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1. 发明授权

US07660687B1 Robust measurement of parameters 有权
标题翻译：稳健的测量参数
公开(公告)号：US07660687B1
公开(公告)日：2010-02-09
申请号：US11420243
申请日：2006-05-25
申请人： Indranil De , Mark A. McCord , David L. Adler
发明人： Indranil De , Mark A. McCord , David L. Adler
IPC分类号： G01D18/00 , G06F17/40 , G06F19/00
CPC分类号： H01J37/222 , G01R31/307 , H01J37/263 , H01J37/28 , H01J2237/2826
摘要： A method of increasing consistency between separate parametric measurement readings that are taken with an electron beam imaging tool at different times within a period of time, by correcting drift in the imaging tool at a time frequency that is less than a time period during which the drift is anticipated to be undesirably large.
摘要翻译：一种提高在一段时间内在不同时间用电子束成像工具拍摄的单独的参数测量读数之间的一致性的方法，通过以小于漂移的时间段的时间频率校正成像工具中的漂移，预计将不合需要。

2. 发明授权

US07315022B1 High-speed electron beam inspection 有权
标题翻译：高速电子束检查
公开(公告)号：US07315022B1
公开(公告)日：2008-01-01
申请号：US11031091
申请日：2005-01-06
申请人： David L. Adler , Mark A. McCord , Mehdi Vaez-Iravani , Liqun Han , Kirk J. Bertsche
发明人： David L. Adler , Mark A. McCord , Mehdi Vaez-Iravani , Liqun Han , Kirk J. Bertsche
IPC分类号： H01J37/20 , G01R31/28
CPC分类号： G01R31/307 , H01J37/244 , H01J37/28 , H01J2237/0653 , H01J2237/20214 , H01J2237/20228 , H01J2237/244 , H01J2237/24507 , H01J2237/24564 , H01J2237/24592 , H01J2237/248 , H01J2237/2809 , H01J2237/2817
摘要： One embodiment disclosed relates to an electron beam apparatus for inspection of a semiconductor wafer, wherein substantially an entire area of the wafer surface is scanned without moving the stage. A cathode ray tube (CRT) gun may be used to rapidly (and cost effectively) scan the beam over the wafer. Another embodiment disclosed relates to a high-speed automated e-beam inspector configured to scan the e-beam in one dimension while translating the wafer in a perpendicular direction. The translation may be linear, or alternatively, may be in a spiral path. Other embodiments are also disclosed.
摘要翻译：所公开的一个实施例涉及一种用于检查半导体晶片的电子束装置，其中在不移动载物台的情况下扫描晶片表面的大致整个区域。阴极射线管（CRT）枪可以用于快速（并且成本有效地）扫描晶片上的光束。所公开的另一实施例涉及一种配置成在一个维度上扫描电子束的高速自动电子束检查器，同时沿垂直方向平移晶片。平移可以是线性的，或者可以是螺旋形路径。还公开了其他实施例。

3. 发明授权

US07514681B1 Electrical process monitoring using mirror-mode electron microscopy 有权
标题翻译：使用镜面电子显微镜进行电气过程监控
公开(公告)号：US07514681B1
公开(公告)日：2009-04-07
申请号：US11451698
申请日：2006-06-13
申请人： Paul F. Marella , Mark A. McCord , Marian Mankos , David L. Adler
发明人： Paul F. Marella , Mark A. McCord , Marian Mankos , David L. Adler
IPC分类号： H01L21/02 , H01J37/145 , G21K7/00
CPC分类号： H01J37/244 , H01J37/05 , H01J37/292 , H01J2237/24485 , H01J2237/24592 , H01J2237/2594 , H01J2237/2817
摘要： One embodiment relates to a method of inspecting a substrate using electrons. Mirror-mode electron-beam imaging is performed on a region of the substrate at multiple voltage differences between an electron source and a substrate, and image data is stored corresponding to the multiple voltage differences. A calculation is made of a measure of variation of an imaged aspect of a feature in the region with respect to the voltage difference between the electron source and the substrate. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及使用电子检查衬底的方法。在电子源和衬底之间的多个电压差的基板的区域上执行镜像电子束成像，并且对应于多个电压差存储图像数据。计算相对于电子源和基板之间的电压差的该区域中特征的成像方面的变化的度量。还公开了其它实施例和特征。

4. 发明申请

US20070145267A1 Portable scanning electron microscope 审中-公开
标题翻译：便携式扫描电子显微镜
公开(公告)号：US20070145267A1
公开(公告)日：2007-06-28
申请号：US11450758
申请日：2006-06-09
申请人： David L. Adler , Ady Levy , Mark A. McCord
发明人： David L. Adler , Ady Levy , Mark A. McCord
IPC分类号： G21K7/00
CPC分类号： H01J37/06 , H01J37/04 , H01J37/228 , H01J37/28 , H01J2237/04924 , H01J2237/06316 , H01J2237/162 , H01J2237/2813
摘要： One embodiment relates to a portable scanning electron microscope (SEM) system. The system includes a portable SEM device including a CRT-type gun and deflectors to generate and scan the electron beam. Another embodiment relates to a portable SEM device which includes a CRT-type gun and deflectors to generate and scan the electron beam, a chamber through which the electron beam is scanned, and a detector in the chamber for detecting radiation emitted as a result of scanning the electron beam. Another embodiment relates to a method of obtaining an electron beam image of a surface of a bulk specimen where a portable SEM device is moved to the bulk specimen. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及便携式扫描电子显微镜（SEM）系统。该系统包括便携式SEM装置，其包括CRT型枪和用于产生和扫描电子束的偏转器。另一个实施例涉及一种便携式SEM器件，其包括CRT型枪和用于产生和扫描电子束的偏转器，扫描电子束的腔室和用于检测作为扫描结果发射的辐射的腔室中的检测器电子束。另一实施例涉及一种获得便携式SEM装置移动到散装试样的散装试样的表面的电子束图像的方法。还公开了其它实施例和特征。

5. 发明申请

US20200090826A1 X-RAY PHOTOEMISSION APPARATUS FOR INSPECTION OF INTEGRATED DEVICES 审中-公开
公开(公告)号：US20200090826A1
公开(公告)日：2020-03-19
申请号：US16690103
申请日：2019-11-20
申请人： David L. Adler
发明人： David L. Adler
IPC分类号： G21K1/00 , G01N23/04 , H01L23/498 , H01L27/02 , H01J1/78
摘要： An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. For some embodiments of the invention, the photoemissive structure is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In some embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

6. 发明授权

US06897444B1 Multi-pixel electron emission die-to-die inspection 有权
标题翻译：多像素电子发射模 - 模检查
公开(公告)号：US06897444B1
公开(公告)日：2005-05-24
申请号：US10702271
申请日：2003-11-06
申请人： David L. Adler
发明人： David L. Adler
IPC分类号： G01N23/225 , G01Q30/02 , G01Q30/04 , H01J37/26 , H01J37/29 , H01J37/153
CPC分类号： H01J37/26 , G01N23/225 , H01J37/29 , H01J2237/24592 , H01J2237/2538 , H01J2237/2817
摘要： One embodiment disclosed is a method of detecting defects in objects. A selected surface area of an object is inspected with a multi-pixel electron microscope, and first set of data is generated having signal values representing image content of each pixel thereof. Further selected surface area of the object is inspected with said multi-pixel electron microscope, and second set of data is generated having signal values representing image content of each pixel thereof. Corresponding portions of first and second sets of data are stored in memory. Misalignment between stored portions of the first and second sets of data is detected with resolution of a fraction of a pixel, and the stored portions of first and second sets of data are aligned using subpixel interpolation to correct the detected misalignment therebetween. Finally, corresponding subportions of the aligned portions of first and second sets of data are compared to detect differences therebetween.
摘要翻译：公开的一个实施例是检测物体中的缺陷的方法。用多像素电子显微镜检查物体的选择的表面积，并且生成具有表示其每个像素的图像内容的信号值的第一组数据。用所述多像素电子显微镜检查物体的另外选择的表面积，并且生成具有表示其每个像素的图像内容的信号值的第二组数据。第一和第二组数据的相应部分被存储在存储器中。以分辨率为单位的像素的分辨率来检测第一和第二组数据的存储部分之间的对准，并且使用子像素插值来对齐第一组数据和第二组数据的存储部分，以校正其间检测到的不对准。最后，比较第一和第二组数据的对准部分的相应子部分，以检测它们之间的差异。

7. 发明授权

US06570154B1 Scanning electron beam microscope 有权
标题翻译：扫描电子束显微镜
公开(公告)号：US06570154B1
公开(公告)日：2003-05-27
申请号：US09786137
申请日：2001-06-11
申请人： Douglas K. Masnaghetti , Stefano E. Concina , Stanley S. Sun , Waiman Ng , David L. Adler
发明人： Douglas K. Masnaghetti , Stefano E. Concina , Stanley S. Sun , Waiman Ng , David L. Adler
IPC分类号： H01J37244
CPC分类号： H01J37/28
摘要： A method and apparatus for generating an image of a specimen with a scanning electron microscope (SEM) is disclosed. The SEM (200) has a source unit (202 through 220) for directing an electron beam (203) substantially towards a portion of the specimen (222), a detector (224) for detecting particles (205) that are emitted from the specimen (222), and an image generator (234 through 242) for generating the image of the specimen (222) from the emitted particles (205). The image features are controlled by conditions under which the image is generated. The specimen is scanned under a first set of conditions (252) to generate a first image during a first image phase (302, 402). The specimen is then scanned under a second set conditions (254) during a setup phase (304, 404). The second set of conditions is selected to control charge on the specimen. The specimen is then scanned under the first set of conditions (252) to generate a second image during a second image phase (306, 406). The features of the second image are controlled by the first and second sets of conditions.
摘要翻译：公开了一种用扫描电子显微镜（SEM）产生样本图像的方法和装置。扫描电子显微镜（200）具有源单元（202至220），用于基本上朝向样本（222）的一部分引导电子束（203）;检测器（224），用于检测从样本发射的颗粒（205）（222），以及用于从所发射的颗粒（205）产生样本（222）的图像的图像发生器（234至242）。图像特征由生成图像的条件控制。在第一组条件（252）下扫描样本，以在第一图像相位期间产生第一图像（302,402）。然后在设置阶段（304,404）期间，在第二设定条件（254）下扫描样本。选择第二组条件来控制样品上的电荷。然后在第一组条件（252）下扫描样本，以在第二图像相位期间产生第二图像（306,406）。第二图像的特征由第一和第二组条件控制。

8. 发明授权

US6066849A Scanning electron beam microscope 有权
标题翻译：扫描电子束显微镜
公开(公告)号：US6066849A
公开(公告)日：2000-05-23
申请号：US149767
申请日：1998-09-08
申请人： Douglas K. Masnaghetti , Stefano E. Concina , Stanley S. Sun , Waiman Ng , David L. Adler
发明人： Douglas K. Masnaghetti , Stefano E. Concina , Stanley S. Sun , Waiman Ng , David L. Adler
IPC分类号： H01L21/66 , H01J37/20 , H01J37/22 , H01J37/248 , H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J2237/004 , H01J2237/2817
摘要： A method and apparatus for generating an image of a specimen with a scanning electron microscope (SEM) is disclosed. The SEM has a source unit for directing an electron beam substantially towards a portion of the specimen, a detector for detecting particles that are emitted from the specimen, and an image generator for generating the image of the specimen from the emitted particles. The image features are controlled by conditions under which the image is generated. The specimen is scanned under a first set of conditions to generate a first image during a first image phase. The specimen is then scanned under a second set of conditions during a setup phase. The second set of conditions are selected to control charge on the specimen. The specimen is then scanned under the first set of conditions to generate a second image during a second image phase. The features of the second image are controlled by the first and second sets of conditions.
摘要翻译：公开了一种用扫描电子显微镜（SEM）产生样本图像的方法和装置。 SEM具有用于将电子束基本上朝向样本的一部分引导的源单元，用于检测从样本发射的颗粒的检测器，以及用于从所发射的颗粒产生样本的图像的图像发生器。图像特征由生成图像的条件控制。在第一组条件下扫描样本以在第一图像阶段期间产生第一图像。然后在设置阶段，在第二组条件下扫描样品。选择第二组条件来控制样品上的电荷。然后在第一组条件下扫描样品，以在第二图像阶段期间产生第二图像。第二图像的特征由第一和第二组条件控制。

9. 发明授权

US11619596B2 X-ray photoemission system for 3-D laminography 有权
公开(公告)号：US11619596B2
公开(公告)日：2023-04-04
申请号：US17721191
申请日：2022-04-14
申请人： David L. Adler
发明人： David L. Adler
IPC分类号： G01N23/04 , H01J1/78 , H01L27/02 , H01L23/498 , G21K1/00 , G01N23/044 , G21K7/00
摘要： A system is disclosed for the examination and inspection of integrated devices such as integrated circuits using 3-D laminography. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the incidence angle of the x-rays is varied to gather multiple images that allow internal three-dimensional structures of the integrated device to be determined using computed laminography. In some embodiments, the recorded images are compared with reference data to enable inspection for manufacturing quality control.

10. 发明授权

US08995622B2 X-ray source with increased operating life 有权
标题翻译： X射线源具有更长的使用寿命
公开(公告)号：US08995622B2
公开(公告)日：2015-03-31
申请号：US13373554
申请日：2011-11-18
申请人： David L. Adler , Wenbing Yun , Thomas Anthony Case
发明人： David L. Adler , Wenbing Yun , Thomas Anthony Case
IPC分类号： H01J35/08 , H05G1/52 , H01J35/14
CPC分类号： H01J35/08 , H01J35/14 , H01J2235/087 , H01J2235/186 , H05G1/52
摘要： An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In response to receiving the beam of focused electrons, the target provides a transmission source of x-rays. Moreover, a repositioning mechanism selectively repositions the beam of focused electrons to different locations on a surface of the target based on a feedback parameter associated with operation of the x-ray source. This feedback parameter may be based on: an intensity of the x-rays output by the x-ray source; a position of the x-rays output by the x-ray source; an elapsed time during operation of the x-ray source; a cross-sectional shape of the x-rays output by the x-ray source; and/or a spot size of the x-rays output by the x-ray source.
摘要翻译：描述了x射线源。在x射线源的操作期间，电子源发射电子束。该电子束通过磁聚焦透镜聚焦到目标上的点。响应于接收聚焦电子束，目标提供x射线的透射源。此外，重新定位机构基于与x射线源的操作相关联的反馈参数，有选择地将聚焦电子束重新定位在目标表面上的不同位置。该反馈参数可以基于：由x射线源输出的x射线的强度; 由x射线源输出的x射线的位置; 在x射线源的操作期间经过的时间; 由x射线源输出的x射线的横截面形状; 和/或由x射线源输出的x射线的斑点大小。

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