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1. 发明授权

US4460273A Test apparatus for defects of plate 失效
标题翻译：板材缺陷试验装置
公开(公告)号：US4460273A
公开(公告)日：1984-07-17
申请号：US309485
申请日：1981-10-07
申请人： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Ohshima
发明人： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Ohshima
IPC分类号： G01N21/88 , G01N21/89 , G01N21/94 , G01N21/956 , G01N21/958
CPC分类号： G01N21/89 , G01N21/88
摘要： A test apparatus for detecting defects on a plate is disclosed. An illumination light is focused to one surface of the plate and another illumination light is focused to the other surface of the plate, and scattered light from the defects on the surfaces are detected to separately detect the defects on the front and rear surfaces of the plate.
摘要翻译：公开了一种用于检测板上的缺陷的测试装置。照明光聚焦到板的一个表面，另一个照明光聚焦到板的另一个表面，并且检测来自表面上的缺陷的散射光以分别检测板的前表面和后表面上的缺陷。

2. 发明授权

US4433235A Focusing position detecting device in optical magnifying and observing apparatus 失效
标题翻译：聚焦位置检测装置在光学放大和观察装置中
公开(公告)号：US4433235A
公开(公告)日：1984-02-21
申请号：US310240
申请日：1981-10-09
申请人： Nobuyuki Akiyama , Yoshimasa Ohshima , Mitsuyoshi Koizumi
发明人： Nobuyuki Akiyama , Yoshimasa Ohshima , Mitsuyoshi Koizumi
IPC分类号： G02B21/24 , G01J1/20 , G01J1/32
CPC分类号： G02B21/245
摘要： A focusing position detecting device in which a laser beam is directed through an objective lens toward the surface of an object to form a minute spot on the surface of the object, and the beam reflected from the surface of the object is led through the objective lens again toward a concentrating point, so as to detect the focusing position of the objective lens by measuring the position of the concentrating point. In the device, a photoelectric element is provided to detect the intensity of the reflected beam, and the intensity of the laser beam is so controlled that the output of the photoelectric element is maintained constant.
摘要翻译：一种聚焦位置检测装置，其中激光束被引导通过物镜朝向物体的表面，以在物体的表面上形成微小的点，并且从物体的表面反射的光束被引导通过物镜再次朝向集中点，以便通过测量集中点的位置来检测物镜的聚焦位置。在该装置中，设置光电元件以检测反射光束的强度，并且控制激光束的强度使得光电元件的输出保持恒定。

3. 发明授权

US5225886A Method of and apparatus for detecting foreign substances 失效
标题翻译：异物检测方法及装置
公开(公告)号：US5225886A
公开(公告)日：1993-07-06
申请号：US584120
申请日：1990-09-18
申请人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
发明人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
IPC分类号： G01N21/94
CPC分类号： G01N21/94
摘要： Disclosed herein are method of and apparatus for detecting a foreign substance on an object by illuminating said object, detecting via an optical system light reflected from said object and detecting said foreign substance in distinction from a background. The object is exposed to first illumination such that light reflected from said background is suppressed but light reflected from said foreign substance is highlighted relative to the light reflected from said background. The light reflected from said object as a result of said first illumination is detected, thereby obtaining a first detection signal. The object is exposed to second illumination such that light reflected from said background is free from suppression relative to the light reflected from said substance as a result of said second illumination. The light reflected from said object as a result of said second illumination is detected, thereby obtaining a second detection signal. Foreign-substance-highlighting processing is performed on said first detection signal by using said second detection signal, whereby said substance is detected.
摘要翻译：本文公开了通过照射所述物体来检测物体上的异物的方法和装置，通过光学系统检测从所述物体反射的光并检测所述异物与背景的区别。对象被暴露于第一照明，使得从所述背景反射的光被抑制，而从所述异物反射的光相对于从所述背景反射的光被突出显示。检测由于所述第一照明而从所述物体反射的光，从而获得第一检测信号。物体暴露于第二照明，使得从所述背景反射的光相对于作为所述第二照明的结果从所述物质反射的光没有抑制。检测作为所述第二照明的结果从所述物体反射的光，从而获得第二检测信号。通过使用所述第二检测信号对所述第一检测信号进行异物突出处理，从而检测所述物质。

4. 发明授权

US4814596A Detection of surface particles by dual semiconductor lasers having stable illumination intensities 失效
标题翻译：通过具有稳定照明强度的双重半导体激光器检测表面颗粒
公开(公告)号：US4814596A
公开(公告)日：1989-03-21
申请号：US74858
申请日：1987-07-17
申请人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
发明人： Mitsuyoshi Koizumi , Yoshimasa Ohshima
IPC分类号： H01L21/66 , G01N21/88 , G01N21/94 , G01N21/956 , H01L21/30 , G01J1/32
CPC分类号： G01N21/94
摘要： Disclosed is an apparatus for detecting particles comprising semiconductor laser drive means for performing feedback control of semiconductor lasers, each thereof incorporating a sensor therewith for monitoring laser-output thereof, by using the output of the sensor, means for holding the feedback voltage, illuminating means including a plurality of optical means disposed to oppose each other so that the laser-outputs from the semiconductor lasers are obliquely applied onto a specimen, and detection means for detecting the light scattered from the particles present on the specimen.
摘要翻译：公开了一种用于检测粒子的装置，包括用于执行半导体激光器的反馈控制的半导体激光器驱动装置，每个半导体激光器结合有传感器，用于监视其激光输出，通过使用传感器的输出，用于保持反馈电压的装置，照明装置包括设置成彼此相对的多个光学装置，使得来自半导体激光器的激光输出倾斜地施加到样本上;以及检测装置，用于检测从存在于样本上的颗粒散射的光。

5. 发明授权

US4922308A Method of and apparatus for detecting foreign substance 失效
标题翻译：检测异物的方法和装置
公开(公告)号：US4922308A
公开(公告)日：1990-05-01
申请号：US67136
申请日：1987-06-29
申请人： Minori Noguchi , Mitsuyoshi Koizumi , Hiroaki Shishido , Sachio Uto , Yoshimasa Ohshima
发明人： Minori Noguchi , Mitsuyoshi Koizumi , Hiroaki Shishido , Sachio Uto , Yoshimasa Ohshima
IPC分类号： G01N21/94
CPC分类号： G01N21/94 , G01N2021/4792
摘要： A method of and an apparatus for detecting a fine foreign substance in which the surface of a specimen is illuminated with linearly-polarized laser beam to detect light scattered from the surface and having passed through a polarization filter, the back side of the specimen is illuminated with light from a light source such as a mercury lamp to obtain the light and darkness information or phase information on the specimen surface by transmitted light from the specimen, and fine massive and filmy foreign substances on the specimen surface are detected on the basis of information given by the scattered light and transmitted light.
摘要翻译：一种检测细微异物的方法和装置，其中用线性偏振激光束照射试样的表面，以检测从表面散射并穿过偏振滤光器的光，使样本的背面被照亮来自诸如汞灯的光源的光从样品透射光获得样品表面上的光和黑信息或相位信息，并且根据信息检测样品表面上的细小块状和薄膜异物由散射光和透射光给出。

6. 发明授权

US4740079A Method of and apparatus for detecting foreign substances 失效
标题翻译：异物检测方法及装置
公开(公告)号：US4740079A
公开(公告)日：1988-04-26
申请号：US792320
申请日：1985-10-28
申请人： Mitsuyoshi Koizumi , Yoshimasa Ohshima , Minoru Tanaka
发明人： Mitsuyoshi Koizumi , Yoshimasa Ohshima , Minoru Tanaka
IPC分类号： G01N21/21 , G01N21/94 , G01N21/95 , G01N21/01
CPC分类号： G01N21/94 , G01N2021/4721 , G01N21/21 , G01N21/9501
摘要： The present invention provides a method for detecting foreign substances which detects a foreign substance with a first photoelectric conversion element by emphasizing the foreign substance and detects a background on the object with a second photoelectric conversion element by emphasizing the background and detects a foreign substance detection signal obtained from the first photoelectric conversion element by emphasizing the signal with a detection signal obtained from the second photoelectric conversion element.
摘要翻译：本发明提供了一种通过强调异物检测第一光电转换元件的异物检测异物的方法，并且通过强调背景来检测物体上的背景，并检测异物检测信号通过用从第二光电转换元件获得的检测信号强调信号从第一光电转换元件获得。

7. 发明申请

US20120312104A1 METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF 有权
标题翻译：检查半导体器件的方法及其装置
公开(公告)号：US20120312104A1
公开(公告)日：2012-12-13
申请号：US13593171
申请日：2012-08-23
申请人： Akira HAMAMATSU , Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Kenji Oka , Takanori Ninomiya , Maki Tanaka , Kenji Watanabe , Tetsuya Watanabe , Yoshio Morishige
发明人： Akira HAMAMATSU , Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Kenji Oka , Takanori Ninomiya , Maki Tanaka , Kenji Watanabe , Tetsuya Watanabe , Yoshio Morishige
IPC分类号： G01N21/88
CPC分类号： G06T7/001 , G01N21/8851 , G01N21/9501 , G01N2021/8861 , G01N2021/8867 , G06T7/97 , G06T2207/10152 , G06T2207/30148
摘要： A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.
摘要翻译：在多个检查条件下对样本进行检查的检查方法和装置以及在多个检查条件下检查样本而获得的检查数据和对应于检查日期样本的位置信息具有相应的检查条件。多个检查条件中的每一个的检查数据通过使用关于样本的位置信息彼此相对来确定待检查的位置，并且在待检查位置处的样本的图像是详细的获得。对所获得的图像进行分类，确定通过使用图像分类信息的样本的检查条件。

8. 发明授权

US08094295B2 Inspection method and inspection apparatus 有权
公开(公告)号：US08094295B2
公开(公告)日：2012-01-10
申请号：US12555610
申请日：2009-09-08
申请人： Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人： Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要： The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.

9. 发明授权

US07952700B2 Method of apparatus for detecting particles on a specimen 有权
标题翻译：用于检测样品上的颗粒的装置的方法
公开(公告)号：US07952700B2
公开(公告)日：2011-05-31
申请号：US12907895
申请日：2010-10-19
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.
摘要翻译：通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置，通过从仰角不同的多个方向之一的细长形状的光束照射，根据要检测的缺陷的种类从照明光源发射的光束。通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像，通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率形状光通量。通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

10. 发明授权

US07817261B2 Method of apparatus for detecting particles on a specimen 有权
标题翻译：用于检测样品上的颗粒的装置的方法
公开(公告)号：US07817261B2
公开(公告)日：2010-10-19
申请号：US12114139
申请日：2008-05-02
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.
摘要翻译：通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置，通过从仰角不同的多个方向之一的细长形状的光束照射，根据要检测的缺陷的种类从照明光源发射的光束。通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像，通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率形状光通量。通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

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