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1. 发明授权

US5661592A Method of making and an apparatus for a flat diffraction grating light valve 失效
$Method of making and an apparatus for a flat diffraction grating light valve$
标题翻译：制造方法和平面衍射光栅光阀的装置
公开(公告)号：US5661592A
公开(公告)日：1997-08-26
申请号：US480459
申请日：1995-06-07
申请人： Jonathan G. Bornstein , William C. Banyai , David M. Bloom , Ralph G. Whitten , Bryan P. Staker
发明人： Jonathan G. Bornstein , William C. Banyai , David M. Bloom , Ralph G. Whitten , Bryan P. Staker
IPC分类号： G02B5/18 , G02B26/08 , G02B26/00
CPC分类号： G02B5/1828 , G02B26/0808 , Y10S359/904
摘要： A deformable grating aparatus for modulating light is made by forming an insulating layer on a substrate, forming a first conductive layer on the insulating layer and then forming a sacrificial layer thereon. The sacrificial layer and the first conducting layer are then etched to define bit lines and busses to bonding pads. Then a layer of resilient material is formed onto the etched layers and a reflective conducting layer is formed on the resilient layer. A dielectric layer is deposited on the reflective conducting layer. The dielectric layer, the reflective conducting layer, the resilient layer and the sacrificial layer are all then etched to form a grating including a plurality of parallel elements. Thereafter the sacrificial layer is removed below the parallel elements, to suspend the parallel elements over the first conducting layer. The surface is treated to prevent the grating from adhering to the first conducting layer. A light modulator includes a substrate with an insulating layer, and a plurality of parallel conductive layers formed on the insulating layer. The ribbons are spaced apart from the conductive layers by an air space and mounted to the substrate in gaps between the conductive layers.
摘要翻译：通过在衬底上形成绝缘层，在绝缘层上形成第一导电层，然后在其上形成牺牲层，制成用于调制光的可变形光栅装置。然后蚀刻牺牲层和第一导电层以将位线和总线限定到接合焊盘。然后在蚀刻层上形成一层弹性材料，并在弹性层上形成反射导电层。电介质层沉积在反射导电层上。然后对电介质层，反射导电层，弹性层和牺牲层进行蚀刻以形成包括多个平行元件的光栅。此后，牺牲层在平行元件下方被移除，以将平行元件悬挂在第一导电层上。处理表面以防止光栅粘附到第一导电层。光调制器包括具有绝缘层的衬底和形成在绝缘层上的多个平行导电层。带通过空气间隔与导电层间隔开，并且在导电层之间的间隙中安装到基板上。

2. 发明授权

US06935759B1 Folded longitudinal torsional hinge for gimbaled MEMS mirror 有权
标题翻译：万向平面MEMS镜的折叠纵向扭转铰链
公开(公告)号：US06935759B1
公开(公告)日：2005-08-30
申请号：US10080064
申请日：2002-02-19
申请人： Bryan P. Staker , William C. Banyai
发明人： Bryan P. Staker , William C. Banyai
IPC分类号： B81B3/00 , G02B26/08 , G02B26/10 , G02B7/182
CPC分类号： G02B26/0841 , B81B3/0062 , G02B26/0833 , G02B26/105
摘要： In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked together by rigid lateral brace sections. In primary embodiment the hinge elements are arranged in a double gimbal configuration. Specific embodiments of the hinge elements are simple longitudinal, compound longitudinal, stacked simple longitudinal, and stacked compound longitudinal. The longitudinal hinges may be used with various types of mirrors including circular or rectilinear, recessed or nonrecessed, where the hinges are connected in either a symmetric or asymmetric configuration relative to one another, as hereinafter illustrated by way of a subset of examples. A preferred embodiment of a mirror structure suitable for an array structure according to the invention is a nonstacked compound longitudinal hinge symmetrically connected to a circular nonrecessed electrostatically-actuatable parallel plate mirror within a substantially circular ring hinged in substantially the same way to form a double gimbaled structure.
摘要翻译：在平行板静电操作优化的万向平面微加工微镜阵列中，提供了纵向型万向铰链元件，其中多个扭转纵向铰链元件以与旋转轴线平行的阵列布置，并且通过刚性侧向大括号。在主要实施例中，铰链元件被布置成双重万向架配置。铰链元件的具体实施例是简单的纵向，复合纵向，堆叠简单的纵向和堆叠的复合纵向。纵向铰链可以与各种类型的反射镜一起使用，包括圆形或直线，凹进或不加工，其中铰链以相对于彼此的对称或非对称构造连接，如下文通过示例子集所示。适用于根据本发明的阵列结构的反射镜结构的优选实施例是一种非堆叠化合物纵向铰链，其对称地连接到基本上相同方式铰链的基本上相同方式上的环形未加工的可静电驱动的平行板反射镜，以形成双平衡结构体。

3. 发明授权

US5629801A Diffraction grating light doubling collection system 失效
$Diffraction grating light doubling collection system$
标题翻译：衍射光栅倍增收集系统
公开(公告)号：US5629801A
公开(公告)日：1997-05-13
申请号：US473759
申请日：1995-06-07
申请人： Bryan P. Staker , David M. Bloom , Bryan E. Loucks
发明人： Bryan P. Staker , David M. Bloom , Bryan E. Loucks
IPC分类号： G02B27/18 , G02B19/00 , G02B27/42 , G02B27/54 , H04N5/74 , H04N9/31 , G02B5/18 , G02F1/00 , G02F1/03 , G03B21/14
CPC分类号： G02B26/0808 , G02B19/0028 , G02B19/0047 , G02B27/42 , H04N5/7458 , H04N9/31
摘要： A reflective/diffractive light valve system collects light from multiple dimensions around a single light source. From these multiple collection dimensions, the light is directed to impinge on the valve from multiple directions. When the valve is configured to be reflective, the light returns to the source. On the other hand, when the valve is configured to be diffractive, light from a first and third order diffraction are transmitted from the valve for each of the collection dimensions which greatly enhances the efficiency of the system.
摘要翻译：反射/衍射光阀系统围绕单个光源收集来自多个维度的光。从这些多个收集尺寸，光被引导从多个方向撞击在阀上。当阀被配置为反射时，光返回到源。另一方面，当阀构造为衍射时，对于每个收集尺寸，来自第一和第三级衍射的光从阀传递，这大大提高了系统的效率。

4. 发明申请

US20120099852A1 METHOD AND SYSTEM FOR IMAGING HIGH DENSITY BIOCHEMICAL ARRAYS WITH SUB-PIXEL ALIGNMENT 有权
标题翻译：用于用子像素对准成像高密度生物化学阵列的方法和系统
公开(公告)号：US20120099852A1
公开(公告)日：2012-04-26
申请号：US12912641
申请日：2010-10-26
申请人： Bryan P. Staker , Craig E. Uhrich
发明人： Bryan P. Staker , Craig E. Uhrich
IPC分类号： G02B21/36 , H04N17/00
CPC分类号： G02B21/365 , G01B11/272 , G02B21/002 , G02B21/025 , G02B21/361 , H04N5/37206 , H04N7/18
摘要： A system and associated method for imaging high density biochemical arrays comprises one or more imaging channels that share a common objective lens and a corresponding one or more time delay integration-type imaging cameras with optical alignment mechanisms that permit independent inter-channel and intra-channel adjustment of each of four degrees: X, Y, rotation and scale. The imaging channels are configured to independently examine different spectra of the image of the biochemical arrays.
摘要翻译：用于对高密度生物化学阵列进行成像的系统和相关方法包括共享共同物镜的一个或多个成像通道和具有光学对准机构的相应的一个或多个时间延迟积分型成像相机，其允许独立的通道间和通道内四度调整：X，Y，旋转和刻度。成像通道被配置为独立地检查生物化学阵列的图像的不同光谱。

5. 发明授权

US06693735B1 MEMS structure with surface potential control 有权
标题翻译：具有表面电位控制的MEMS结构
公开(公告)号：US06693735B1
公开(公告)日：2004-02-17
申请号：US09919219
申请日：2001-07-30
申请人： Lawrence P. Muray , Bryan P. Staker , Andres Fernandez
发明人： Lawrence P. Muray , Bryan P. Staker , Andres Fernandez
IPC分类号： G02B2600
CPC分类号： G02B26/0841 , B81B3/0086 , B81B2201/042
摘要： In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.
摘要翻译：在静电控制装置中，例如具有围绕电极形成的空腔的MEMS阵列，其直接安装在电介质基底上，其中嵌入的静电致动电极与各个MEMS元件对齐设置，提供了可控地中和多余电荷的机构并且在MEMS元件和静电致动电极之间建立受控电位。

6. 发明授权

US06649987B1 MEMS hybrid structure having flipped silicon with external standoffs 有权
标题翻译： MEMS混合结构具有外部支架翻转硅
公开(公告)号：US06649987B1
公开(公告)日：2003-11-18
申请号：US09975119
申请日：2001-10-09
申请人： Bryan P. Staker , Douglas L. Teeter, Jr. , Andres Fernandez , David T. Amm
发明人： Bryan P. Staker , Douglas L. Teeter, Jr. , Andres Fernandez , David T. Amm
IPC分类号： H01L2982
CPC分类号： B81B3/0086
摘要： A structure of a hybrid MEMS structure is provided wherein a plate comprises a thin actuatable layer of conductive silicon, such as a MEMS actuatable element, and a thicker handle layer of conductive silicon to provide structural integrity which are separated by a thin oxide, together forming an SOI wafer. This plate is mounted to a substrate, typically ceramic, with the thin actuatable layer facing the substrate and separated by an air gap that is formed by creating, on the substrate, insulator standoffs which come in contact with the plate. A suitable dielectric material useful as a standoff on the substrate is a footrest that permits high aspect ratios.
摘要翻译：提供了混合MEMS结构的结构，其中板包括导电硅的薄可致动层，例如MEMS可致动元件，以及较厚的导电硅手柄层，以提供由薄氧化物分隔的结构完整性，一起形成 SOI晶片。该板被安装到通常为陶瓷的基板上，薄的可致动层面向基板，并由通过在基板上产生与板接触的绝缘体间隙而形成的气隙分开。用作衬底上的支座的合适的介电材料是允许高纵横比的搁脚板。

7. 发明授权

US06635158B1 Electro ceramic MEMS structure with controlled actuator gap 有权
标题翻译：电陶瓷MEMS结构具有受控的执行器间隙
公开(公告)号：US06635158B1
公开(公告)日：2003-10-21
申请号：US09919569
申请日：2001-07-30
申请人： Bryan P. Staker , Douglas L. Teeter, Jr. , David T. Amm
发明人： Bryan P. Staker , Douglas L. Teeter, Jr. , David T. Amm
IPC分类号： C25D1700
CPC分类号： B81B3/0086 , B81B2201/042
摘要： In an array apparatus, each MEMS element, comprising an actuatable element and a supportive handle, is mounted over a plurality of electrodes wherein the air gap is controlled by the thickness of the electrodes and not primarily by the structure of the handle. The structure of electrostatic actuation electrodes in specific embodiments is disclosed. While the invention is primarily a technique for reducing the air gap without unduly limiting the thickness of the handle, the invention may also be used to establish an air gap greater than the thickness of the handle.
摘要翻译：在阵列装置中，包括可致动元件和支撑手柄的每个MEMS元件安装在多个电极上，其中气隙由电极的厚度控制，而不是主要由手柄的结构控制。在具体实施例中公开了静电致动电极的结构。虽然本发明主要是用于减小气隙而不过度地限制手柄的厚度的技术，但是本发明也可用于建立大于手柄厚度的气隙。

8. 发明申请

US20120224050A1 HIGH-DENSITY BIOCHEMICAL ARRAY CHIPS 有权
标题翻译：高密度生物化学阵列
公开(公告)号：US20120224050A1
公开(公告)日：2012-09-06
申请号：US13221648
申请日：2011-08-30
申请人： Bryan P. Staker
发明人： Bryan P. Staker
IPC分类号： H04N7/18 , C40B40/06
CPC分类号： G01N21/6452 , B01J19/0046 , B01J2219/00531 , B01J2219/00659 , B01J2219/00662 , B01J2219/00693 , C40B20/02 , G01N21/6428 , G01N21/6458
摘要： An array chip useful for biochemical assays is provided wherein the chip includes a field region arranged with attachment sites according to a first pitch and at least one track region having a one-dimensional spot pattern arranged according to a second pitch that is less dense and is a non-integer multiple of the first pitch so that one-dimensional Moiré averaging may be applied in the track region, thereby to attain alignment of the chip to the optical instrumentation with a higher density of attachment sites.
摘要翻译：提供了一种可用于生物化学测定的阵列芯片，其中芯片包括根据第一间距布置有附接位置的场区域和至少一个具有根据第二节距排列的一维点图案的轨道区域，该第二间距不太密集，第一节距的非整数倍，使得可以在轨道区域中施加一维莫尔平均，从而以更高密度的附着位置实现芯片与光学仪器的对准。

9. 发明申请

US20080113160A1 Method And Apparatus For Localized Bonding 审中-公开
标题翻译：用于局部粘合的方法和装置
公开(公告)号：US20080113160A1
公开(公告)日：2008-05-15
申请号：US11559831
申请日：2006-11-14
申请人： Andres Fernandez , Bryan P. Staker , Alexander P. Kindwall , Windsor E. Owens
发明人： Andres Fernandez , Bryan P. Staker , Alexander P. Kindwall , Windsor E. Owens
IPC分类号： B32B7/14 , B32B37/02 , B32B37/14
CPC分类号： B32B37/1292 , B32B7/12 , B32B2309/68 , B32B2457/00 , B81C3/001 , B81C2203/032 , B81C2203/035 , Y10T428/24612 , Y10T428/2462
摘要： One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.
摘要翻译：在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。这些空腔用作接合材料的接收器，并且是键的位置。空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。这允许零件与标称零分离配合。一旦固化，接合材料在每个空腔内形成局部粘合。可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

10. 发明授权

US06917733B1 Three-dimensional optical switch with offset input-output ports 有权
标题翻译：具有偏移输入输出端口的三维光开关
公开(公告)号：US06917733B1
公开(公告)日：2005-07-12
申请号：US10406947
申请日：2003-04-03
申请人： Eugene W. Campbell , Bryan P. Staker
发明人： Eugene W. Campbell , Bryan P. Staker
IPC分类号： G02B6/35
CPC分类号： G02B6/3556 , G02B6/3512
摘要： An optical switch globally minimizes maximum tilt angles used to route optical signals from input to output by disposition of an input array of first tiltable micromirrors within a first boundary typically having top-bottom reflection symmetry and left-right reflection symmetry and by disposition of an output array of second tiltable micromirrors within a second boundary a symmetry which matches the symmetry for the input array, the output array and the input array being disposed opposing one another and normal to parallel central axes and further being offset from one another in the plane of the normals to the arrays, so that a collimated beamlet impinging on the center the input array and reflected off at an equivalent angle intersects the output array at an offset.
摘要翻译：光学开关全局地最小化用于通过在通常具有顶部底部反射对称性和左右反射对称性的第一边界内的第一可倾斜微反射器的输入阵列的布置和通过布置输出来将输入到输出的光信号路由到的最大倾斜角度最小化在第二边界内的第二可倾斜微镜的阵列，其对应于输入阵列的对称性，输出阵列和输入阵列被布置为彼此相对并垂直于平行的中心轴，并且还在第二边界的平面中彼此偏移使阵列上的准直子束入射到输入阵列的中心并以等效的角度反射，与偏移的输出阵列相交。

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