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    • 11. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS61152039A
    • 1986-07-10
    • JP27309584
    • 1984-12-26
    • HITACHI MICROCUMPUTER ENGHITACHI LTD
    • NAKAGAWA TAKASHIKOYAMA YOSHIHISA
    • H01L21/3213H01L21/88
    • PURPOSE:To perform microscopic processing on a metal film without using a multilayer resist structure and to obtain a high-accuracy wiring and a semiconductor device with fuse by a method wherein the oxide coated film on the surface of the metal film is colored, a photo absorption layer consisting of the colored layer of the oxide coated film is provided on the surface of the metal film and the reflectivity of the metal film is made to reduce. CONSTITUTION:An oxide coated film of several tens Angstrom or thereabouts is provided on the surface of an Al evaporated film 3. This oxide coated film is generally a gamma-al2O3 film, is porous from the mechanism of its formation, is rich in absorption and is easy to dye. The oxide coated film, which is the surface layer of the Al evaporated film 3, is colored and a photo absorption layer 4 consisting of the colored layer is provided. Then, a photo resist film 5 is formed. A pattern exposure is performed turning the photo resist film 5 to the wiring pattern. At the time of this exposure, as the photo absorption layer 4 is being provided on the surface of the Al evaporated film 3 having a high reflectivity, the light of a photosensitive wavelength is absorbed in the colored layer of the photo absorption layer 4, and the reflection of light from the steps and the adjacent patterns and the reflection of light from the surface of the Al evaporated film 3, which is the base, can be exposure reaches so deep as to deep as to the light-shielding part consisting of a mask, there is no need to use a multilayer resist structure in a microscopic processing technique according to photolithography.
    • 18. 发明专利
    • Semiconductor integrated circuit device
    • 半导体集成电路设备
    • JPS61104396A
    • 1986-05-22
    • JP22219084
    • 1984-10-24
    • Hitachi LtdHitachi Micro Comput Eng Ltd
    • KOYAMA YOSHIHISA
    • G11C11/401G11C11/34
    • PURPOSE: To reduce a rush current of the time when a power source is turned on, by controlling an FET between an inverter of a timing circuit and the ground by an FET coupled with a power source by the same conductive type.
      CONSTITUTION: "The gate potential of P type FETs Q2WQ5 for connecting an input of inverters IV2, IV4...IV8 and the ground, in CMOS inverters IV1WIV5 for generating a preamplifier timing signal ϕP
      a and an inversion ϕP
      a , when a power source is turned on is turned on by L of a floating state by a parasitic input capacity. Accordingly, the input of the inverters IV2, IV4...IV8 becomes a ground potential and the output becomes H, and as for an input level of the invertors IV1WIV8, a period in which it becomes an intermediate level is shortened. When the power supply voltage exceeds a threshold level, a P type FETQ1 whose gate is connected to the ground is turned on, the gate is controlled and the FETs Q2WQ5 are turned off. According to such constitution as a period in which an input of the inverter becomes an intermediate level, when the power source is turned on, a through-current is suppressed, and a rush current of the time when the power source is turned on is reduced.
      COPYRIGHT: (C)1986,JPO&Japio
    • 目的:为了减少电源接通时的冲击电流,通过使用相同导电类型的与电源耦合的FET来控制定时电路的反相器与地之间的FET。 构成:在用于产生前置放大器定时信号phiPa和反相phiPa的CMOS反相器IV1-IV5中用于连接反相器IV2,IV4 ... IV8和地的输入端的P型FET Q2-Q5的栅极电位,当 电源通过寄生输入容量导通浮动状态L。 因此,反相器IV2,IV4 ... IV8的输入成为接地电位,输出变为H,对于反相器IV1〜IV8的输入电平,缩短了变为中间电平的期间。 当电源电压超过阈值电平时,栅极连接到地的P型FETQ1导通,栅极被控制,FET Q2-Q5截止。 根据逆变器的输入为中间电平的期间的结构,当电源接通时,抑制通电,并且电源接通时的冲击电流减少 。
    • 19. 发明专利
    • Discriminating circuit in semiconductor integrated circuit
    • 在半导体集成电路中识别电路
    • JPS59117795A
    • 1984-07-07
    • JP22630582
    • 1982-12-24
    • Hitachi LtdHitachi Micro Comput Eng Ltd
    • KOYAMA YOSHIHISA
    • G11C11/413G06F11/00G11C29/00G11C29/04
    • G06F11/006
    • PURPOSE:To discriminate easily and surely a failed part after the package assembling of a memory provided with a redundancy circuit by connecting a fuse of a programmable element and a transistor (TR) of diode operation and impressing a reverse potential to the connection. CONSTITUTION:No current is conducted to the FETQ3, Q4 of diode connection connected to the fuse 4 of a discriminating circuit 3 at the normal operation when voltages at terminals VCC, VSS are at power supply voltage and ground voltage respectively, and no effect on an output buffer circuit is given because of the connection of the circuit 3. In impressing the reverse potential to the terminals VCC and VSS, when the fuse 4 is not blown, a node N1' reaches a prescribed voltage dividing potential by the FETQ3, Q4, and when the fuse is blown, the potential reaches a high potential depending on the FETQ4. When the potential depending on the discrimination of the presence of a failure via the bonding and section 2 is observed, the discrimination of a failed part is attained easily and surely even after the package assembling.
    • 目的:通过连接可编程元件的熔丝和二极管操作的晶体管(TR),并向连接施加反向电位,在设有冗余电路的存储器的封装组装之后,容易且可靠地区分故障部分。 构成:在VCC,VSS端子的电压分别为电源电压和接地电压时,二极管连接的FETQ3,Q4在正常工作时连接到鉴别电路3的保险丝4,没有电流 由于电路3的连接,给出了输出缓冲电路。在给端子VCC和VSS施加反向电位时,当熔丝4不熔断时,节点N1'通过FETQ3,Q4达到规定的分压电位, 当保险丝熔断时,根据FETQ4,电位达到高电位。 当观察到根据通过接合和部分2鉴别故障的电位时,即使在封装组装之后也能容易且可靠地实现对故障部件的识别。
    • 20. 发明专利
    • DYNAMIC TYPE SEMICONDUCTOR MEMORY
    • JPH04349294A
    • 1992-12-03
    • JP12339791
    • 1991-05-28
    • HITACHI LTDHITACHI VLSI ENG
    • KOYAMA YOSHIHISASUZUKI YUKIE
    • G11C11/404G11C11/407
    • PURPOSE:To prevent an insulating film under a plate electrode from being collapsed with static electricity by interposing a switch for power supply/ interruption between an external source voltage terminal or a Vcc/2 generator and the plate electrode. CONSTITUTION:This memory is constituted so that the Vcc/2 voltage generated in the Vcc/2 generator 5 is capable to supply to the plate electrode in a memory array through a switch MOSQ1 and to a data line and to a sense amplifier through a switch MOSQ2. In such a case, when a start detecting signal WK is supplied to a Vcc/2 supply control signal generator 6, a supply control signal VPLC to be its output signal is low level, thus, switches MOSQ1, Q2 are turned off and even when the Vcc/2 voltage is generated in the Vcc/2 generator, the supply is interrupted. On the contrary, when high voltage as static electricity is impressed transiently to the source voltage terminal, since switchs MOSQ1, Q2 are turned off, high voltage is unsupplied to the plate electrode and the collaps of the insulating film is prevented.