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1. 发明授权

US5661592A Method of making and an apparatus for a flat diffraction grating light valve 失效
$Method of making and an apparatus for a flat diffraction grating light valve$
标题翻译：制造方法和平面衍射光栅光阀的装置
公开(公告)号：US5661592A
公开(公告)日：1997-08-26
申请号：US480459
申请日：1995-06-07
申请人： Jonathan G. Bornstein , William C. Banyai , David M. Bloom , Ralph G. Whitten , Bryan P. Staker
发明人： Jonathan G. Bornstein , William C. Banyai , David M. Bloom , Ralph G. Whitten , Bryan P. Staker
IPC分类号： G02B5/18 , G02B26/08 , G02B26/00
CPC分类号： G02B5/1828 , G02B26/0808 , Y10S359/904
摘要： A deformable grating aparatus for modulating light is made by forming an insulating layer on a substrate, forming a first conductive layer on the insulating layer and then forming a sacrificial layer thereon. The sacrificial layer and the first conducting layer are then etched to define bit lines and busses to bonding pads. Then a layer of resilient material is formed onto the etched layers and a reflective conducting layer is formed on the resilient layer. A dielectric layer is deposited on the reflective conducting layer. The dielectric layer, the reflective conducting layer, the resilient layer and the sacrificial layer are all then etched to form a grating including a plurality of parallel elements. Thereafter the sacrificial layer is removed below the parallel elements, to suspend the parallel elements over the first conducting layer. The surface is treated to prevent the grating from adhering to the first conducting layer. A light modulator includes a substrate with an insulating layer, and a plurality of parallel conductive layers formed on the insulating layer. The ribbons are spaced apart from the conductive layers by an air space and mounted to the substrate in gaps between the conductive layers.
摘要翻译：通过在衬底上形成绝缘层，在绝缘层上形成第一导电层，然后在其上形成牺牲层，制成用于调制光的可变形光栅装置。然后蚀刻牺牲层和第一导电层以将位线和总线限定到接合焊盘。然后在蚀刻层上形成一层弹性材料，并在弹性层上形成反射导电层。电介质层沉积在反射导电层上。然后对电介质层，反射导电层，弹性层和牺牲层进行蚀刻以形成包括多个平行元件的光栅。此后，牺牲层在平行元件下方被移除，以将平行元件悬挂在第一导电层上。处理表面以防止光栅粘附到第一导电层。光调制器包括具有绝缘层的衬底和形成在绝缘层上的多个平行导电层。带通过空气间隔与导电层间隔开，并且在导电层之间的间隙中安装到基板上。

2. 发明授权

US5629801A Diffraction grating light doubling collection system 失效
$Diffraction grating light doubling collection system$
标题翻译：衍射光栅倍增收集系统
公开(公告)号：US5629801A
公开(公告)日：1997-05-13
申请号：US473759
申请日：1995-06-07
申请人： Bryan P. Staker , David M. Bloom , Bryan E. Loucks
发明人： Bryan P. Staker , David M. Bloom , Bryan E. Loucks
IPC分类号： G02B27/18 , G02B19/00 , G02B27/42 , G02B27/54 , H04N5/74 , H04N9/31 , G02B5/18 , G02F1/00 , G02F1/03 , G03B21/14
CPC分类号： G02B26/0808 , G02B19/0028 , G02B19/0047 , G02B27/42 , H04N5/7458 , H04N9/31
摘要： A reflective/diffractive light valve system collects light from multiple dimensions around a single light source. From these multiple collection dimensions, the light is directed to impinge on the valve from multiple directions. When the valve is configured to be reflective, the light returns to the source. On the other hand, when the valve is configured to be diffractive, light from a first and third order diffraction are transmitted from the valve for each of the collection dimensions which greatly enhances the efficiency of the system.
摘要翻译：反射/衍射光阀系统围绕单个光源收集来自多个维度的光。从这些多个收集尺寸，光被引导从多个方向撞击在阀上。当阀被配置为反射时，光返回到源。另一方面，当阀构造为衍射时，对于每个收集尺寸，来自第一和第三级衍射的光从阀传递，这大大提高了系统的效率。

3. 发明授权

US5841579A Flat diffraction grating light valve 失效
$Flat diffraction grating light valve$
标题翻译：平面衍射光栅光阀
公开(公告)号：US5841579A
公开(公告)日：1998-11-24
申请号：US482188
申请日：1995-06-07
申请人： David M. Bloom , Dave B. Corbin , William C. Banyai , Bryan P. Straker
发明人： David M. Bloom , Dave B. Corbin , William C. Banyai , Bryan P. Straker
IPC分类号： G02B5/18 , G02B26/08 , G02B26/00 , G09G3/34
CPC分类号： G02B5/1828 , G02B26/0808 , Y10S359/904
摘要： A diffraction grating light valve modulates an incident beam of light. A plurality of elongated elements each have a reflective surface. The elongated elements are suspended with their respective ends substantially coplanar. Alternate ones of the elongated elements are electrically coupled for receiving a first bias voltage. The interdigitated elongated elements are electrically coupled for receiving a second bias voltage. By applying a appropriate first and second biasing voltages, all the reflective surfaces can be maintained in a first plane. When all the elongated elements are in the first plane, the diffraction grating light valve reflects the beam of light. A predetermined group of the elongated elements, preferably alternate ones, are deformable to be substantially coplanar in a second plane which is parallel to the first plane. When the predetermined group of elements is in the second plane, the diffraction grating light valve diffracts the beam of light.
摘要翻译：衍射光栅光阀调制入射光束。多个细长元件各自具有反射表面。细长元件悬挂在其各自的端部基本上共面。细长元件中的另一个被电耦合以接收第一偏置电压。交叉的细长元件被电耦合以接收第二偏置电压。通过施加适当的第一和第二偏置电压，所有的反射表面可以保持在第一平面中。当所有细长元件在第一平面中时，衍射光栅光阀反射光束。预定组的细长元件，优选地是交替的，可在可平行于第一平面的第二平面中变形为基本共面。当预定的元件组在第二平面中时，衍射光栅光阀衍射出光束。

4. 发明申请

US20140085562A1 Grayscale patterns from binary spatial light modulators 有权
标题翻译：二进制空间光调制器的灰度图案
公开(公告)号：US20140085562A1
公开(公告)日：2014-03-27
申请号：US14032459
申请日：2013-09-20
申请人： David M. Bloom , Matthew A. Leone
发明人： David M. Bloom , Matthew A. Leone
IPC分类号： G02B26/08 , G02F1/133
CPC分类号： G02B26/0833 , G01B11/2527 , G01C3/08 , G02B26/02 , G02B26/06 , G02B26/0808 , G02B26/0816 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/101 , G02B27/0068 , G02F1/0123 , G02F1/0128 , G02F1/13306 , G02F1/155 , G02F1/29 , G06K9/2036 , G09G3/3433 , G09G2300/0426 , G09G2300/0473 , H04N13/204 , H04N13/254
摘要： Brightness-by-column grayscale and spatial Σ-Δ modulation grayscale allow grayscale patterns to be produced using a binary spatial light modulator as fast as the bright/dark switching speed.
摘要翻译：亮度逐渐增加的灰度和空间＆调制灰度允许使用二进制空间光调制器产生与亮/暗切换速度一样快的灰度图案。

5. 发明申请

US20130114123A1 MULTIPLE-LINEAR-ARRAY MEMS DISPLAY CHIPS 有权
标题翻译：多线性阵列MEMS显示器
公开(公告)号：US20130114123A1
公开(公告)日：2013-05-09
申请号：US13291867
申请日：2011-11-08
申请人： David M. Bloom , Matthew A. Leone
发明人： David M. Bloom , Matthew A. Leone
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/105
摘要： Single-chip, multiple-linear-array MEMS form the basis for high-resolution, high-frame-rate video displays.
摘要翻译：单芯片，多线性阵列MEMS构成了高分辨率，高帧率视频显示的基础。

6. 发明申请

US20110084343A1 Monolithic IC and MEMS microfabrication process 有权
公开(公告)号：US20110084343A1
公开(公告)日：2011-04-14
申请号：US12968594
申请日：2010-12-15
申请人： Richard Yeh , David M. Bloom
发明人： Richard Yeh , David M. Bloom
IPC分类号： H01L29/66 , H01L21/20
CPC分类号： H01L27/06 , B81C1/00246 , B81C2203/0742
摘要： Monolithic IC/MEMS processes are disclosed in which high-stress silicon nitride is used as a mechanical material while amorphous silicon serves as a sacrificial layer. Electronic circuits and micro-electromechanical devices are built on separate areas of a single wafer. The sequence of IC and MEMS process steps is designed to prevent alteration of partially completed circuits and devices by subsequent high process temperatures.

7. 发明申请

US20100315565A1 Display system 有权
标题翻译：显示系统
公开(公告)号：US20100315565A1
公开(公告)日：2010-12-16
申请号：US12482686
申请日：2009-06-11
申请人： David M. Bloom , Matthew A. Leone
发明人： David M. Bloom , Matthew A. Leone
IPC分类号： H04N9/31
CPC分类号： H04N9/3132 , G02B26/06 , G02B26/101
摘要： A display system is based on a linear array phase modulator and a phase edge discriminator optical system.
摘要翻译：显示系统基于线性阵列相位调制器和相位鉴别器光学系统。

8. 发明申请

US20090140433A1 MEMS chip-to-chip interconnects 审中-公开
标题翻译： MEMS芯片到芯片互连
公开(公告)号：US20090140433A1
公开(公告)日：2009-06-04
申请号：US12276123
申请日：2008-11-21
申请人： David M. Bloom , Matthew A. Leone , Richard Yeh
发明人： David M. Bloom , Matthew A. Leone , Richard Yeh
IPC分类号： H01L23/48 , H01L21/4763
CPC分类号： B81C3/008 , B81B7/0006 , B81B2207/07
摘要： A chip-to-chip interconnect system suited for MEMS that do not require low-resistance connections is described. The interconnects may be fabricated simultaneously with MEMS ribbon structures such as are found in MEMS optical modulators.
摘要翻译：描述了适用于不需要低电阻连接的MEMS的芯片到芯片的互连系统。互连可以与诸如在MEMS光学调制器中发现的MEMS带结构同时制造。

9. 发明申请

US20080273557A1 Illumination system for optical modulators 有权
标题翻译：光学调制器照明系统
公开(公告)号：US20080273557A1
公开(公告)日：2008-11-06
申请号：US11799565
申请日：2007-05-02
申请人： David M. Bloom
发明人： David M. Bloom
IPC分类号： H01S3/098
CPC分类号： G02B27/0927 , G02B19/0014 , G02B19/0057 , G03B21/2013 , G03B21/2033 , G03B21/208 , H01S5/005 , H01S5/14 , H01S5/4012 , H01S5/423 , H01S2301/206
摘要： A phase plate and lens modify light beams emitted by an array of lasers to form an efficient illumination source for a MEMS light modulator array. The phase of the electric field emitted by the lasers is modified such that the after passing through a lens the beam profile at the lens focal plane has an approximately rectangular shape appropriate for illuminating a light modulator array. The phase plate may be constructed from a glass plate with rectangular notches etched in it or with rectangular ridges formed on it. Furthermore a light source, such as a laser, may be coupled to an adiabatically tapered optical waveguide in which a phase adjusting block is introduced in analogy to notches in a bulk phase plate. Phase modified light beams output from the waveguide system have similar focusing properties to those passing through a bulk phase plate.
摘要翻译：相位板和透镜修改由激光阵列发射的光束，以形成用于MEMS光调制器阵列的高效照明源。修改由激光器发射的电场的相位，使得在透镜之后，透镜焦平面处的光束轮廓具有适于照亮光调制器阵列的大致矩形形状。相位板可以由其中蚀刻有矩形凹口的玻璃板或在其上形成的矩形脊构成。此外，诸如激光器的光源可以耦合到绝热锥形光波导，其中类似于大块相中的凹口引入相位调整块。从波导系统输出的相位改变的光束对于通过大块相位板的那些具有相似的聚焦特性。

10. 发明授权

US07446925B2 Micro-electromechanical light modulator with anamorphic optics 有权
标题翻译：具有变形光学元件的微机电光调制器
公开(公告)号：US07446925B2
公开(公告)日：2008-11-04
申请号：US11472086
申请日：2006-06-21
申请人： David M. Bloom
发明人： David M. Bloom
IPC分类号： G02F26/00
CPC分类号： G02B13/08 , G02B26/06 , G02B26/0833
摘要： Micro-electromechanical light modulators are combined with anamorphic and contrast enhancing optical elements to form optical display engines. Linear MEMS arrays are suitable for the étendue of low divergence light sources while handling high optical power for brightness. The output of an optical engine is a line image which may be scanned to form a two-dimensional image.
摘要翻译：微机电光调制器与变形和对比度增强的光学元件组合以形成光学显示引擎。线性MEMS阵列适用于低散射光源的低通量，同时处理高亮度的光学功率。光学引擎的输出是可以被扫描以形成二维图像的行图像。

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