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1. 发明申请

US20080113160A1 Method And Apparatus For Localized Bonding 审中-公开
标题翻译：用于局部粘合的方法和装置
公开(公告)号：US20080113160A1
公开(公告)日：2008-05-15
申请号：US11559831
申请日：2006-11-14
申请人： Andres Fernandez , Bryan P. Staker , Alexander P. Kindwall , Windsor E. Owens
发明人： Andres Fernandez , Bryan P. Staker , Alexander P. Kindwall , Windsor E. Owens
IPC分类号： B32B7/14 , B32B37/02 , B32B37/14
CPC分类号： B32B37/1292 , B32B7/12 , B32B2309/68 , B32B2457/00 , B81C3/001 , B81C2203/032 , B81C2203/035 , Y10T428/24612 , Y10T428/2462
摘要： One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.
摘要翻译：在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。这些空腔用作接合材料的接收器，并且是键的位置。空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。这允许零件与标称零分离配合。一旦固化，接合材料在每个空腔内形成局部粘合。可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

2. 发明申请

US20080137172A1 ARRAY OF GRADUATED PRE-TILTED MEMS MIRRORS 审中-公开
标题翻译：研磨抛光MEMS微镜阵列
公开(公告)号：US20080137172A1
公开(公告)日：2008-06-12
申请号：US11567723
申请日：2006-12-06
申请人： Bryan P. Staker , Andres Fernandez , Windsor E. Owens , Alexander P. Kindwall
发明人： Bryan P. Staker , Andres Fernandez , Windsor E. Owens , Alexander P. Kindwall
IPC分类号： G02B26/00
CPC分类号： G02B6/3556 , G02B6/357 , G02B26/0841
摘要： An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.
摘要翻译：在平面基板上形成MEMS器件的阵列，其具有在多个环形区域或扇区中的每一个中具有基本相同结构的多个MEMS反射镜，其中每个区域中的MEMS反射镜具有相同的预倾斜。预倾斜是通过将每个双轴可倾斜镜嵌入预倾斜的微平台或万向节来实现的。在具体实施例中，为每个微反射镜提供预选的预倾角的一个微平台，并且提供具有与预倾斜一致的形状的底层电极。在具体实施例中，环形区域是相邻的椭圆形或椭圆形区域。通过预倾斜，意味着微镜的静止状态或非激活状态使得来自固定源的反射光束被引导到目标阵列的中心。

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