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1. 发明申请

WO2013155391A1 SYSTEM AND METHOD FOR REJUVENATING AN IMAGING SENSOR DEGRADED BY EXPOSURE TO EXTREME ULTRAVIOLET OR DEEP ULTRAVIOLET LIGHT 审中-公开
标题翻译：用于重新摄取成像传感器的系统和方法，通过暴露于极端超紫外线或深紫外线灯
公开(公告)号：WO2013155391A1
公开(公告)日：2013-10-17
申请号：PCT/US2013/036335
申请日：2013-04-12
申请人： KLA-TENCOR CORPORATION
发明人： DELGADO, Gildardo , JANIK, Gary
IPC分类号： H04N5/335 , G01M11/00 , G01N21/88
CPC分类号： H01L21/26 , G01J1/0228 , G01J1/429 , G01J2001/0276 , G01J2001/0285 , G01N2021/95676
摘要： The present invention for imaging sensor rejuvenation may include a rejuvenation illumination system configured to selectably illuminate a portion of an imaging sensor of an imaging system with illumination suitable for at least partially rejuvenating the imaging sensor degraded by exposure to at least one of extreme ultraviolet light or deep ultraviolet light; and a controller communicatively coupled to the rejuvenation illumination system and configured to direct the rejuvenation illumination system to illuminate the imaging sensor for one or more illumination cycles during a non-imaging state of the imaging sensor.
摘要翻译：用于成像传感器复原的本发明可以包括复原照明系统，其被配置为可选择地照射成像系统的成像传感器的一部分，所述照明适合于至少部分地恢复通过暴露于至少一种极紫外光而降级的成像传感器，深紫外线; 以及控制器，其通信地耦合到所述复原照明系统并且被配置为引导所述复原照明系统在所述成像传感器的非成像状态期间照射所述成像传感器用于一个或多个照明周期。

2. 发明申请

WO2013119992A1 SYSTEM AND METHOD FOR APODIZATION IN A SEMICONDUCTOR DEVICE INSPECTION SYSTEM 审中-公开
标题翻译：用于在半导体器件检测系统中进行APODIZATION的系统和方法
公开(公告)号：WO2013119992A1
公开(公告)日：2013-08-15
申请号：PCT/US2013/025396
申请日：2013-02-08
申请人： KLA-TENCOR CORPORATION
发明人： SULLIVAN, Jamie , JANIK, Gary , CUI, Steve , WILK, Dieter , SHORT, Steve , HAURYLAU, Mikhail , ZHANG, Qiang , CHEN, Grace , DANEN, Robert , MARTONO, Suwipin , VERMA, Shobhit , CAI, Wenjian , BRENDER, Meier
IPC分类号： H01L21/66
CPC分类号： G01N21/8806 , G01N21/9501 , G01N21/95623 , G01N2021/8825 , G02B27/58
摘要： An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.
摘要翻译：具有可选择变迹的检查系统包括被配置为照亮样品表面的照明源，检测器，被配置为检测从样品的表面发出的光的至少一部分，照明源和检测器通过光学光学系统的路径，可选择地配置的沿着光学路径布置的变迹装置，其中所述变迹装置包括一个或多个变迹元件，所述变迹元件可操作地耦合到一个或多个致动级，所述致动级被配置成沿着一个或多个方向可选地致动所述一个或多个变迹元件以及控制系统，其通信地耦合到所述一个或多个致动并且被配置为通过控制所述一个或多个变迹元件的致动状态来选择性地控制沿着所述光学路径传输的照明的变迹。

3. 发明申请

WO2004049016A2 OPTICAL SYSTEM FOR MEASURING SAMPLES USING SHORT WAVELENGTH RADIATION 审中-公开
标题翻译：用短波长辐射测量样品的光学系统
公开(公告)号：WO2004049016A2
公开(公告)日：2004-06-10
申请号：PCT/US2003/037939
申请日：2003-11-25
申请人： KLA-TENCOR CORPORATION
发明人： NIKOONAHAD, Mehrdad , LEE, Shing , KWAK, Hidong , EDELSTEIN, Sergio , ZHAO, Guoheng , JANIK, Gary
IPC分类号： G02B
CPC分类号： G01N21/9501 , G01N21/8806
摘要： In an optical system measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system. In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample does not need to be placed in a vacuum, thereby enhancing system throughput.
摘要翻译：在用于测量样品特性的光学系统中，通过减少在至少一部分照明和检测路径中存在的环境吸收气体或气体和水分的量，所述环境吸收气体或气体和水分存在于用于测量过程中，可以减少这种波长分量的衰减。这种减少可以通过一个过程来完成，而不需要从测量系统中排出所有的气体和湿气。在一个实施例中，可通过置换至少一部分测量路径中存在的吸收气体和湿气中的至少一些来减少VUV辐射的衰减来实现该降低。以这种方式，样品不需要放在真空中，从而提高了系统的产量。

4. 发明公开

EP2837174A1 SYSTEM AND METHOD FOR REJUVENATING AN IMAGING SENSOR DEGRADED BY EXPOSURE TO EXTREME ULTRAVIOLET OR DEEP ULTRAVIOLET LIGHT 审中-公开
标题翻译： SYSTEM AND METHOD FOR PROCESSING降低极端紫外线辐射或远紫外线图像传感器
公开(公告)号：EP2837174A1
公开(公告)日：2015-02-18
申请号：EP13775277.0
申请日：2013-04-12
申请人： Kla-Tencor Corporation
发明人： DELGADO, Gildardo , JANIK, Gary
IPC分类号： H04N5/335 , G01M11/00 , G01N21/88
CPC分类号： H01L21/26 , G01J1/0228 , G01J1/429 , G01J2001/0276 , G01J2001/0285 , G01N2021/95676
摘要： The present invention for imaging sensor rejuvenation may include a rejuvenation illumination system configured to selectably illuminate a portion of an imaging sensor of an imaging system with illumination suitable for at least partially rejuvenating the imaging sensor degraded by exposure to at least one of extreme ultraviolet light or deep ultraviolet light; and a controller communicatively coupled to the rejuvenation illumination system and configured to direct the rejuvenation illumination system to illuminate the imaging sensor for one or more illumination cycles during a non-imaging state of the imaging sensor.

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