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    • 11. 发明申请
    • ARRAY OF GRADUATED PRE-TILTED MEMS MIRRORS
    • 研磨抛光MEMS微镜阵列
    • US20080137172A1
    • 2008-06-12
    • US11567723
    • 2006-12-06
    • Bryan P. StakerAndres FernandezWindsor E. OwensAlexander P. Kindwall
    • Bryan P. StakerAndres FernandezWindsor E. OwensAlexander P. Kindwall
    • G02B26/00
    • G02B6/3556G02B6/357G02B26/0841
    • An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.
    • 在平面基板上形成MEMS器件的阵列,其具有在多个环形区域或扇区中的每一个中具有基本相同结构的多个MEMS反射镜,其中每个区域中的MEMS反射镜具有相同的预倾斜。 预倾斜是通过将每个双轴可倾斜镜嵌入预倾斜的微平台或万向节来实现的。 在具体实施例中,为每个微反射镜提供预选的预倾角的一个微平台,并且提供具有与预倾斜一致的形状的底层电极。 在具体实施例中,环形区域是相邻的椭圆形或椭圆形区域。 通过预倾斜,意味着微镜的静止状态或非激活状态使得来自固定源的反射光束被引导到目标阵列的中心。
    • 15. 发明授权
    • Three-dimensional optical switch with offset input-output ports
    • 具有偏移输入输出端口的三维光开关
    • US06917733B1
    • 2005-07-12
    • US10406947
    • 2003-04-03
    • Eugene W. CampbellBryan P. Staker
    • Eugene W. CampbellBryan P. Staker
    • G02B6/35
    • G02B6/3556G02B6/3512
    • An optical switch globally minimizes maximum tilt angles used to route optical signals from input to output by disposition of an input array of first tiltable micromirrors within a first boundary typically having top-bottom reflection symmetry and left-right reflection symmetry and by disposition of an output array of second tiltable micromirrors within a second boundary a symmetry which matches the symmetry for the input array, the output array and the input array being disposed opposing one another and normal to parallel central axes and further being offset from one another in the plane of the normals to the arrays, so that a collimated beamlet impinging on the center the input array and reflected off at an equivalent angle intersects the output array at an offset.
    • 光学开关全局地最小化用于通过在通常具有顶部底部反射对称性和左右反射对称性的第一边界内的第一可倾斜微反射器的输入阵列的布置和通过布置输出来将输入到输出的光信号路由到的最大倾斜角度最小化 在第二边界内的第二可倾斜微镜的阵列,其对应于输入阵列的对称性,输出阵列和输入阵列被布置为彼此相对并垂直于平行的中心轴,并且还在第二边界的平面中彼此偏移 使阵列上的准直子束入射到输入阵列的中心并以等效的角度反射,与偏移的输出阵列相交。
    • 16. 发明授权
    • Method of making and an apparatus for a flat diffraction grating light
valve
    • 制造方法和平面衍射光栅光阀的装置
    • US5661592A
    • 1997-08-26
    • US480459
    • 1995-06-07
    • Jonathan G. BornsteinWilliam C. BanyaiDavid M. BloomRalph G. WhittenBryan P. Staker
    • Jonathan G. BornsteinWilliam C. BanyaiDavid M. BloomRalph G. WhittenBryan P. Staker
    • G02B5/18G02B26/08G02B26/00
    • G02B5/1828G02B26/0808Y10S359/904
    • A deformable grating aparatus for modulating light is made by forming an insulating layer on a substrate, forming a first conductive layer on the insulating layer and then forming a sacrificial layer thereon. The sacrificial layer and the first conducting layer are then etched to define bit lines and busses to bonding pads. Then a layer of resilient material is formed onto the etched layers and a reflective conducting layer is formed on the resilient layer. A dielectric layer is deposited on the reflective conducting layer. The dielectric layer, the reflective conducting layer, the resilient layer and the sacrificial layer are all then etched to form a grating including a plurality of parallel elements. Thereafter the sacrificial layer is removed below the parallel elements, to suspend the parallel elements over the first conducting layer. The surface is treated to prevent the grating from adhering to the first conducting layer. A light modulator includes a substrate with an insulating layer, and a plurality of parallel conductive layers formed on the insulating layer. The ribbons are spaced apart from the conductive layers by an air space and mounted to the substrate in gaps between the conductive layers.
    • 通过在衬底上形成绝缘层,在绝缘层上形成第一导电层,然后在其上形成牺牲层,制成用于调制光的可变形光栅装置。 然后蚀刻牺牲层和第一导电层以将位线和总线限定到接合焊盘。 然后在蚀刻层上形成一层弹性材料,并在弹性层上形成反射导电层。 电介质层沉积在反射导电层上。 然后对电介质层,反射导电层,弹性层和牺牲层进行蚀刻以形成包括多个平行元件的光栅。 此后,牺牲层在平行元件下方被移除,以将平行元件悬挂在第一导电层上。 处理表面以防止光栅粘附到第一导电层。 光调制器包括具有绝缘层的衬底和形成在绝缘层上的多个平行导电层。 带通过空气间隔与导电层间隔开,并且在导电层之间的间隙中安装到基板上。
    • 20. 发明申请
    • METHOD AND SYSTEM FOR ACCURATE ALIGNMENT AND REGISTRATION OF ARRAY FOR DNA SEQUENCING
    • 用于DNA序列的精确对准和阵列注册的方法和系统
    • US20110268347A1
    • 2011-11-03
    • US13092618
    • 2011-04-22
    • Bryan P. Staker
    • Bryan P. Staker
    • G06K9/00C40B60/10
    • C12Q1/6874G06K9/32G06K9/42G06K2209/07G06T7/0012G06T7/32G06T7/337G06T7/74G06T2207/10056G06T2207/30072
    • In a genome sequencing system and methodology, a protocol is provided to achieve precise alignment and accurate registration of an image of a planar array of nanoballs subject to optical analysis. Precise alignment correcting for fractional offsets is achieved by correcting for errors in subperiod x-y offset, scale and rotation by use of minimization techniques and Moiré averaging. In Moiré averaging, magnification is intentionally set so that the pixel period of the imaging element is a noninteger multiple of the site period. Accurate registration is achieved by providing for pre-defined pseudo-random sets of sites, herein deletion or reserved sites, where nanoballs are prevented from attachment to the substrate so that the sites of the array can be used in a pattern matching scheme as registration markers for absolute location identification. Information can be extracted with a high degree of confidence that it is correlated to a known location, while at the same time the amount of information that can be packed on a chip is maximized.
    • 在基因组测序系统和方法学中,提供了一种协议,以实现经受光学分析的纳米棒的平面阵列的图像的精确对准和精确配准。 通过使用最小化技术和莫尔平均来校正子周期x-y偏移,刻度和旋转中的误差来实现分数偏移的精确对准校正。 在莫尔平均中,有意地设置放大率,使得成像元件的像素周期是站点周期的非整数倍。 通过提供预定义的伪随机组的位点(这里是删除或保留位点)来实现精确的注册,其中防止了纳米线附着到基底,使得阵列的位点可以以模式匹配方案用作对准标记 用于绝对位置识别。 可以高信度地提取信息,使其与已知位置相关联,同时可将芯片上打包的信息量最大化。