寿命的指示。还提出了可用于钝化晶片表面以进行检查的其它装置。

10. 发明申请

WO2012112616A2 COMPOSITE POLARIZER WITH ADJUSTABLE POLARIZATION ANGLES 审中-公开
标题翻译：具有可调偏振角的复合偏振器
公开(公告)号：WO2012112616A2
公开(公告)日：2012-08-23
申请号：PCT/US2012/025130
申请日：2012-02-14
申请人： KLA-TENCOR CORPORATION , ZHAO, Guoheng
发明人： ZHAO, Guoheng
IPC分类号： G02B5/30 , G01N21/88
CPC分类号： G02B27/286 , G01N21/21 , G01N21/8806 , G01N21/9501 , G01N2021/8848 , G02B5/3066 , G02B27/283
摘要： An adjustable, composite polarizer can include first and second plate polarizers and an adjusting apparatus. The adjusting apparatus can adjust a pitch angle and a roll angle for the first and second plate polarizers while maintaining a predetermined, minimal distance between those plates. In this configuration, the adjustable, composite polarizer can provide mirror symmetric polarization with respect to an incident plane while providing the flexibility of any polarization.
摘要翻译：可调整的复合偏振器可以包括第一和第二板偏振器以及调整装置。调整设备可以调整第一和第二板偏振器的俯仰角和侧倾角，同时保持这些板之间的预定的最小距离。在这种配置中，可调整的复合偏振器可以提供相对于入射平面的镜像对称偏振，同时提供任何偏振的灵活性。

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