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11. 发明授权

US6131307A Method and device for controlling pressure and flow rate 有权
标题翻译：用于控制压力和流量的方法和装置
公开(公告)号：US6131307A
公开(公告)日：2000-10-17
申请号：US129760
申请日：1998-08-05
申请人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
发明人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
IPC分类号： H01L21/304 , F26B21/10 , F26B21/12 , G05B11/36 , G05D7/06 , G05D16/06 , G05D16/20 , F26B3/00
CPC分类号： F26B21/10 , F26B21/12
摘要： A pressure and flow rate of a gas flowing into or out of a processing chamber are controlled, so as to decrease or increase an atmosphere in the processing chamber higher or lower than a target pressure to obtain a target pressure. During a first period, an opening speed of an opening degree adjusting device provided in an inlet pipe communicating to the processing chamber is controlled to a first target value toward a first predetermined functional approximation line (for example a function of second degree) as ideal value. During the rest of periods other than the first period, the opening speed is controlled stepwise to two or more predetermined target values so that the processing chamber reaches the target pressure. During a period before the first period, the opening speed may be controlled to a second target value among the two or more target values, based on a control amount for the opening degree adjusting device. During another period after the first period, the opening speed may be controlled toward a second predetermined functional approximation line (e.g., linear) as ideal value, which has a larger change than the first functional approximation line, until the second target value reaches the target pressure.
摘要翻译：控制流入或流出处理室的气体的压力和流量，以便降低或增加处理室中的气氛高于或低于目标压力以获得目标压力。在第一时段期间，设置在与处理室连通的入口管中的开度调节装置的打开速度被控制为朝向第一预定功能近似线（例如第二度的函数）的第一目标值作为理想值。在除了第一时段之外的其余时段中，打开速度被逐步地控制到两个或更多个预定目标值，使得处理室达到目标压力。在第一期间之前的期间，基于开度调节装置的控制量，可以将打开速度控制在两个以上目标值中的第二目标值。在第一时段之后的另一时段期间，打开速度可以被控制为第二预定功能近似线（例如，线性）作为理想值，其具有比第一功能近似线更大的变化，直到第二目标值达到目标压力。

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