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11. 发明授权

US4674875A Method and apparatus for inspecting surface defects on the magnetic disk file memories 失效
标题翻译：用于检查磁盘文件存储器上的表面缺陷的方法和装置
公开(公告)号：US4674875A
公开(公告)日：1987-06-23
申请号：US679358
申请日：1984-12-07
申请人： Mitsuyoshi Koizumi
发明人： Mitsuyoshi Koizumi
IPC分类号： G01N21/95 , G01N21/89
CPC分类号： G01N21/9506
摘要： Method and apparatus for inspecting surface defects of a sample in which oblique illumination is applied onto a surface of the sample and in which illuminance of reflected beams generated from the surface is measured. Shading plate having double pinholes or double slits is used as means for shading a scattered beam from aventurine prominences of the sample surface to fully shade the scattered beam so that the inspection is accurately executed.
摘要翻译：用于检查样品的表面缺陷的方法和装置，其中倾斜照明被施加到样品的表面上并且其中测量从表面产生的反射光的照度。使用具有双针孔或双缝的遮光板作为用于使来自样品表面的透明突起的散射光线遮蔽的装置，以完全遮蔽散射光束，从而准确地执行检查。

12. 发明授权

US4460273A Test apparatus for defects of plate 失效
标题翻译：板材缺陷试验装置
公开(公告)号：US4460273A
公开(公告)日：1984-07-17
申请号：US309485
申请日：1981-10-07
申请人： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Ohshima
发明人： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Ohshima
IPC分类号： G01N21/88 , G01N21/89 , G01N21/94 , G01N21/956 , G01N21/958
CPC分类号： G01N21/89 , G01N21/88
摘要： A test apparatus for detecting defects on a plate is disclosed. An illumination light is focused to one surface of the plate and another illumination light is focused to the other surface of the plate, and scattered light from the defects on the surfaces are detected to separately detect the defects on the front and rear surfaces of the plate.
摘要翻译：公开了一种用于检测板上的缺陷的测试装置。照明光聚焦到板的一个表面，另一个照明光聚焦到板的另一个表面，并且检测来自表面上的缺陷的散射光以分别检测板的前表面和后表面上的缺陷。

13. 发明授权

US4433235A Focusing position detecting device in optical magnifying and observing apparatus 失效
标题翻译：聚焦位置检测装置在光学放大和观察装置中
公开(公告)号：US4433235A
公开(公告)日：1984-02-21
申请号：US310240
申请日：1981-10-09
申请人： Nobuyuki Akiyama , Yoshimasa Ohshima , Mitsuyoshi Koizumi
发明人： Nobuyuki Akiyama , Yoshimasa Ohshima , Mitsuyoshi Koizumi
IPC分类号： G02B21/24 , G01J1/20 , G01J1/32
CPC分类号： G02B21/245
摘要： A focusing position detecting device in which a laser beam is directed through an objective lens toward the surface of an object to form a minute spot on the surface of the object, and the beam reflected from the surface of the object is led through the objective lens again toward a concentrating point, so as to detect the focusing position of the objective lens by measuring the position of the concentrating point. In the device, a photoelectric element is provided to detect the intensity of the reflected beam, and the intensity of the laser beam is so controlled that the output of the photoelectric element is maintained constant.
摘要翻译：一种聚焦位置检测装置，其中激光束被引导通过物镜朝向物体的表面，以在物体的表面上形成微小的点，并且从物体的表面反射的光束被引导通过物镜再次朝向集中点，以便通过测量集中点的位置来检测物镜的聚焦位置。在该装置中，设置光电元件以检测反射光束的强度，并且控制激光束的强度使得光电元件的输出保持恒定。

14. 发明授权

US5225886A Method of and apparatus for detecting foreign substances 失效
标题翻译：异物检测方法及装置
公开(公告)号：US5225886A
公开(公告)日：1993-07-06
申请号：US584120
申请日：1990-09-18
申请人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
发明人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
IPC分类号： G01N21/94
CPC分类号： G01N21/94
摘要： Disclosed herein are method of and apparatus for detecting a foreign substance on an object by illuminating said object, detecting via an optical system light reflected from said object and detecting said foreign substance in distinction from a background. The object is exposed to first illumination such that light reflected from said background is suppressed but light reflected from said foreign substance is highlighted relative to the light reflected from said background. The light reflected from said object as a result of said first illumination is detected, thereby obtaining a first detection signal. The object is exposed to second illumination such that light reflected from said background is free from suppression relative to the light reflected from said substance as a result of said second illumination. The light reflected from said object as a result of said second illumination is detected, thereby obtaining a second detection signal. Foreign-substance-highlighting processing is performed on said first detection signal by using said second detection signal, whereby said substance is detected.
摘要翻译：本文公开了通过照射所述物体来检测物体上的异物的方法和装置，通过光学系统检测从所述物体反射的光并检测所述异物与背景的区别。对象被暴露于第一照明，使得从所述背景反射的光被抑制，而从所述异物反射的光相对于从所述背景反射的光被突出显示。检测由于所述第一照明而从所述物体反射的光，从而获得第一检测信号。物体暴露于第二照明，使得从所述背景反射的光相对于作为所述第二照明的结果从所述物质反射的光没有抑制。检测作为所述第二照明的结果从所述物体反射的光，从而获得第二检测信号。通过使用所述第二检测信号对所述第一检测信号进行异物突出处理，从而检测所述物质。

15. 发明授权

US5098191A Method of inspecting reticles and apparatus therefor 失效
标题翻译：检查掩模版及其设备的方法
公开(公告)号：US5098191A
公开(公告)日：1992-03-24
申请号：US424196
申请日：1989-10-19
申请人： Minori Noguchi , Hiroaki Shishido , Mitsuyoshi Koizumi , Nobuyuki Akiyama , Toshihilo Nakata
发明人： Minori Noguchi , Hiroaki Shishido , Mitsuyoshi Koizumi , Nobuyuki Akiyama , Toshihilo Nakata
IPC分类号： G01N21/88 , G01N21/93 , G01N21/94 , G01N21/956 , G03F1/00 , H01L21/027 , H01L21/30 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607 , G01N21/95623 , G01N2021/95676 , G01N21/94
摘要： Method of inspecting reticles and an apparatus therefor, where means for holding and transferring an inspected reticle and a standard reticle respectively, means for illuminating light with spatial coherency adjusted onto both reticles respectively, and an objective lens for collecting transmitted light or reflected light from the illuminated body produced by the illuminating, are installed on respective Fourier transformation surfaces of both reticle surfaces, and a light blocking plate for blocking light corresponding to the adjusted spatial coherency is installed, and electric signals obtained are compared thereby a defect or a foreign substance existing on the inspected reticle can be detected.
摘要翻译：检测掩模版的方法及其装置，分别用于保持和传送被检查的掩模版和标准掩模版的装置，用于分别照射调节到两个光罩上的空间一致性的光，以及用于收集透射光或反射光的物镜通过照明产生的照明体安装在两个标线片表面的相应的傅立叶变换表面上，并且安装用于阻挡与调整的空间相干性相对应的光的遮光板，并且比较所获得的电信号，从而存在缺陷或异物可以检测到被检查的掩模版。

16. 发明授权

US5046847A Method for detecting foreign matter and device for realizing same 失效
标题翻译：异物检测方法及其实现方法
公开(公告)号：US5046847A
公开(公告)日：1991-09-10
申请号：US262573
申请日：1988-10-25
申请人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
发明人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
IPC分类号： G01N21/21 , G01N21/94 , G03F9/00
CPC分类号： G03F9/70 , G01N21/94 , G01N21/95623 , G01N2021/473 , G01N21/21
摘要： A method and apparatus for detecting foreign matter on a sample by illuminating a stripe-shaped region with linearly polarized light. Some of the light reflected by the sample is intercepted by a light intercepting stage, and the rest of the light reflected by the sample, which passes through the light intercepting stage is directed to a detecting optical system, to be detected by a photo-detector. The sample is illuminated obliquely at a predetermined angle with respect to a group of straight lines constituting a primary pattern on the sample. The angle is selected so that the diffraction light reflected by the group of straight lines does not enter the detecting optical system. A polarizing spatial filter using a liquid crystal element may be disposed in a predetermined restricted region in a spacial frequency region, or Fourier transformation plane, within the detecting optical system. The light scattered by the sample may further be separated in the detecting optical system into partial beams having different wave orientation characteristics, which characteristics are detected by a number of one-dimensional solid state imaging elements. The signals are processed by a driver, adder, and quantizer in synchronism with the one-dimensional solid state imaging elements.
摘要翻译：一种通过用线性偏振光照射条形区域来检测样品上的异物的方法和装置。由样品反射的一些光被遮光阶段遮挡，并且通过遮光台的由样品反射的其余光指向检测光学系统，由光检测器检测。样品相对于构成样品上的主要图案的一组直线以预定角度倾斜照射。选择该角度使得由直线组反射的衍射光不进入检测光学系统。使用液晶元件的偏振空间滤光片可以设置在检测光学系统内的空间频率区域或傅立叶变换平面的预定限制区域中。由样本散射的光可以在检测光学系统中进一步分离成具有不同波取向特性的部分光束，该特征由多个一维固态成像元件检测。信号由驱动器，加法器和量化器与一维固态成像元件同步处理。

17. 发明授权

US4814596A Detection of surface particles by dual semiconductor lasers having stable illumination intensities 失效
标题翻译：通过具有稳定照明强度的双重半导体激光器检测表面颗粒
公开(公告)号：US4814596A
公开(公告)日：1989-03-21
申请号：US74858
申请日：1987-07-17
申请人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
发明人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
IPC分类号： H01L21/66 , G01N21/88 , G01N21/94 , G01N21/956 , H01L21/30 , G01J1/32
CPC分类号： G01N21/94
摘要： Disclosed is an apparatus for detecting particles comprising semiconductor laser drive means for performing feedback control of semiconductor lasers, each thereof incorporating a sensor therewith for monitoring laser-output thereof, by using the output of the sensor, means for holding the feedback voltage, illuminating means including a plurality of optical means disposed to oppose each other so that the laser-outputs from the semiconductor lasers are obliquely applied onto a specimen, and detection means for detecting the light scattered from the particles present on the specimen.
摘要翻译：公开了一种用于检测粒子的装置，包括用于执行半导体激光器的反馈控制的半导体激光器驱动装置，每个半导体激光器结合有传感器，用于监视其激光输出，通过使用传感器的输出，用于保持反馈电压的装置，照明装置包括设置成彼此相对的多个光学装置，使得来自半导体激光器的激光输出倾斜地施加到样本上;以及检测装置，用于检测从存在于样本上的颗粒散射的光。

18. 发明授权

US4669875A Foreign particle detecting method and apparatus 失效
标题翻译：异物检测方法及装置
公开(公告)号：US4669875A
公开(公告)日：1987-06-02
申请号：US548516
申请日：1983-11-03
申请人： Masataka Shiba , Sachio Uto , Mitsuyoshi Koizumi
发明人： Masataka Shiba , Sachio Uto , Mitsuyoshi Koizumi
IPC分类号： G01N15/02 , G01N21/94 , G01N21/32
CPC分类号： G01N21/94 , G01N2015/0238 , G01N2021/4792 , G01N2201/1053
摘要： The foreign particle detecting method and apparatus are disclosed wherein a polarized laser beam emitted by a laser beam irradiating system from a direction inclined with respect to the direction perpendicular to the surface of a substrate is used by a scanning means to linearly scan the substrate surface from a direction approximately 90.degree. with respect to the laser light irradiating direction; and the laser light reflected from a foreign particle on the substrate surface is detected by a polarized light analyzer and a photoelectric conversion device from a direction set approximately equal to said scanning direction and inclined with respect to the direction perpendicular to the substrate surface.
摘要翻译：公开了一种外来粒子检测方法和装置，其中通过扫描装置使用激光束照射系统从相对于垂直于衬底表面的方向倾斜的方向发射的偏振激光束线性扫描衬底表面相对于激光照射方向大约90°的方向; 并且通过偏振光分析仪和光电转换装置从基本上等于所述扫描方向的方向检测从基板表面上的异物引起的反射的激光，并且相对于垂直于基板表面的方向倾斜。

19. 发明授权

US4668089A Exposure apparatus and method of aligning exposure mask with workpiece 失效
标题翻译：曝光装置和曝光掩模与工件对准的方法
公开(公告)号：US4668089A
公开(公告)日：1987-05-26
申请号：US684292
申请日：1984-12-20
申请人： Yoshitada Oshida , Masataka Shiba , Toshihiko Nakata , Mitsuyoshi Koizumi , Naoto Nakashima
发明人： Yoshitada Oshida , Masataka Shiba , Toshihiko Nakata , Mitsuyoshi Koizumi , Naoto Nakashima
IPC分类号： H01L21/30 , G03F9/00 , G01B11/26 , G01J1/32
CPC分类号： G03F9/7049
摘要： An exposure apparatus comprises a light source, a mask plate having an exposure pattern area section and an alignment/reflection area section, a projection lens, a movable stage for holding a workpiece having a workpiece alignment mark, an alignment control and a driver for the movable stage. Before the exposure pattern area section is illuminated by the light source to be projected through the projection lens onto the workpiece, the workpiece is properly aligned with the mask. Alignment between the mask plate and the workpiece is performed by the effective use of the alignment/reflection area section specifically arranged and having a specific structure. The alignment/reflection area section is on that surface of the mask plate which does not face the light source and includes a reflection portion for conducting light from another light source to the workpiece and conducting light scattered from the workpiece and passing through the projection lens to the alignment control and a mask alignment mark portion of providing, when illuminated, an image of the mask alignment mark portion to the alignment control so that it detects the positional relation between the mask alignment mark portion and the workpiece alignment mark and produces a control signal for achieving alignment between the mask plate and the workpiece.
摘要翻译：曝光装置包括光源，具有曝光图案区域部分和对准/反射区域部分的掩模板，投影透镜，用于保持具有工件对准标记的工件的可动台，对准控制和用于活动舞台。在通过投影透镜投射到工件上的光源照射曝光图案区域部分之前，工件与掩模正确对准。掩模板与工件之间的对准通过有效地使用具体排列并具有特定结构的对准/反射区域部分进行。对准/反射区域在掩模板的不面向光源的表面上，并且包括用于将来自另一光源的光传导到工件的反射部分，并且传导从工件散射的光并通过投影透镜到对准控制和掩模对准标记部分，当照明时，将掩模对准标记部分的图像提供给对准控制，使得其检测掩模对准标记部分和工件对准标记之间的位置关系，并产生控制信号以实现掩模板和工件之间的对准。

20. 发明授权

US5245403A Apparatus for detecting extraneous substances on a glass plate 失效
标题翻译：用于检测玻璃板上的特殊物质的装置
公开(公告)号：US5245403A
公开(公告)日：1993-09-14
申请号：US813837
申请日：1991-12-27
申请人： Noboru Kato , Izuo Horai , Toshihiro Kimura , Mitsuyoshi Koizumi
发明人： Noboru Kato , Izuo Horai , Toshihiro Kimura , Mitsuyoshi Koizumi
IPC分类号： G01B11/30 , G01N21/88 , G01N21/89 , G01N21/896 , G01N21/94 , G01N21/95 , G01N21/958
CPC分类号： G01N21/94 , G01N2021/4792 , G01N2021/887 , G01N2021/9513 , G01N21/9501
摘要： An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation angle, a second light projecting system arranged above the surface thereof which is irradiated with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface irradiated with the laser beams respectively emitted from the first and the second light projecting system at an elevation angle smaller than the first elevation angle. The light receiving system is arranged on a side opposite to the direction of irradiation with the normal line set up at the laser beam irradiation point therebetween and the output level of the P-polarized laser beam is set in specific relation to the S-polarized laser beam.

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