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    • 17. 发明专利
    • DE4244450C2
    • 1996-05-02
    • DE4244450
    • 1992-12-23
    • YAMATAKE HONEYWELL CO LTD
    • KIMURA SHIGEOISHIKURA YOSHIYUKIMASUDA TAKASHIKUROIWA TAKAAKIKIHARA TAKASHI
    • G01L9/12G01L9/00
    • A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire. The first and second substrates are bonded to each other at a temperature lower than the melting point of the substrate material without forming any bonding layer.
    • 20. 发明专利
    • DE69204425D1
    • 1995-10-05
    • DE69204425
    • 1992-11-19
    • YAMATAKE HONEYWELL CO LTD
    • OKANIWA HIROSHIKOSHIMIZU ATSUSHIMITSUTAKE ICHIRO
    • G01F1/60G01F1/58
    • An electromagnetic flowmeter for obtaining a detection signal by sampling voltages generated from electrodes in contact with a conductive fluid flowing in a magnetic field at a predetermined timing includes an external noise detecting section, a pseudo-noise signal generating section, and a timing signal generating section. The external noise detecting section detects external noise, superposed on the fluid, from the electrodes. The pseudo-noise generating section supplies a pseudo-noise signal for a predetermined period of time if the external noise detecting section determines that no external noise signal is detected. The timing signal generating section generates a timing at which an excitation current for generating the magnetic field is generated, and the sampling timing on the basis of the pseudo-noise signal while the pseudo-noise signal is kept supplied, and causes the external noise detecting section to generate the timing at which the excitation current for generating the magnetic field is generated, and the sampling timing while no pseudo-noise signal is supplied.