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    • 14. 发明授权
    • Inspection apparatus and method for producing image for inspection
    • 用于检查图像的检查装置和方法
    • US08730318B2
    • 2014-05-20
    • US13160108
    • 2011-06-14
    • Kenji NakahiraAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • Kenji NakahiraAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • H04N9/47H04N5/235G06K9/00
    • H04N5/265H04N5/217H04N5/2628H04N7/183
    • In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
    • 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化,检查装置由图像拾取单元,图像获取单元,其获取包含 信号(噪声),其基本上独立于由图像拾取单元获得的每个帧;局部对准单元,其对具有不同时间相位的帧进行局部对准,以形成由图像获取单元获取的图像;帧合成单元, 由本地对准单元对准的多个帧,用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元,用于显示或记录由帧生成的合成帧形成的图像 合成单位。
    • 17. 发明申请
    • CHARGED PARTICLE BEAM DEVICE AND A METHOD OF IMPROVING IMAGE QUALITY OF THE SAME
    • 充电颗粒束装置和改进其图像质量的方法
    • US20120274757A1
    • 2012-11-01
    • US13513280
    • 2010-11-08
    • Jie BaiKenji NakahiraAtsushi MiyamotoChie ShishidoHideyuki Kazumi
    • Jie BaiKenji NakahiraAtsushi MiyamotoChie ShishidoHideyuki Kazumi
    • H04N7/18
    • H01J37/28H01J37/244H01J2237/24495H01J2237/2809H01J2237/2817H01L22/12
    • The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate allocation ratio in accordance with pattern arrangement. In a charged particle beam device capable of improving image quality by using detected images obtained from a plurality of detectors and in a method of improving the image quality, a method of generating one or more output images from detected images corresponding to respective outputs of the detectors that are arranged at different locations is controlled by using information of a pattern direction, an edge strength, or others calculated from a design data or the detected image. In this manner, a detection area of the detected signals can be expanded by using the plurality of detectors, and the image quality such as the contrast can be improved by synthesizing the detected signals by using the pattern direction or the edge strength calculated from the design data or the detected images.
    • 本发明涉及一种通过根据图案布置使用合适的分配比例来合成来自多个检测器的检测信号来提高多层下层图案的对比度的技术。 在能够通过使用从多个检测器获得的检测图像来提高图像质量的带电粒子束装置中,以及提高图像质量的方法中,提供一种从与检测器的各个输出对应的检测图像生成一个或多个输出图像的方法 通过使用从设计数据或检测到的图像计算的图案方向,边缘强度或其他的信息来控制布置在不同位置处的位置。 以这种方式,可以通过使用多个检测器来扩展检测信号的检测区域,并且可以通过使用从设计计算出的图案方向或边缘强度合成检测信号来提高诸如对比度的图像质量 数据或检测到的图像。
    • 20. 发明申请
    • Inspection Apparatus and Method for Producing Image for Inspection
    • 检验仪器及其检测方法
    • US20120026317A1
    • 2012-02-02
    • US13160108
    • 2011-06-14
    • Kenji NAKAHIRAAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • Kenji NAKAHIRAAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • H04N7/18
    • H04N5/265H04N5/217H04N5/2628H04N7/183
    • In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
    • 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化,检查装置由图像拾取单元,图像获取单元,其获取包含 信号(噪声),其基本上独立于由图像拾取单元获得的每个帧;局部对准单元,其对具有不同时间相位的帧进行局部对准,以形成由图像获取单元获取的图像;帧合成单元, 由本地对准单元对准的多个帧,用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元,用于显示或记录由帧生成的合成帧形成的图像 合成单位。