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    • 11. 发明授权
    • Semiconductor laser and manufacturing method thereof
    • 半导体激光器及其制造方法
    • US5144633A
    • 1992-09-01
    • US704969
    • 1991-05-23
    • Kiyoshi OhnakaYuzaburo BanIsao Kidoguchi
    • Kiyoshi OhnakaYuzaburo BanIsao Kidoguchi
    • H01S5/20H01S5/22H01S5/223H01S5/323
    • H01S5/2231H01S5/2059H01S5/2205H01S5/32325
    • A hetero structure semiconductor laser of inner stripe type comprises an (Al.sub.x Ga.sub.1-x).sub.0.5 In.sub.0.5 P first cladding layer of a first conductivity type, a Ga.sub.0.5 In.sub.0.5 P or (Al.sub.x Ga.sub.1-x).sub.0.5 In.sub.0.5 P active layer, an (Al.sub.x Ga.sub.1-x).sub.0.5 In.sub.0.5 P second cladding layer of a second conductivity type different from the first conductivity type, an AlInP or (Al.sub.x Ga.sub.1-x).sub.0.5 In.sub.0.5 P confinement layer or a SiO.sub.2 having a stripe-like opening and having a refractive index lower than that of the first cladding layer, and an upper cladding layer having a band gap larger than that of the first cladding layer having a refractive index lower than that of the second cladding layer are formed successively on a GaAs substrate. Further, the width of the active layer may be narrowed as a stripe-like structure. Thus, astigmatism of a semiconductor laser becomes smaller and the threshold value of laser action becomes smaller. The manufacturing methods of such a semiconductor laser are also disclosed.
    • 内条型的异质结构半导体激光器包括第一导电类型的(Al x Ga 1-x)0.5 In 0.5 P第一包层,Ga 0.5 In 0.5 P或(Al x Ga 1-x)0.5 In 0.5 P活性层,( Al x Ga 1-x)0.5 In 0.5 P第二导电类型的不同于第一导电类型的第二包层,AlInP或(Al x Ga 1-x)0.5 In 0.5 P限制层或具有条状开口并具有折射率 指数低于第一包覆层的折射率,并且在GaAs衬底上依次形成具有比第二包覆层的折射率低的第一包层的带隙大的带隙的上包层。 此外,活性层的宽度可以变窄为条状结构。 因此,半导体激光器的像散变小,激光作用的阈值变小。 还公开了这种半导体激光器的制造方法。