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11. 发明授权

US06627884B2 Simultaneous flooding and inspection for charge control in an electron beam inspection machine 有权
标题翻译：电子束检查机中充电控制的同时淹没和检查
公开(公告)号：US06627884B2
公开(公告)日：2003-09-30
申请号：US09912732
申请日：2001-07-23
申请人： Mark A. McCord , David Walker , Jun Pei , Neil Richardson
发明人： Mark A. McCord , David Walker , Jun Pei , Neil Richardson
IPC分类号： G21K700
CPC分类号： H01J37/28 , G01N23/225 , H01J2237/004 , H01J2237/2817
摘要： Disclosed are methods and apparatus for simultaneously flooding a sample (e.g., a semiconductor wafer) to control charge and inspecting the sample. The apparatus includes a charged particle beam generator arranged to generate a charged particle beam substantially towards a first portion of the sample and a flood gun for generating a second beam towards a second portion of the sample. The second beam is generated substantially simultaneously with the inspection beam. The apparatus further includes a detector arranged to detect charged particles originating from the sample portion. In a further implementation, the apparatus further includes an image generator for generating an image of the first portion of the sample from the detected particles. In one embodiment, the sample is a semiconductor wafer. In a method aspect, a first area of a sample is flooded with a flood beam to control charge on a surface of the sample. A second area of the sample is inspected with an inspection beam. The second area comprises at least a portion of the first area flooded by the flood beam. The inspection beam moves in tandem with the flood beam. In another aspect of the present invention, methods and apparatus are provided for controlling the charge buildup of an area of the sample by an electrode having a voltage applied to it and through which the flood beam and charged particles emitted from the area of the sample can pass.
摘要翻译：公开了用于同时淹没样品（例如，半导体晶片）以控制电荷并检查样品的方法和装置。该装置包括带电粒子束发生器，其布置成基本上朝向样品的第一部分产生带电粒子束，以及用于产生朝向样品的第二部分的第二束的泛喷枪。第二光束基本上与检查光束同时产生。该装置还包括检测器，其被布置成检测源自样品部分的带电粒子。在另一实施方式中，该装置还包括图像发生器，用于从检测到的粒子生成样品的第一部分的图像。在一个实施例中，样品是半导体晶片。在方法方面，样品的第一区域用泛光束淹没以控制样品表面上的电荷。用检查梁检查样品的第二个区域。第二区域包括由洪水束淹没的第一区域的至少一部分。检查光束与泛光束一起移动。在本发明的另一方面，提供了一种方法和装置，用于通过具有施加到其上的电压的电极来控制样品区域的电荷积累，通过该方法和装置，并且从样品的区域发射的带电粒子可以通过。

12. 发明授权

US6064486A Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals 失效
标题翻译：用于基于对样本对准信号的拟合来检测基板上新的对准标记的位置的系统，方法和计算机程序产品
公开(公告)号：US6064486A
公开(公告)日：2000-05-16
申请号：US82851
申请日：1998-05-21
申请人： Xun Chen , Amir A. Ghazanfarian , Mark A. McCord , R. Fabian W. Pease , Thomas Kailath
发明人： Xun Chen , Amir A. Ghazanfarian , Mark A. McCord , R. Fabian W. Pease , Thomas Kailath
IPC分类号： G03F9/00 , G01B9/02
CPC分类号： G03F9/7092 , G03F9/70 , G03F9/7076
摘要： Systems, methods and computer program products detect a position of a new alignment mark on a substrate by producing an alignment signal model from sample alignment signals and fitting the new alignment signal to the alignment signal model. The alignment signal model may be produced from the multiple sample alignment signals using singular value decomposition, based on subspace decomposition of the alignment signals. By producing an alignment signal model from multiple sample alignment signals, asymmetries in the sample alignment marks and/or in the coatings that are fabricated on the sample alignment marks, may be taken into account when detecting the position of a new alignment mark.
摘要翻译：系统，方法和计算机程序产品通过从采样对准信号产生对准信号模型并将新的对准信号拟合到对准信号模型来检测基板上新对准标记的位置。基于对准信号的子空间分解，可以使用奇异值分解从多个样本对准信号产生对准信号模型。通过从多个样本对准信号产生对准信号模型，当检测到新的对准标记的位置时，可以考虑样品对准标记中的不对称性和/或在样品对准标记上制造的涂层中的不对称性。

13. 发明授权

US4925139A Mechanical stage support for a scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜的机械平台支撑
公开(公告)号：US4925139A
公开(公告)日：1990-05-15
申请号：US345609
申请日：1989-04-28
申请人： Mark A. McCord
发明人： Mark A. McCord
IPC分类号： G01B7/34 , F16M11/12 , G01B21/00 , G01N27/00 , G01Q10/02 , G01Q60/16 , G12B5/00
CPC分类号： G01Q60/16 , B82Y35/00 , F16M11/043 , F16M11/18 , G01Q10/02 , Y10S248/913 , Y10S977/861
摘要： The present invention is an improved mechanism for the coarse adjustment of a scanning tunneling microscope stage. In the present invention the stage is moved by forces transmitted through rigid wire springs mounted on leaf spring assemblies which transmit the motion from rigidly mounted micrometer adjusting devices. It is intended that the coarse adjustment mechanism of the present invention will provide improved performance over coarse adjustment mechanisms presently available for STM applications.The present invention replaces separate sets of leaf springs for X and Y motion with a single set of four wire springs. This simplifies the design and increases the rigidity and stability by reducing the mechanical path length from the solid base to the X-Y-Z stage. The screw mechanisms are all directly connected to the rigid base. (This is made possible by the additional pairs of wire springs connected from the X and Y screws to the stage.) The following advantages are achieved: first, since the screw mechanisms do not move with the stage, driving mechanisms such as motors and gears can be simply connected; and, second, the rigidity and stability are again increased since the stage position is referenced directly to the base through all three screws rather than through intermediate support structures.

14. 发明授权

US10987546B2 Hydrodynamic human-powered propulsion mechanism 有权
公开(公告)号：US10987546B2
公开(公告)日：2021-04-27
申请号：US16590188
申请日：2019-10-01
申请人： Mark A. McCord
发明人： Mark A. McCord
IPC分类号： A63B31/08 , A63B31/11
摘要： One embodiment of improved swim fins consists of a right foot attachment (101) with an outer right blade (111) and an inner right blade (112) which is arranged such that it does not mechanically interfere with an inner left blade (113). The blades may include a pivot mechanism (220) that allows the blades to maintain an optimal angle of attack as the swimmer moves their legs up and down. In another embodiment, a right blade (1011) and a left blade (1013) are attached to the feet of a person who is propelled by the blades above the surface of the water as they pump their feet up and down, forming a human-powered hydrofoil. Other embodiments are described and shown.

15. 发明授权

US08106355B1 Automated inspection using cell-cell subtraction perpendicular to stage motion direction 有权
标题翻译：使用垂直于舞台运动方向的细胞细胞减法进行自动检查
公开(公告)号：US08106355B1
公开(公告)日：2012-01-31
申请号：US12163708
申请日：2008-06-27
申请人： Jan Lauber , Mark A. McCord
发明人： Jan Lauber , Mark A. McCord
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , H01J2237/20285 , H01J2237/221 , H01J2237/2817
摘要： One embodiment relates to an apparatus for automated inspection of a semiconductor substrate. Processor-executable code is configured to control the stage electronics to move the substrate using a continuous motion in a substrate-translation direction and is configured to control the beam to scan it across the surface of the substrate and collect corresponding image data, scan lines of the scan being along a scan-line direction perpendicular to the substrate-translation direction. Processor-executable code is also configured to select from the image data two cells of the repeating pattern on the surface of the substrate, the two cells being displaced from each other by one or multiple cell heights in the scan-line direction. Finally, processor-executable code is configured to generate a difference image by subtracting image data from said two cells on a pixel-by-pixel basis. Other embodiments, aspects and features are also disclosed.
摘要翻译：一个实施例涉及用于半导体衬底的自动检查的设备。处理器可执行代码被配置为控制平台电子设备以使其在基板平移方向上使用连续运动来移动基板，并且被配置成控制该波束跨越基板的表面进行扫描，并收集相应的图像数据，扫描线扫描沿着垂直于衬底平移方向的扫描线方向。处理器可执行代码还被配置为从图像数据中选择基板表面上的重复图案的两个单元，两个单元在扫描线方向上彼此移位一个或多个单元格高度。最后，处理器可执行代码被配置为通过以逐个像素为基础从所述两个单元中减去图像数据来生成差分图像。还公开了其它实施例，方面和特征。

16. 发明授权

US07514681B1 Electrical process monitoring using mirror-mode electron microscopy 有权
标题翻译：使用镜面电子显微镜进行电气过程监控
公开(公告)号：US07514681B1
公开(公告)日：2009-04-07
申请号：US11451698
申请日：2006-06-13
申请人： Paul F. Marella , Mark A. McCord , Marian Mankos , David L. Adler
发明人： Paul F. Marella , Mark A. McCord , Marian Mankos , David L. Adler
IPC分类号： H01L21/02 , H01J37/145 , G21K7/00
CPC分类号： H01J37/244 , H01J37/05 , H01J37/292 , H01J2237/24485 , H01J2237/24592 , H01J2237/2594 , H01J2237/2817
摘要： One embodiment relates to a method of inspecting a substrate using electrons. Mirror-mode electron-beam imaging is performed on a region of the substrate at multiple voltage differences between an electron source and a substrate, and image data is stored corresponding to the multiple voltage differences. A calculation is made of a measure of variation of an imaged aspect of a feature in the region with respect to the voltage difference between the electron source and the substrate. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及使用电子检查衬底的方法。在电子源和衬底之间的多个电压差的基板的区域上执行镜像电子束成像，并且对应于多个电压差存储图像数据。计算相对于电子源和基板之间的电压差的该区域中特征的成像方面的变化的度量。还公开了其它实施例和特征。

17. 发明申请

US20070145267A1 Portable scanning electron microscope 审中-公开
标题翻译：便携式扫描电子显微镜
公开(公告)号：US20070145267A1
公开(公告)日：2007-06-28
申请号：US11450758
申请日：2006-06-09
申请人： David L. Adler , Ady Levy , Mark A. McCord
发明人： David L. Adler , Ady Levy , Mark A. McCord
IPC分类号： G21K7/00
CPC分类号： H01J37/06 , H01J37/04 , H01J37/228 , H01J37/28 , H01J2237/04924 , H01J2237/06316 , H01J2237/162 , H01J2237/2813
摘要： One embodiment relates to a portable scanning electron microscope (SEM) system. The system includes a portable SEM device including a CRT-type gun and deflectors to generate and scan the electron beam. Another embodiment relates to a portable SEM device which includes a CRT-type gun and deflectors to generate and scan the electron beam, a chamber through which the electron beam is scanned, and a detector in the chamber for detecting radiation emitted as a result of scanning the electron beam. Another embodiment relates to a method of obtaining an electron beam image of a surface of a bulk specimen where a portable SEM device is moved to the bulk specimen. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及便携式扫描电子显微镜（SEM）系统。该系统包括便携式SEM装置，其包括CRT型枪和用于产生和扫描电子束的偏转器。另一个实施例涉及一种便携式SEM器件，其包括CRT型枪和用于产生和扫描电子束的偏转器，扫描电子束的腔室和用于检测作为扫描结果发射的辐射的腔室中的检测器电子束。另一实施例涉及一种获得便携式SEM装置移动到散装试样的散装试样的表面的电子束图像的方法。还公开了其它实施例和特征。

18. 发明授权

US06774646B1 Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanisms 有权
标题翻译：电子束检查系统采用多个电子束和均匀的焦点和偏转机制
公开(公告)号：US06774646B1
公开(公告)日：2004-08-10
申请号：US10058614
申请日：2002-01-28
申请人： Liqun Han , Mark A. McCord
发明人： Liqun Han , Mark A. McCord
IPC分类号： G01R3100
CPC分类号： H01J37/28 , G01N23/04 , H01J37/04 , H01J37/141 , H01J37/145 , H01J37/147 , H01J2237/04756 , H01J2237/103 , H01J2237/2817
摘要： A method for inspecting samples uses a multiple beam electron system having a uniform magnetic focusing field. Deflection of the incident electron beams is produced by deflector plates generating an electrostatic deflection force which produces a uniform force on the electron beams. Thermal field emission sources generate incident electron beams towards at least two portions of the sample. A detector array collects multiple detection electrons.
摘要翻译：用于检查样品的方法使用具有均匀磁场的多束电子系统。入射电子束的偏转由偏转板产生，该偏转板产生在电子束上产生均匀的力的静电偏转力。热场发射源朝向样品的至少两部分产生入射电子束。检测器阵列收集多个检测电子。

19. 发明授权

US5150392A X-ray mask containing a cantilevered tip for gap control and alignment 失效
标题翻译：包含用于间隙控制和对准的悬臂尖端的X射线掩模
公开(公告)号：US5150392A
公开(公告)日：1992-09-22
申请号：US756642
申请日：1991-09-09
申请人： Fritz J. Hohn , Mark A. McCord
发明人： Fritz J. Hohn , Mark A. McCord
IPC分类号： G01Q10/00 , G01Q10/04 , G01Q60/04 , G01Q60/10 , G01Q80/00 , G03F1/22 , G03F9/00 , G05D3/00 , H01J37/304 , H01L21/027
CPC分类号： G01Q60/04 , B82Y35/00 , G03F1/22 , G03F9/703 , G03F9/7061 , H01J37/3045 , B82Y10/00 , G01Q80/00
摘要： An X-ray mask membrane 12 is discussed wherein a cantilever and tip portion such as used on an atomic force or scanning tunneling microscope are fabricated directly as part of the mask. The mask is located over a wafer and the vertical (z) motion of the tip with respect to the wafer is achieved with a piezoelectric device which is mounted on a movable support above the cantilever. Piezoelectric device may be a tube having an electrode divided into quadrants so that the end of the tube could be positioned in three dimensions to allow for alignment of the end of the tube to the cantilever tip. X and Y motion of the tip and the mask membrane relative to the wafer is achieved by mounting the wafer on an x-y stage driven by piezoelectric or other transducers. The wafer includes a raised alignment mask on its upper surface. The wafer, mask membrane, and z piezoelectric tube are held rigidly but adjustably with respect to each other by a mechanical fixture. The z piezoelectric tube is lowered until it touches the cantilever; it is then lowered further by the designed gap spacing, deflecting the cantilever downward. The wafer is then raised until it is detected by the tip on the cantilever, either by sensing a tunneling current (STM) or a force (AFM). The wafer is now at the correct z gap setting, and is scanned back and forth in the x and y directions until the location of the alignment mark is determined by the cantilever tip following the contours of the alignment mark, thus setting the proper alignment between the wafer and the mask in the x, y direction.

20. 发明授权

US07660687B1 Robust measurement of parameters 有权
标题翻译：稳健的测量参数
公开(公告)号：US07660687B1
公开(公告)日：2010-02-09
申请号：US11420243
申请日：2006-05-25
申请人： Indranil De , Mark A. McCord , David L. Adler
发明人： Indranil De , Mark A. McCord , David L. Adler
IPC分类号： G01D18/00 , G06F17/40 , G06F19/00
CPC分类号： H01J37/222 , G01R31/307 , H01J37/263 , H01J37/28 , H01J2237/2826
摘要： A method of increasing consistency between separate parametric measurement readings that are taken with an electron beam imaging tool at different times within a period of time, by correcting drift in the imaging tool at a time frequency that is less than a time period during which the drift is anticipated to be undesirably large.
摘要翻译：一种提高在一段时间内在不同时间用电子束成像工具拍摄的单独的参数测量读数之间的一致性的方法，通过以小于漂移的时间段的时间频率校正成像工具中的漂移，预计将不合需要。

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