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11. 发明授权

US06802934B2 Processing apparatus 失效
标题翻译：处理装置
公开(公告)号：US06802934B2
公开(公告)日：2004-10-12
申请号：US10378890
申请日：2003-03-05
申请人： Hiroaki Saeki , Keiichi Matsushima , Teruo Asakawa , Masaki Narushima
发明人： Hiroaki Saeki , Keiichi Matsushima , Teruo Asakawa , Masaki Narushima
IPC分类号： H01L2100
CPC分类号： H01L21/67766 , H01L21/67167 , H01L21/67201 , H01L21/67742 , H01L21/67745 , Y10S414/135 , Y10S414/136
摘要： Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133. Each of the load lock chambers is capable of accommodating a single wafer W. The first transfer chamber 122 is provided with a first transfer unit 124 having two substrate holders 124a, 124b each capable of holding a single object to be processed, in order to transport the wafer W among a load port site 120, the first load lock chamber 130, the second load lock chamber 132 and a positioning unit 150. The second transfer chamber 133 is provided with a second transfer unit 156 having two substrate holders 156a, 156b each capable of holding the single object to be processed, in order to transport the wafer between the first load lock chamber 130, the second load lock chamber 132 and respective vacuum processing chambers 158 to 164. Since the volume of each load lock chamber can be minimized, it is possible to perform the prompt control of atmospheres in the load lock chambers. Additionally, it is possible to perform the delivery of the wafers promptly.
摘要翻译：两个负载锁定室130和132设置在第一传送室122和第二传送室133之间。每个负载锁定室能够容纳单个晶片W.第一传送室122设置有第一传送单元124 具有能够保持单个待处理物体的两个基板保持件124a，124b，以便在载荷端口位置120，第一加载锁定室130，第二加载锁定室132和定位单元150之间输送晶片W 第二传送室133设置有第二传送单元156，第二传送单元156具有两个能够保持单个待处理物体的基板保持器156a，156b，以便在第一加载锁定室130，第二加载锁室132和相应的真空处理室158至164.由于每个负载锁定室的体积可以最小化，因此可以对负载锁中的气氛进行即时控制 mbers。此外，可以及时执行晶片的传送。

12. 发明授权

US5947675A Cassette transfer mechanism 失效
标题翻译：纸盒传送机构
公开(公告)号：US5947675A
公开(公告)日：1999-09-07
申请号：US967397
申请日：1997-11-11
申请人： Keiichi Matsushima
发明人： Keiichi Matsushima
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67775 , Y10S414/14
摘要： A cassette transfer mechanism according to the present invention comprises a cassette chamber for containing a cassette for holding a plurality of objects to be processed, a cassette transfer port formed in the cassette chamber, for allowing the cassette to be transferred into and from the cassette chamber, an object transfer port formed in the cassette chamber and opened at a predetermined angle to an opening direction of the cassette transfer port, for allowing the objects to be transferred into and from the cassette chamber, an elevation table provided in the cassette chamber such that the elevation table can be elevated, a shaft installed rotatably on the elevation table and extending in a direction substantially perpendicular to an opening direction of the object transfer port, a cassette support table fixed to the shaft and having a bottom support portion for receiving a bottom surface of the cassette and a back surface support portion for receiving a back surface of the cassette, for orienting the cassette supported by the bottom support portion and the back surface support portion, in the opening direction of the object transfer port, and a rotation mechanism for rotating the cassette support table between a first position inside the cassette chamber and a second position outside the cassette chamber, by rotating the shaft in in response to operation of the elevation table.
摘要翻译：根据本发明的盒式传送机构包括用于容纳用于保持待处理的多个物体的盒的盒室，形成在盒室中的盒传送端口，用于允许盒传送到盒室中，形成在盒室中并且以与盒传送口的打开方向成预定角度打开的物体传送口，用于允许物体被传送到盒室中和从盒室传送;设置在盒室中的升降台，使得升降台可以升高，轴可旋转地安装在升降台上并且沿着与物体传送口的打开方向大致垂直的方向延伸;盒支撑台，固定到轴上，并具有用于接收底部的底部支撑部分盒的表面和用于接收盒的后表面的后表面支撑部分用于使由所述底部支撑部和所述后表面支撑部支撑的所述盒沿所述物体传送口的打开方向定向;以及旋转机构，用于使所述盒支撑台在所述盒室内的第一位置和第二位置之间旋转通过响应于升降台的操作使轴转动，在盒室外部。

13. 发明授权

US5892421A Starter activatable at low and high speeds sequentially 失效
标题翻译：启动器可以低速和高速顺序启动
公开(公告)号：US5892421A
公开(公告)日：1999-04-06
申请号：US783799
申请日：1997-01-15
申请人： Keiichi Matsushima
发明人： Keiichi Matsushima
IPC分类号： F02N15/02 , F02N11/00 , F02N11/08 , F02N15/06 , H01H67/02
CPC分类号： F02N11/0859 , F02N11/00 , F02N11/0851 , F02N15/065 , F02N11/087 , F02N15/023 , Y10T74/13 , Y10T74/131 , Y10T74/132 , Y10T74/134
摘要： A rotation restricting member made of a resilient body such as a leaf spring is driven by a magnet switch upon energization of a motor and engages engaging grooves formed on an outer peripheral surface of an outer portion of a one-way clutch so that the rotation restricting member restricts rotation of the one-way clutch. The motor has first and second field coils connected in parallel. The first field coil is connected to an exciting coil in the magnet switch in series and the second field coil is connected to a motor contact in the magnet switch in series. When a starter switch is actuated, only the first field coil is actuated first with low voltage. Then, the motor contact is closed and the second field coil is actuated also so that the motor rotates at a high speed with full voltage.
摘要翻译：由电动机等的弹性体构成的旋转限制部件由电动机开关驱动，并且与形成在单向离合器的外部部分的外周面上的接合槽接合，从而限制构件限制单向离合器的旋转。马达具有并联的第一和第二场线圈。第一场线圈与磁开关中的励磁线圈串联连接，第二励磁线圈与磁开关串联连接到电机触点。当起动开关被起动时，只有第一个励磁线圈首先被低电压驱动。然后，闭合电动机触点，并且第二励磁线圈也被致动，使得电动机以全速高速旋转。

14. 发明授权

US07827931B2 Plasma processor electrode and plasma processor 有权
标题翻译：等离子处理器电极和等离子体处理器
公开(公告)号：US07827931B2
公开(公告)日：2010-11-09
申请号：US10508699
申请日：2003-03-27
申请人： Keiichi Matsushima , Takashi Suzuki , Hajime Furuya
发明人： Keiichi Matsushima , Takashi Suzuki , Hajime Furuya
IPC分类号： C23C16/50 , C23C16/455 , C23F1/00 , H01L21/306 , C23C16/503 , C23C16/505
CPC分类号： H01J37/32541 , H01J37/3244
摘要： A plasma processor electrode includes a support member disposed to face to an electrode that holds a substrate to be treated, an electrode plate fixed to the support member and equipped with gas injection holes and a screw hole open and facing to the support member to supply a processing gas through the gas discharge hole into a processing space formed between the electrode plate and the electrode to generate a plasma in the processing space, and a fastening unit that clamps the electrode plate on the support member by fastening the electrode plate to the support member with a screw driven into the screw hole from the support member.
摘要翻译：等离子体处理器电极包括一个支撑构件，该支撑构件设置成与保持待处理基板的电极相对，一个固定在该支撑构件上的电极板，该电极板装有气体注入孔和一个与该支撑构件相对的开口的螺孔，通过气体排出孔将气体处理成形成在电极板和电极之间的处理空间，以在处理空间中产生等离子体;以及紧固单元，其通过将电极板紧固到支撑构件上来将电极板夹持在支撑构件上螺钉从支撑构件驱动到螺钉孔中。

15. 发明授权

US06984097B1 Mounting/demounting device for wafer carrier lid 失效
标题翻译：晶圆托架盖的安装/拆卸装置
公开(公告)号：US06984097B1
公开(公告)日：2006-01-10
申请号：US10019227
申请日：2000-06-28
申请人： Hiroaki Saeki , Yoshiaki Sasaki , Keiichi Matsushima , Yasushi Taniyama , Shuuji Hagiwara
发明人： Hiroaki Saeki , Yoshiaki Sasaki , Keiichi Matsushima , Yasushi Taniyama , Shuuji Hagiwara
IPC分类号： B65G49/07
CPC分类号： H01L21/50 , H01L21/67772 , H01L21/67775
摘要： An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier provided with a lock unit having a keyhole exposed outside, on a side of the keyhole; a driver for causing the lid holding plate to move forward and backward; and a key element protruding from the lid holding plate on a side of the lid in a pivotable manner, the key element disposed opposite the keyhole in a direction of the forward and backward movement. The lock unit is adapted to be locked and unlocked by the key element pivoting in the keyhole. In a locked state, the key element can be inserted into and released from the keyhole, and in an unlocked state, the key element is engaged with and can not be released from the keyhole, while the lid holding plate holds the lid. The lid holding plate is provided with a lid-detecting unit for detecting whether the lid holding plate is holding the lid or not.
摘要翻译：根据本发明的用于晶片载体的盖的安装和拆卸单元包括：盖保持板，其能相对于晶片载体的盖子前后移动，所述盖板设置有具有在外侧露出的锁孔的锁定单元，的钥孔; 用于使盖保持板前后移动的驱动器; 以及从所述盖保持板在所述盖的侧面以可转动的方式突出的键元件，所述键元件在所述向前和向后移动的方向上与所述键孔相对设置。锁定单元适于通过在键孔中枢转的键元件来锁定和解锁。在锁定状态下，键元件可以插入钥匙孔中并从钥匙孔释放，并且在解锁状态下，当盖子保持板握住盖子时，钥匙元件与钥匙孔接合并且不能从钥匙孔释放。盖保持板设置有用于检测盖保持板是否保持盖的盖检测单元。

16. 发明授权

US06675111B2 Method and apparatus for measuring flow velocity and method and apparatus for measuring flow rate 有权
标题翻译：测量流速的方法和装置及测量流量的方法和装置
公开(公告)号：US06675111B2
公开(公告)日：2004-01-06
申请号：US10081240
申请日：2002-02-25
申请人： Eisaku Komatsu , Keiichi Matsushima
发明人： Eisaku Komatsu , Keiichi Matsushima
IPC分类号： G01F100
CPC分类号： G01F1/667
摘要： Disclosed is a method and apparatus for measuring flow velocity and flow rate of a fluid in a tube member or the like with high precision. A flow vel0ocity measuring method has: a step of allowing a signal sound of ultrasound to propagate through a fluid in a tube member or the like and detecting a phase difference between the signal sound and an original signal; a step of eliminating a phase difference detected in the step to obtain synchronism; a step of detecting time or oscillation frequency required to complete the phase synchronization in the step; and a step of, on the basis of the time or oscillation frequency required to complete phase synchronization in the step, calculating flow velocity by referring to flow velocity which is preset in a table in correspondence with the time or frequency. In the table, flow velocities corresponding to changes in temperature, pressure, and kind of a fluid may be preset together with the time or oscillation frequency. A flow velocity measuring apparatus is realized by hardware having the functions of the above steps. A flow rate is obtained by multiplying the measured flow velocity with the internal diameter of a tube member.
摘要翻译：公开了一种用于以高精度测量管构件等中的流体的流速和流量的方法和装置。流动测量方法具有：允许超声波的信号通过管构件等中的流体传播并检测信号声音与原始信号之间的相位差的步骤; 消除在步骤中检测到的相位差以获得同步的步骤; 检测在步骤中完成相位同步所需的时间或振荡频率的步骤; 以及基于在该步骤中完成相位同步所需的时间或振荡频率的步骤，通过参考与时间或频率对应的表中预设的流速来计算流速。在表中，与流体的温度，压力和种类的变化对应的流速可以与时间或振荡频率一起预先设定。流量测量装置由具有上述步骤功能的硬件实现。通过将测量的流速与管构件的内径相乘来获得流量。

17. 发明授权

US06339730B1 Processing system 有权
标题翻译：处理系统
公开(公告)号：US06339730B1
公开(公告)日：2002-01-15
申请号：US09680439
申请日：2000-10-05
申请人： Keiichi Matsushima
发明人： Keiichi Matsushima
IPC分类号： G06F700
CPC分类号： H01L21/67167 , H01L21/67196 , H01L21/67259 , Y10S414/136 , Y10S414/139
摘要： A processing system comprises a plurality of processing vessels (8A to 8D) provided with openings in which a wafer (W) is subjected to predetermined processes, and a common transfer vessel (4) connected to the openings of the processing vessels. A transfer mechanism (14) capable of turning, bending and stretching is installed in the common transfer vessel to transfer the wafer (W) between the common transfer vessel (4) and the processing vessels (8A to 8D). Stand-by spaces (24A to 24D), where the wafer (W) is held temporarily, are determined so as to correspond to the openings of the processing vessels (8A to 8D), respectively. Position sensors (26-1 to 26-5) are assigned in pairs to the stand-by spaces to measure the position of the perimeter of the wafer. The position sensors are arranged so that each stand-by space (24A to 24D) shares one of the pair of position sensors with the adjacent stand-by space for common use. A control means determines an offset of the object held by the transfer mechanism on the basis of the position of the perimeter of the object detected by the position sensors and controls the operation of the transfer mechanism so as to correct the offset of the object.
摘要翻译：处理系统包括设置有晶片（W）进行预定处理的开口的多个处理容器（8A至8D）和连接到处理容器的开口的公共转移容器（4）。在公共转移容器中安装能够转动，弯曲和拉伸的转移机构（14），以在公共转移容器（4）和处理容器（8A至8D）之间转移晶片（W）。确定晶片（W）暂时保持的备用空间（24A至24D）分别对应于处理容器（8A至8D）的开口。位置传感器（26-1至26-5）成对分配给待机空间，以测量晶片周边的位置。位置传感器被布置成使得每个备用空间（24A至24D）共享一对位置传感器中的一个与相邻的备用空间共同使用。控制装置基于由位置传感器检测到的物体的周边的位置来确定由传送机构保持的物体的偏移，并且控制传送机构的操作，以便校正物体的偏移。

18. 发明授权

US5670754A Digitizer and position determination method therefor 失效
标题翻译：数字化仪及其位置确定方法
公开(公告)号：US5670754A
公开(公告)日：1997-09-23
申请号：US411110
申请日：1995-03-27
申请人： Keiichi Matsushima
发明人： Keiichi Matsushima
IPC分类号： G06F3/046 , G06F3/033 , G06F3/041 , G09C21/00
CPC分类号： G06F3/046
摘要： A digitizer and a method for calculating the position coordinates indicated by a position indicator on a tablet. The position indicator has a coil that electromagnetically interacts with the loop coil group of the tablet. A signal detection unit, a "sum" signal specifying unit, and a coordinate determination unit are utilized. The signal detection unit sequentially selects two loop coils as a loop coil pair from the loop coil group of the tablet and acquires a "sum" of and a "difference" between signals generated in respective coils of each loop coil pair. The "sum" signal specifying unit specifies one of the loop coil pairs of the loop coil group which generates a "sum" signal of a maximum absolute value when the coil of the position indicator and the loop coil group of the tablet are brought into an interaction state. The coordinate determination unit determines position coordinates on the tablet designated by the position indicator, on the basis of a "difference" signal of the specified loop coil pair.
摘要翻译：用于计算由平板电脑上的位置指示器指示的位置坐标的数字化仪和方法。位置指示器具有与片剂的环线圈组电磁相互作用的线圈。使用信号检测单元，“和”信号指定单元和坐标确定单元。信号检测单元顺序地从图形输入板的环形线圈组中选择两个环形线圈作为环形线圈对，并且获得每个环形线圈对的各个线圈中产生的信号之间的“和”和“差”。 “和”信号指定单元指定环形线圈组的环形线圈对之一，当线圈组的位置指示器的线圈和平板的环形线圈组进入时，产生最大绝对值的“和”信号互动状态坐标确定单元基于指定的环形线圈对的“差分”信号来确定由位置指示器指定的图形输入板上的位置坐标。

19. 发明授权

US06708570B2 Flow rate measurement method, ultrasonic flow rate meter, flow velocity measurement method, temperature or pressure measurement method, ultrasonic thermometer and ultrasonic pressure gage 有权
标题翻译：流量测量方法，超声波流量计，流速测量方法，温度或压力测量方法，超声波温度计和超声波压力表
公开(公告)号：US06708570B2
公开(公告)日：2004-03-23
申请号：US10020132
申请日：2001-12-18
申请人： Keiichi Matsushima , Michio Ohkawa , Eisaku Komatsu
发明人： Keiichi Matsushima , Michio Ohkawa , Eisaku Komatsu
IPC分类号： G01F166
CPC分类号： G01F1/667
摘要： An flow rate measurement method and a ultrasonic flow meter is provided, which can measure a flow velocity accurately by utilizing a ultrasonic wave having a frequency by which a phase difference becomes zero. According to the flow rate measurement method, a reference ultrasonic velocity is prepared such that the fluid is in a standard condition, firstly. Then, an absolute ultrasonic velocity in the fluid and a temporary flow velocity V0 in the fluid are obtained. Then, the temporary flow velocity V0 is corrected by using the difference between the reference ultrasonic velocity and the absolute ultrasonic velocity thereby to determine an accurate flow velocity of the fluid, and to determine a flow rate of the fluid by using the accurate flow velocity and a cross section area of the conduit.
摘要翻译：提供一种流量测量方法和超声波流量计，其可以通过利用具有相位差为零的频率的超声波来精确地测量流速。根据流量测量方法，首先准备参考超声速度使得流体处于标准状态。然后，获得流体中的绝对超声波速度和流体中的临时流速V0。然后，通过使用参考超声波速度和绝对超声波速度之间的差来校正临时流速V0，从而确定流体的精确流速，并且通过使用精确的流速来确定流体的流量，以及导管的横截面积。

20. 发明授权

US6144926A Method of sensing access positions of arm 失效
标题翻译：检测手臂进入位置的方法
公开(公告)号：US6144926A
公开(公告)日：2000-11-07
申请号：US64003
申请日：1998-04-21
申请人： Shigeru Ishizawa , Keiichi Matsushima
发明人： Shigeru Ishizawa , Keiichi Matsushima
IPC分类号： H01L21/677 , G05B19/401 , H01L21/68 , G06F19/00
CPC分类号： H01L21/681 , G05B19/4015
摘要： In an arm access position sensing method according to the present invention, optical sensors are provided in a cassette chamber. An adjusting cassette holding wafers W in the top slot and bottom slot is placed on a stage in the cassette chamber. The stage is movable. In a calibration process, the reference slot position, map position, and map thickness are calculated using optical sensors. Similarly, in a mapping process, the sampling thickness and map wafer offset value of each slot in the cassette holding the wafers W are calculated. In an arm access position sensing process, the access position of the transfer arm is calculated using the sampling thickness, map wafer offset value, reference slot position, map position, map thickness, and specific values. On the basis of the access position, the transfer arm and stage are actuated to transfer the wafer W.
摘要翻译：在根据本发明的臂访问位置检测方法中，光学传感器设置在盒室中。在顶部狭槽和底部狭槽中保持晶片W的调节盒放置在盒室中的台上。舞台是可动的在校准过程中，使用光学传感器计算参考时隙位置，地图位置和地图厚度。类似地，在映射处理中，计算保持晶片W的盒中的每个槽的采样厚度和映射晶片偏移值。在臂访问位置检测处理中，使用采样厚度，地图晶片偏移值，参考时隙位置，地图位置，地图厚度和特定值来计算传送臂的访问位置。基于进入位置，传送臂和台被致动以传送晶片W.

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